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    • 3. 发明授权
    • Semiconductor device and power supply using the same
    • 半导体器件和电源使用相同
    • US08125206B2
    • 2012-02-28
    • US12143305
    • 2008-06-20
    • Noboru AkiyamaTakayuki HashimotoTakashi HiraoKoji Tateno
    • Noboru AkiyamaTakayuki HashimotoTakashi HiraoKoji Tateno
    • G05F1/40
    • H02M3/1588Y02B70/1466
    • A power-supply control IC is included in a switching power supply which drives to turn on and off a semiconductor switching device connected to a DC power supply in series to supply a predetermined constant voltage to an external load, and is a semiconductor device including a semiconductor circuit which controls on and off of the semiconductor switching device. When a current flowing through the load is abruptly increased to cause an error voltage to exceed a predetermined first threshold voltage after the end of a PWM on-pulse generated in synchronization with a switching cycle, a second PWM on-pulse is generated within the same switching cycle. Furthermore, in a plurality of switching cycles after the switching cycle in which the second PWM on-pulse is generated, the first threshold voltage for comparison with the error voltage is switched to a second threshold voltage higher than the first threshold voltage.
    • 电源控制IC包括在开关电源中,该开关电源驱动以串联连接到直流电源的半导体开关装置,以向外部负载提供预定的恒定电压,并且是包括 控制半导体开关器件的导通和截止的半导体电路。 当流过负载的电流突然增加以在与开关周期同步产生的PWM导通脉冲结束之后导致误差电压超过预定的第一阈值电压时,在同一时间内产生第二PWM导通脉冲 开关周期。 此外,在产生第二PWM导通脉冲的开关周期之后的多个开关周期中,与误差电压进行比较的第一阈值电压被切换到高于第一阈值电压的第二阈值电压。
    • 9. 发明授权
    • Method for producing an amorphous silicon semiconductor device using a
multichamber PECVD apparatus
    • 使用多室PECVD装置制造非晶硅半导体器件的方法
    • US4800174A
    • 1989-01-24
    • US50699
    • 1987-05-18
    • Shinichiro IshiharaMasatoshi KitagawaTakashi Hirao
    • Shinichiro IshiharaMasatoshi KitagawaTakashi Hirao
    • H01L21/205C23C16/24C23C16/54H01L31/04
    • C23C16/54C23C16/24Y10S148/025Y10S148/045Y10S148/072Y10S438/908
    • A method of producing an amorphous silicon semiconductor device makes use of a capacitance-coupled high-frequency glow-discharge semiconductor production apparatus which is equipped with a plurality of glow-discharge chambers each having a high-frequency electrode and a substrate holder opposing each other and means for supplying material gases to the glow-discharge chambers. A reaction of a material gas is effected in a first glow-discharge chamber, so as to form a semiconductor layer having a first conductivity type on a substrate introduced into the first glow-discharge chamber, and, after moving the substrate into a second glow-discharge chamber, a reaction of a material gas different from the material gas used in the first glow-discharge chamber is effected, thereby forming a semiconductor layer having a second conductivity type on the semiconductor layer of the first conductivity type. The substrate with the semiconductor layer of the first conductivity formed thereon is moved from the first glow-discharge chamber to the second glow-discharge chamber after a predetermined gas atmosphere is formed in the first glow-discharge chamber. The distance between the electrode and the substrate holder is made smaller in one of the first and second glow-discharge chambers which is designed for forming the thicker one of the semiconductor layers of the first and second conductivity types than in the other of the first and second glow-discharge chambers. The temperature of the substrate is set higher in one of the first and second glow-discharge chambers which is designed for forming the thicker one of the semiconductor layers of the first and second conductivity types than in the other of the first and second glow-discharge chambers.
    • 一种非晶硅半导体器件的制造方法采用电容耦合高频辉光放电半导体制造装置,该装置配备有多个辉光放电室,每个辉光放电室具有彼此相对的高频电极和衬底保持器 以及用于将材料气体供应到辉光放电室的装置。 在第一辉光放电室中进行材料气体的反应,以便在引入第一辉光放电室的衬底上形成具有第一导电类型的半导体层,并且在将衬底移动到第二发光 进行与第一辉光放电室中使用的材料气体不同的原料气体的反应,由此在第一导电型半导体层上形成具有第二导电类型的半导体层。 在第一辉光放电室中形成规定的气体气氛之后,将形成有第一导电性的半导体层的基板从第一辉光放电室向第二辉光放电室移动。 在第一和第二辉光放电室之一中,电极和衬底保持器之间的距离较小,被设计用于形成第一和第二导电类型的较厚的一个半导体层,而不是第一和第二导电类型中的另一个, 第二个辉光放电室。 第一和第二辉光放电室之一的衬底的温度被设定为高于在第一和第二辉光放电中的另一个中形成第一和第二导电类型的较厚的一个半导体层的第一和第二辉光放电室 房间。