专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07528935B2 Lithographic apparatus, device manufacturing method, and device manufactured thereby 有权
标题翻译：平版印刷设备，器件制造方法和由此制造的器件
公开(公告)号：US07528935B2
公开(公告)日：2009-05-05
申请号：US11312654
申请日：2005-12-21
申请人： Koen Jacobus Johannes Maria Zaal , Tjarko Adriaan Rudolf Van Empel , Hendricus Johannes Maria Meijer , Joost Jeroen Ottens , Marco Le Kluse , Jan Hopman
发明人： Koen Jacobus Johannes Maria Zaal , Tjarko Adriaan Rudolf Van Empel , Hendricus Johannes Maria Meijer , Joost Jeroen Ottens , Marco Le Kluse , Jan Hopman
IPC分类号： G03B27/58 , G03B27/62 , H01T23/00
CPC分类号： G03F7/707 , G03F7/70708 , G03F7/70783
摘要： A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an article to be placed in a beam path of the beam of radiation. The protrusions are generally spaced apart equidistantly at a first distance. The article holder also includes a pair of electrodes for clamping the article to the holder. The electrodes are disposed in substantially the same plane above or below the protrusions, and are spaced apart from one another by a gap. Neighboring protrusions within the plurality of protrusions that are located on opposite sides of the gap are spaced apart by a second distance that is greater than the first distance.
摘要翻译：公开了一种光刻投影装置。该装置包括用于调节辐射束的照明器和物品保持器。物品保持器包括多个突出部，其布置成提供基本平坦的支撑平面，用于支撑待放置在辐射束的光束路径中的物品。这些突起通常在第一距离处等距离间隔开。物品保持器还包括用于将物品夹持到保持器的一对电极。电极设置在突起上方或下方的基本上相同的平面中，并且通过间隙彼此间隔开。位于间隙的相对侧上的多个突起内的相邻突起被间隔开大于第一距离的第二距离。

2. 发明授权

US07110091B2 Lithographic apparatus, device manufacturing method, and device manufactured thereby 有权
标题翻译：平版印刷设备，器件制造方法和由此制造的器件
公开(公告)号：US07110091B2
公开(公告)日：2006-09-19
申请号：US10896367
申请日：2004-07-22
申请人： Koen Jacobus Johannes Maria Zaal , Tjarko Adriaan Rudolf Van Empel , Joost Jeroen Ottens , Jan Hopman
发明人： Koen Jacobus Johannes Maria Zaal , Tjarko Adriaan Rudolf Van Empel , Joost Jeroen Ottens , Jan Hopman
IPC分类号： G03B27/62 , G03B27/58 , H02N13/00
CPC分类号： G03F7/707 , G03F7/70708 , G03F7/70783
摘要： A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an article to be placed in a beam path of the beam of radiation, and at least one clamping electrode for generating an electrostatic clamping force for clamping the article against the article holder. The clamping electrode includes an electric field changer for locally changing the electrostatic clamping force for leveling local height variations of the substrate.
摘要翻译：公开了一种光刻投影装置。该装置包括用于调节辐射束的照明器和物品保持器。物品保持器包括多个突起，其被布置成提供基本平坦的支撑平面，用于支撑待放置在辐射束的光束路径中的物品;以及至少一个夹紧电极，用于产生用于夹紧物品的静电夹紧力反对文章持有人。夹持电极包括用于局部地改变静电夹持力的电场改变器，用于调平衬底的局部高度变化。

3. 发明申请

US20110126406A1 Lithographic Apparatus and Method of Manufacturing an Electrostatic Clamp for a Lithographic Apparatus 有权
标题翻译：平版印刷设备和制造用于平版印刷设备的静电夹具的方法
公开(公告)号：US20110126406A1
公开(公告)日：2011-06-02
申请号：US13020399
申请日：2011-02-03
申请人： Hubert Adriaan VAN MIERLO , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
发明人： Hubert Adriaan VAN MIERLO , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
IPC分类号： H01B13/00
CPC分类号： H01L21/6831 , G03F7/70708 , Y10T29/49117
摘要： The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.
摘要翻译：本发明涉及一种制造静电夹具的方法，所述静电夹具被配置为将制品静电地夹持在光刻设备中的制品支撑件上。该方法包括提供第一层材料，蚀刻第一层材料中的凹槽，以及将电极设置在第一层材料的凹槽中。

4. 发明授权

US08476167B2 Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus 有权
标题翻译：用于光刻设备的静电夹具的平版印刷设备和方法
公开(公告)号：US08476167B2
公开(公告)日：2013-07-02
申请号：US13020399
申请日：2011-02-03
申请人： Hubert Adriaan Van Mierlo , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
发明人： Hubert Adriaan Van Mierlo , Erik Leonardus Ham , Hendricus Johannes Maria Meijer , Hendrik Antony Johannes Neerhof , Joost Jeroen Ottens , Johannes Adrianus Petrus Leijtens , Marco Le Kluse , Jan Hopman , Johannes Hubertus Josephina Moors
IPC分类号： H01L21/311
CPC分类号： H01L21/6831 , G03F7/70708 , Y10T29/49117
摘要： The invention relates to a method of manufacturing an electrostatic clamp configured to electrostatically clamp an article to an article support in a lithographic apparatus. The method includes providing a first layer of material, etching a recess in the first layer of material, and disposing an electrode in the recess of the first layer of material.
摘要翻译：本发明涉及一种制造静电夹具的方法，所述静电夹具被配置为将制品静电地夹持在光刻设备中的制品支撑件上。该方法包括提供第一层材料，蚀刻第一层材料中的凹槽，以及将电极设置在第一层材料的凹槽中。

5. 发明授权

US07327439B2 Lithographic apparatus and device manufacturing method 有权
标题翻译：光刻设备和器件制造方法
公开(公告)号：US07327439B2
公开(公告)日：2008-02-05
申请号：US10988832
申请日：2004-11-16
申请人： Koen Jacobus Johannes Maria Zaal , Joost Jeroen Ottens , Jan Hopman
发明人： Koen Jacobus Johannes Maria Zaal , Joost Jeroen Ottens , Jan Hopman
IPC分类号： G03B27/62
CPC分类号： G03F7/70716 , B32B38/0012 , B32B38/06 , B32B2315/02 , G03F7/70708 , Y10T428/24479
摘要： A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to condition a radiation beam, and an article support configured to support an article to be placed in a beam path of the radiation beam. The article support includes a plurality of bonded layers. At least one of the bonded layers includes a plurality of recesses facing another of the bonded layers, so as to reduce a bonding surface between the bonded layers.
摘要翻译：公开了一种光刻设备。该装置包括布置成调节辐射束的照明系统和被配置为支撑要放置在辐射束的光束路径中的物品的物品支撑件。物品支撑件包括多个粘合层。至少一个接合层包括面对另一个接合层的多个凹槽，以便减少接合层之间的接合表面。

6. 发明申请

US20060158638A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby 有权
公开(公告)号：US20060158638A1
公开(公告)日：2006-07-20
申请号：US11312654
申请日：2005-12-21
申请人： Koen Maria Zaal , Tjarko Adriaan Rudolf Van Empel , Hendricus Meijer , Joost Ottens , Marco Kluse , Jan Hopman
发明人： Koen Maria Zaal , Tjarko Adriaan Rudolf Van Empel , Hendricus Meijer , Joost Ottens , Marco Kluse , Jan Hopman
IPC分类号： G03B27/58
CPC分类号： G03F7/707 , G03F7/70708 , G03F7/70783
摘要： A lithographic projection apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and an article holder. The article holder includes a plurality of protrusions arranged to provide a substantially flat plane of support for supporting an article to be placed in a beam path of the beam of radiation. The protrusions are generally spaced apart equidistantly at a first distance. The article holder also includes a pair of electrodes for clamping the article to the holder. The electrodes are disposed in substantially the same plane above or below the protrusions, and are spaced apart from one another by a gap. Neighboring protrusions within the plurality of protrusions that are located on opposite sides of the gap are spaced apart by a second distance that is greater than the first distance.

7. 发明授权

US06290275B1 Robotically drivable interface mechanism 失效
标题翻译：机器人驱动的接口机制
公开(公告)号：US06290275B1
公开(公告)日：2001-09-18
申请号：US09357154
申请日：1999-07-19
申请人： Bernardus Carolus Braam , Jan Hopman
发明人： Bernardus Carolus Braam , Jan Hopman
IPC分类号： B25J1504
CPC分类号： B64G1/641 , B25J15/0019 , B64G1/222
摘要： Robotically drivable interface mechanism for coupling to a device and for coupling to an end effector attachable to the end of a robot arm. The interface mechanism having a first coupler to couple with an associated second coupler on the device and a third coupler to couple with an associate fourth coupler on the end effector. The first coupler is connectable to an actuator included in the end effector, when the interface mechanism is coupled to the end effector. The first coupler has at least one first roller for cooperating with the second coupler formed by at least one slot in the device.
摘要翻译：机器人可驱动的接口机构，用于联接到设备并且用于联接到可附接到机器人手臂的端部的末端执行器。所述接口机构具有第一耦合器以耦合到所述装置上的相关联的第二耦合器，以及第三耦合器以与所述端部执行器上的关联第四耦合器耦合。当接口机构联接到末端执行器时，第一联接器可连接到包括在端部执行器中的致动器。第一联接器具有至少一个第一辊，用于与由装置中的至少一个槽形成的第二联接件配合。

8. 发明申请

US20100230581A1 LIGHT SENSOR 审中-公开
标题翻译：光传感器
公开(公告)号：US20100230581A1
公开(公告)日：2010-09-16
申请号：US12293700
申请日：2007-03-26
申请人： Johannes Adrianus Petrus Leijtens , Jan Hopman
发明人： Johannes Adrianus Petrus Leijtens , Jan Hopman
IPC分类号： H01L27/144
CPC分类号： H01L27/14618 , B64G1/363 , H01L27/14623 , H01L31/02024 , H01L31/0203 , H01L31/02164 , H01L2924/0002 , H01L2924/00
摘要： Light sensor, comprising a non-translucent layer (1) having a translucent aperture (2), and a sensor array layer (3), comprising an array of op to-electrical sensor elements (3a-d), as well as a translucent solid first carrier layer (4) to which said non-translucent layer is applied at one side and said sensor array layer at the other side. A multitude of such light sensors can be manufactured by taking a first substrate (4) which is suitable as a translucent solid first carrier layer for said multitude of light sensors, applying the non-translucent layers (1) including an aperture (2) in each of them for said multitude of light sensors at one side of the first substrate and applying the sensor array layers (3) for said multitude of light sensors at the other side of the first substrate and, finally, separating the individual light sensors (7a-b). The light sensor may comprise an integrated opto-electric power supply (8, 9).
摘要翻译：光传感器，包括具有半透明孔（2）的非半透明层（1）和传感器阵列层（3），所述传感器阵列层（3）包括一组运算电传感器元件（3a-d），以及半透明固体第一载体层（4），一侧涂有所述非半透明层，另一侧涂敷所述传感器阵列层。可以通过采用适合作为所述多个光传感器的半透明固体第一载体层的第一基板（4）来制造多个这样的光传感器，将包括孔（2）的非半透明层（1）它们中的每一个用于在第一基板的一侧处的所述多个光传感器，并且在第一基板的另一侧上施加用于所述多个光传感器的传感器阵列层（3），并且最后将各个光传感器（7a -b）。光传感器可以包括集成的光电电源（8,9）。

9. 发明授权

US5663486A Mechanical linear guide 失效
标题翻译：机械直线导轨
公开(公告)号：US5663486A
公开(公告)日：1997-09-02
申请号：US454358
申请日：1995-08-07
申请人： Bernardus Carolus Braam , Jan Hopman , Marinus Pieter Koster
发明人： Bernardus Carolus Braam , Jan Hopman , Marinus Pieter Koster
IPC分类号： G01P21/00 , B23Q1/36 , F16F1/26 , F16F3/02 , F16F15/06 , F16F15/073 , G01V7/00 , G01V7/02 , G01V7/16 , G01V13/00 , G01N37/00
CPC分类号： F16F15/073 , B23Q1/36 , F16F1/26 , F16F3/02 , G01V13/00 , G01V7/005 , F16F2230/0052
摘要： A mechanical linear guide for making a body move in an axial direction, comprising a system which is preferably made up of reinforced leaf springs and/or hole-type hinges, and which is rotationally symmetrical about an axial direction and mirror-symmetrical about a plane perpendicular to the axial direction. The system is connected to a fixed base at six points (A, D, I, L, M, P), and a body (18) is suspended between two points (F, G) in such a way that it can carry out only movement in the axial direction, and not in the lateral direction.
摘要翻译： PCT No.PCT / NL93 / 00265 Sec。 371日期：1995年8月7日 102（e）日期1995年8月7日PCT提交1993年12月14日PCT公布。第WO94 / 13976号公报日期1994年6月23日用于使身体沿轴向移动的机械线性引导件，包括优选由加强的板簧和/或孔型铰链构成并且围绕轴向和镜子旋转对称的系统围绕垂直于轴向方向的平面对称。该系统在六点（A，D，I，L，M，P）处连接到固定基座，并且主体（18）悬挂在两点（F，G）之间，使得它可以执行只能在轴向移动，而不是横向移动。

10. 发明申请

US20060102277A1 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US20060102277A1
公开(公告)日：2006-05-18
申请号：US10988832
申请日：2004-11-16
申请人： Koen Jacobus Maria Zaal , Joost Ottens , Jan Hopman
发明人： Koen Jacobus Maria Zaal , Joost Ottens , Jan Hopman
IPC分类号： B32B37/00
CPC分类号： G03F7/70716 , B32B38/0012 , B32B38/06 , B32B2315/02 , G03F7/70708 , Y10T428/24479
摘要： A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to condition a radiation beam, and an article support configured to support an article to be placed in a beam path of the radiation beam. The article support includes a plurality of bonded layers. At least one of the bonded layers includes a plurality of recesses facing another of the bonded layers, so as to reduce a bonding surface between the bonded layers.
摘要翻译：公开了一种光刻设备。该装置包括布置成调节辐射束的照明系统和被配置为支撑要放置在辐射束的光束路径中的物品的物品支撑件。物品支撑件包括多个粘合层。至少一个接合层包括面对另一个接合层的多个凹槽，以便减少接合层之间的接合表面。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式