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1. 发明授权

US06690703B1 Molecular fluorine laser system 失效
标题翻译：分子氟激光系统
公开(公告)号：US06690703B1
公开(公告)日：2004-02-10
申请号：US10211971
申请日：2002-08-02
申请人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
发明人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
IPC分类号： H01S3225
CPC分类号： H01S3/225 , H01S3/08 , H01S3/2308 , H01S3/2366
摘要： A molecular fluorine laser includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas and not including a laser active rare gas, multiple electrodes within the discharge chamber defining a discharge region therebetween connected to a pulsed discharge circuit for applying discharge pulses to the electrodes for energizing the gas mixture, and a resonator including the discharge chamber for generating an oscillator laser beam at a wavelength around 157 nm and a bandwidth of less than 0.6 pm. The laser further includes a power amplifier for increasing the energy of the attenuated oscillator laser beam to a second predetermined energy for lithographic processing, a line-narrowing unit for reducing the bandwidth, a low intensity suppressor module to suppress the weaker lines of the F2-laser, and a synchronization unit to synchronize the oscillator and amplifier.
摘要翻译：分子氟激光器包括：填充有分子氟和缓冲气体并且不包括激光活性稀有气体的气体混合物的放电室，放电室内的多个电极限定其间连接到脉冲放电电路的放电区域，用于施加放电脉冲到用于激励气体混合物的电极，以及包括用于产生波长约157nm和带宽小于0.6μm的振荡器激光束的放电室的谐振器。激光器还包括用于将衰减振荡器激光束的能量增加到用于光刻处理的第二预定能量的功率放大器，用于减小带宽的线窄变换单元，用于抑制F2- 激光器和同步单元来同步振荡器和放大器。

2. 发明授权

US06487229B2 Beam delivery system for molecular fluorine (F2) laser 失效
公开(公告)号：US06487229B2
公开(公告)日：2002-11-26
申请号：US09965492
申请日：2001-09-26
申请人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
发明人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
IPC分类号： H01S322
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/05 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

3. 发明授权

US06327290B1 Beam delivery system for molecular fluorine (F2) laser 失效
标题翻译：分子氟（F2）激光束传输系统
公开(公告)号：US06327290B1
公开(公告)日：2001-12-04
申请号：US09594892
申请日：2000-06-14
申请人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
发明人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
IPC分类号： H01G303
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/05 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.
摘要翻译：提供了一种系统，用于通过可密封地连接到激光器的密封外壳，优选地将最终导向工件的激光器等激光器（例如F2激光器或ArF激光器）传送波长小于200nm的激光束。外壳优选被抽空并用惰性气体反填充以充分消耗外壳内的任何空气，水，碳氢化合物或氧气。之后或者替代地，在激光器的操作期间建立惰性气体流并保持在外壳内。惰性气体优选具有高纯度，例如超过99.5％，优选大于99.999％，其中惰性气体优选为氮气或惰性气体。外壳优选由对于200nm以下的辐射透明的窗口密封，以防止在外壳中产生的污染物进入壳体和污染表面。外壳优选由钢和/或铜制成，并且窗口优选地由CaF 2制成。

4. 发明授权

US06490305B2 Beam delivery system for molecular fluorine (F2) laser 失效
公开(公告)号：US06490305B2
公开(公告)日：2002-12-03
申请号：US09965498
申请日：2001-09-26
申请人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
发明人： Sergei V. Govorkov , Klaus Wolfgang Vogler , Frank Voss , Rainer Pätzel
IPC分类号： H01S322
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/05 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.

5. 发明授权

US06834069B1 Molecular fluorine laser with intracavity polarization enhancer 失效
标题翻译：分子氟激光与腔内极化增强剂
公开(公告)号：US06834069B1
公开(公告)日：2004-12-21
申请号：US10162115
申请日：2002-06-03
申请人： Elko Bergmann , Frank Voss , Klaus Wolfgang Vogler
发明人： Elko Bergmann , Frank Voss , Klaus Wolfgang Vogler
IPC分类号： H01S3223
CPC分类号： G02B5/1838 , G02B5/1814 , H01S3/08004 , H01S3/08009 , H01S3/1055 , H01S3/225
摘要： A F2 laser includes a laser tube filled with a laser gas mixture at least including molecular fluorine for generating a spectral emission including multiple closely-spaced lines in a wavelength range between 157 nm and 158 nm, including a first line centered around 157.62 nm and a second line centered around 157.52 nm, multiple electrodes within the discharge chamber connected with a power supply circuit for energizing the molecular fluorine, a laser resonator including a line selection unit for selecting one of the first and second lines of the multiple closely spaced lines and for supressing the other of the first and second lines, for generating a narrow bandwidth VUV output beam, and at least one intracavity polarizing element. The narrow bandwidth VUV output beam is polarized at least 95%, and may be 98% or more.
摘要翻译： F2激光器包括填充有至少包括分子氟的激光气体混合物的激光管，用于产生包括在157nm和158nm之间的波长范围内的多个紧密间隔的线的光谱发射，包括以157.62nm为中心的第一线和第二行以157.52nm为中心，放电室内的多个电极与用于激励分子氟的电源电路连接，激光谐振器包括用于选择多个紧密间隔的线中的第一和第二线之一的线选择单元，抑制第一和第二行中的另一个，用于产生窄带宽VUV输出光束，以及至少一个腔内偏振元件。窄带宽VUV输出光束极化至少95％，可以是98％以上。

6. 发明授权

US07006541B2 Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp 失效
公开(公告)号：US07006541B2
公开(公告)日：2006-02-28
申请号：US10354945
申请日：2003-01-29
申请人： Peter Lokai , Thomas Schroeder , Juergen Kleinschmidt , Uwe Stamm , Klaus Wolfgang Vogler
发明人： Peter Lokai , Thomas Schroeder , Juergen Kleinschmidt , Uwe Stamm , Klaus Wolfgang Vogler
IPC分类号： H01S3/13
CPC分类号： H01S3/225 , H01S3/1392
摘要： A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.

7. 发明授权

US06504861B2 Laser gas replenishment method 有权
公开(公告)号：US06504861B2
公开(公告)日：2003-01-07
申请号：US10114184
申请日：2002-04-01
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Thomas Schroeder
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Thomas Schroeder
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

8. 发明授权

US06577665B2 Molecular fluorine laser 失效
公开(公告)号：US06577665B2
公开(公告)日：2003-06-10
申请号：US10116903
申请日：2002-04-05
申请人： Klaus Wolfgang Vogler , Juergen Kleinschmidt
发明人： Klaus Wolfgang Vogler , Juergen Kleinschmidt
IPC分类号： H01S322
CPC分类号： H01S3/036 , G02B5/1814 , G02B5/1838 , H01S3/0315 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08059 , H01S3/0809 , H01S3/0971 , H01S3/1055 , H01S3/137 , H01S3/225 , H01S3/2258
摘要： An efficient F2 laser is provided with improvements in line selection, monitoring capabilities, alignment stabilization, performance at high repetition rates and polarization characteristics. Line selection is preferably provided by a transmission grating or a grism. The grating or grism preferably outcouples the laser beam. The line selection may be fully provided at the front optics module. A monitor grating and an array detector monitor the intensity of the selected (and unselected) lines for line selection control. An energy detector is enclosed in an inert gas purged environment at slight overpressure. A blue or green reference beam is used for F2 laser beam alignment stabilization and/or spectral monitoring of the output laser beam. The blue or green reference beam advantageously is not reflected out with a atomic fluorine red emission of the laser and is easily resolved from the red emission. The clearing ratio of the laser gas flow through the discharge area is reduced by narrowing the discharge width using improved laser electrodes and/or by increasing the gas flow rate through the discharge while maintaining uniformity by using a more aerodynamic discharge chamber. The F2 laser beam is substantially polarized, e.g., 98% or better, using at least one intracavity polarization element preferably in combination with Brewster discharge chamber windows.

9. 发明授权

US06526085B2 Performance control system and method for gas discharge lasers 失效
公开(公告)号：US06526085B2
公开(公告)日：2003-02-25
申请号：US10035572
申请日：2001-10-18
申请人： Klaus Wolfgang Vogler , Peter Heist
发明人： Klaus Wolfgang Vogler , Peter Heist
IPC分类号： H01S322
CPC分类号： G03F7/70025 , H01S3/22
摘要： A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving voltage to a discharge circuit. A master data set of an output parameter such as any of output beam energy, bandwidth, spectrum width, long axial beam profile, short axial beam profile, beam divergence, energy stability, energy efficiency, width of the discharge, temporal beam coherence, spatial beam coherence, spatial pulse width, amplified spontaneous emission and temporal pulse width versus an input parameter such as driving voltage is generated corresponding to an optimal gas mixture status, preferably after a new fill and typically at the factory, and alternatively following a new fill at the fab. Preferably several master data sets are measured and stored following new fills corresponding to various ages and other conditions of the laser system. The master data set is stored into a memory of the control system. Several more calibration data sets are also preferably generated corresponding to other gas mixture or laser operating conditions. At another time, during a check sub-routine preferably during a subsequent start-up procedure or during each subsequent start-up procedure, a current status data set of the output and input parameters is generated corresponding to the current status of the gas mixture. The current status data set is then compared with the master data set and deviations of the current status and master data sets are noted. A follow-up procedure may be performed, preferably automatically as initiated by the processor, based on the comparison.

10. 发明授权

US06493370B2 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US06493370B2
公开(公告)日：2002-12-10
申请号：US10121292
申请日：2002-04-12
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Thomas Schroeder
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Thomas Schroeder
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
摘要翻译：提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的组成气体维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。激光气体混合物的构成气体以初始分压提供，并且组成气体在激光放电室内耗尽。各成分气体的注入是为了将放电室中的分压增加一个选定的量，优选每次注射小于0.2毫巴。以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中组成气体的计算量而变化。驱动电压被确定为基于系统老化而调整的多个驱动电压范围之一。在每个范围内，气体注入和气体替换优选地基于对放电的总施加的电能和/或在时间和/或脉冲计数上进行。

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