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1. 发明授权

US4552524A Hydraulic press 失效
标题翻译：液压机
公开(公告)号：US4552524A
公开(公告)日：1985-11-12
申请号：US687190
申请日：1984-12-28
申请人： Klaus Schmidts , Dieter Therolf , Ulrich Weber
发明人： Klaus Schmidts , Dieter Therolf , Ulrich Weber
IPC分类号： B29C70/06 , B29C43/32 , B29D7/00 , B29K105/06 , B30B1/32 , B32B37/00 , B30B11/00
CPC分类号： B30B1/323
摘要： In a press an hydraulic adjusting cylinder connected to the slidable cross-piece of the press has a stroke matching the range of movement of the press and a number of hydraulic press cylinders of short stroke are provided for executing the working strokes of the press. The press cylinders are each couplable to the slidable cross-piece by a coupling including a coupling rod and a stationary clamping jaw and a pressable clamping jaw cooperating with the coupling rod, the pressable clamping jaw being activated by at least one single acting hydraulic cylinder.
摘要翻译：在压力机中，连接到压力机的可滑动横截面的液压调节气缸具有与冲压机的运动范围相匹配的冲程，并且提供了许多用于执行压机的工作冲程的液压冲压缸。压力缸通过包括联接杆和固定夹爪的联接器以及与联接杆配合的可压紧夹爪可耦合到可滑动的横梁上，可压紧夹爪由至少一个单作用液压缸启动。

2. 发明授权

US4565517A Hydraulic press for pressing mats of plastic material reinforced with glass fibers 失效
标题翻译：液压机用于压制玻璃纤维增强塑料材料的垫子
公开(公告)号：US4565517A
公开(公告)日：1986-01-21
申请号：US695390
申请日：1985-01-28
申请人： Dirk Brinkmann , Wolfgang Muller , Walter Sauerwald , Klaus Schmidts , Dieter Therolf , Ulrich Weber
发明人： Dirk Brinkmann , Wolfgang Muller , Walter Sauerwald , Klaus Schmidts , Dieter Therolf , Ulrich Weber
IPC分类号： B29C70/06 , B29C43/34 , B29C43/36 , B29K105/06 , B29L9/00 , B30B1/32 , B29C43/00
CPC分类号： B30B1/323
摘要： An hydraulic press for pressing plastic mats reinforced with glass fibers into formed parts, which press has a stationary and a slidable cross-piece as well as a press drive which drive for driving the slidable cross-piece has at least one adjusting cylinder with a stroke length corresponding to the working range of the press and at least two couplable press cylinders of short stroke wherein for coupling each press cylinder to the slidable cross-piece a coupling rod and a clamping means is provided, the press being distinguished in that in order to better accomodate incorporation of the press drive into an existing press, each press cylinder has a hollow lifting body through which an associated coupling rod is guided, and for coupling the lifting body to the associated coupling rod a clamping device is included on the lifting body.
摘要翻译：一种用于将用玻璃纤维增强的塑料垫挤压成成形部件的液压机，该压力机具有静止和可滑动的横截面以及用于驱动可滑动横档的驱动装置，具有至少一个具有行程的调节气缸对应于压力机的工作范围的长度和至少两个短冲程的联接压力缸，其中为了将每个压力缸联接到可滑动的横截面上，提供了一个联接杆和一个夹紧装置，其特征在于：更好地适应将压力机构结合到现有的压力机中，每个压力缸具有中空的提升体，相关的联接杆通过该中空提升体引导，并且用于将提升体联接到相关的联接杆上，夹紧装置包括在提升体上。

3. 发明授权

US4610618A Hydraulic press 失效
标题翻译：液压机
公开(公告)号：US4610618A
公开(公告)日：1986-09-09
申请号：US770636
申请日：1985-08-28
申请人： Klaus Schmidts , Dieter Therolf , Ulrich Weber
发明人： Klaus Schmidts , Dieter Therolf , Ulrich Weber
IPC分类号： B27D3/00 , B30B1/32 , B30B15/04 , B30B11/00
CPC分类号： B30B15/048 , B30B1/323 , B30B15/041
摘要： In an hydraulic press, usable as a press for forming composite sheet material, with a press base, several vertical guides extending out of the press base and a cross head slidably arranged on the vertical guides, which cross head is hydraulically clampable to the vertical guides, with a slidable press plate and a press drive, wherein several long stroke hydraulic cylinders are provided for adjusting the cross head and several short stroke hydraulic cylinders create the stroke of the press plate. The vertical guides and the cross head are made with several guide laminations clampable together in order to realize a guide and coupling system at small construction expense.
摘要翻译：在可用作用于形成复合片材的压力机的液压机中，具有压力机底座，从压力机基座延伸出的几个垂直导向件和可滑动地布置在垂直导轨上的十字头，该十字头可液压地夹紧到垂直导轨具有可滑动的压板和压力机构，其中设置有用于调节十字头的几个长行程液压缸，并且几个短行程液压缸产生压板的行程。垂直导轨和十字头由几个可夹紧的导向叠片制成，以便以小的建筑成本实现导向和联接系统。

4. 发明授权

US08508868B2 Holding arrangement for an optical element 失效
标题翻译：保持光学元件的布置
公开(公告)号：US08508868B2
公开(公告)日：2013-08-13
申请号：US13359341
申请日：2012-01-26
申请人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
发明人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
IPC分类号： G02B7/02 , G02B15/14
CPC分类号： G02B7/004 , G02B7/023
摘要： A holding arrangement for an optical element, in particular for a cylindrical lens, includes a basic structure surrounding an optical element and a mounting device by which the optical element is supported on the basic structure. The mounting device has two degrees of freedom so that the optical element can be supported by the mounting device in a manner that allows the optical element to rotate about both about an optical axis and an axis perpendicular to the optical axis. If the optical element is a cylindrical lens, the axis perpendicular to the optical axis can be an axis perpendicular to an axial direction of the cylindrical lens. The disclosure further relates to a manipulator unit for an optical system which includes a holding arrangement.
摘要翻译：用于光学元件的保持装置，特别是用于圆柱形透镜的保持装置包括围绕光学元件的基本结构和安装装置，光学元件通过该安装装置支撑在基本结构上。安装装置具有两个自由度，使得光学元件可以以允许光学元件围绕光轴和垂直于光轴的轴线旋转的方式由安装装置支撑。如果光学元件是圆柱形透镜，则垂直于光轴的轴线可以是垂直于柱面透镜轴向的轴线。本发明还涉及一种用于光学系统的操纵器单元，其包括保持装置。

5. 发明授权

US08035903B2 Positioning unit and alignment device for an optical element 有权
标题翻译：光学元件的定位单元和对准装置
公开(公告)号：US08035903B2
公开(公告)日：2011-10-11
申请号：US12768286
申请日：2010-04-27
申请人： Ulrich Weber , Jens Kugler
发明人： Ulrich Weber , Jens Kugler
IPC分类号： G02B7/02
CPC分类号： G02B7/005 , G02B7/003 , G02B7/004 , G02B7/02 , G02B7/023 , G02B7/1822 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： The invention relates to a positioning unit for an optical element in a microlithographic projection exposure installation. Said unit comprises a first connection region (A, 22) for connecting to the optical elements, and a second connection region (B, 20) for connecting to an object in the vicinity of the optical elements. At least two levers are connected to the second connection region by means of the respective lever bearing thereof, and the respective load arm thereof is connected to the first connection region by an articulation by means of an intermediate element (31, 33, 36) applied to said articulations. Regulating devices (28, 29) or actuators are arranged on the respective power arms of the levers. In a first position, the first connection region and the second connection region are arranged in relation to each other in such a way that the lever bearings of at least two levers and the articulations associated with said levers have approximately parallel rotational axes that are located approximately in a plane in the first position.
摘要翻译：本发明涉及一种用于微光刻投影曝光装置中的光学元件的定位单元。所述单元包括用于连接到光学元件的第一连接区域（A，22）和用于连接到光学元件附近的物体的第二连接区域（B，20）。至少两个杠杆通过其相应的杠杆轴承连接到第二连接区域，并且其相应的负载臂通过借助于施加的中间元件（31,33,36）的铰接而连接到第一连接区域到所说的关节。调节装置（28,29）或致动器布置在杠杆的相应动力臂上。在第一位置，第一连接区域和第二连接区域彼此相对布置，使得至少两个杠杆的杠杆轴承和与所述杠杆相关联的铰接件具有近似平行的旋转轴线，其大致位于在一架飞机中处于第一位。

6. 发明申请

US20090040487A1 IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY 有权
标题翻译：投影曝光设备中的成像装置
公开(公告)号：US20090040487A1
公开(公告)日：2009-02-12
申请号：US12247597
申请日：2008-10-08
申请人： Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schongart , Markus Neumaier , Barbel Trossbach , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
发明人： Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schongart , Markus Neumaier , Barbel Trossbach , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
IPC分类号： G03B27/42
CPC分类号： G03F7/70258 , G03F7/70825
摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.
摘要翻译：用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

7. 发明申请

US20080174757A1 IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE 失效
标题翻译：投影曝光机成像装置
公开(公告)号：US20080174757A1
公开(公告)日：2008-07-24
申请号：US11936768
申请日：2007-11-07
申请人： Wolfgang Hummel , Jurgen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schongart , Markus Neumaier , Barbel Trossbach , Ulrich Weber , Michael Muhlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
发明人： Wolfgang Hummel , Jurgen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schongart , Markus Neumaier , Barbel Trossbach , Ulrich Weber , Michael Muhlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
IPC分类号： G03B27/54
CPC分类号： G03F7/70258 , G03F7/70825
摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.
摘要翻译：用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

8. 发明授权

US07014328B2 Apparatus for tilting a carrier for optical elements 有权
公开(公告)号：US07014328B2
公开(公告)日：2006-03-21
申请号：US10119182
申请日：2002-04-08
申请人： Ulrich Weber , Hubert Holderer , Alexander Kohl
发明人： Ulrich Weber , Hubert Holderer , Alexander Kohl
IPC分类号： G02B7/18 , G02B7/182
CPC分类号： G02B7/182
摘要： The invention relates to an apparatus for tilting a carrier for optical elements with two optical faces which are arranged together on a carrier and are fixed at a fixed angle to one another, the carrier being fastened on a base plate via articulated connections. The carrier can be pivoted about three tilting axes, a first tilting axis preferably being located in the plane of the first optical face and extending normal to the plane of the second optical face, the second tilting axis preferably being located in the plane of the second optical face and extending normal to the plane of the first optical face, and the third tilting axis being located parallel to the line of intersection between the two planes of the optical element.

9. 发明申请

US20050248858A1 Device for holding a beam splitter element 失效
标题翻译：用于固定分束器元件的装置
公开(公告)号：US20050248858A1
公开(公告)日：2005-11-10
申请号：US11109316
申请日：2005-04-19
申请人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
发明人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
IPC分类号： G02B7/00 , G02B7/18 , G03F7/20 , G02B5/30 , G02B7/02 , G02B27/28
CPC分类号： G03F7/70825 , G02B7/008 , G02B7/1805 , G03F7/70891
摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
摘要翻译：本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的壳体中的至少一个支撑元件。分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在分束器元件

10. 发明申请

US20050110447A1 Device for manipulating the angular position of an object relative to a fixed structure 审中-公开
标题翻译：用于操纵物体相对于固定结构的角位置的装置
公开(公告)号：US20050110447A1
公开(公告)日：2005-05-26
申请号：US10942638
申请日：2004-09-16
申请人： Ulrich Weber , Hubert Holderer , Hartmut Muenker
发明人： Ulrich Weber , Hubert Holderer , Hartmut Muenker
IPC分类号： G03F7/20 , G05G11/00 , B25J9/18 , B66C1/00
CPC分类号： G03F7/70825 , Y10T74/20207
摘要： The invention relates to a device for manipulation of the angular position of an object relative to a fixed structure, into which the object, in particular an optical element of a lens group for microlithography, is introduced, about three rotational axes, intersecting at a point. The object can also be held in a support frame. The support frame, with the object is connected to the fixed structure by means of three connection limbs each with three rotational degrees of freedom and one translational degree of freedom. The angular position of the support frame is adjustable about each one of the three rotational axes by means of one of the connection limbs.
摘要翻译：本发明涉及一种用于操纵物体相对于固定结构的角位置的装置，其中物体（特别是用于微光刻的透镜组的光学元件）被引入到该三维旋转轴中，在一个点处相交。物体也可以保持在支撑框架中。具有该物体的支撑框架通过三个连接臂连接到固定结构，每个连接臂具有三个旋转自由度和一个平移自由度。支撑框架的角位置可以通过连接四肢中的一个围绕三个旋转轴线中的每一个来调节。

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