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    • 8. 发明授权
    • Pellicle, pressure-sensitive adhesive for pellicle, photomask with pellicle, and method for manufacturing semiconductor device
    • 薄膜,防护薄膜的压敏粘合剂,防护薄膜的光掩模和半导体装置的制造方法
    • US09310673B2
    • 2016-04-12
    • US14118106
    • 2012-05-18
    • Kohei YanoDaiki Yamashita
    • Kohei YanoDaiki Yamashita
    • G03F1/64C09J133/08
    • G03F1/64C09J133/08
    • To provide a pellicle having a an adhesive, wherein adhesive residue is decreased at the time of peeling the pellicle from a mask after lithographic exposure and outgassing from the adhesive is suppressed The pellicle according to the present invention is a pellicle comprising a pellicle frame, a tensioned pellicle film placed on one end surface of the pellicle frame and an adhesive applied to the other end surface thereof, in which the adhesive contains a (meth)acrylic alkyl ester copolymer and a silane compound, and the (meth)acrylic alkyl ester copolymer is a copolymer of a (meth)acrylic alkyl ester having an alkyl group of 4 to 14 carbon atoms and a monomer having a functional group reactive to at least either one of an isocyanate group or an epoxy group.
    • 提供具有粘合剂的防护薄膜组件,其中在光刻曝光之后从掩模剥离防护薄膜时,粘合剂残留物减少,并且从粘合剂中脱气。防护薄膜组件包括防护薄膜组件框架,防护薄膜组件 将防粘膜框架的一个端面上的张紧防护薄膜和粘贴在其另一端面上的粘合剂,其中粘合剂含有(甲基)丙烯酸烷基酯共聚物和硅烷化合物,和(甲基)丙烯酸烷基酯共聚物 是具有4〜14个碳原子的烷基的(甲基)丙烯酸烷基酯与具有与异氰酸酯基或环氧基中的至少一个反应的官能团的单体的共聚物。
    • 9. 发明授权
    • Pressure sensitive adhesive composition for optical members, pressure sensitive adhesive layer for optical members, pressure sensitive adhesive optical member and image display
    • 用于光学构件的压敏粘合剂组合物,用于光学构件的压敏粘合剂层,压敏粘合剂光学构件和图像显示
    • US08389611B2
    • 2013-03-05
    • US11814775
    • 2006-01-10
    • Fumiaki ShirafujiMasayuki SatakeKohei YanoYutaka MoroishiFumiko Nakano
    • Fumiaki ShirafujiMasayuki SatakeKohei YanoYutaka MoroishiFumiko Nakano
    • C08K5/101C08K5/01C08K5/03
    • C09J133/04
    • An object of the present invention is to provide a pressure sensitive adhesive composition for an optical member, which is excellent in coating property because of low viscosity, can reduce an amount of an organic solvent used, and can form a pressure sensitive adhesive layer excellent in durability and having high surface uniformity. The present invention relates to a pressure sensitive adhesive composition for an optical member, which comprises a (meth)acrylic polymer, a C6 to C9 hydrocarbon-based solvent (A), and a high-boiling highly solubilizing solvent (B) having a boiling point higher than that of the above hydrocarbon-based solvent and having a higher ability to solubilize the (meth)acrylic polymer than that of the above hydrocarbon-based solvent, wherein a content of the hydrocarbon-based solvent (A) is 20 to 60 wt % based on the total amount of the solvents, and a ratio of the content (wt %) of the hydrocarbon-based solvent (A) to the content (wt %) of the high-boiling highly solubilizing solvent (B) (high-boiling highly solubilizing solvent (B)/hydrocarbon-based solvent (A)) is 0.05 to 4.
    • 本发明的目的是提供一种用于光学部件的粘合剂组合物,由于粘度低而具有优异的涂布性能,可以减少所用的有机溶剂的量,并且可以形成优异的压敏粘合剂层 耐久性好,表面均匀性好。 本发明涉及一种用于光学部件的压敏粘合剂组合物,其包含(甲基)丙烯酸类聚合物,C6〜C9烃类溶剂(A)和具有沸点的高沸点高溶解性溶剂(B) 比上述烃基溶剂高,并且与上述烃类溶剂相比,具有较高的(甲基)丙烯酸类聚合物的溶解能力,其中烃系溶剂(A)的含量为20〜60 (A)的含量(重量%)与高沸点高增溶溶剂(B)的含量(重量%)的比例(重量%)(高) 沸腾高溶解性溶剂(B)/烃系溶剂(A))为0.05〜4。