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    • 8. 发明授权
    • Method and apparatus for cross-section processing and observation
    • 横截面加工和观察的方法和装置
    • US08542275B2
    • 2013-09-24
    • US12880626
    • 2010-09-13
    • Masahiro KiyoharaMakoto SatoHaruo TakahashiJunichi Tashiro
    • Masahiro KiyoharaMakoto SatoHaruo TakahashiJunichi Tashiro
    • H04N7/18
    • G01N23/2255
    • A cross-section processing and observation method includes: forming a first cross section in a sample by etching processing using a focused ion beam; obtaining image information of the first cross section by irradiating the focused ion beam to the first cross section; forming a second cross section by performing etching processing on the first cross section; obtaining image information of the second cross section by irradiating the focused ion beam to an irradiation region including the second cross section; displaying image information of a part of a display region of the irradiation region from the image information of the second cross section; displaying the image information of the first cross section by superimposing it on the image information being displayed; and moving the display region within the irradiation region. Observation images in which display regions are aligned can be obtained while reducing damage to the sample.
    • 截面处理和观察方法包括:通过使用聚焦离子束的蚀刻处理在样品中形成第一横截面; 通过将聚焦的离子束照射到第一横截面来获得第一横截面的图像信息; 通过对所述第一横截面进行蚀刻处理形成第二横截面; 通过将聚焦离子束照射到包括第二横截面的照射区域来获得第二横截面的图像信息; 从第二横截面的图像信息中显示照射区域的显示区域的一部分的图像信息; 通过将第一横截面的图像信息叠加在正在显示的图像信息上来显示图像信息; 并且在照射区域内移动显示区域。 可以获得显示区域对准的观察图像,同时减少对样品的损伤。
    • 9. 发明申请
    • METHOD AND APPARATUS FOR CROSS-SECTION PROCESSING AND OBSERVATION
    • 交叉处理和观察的方法和装置
    • US20110052044A1
    • 2011-03-03
    • US12873886
    • 2010-09-01
    • Haruo TakahashiMasahiro KiyoharaMakoto SatoJunichi Tashiro
    • Haruo TakahashiMasahiro KiyoharaMakoto SatoJunichi Tashiro
    • G06T7/00
    • G01N23/2255H01J2237/221
    • A cross-section processing and observation method includes: forming a cross section in a sample by a focused ion beam through etching processing; obtaining a cross-section observation image through cross-section observation by the focused ion beam; and forming a new cross section by performing etching processing in a region including the cross section and obtaining a cross-section observation image of the new cross section. A surface observation image of a region including a mark on the sample and the cross section is obtained. A position of the mark is recognized in the surface observation image and etching processing is performed on the cross section by setting, in reference to the position of the mark, a focused ion beam irradiation region in which to form the new cross section. Cross-section processing and observation is thus enabled continuously and efficiently using a focused ion beam apparatus having no SEM apparatus.
    • 截面处理和观察方法包括:通过蚀刻处理通过聚焦离子束在样品中形成横截面; 通过聚焦离子束的横截面观察获得横截面观察图像; 并且通过在包括横截面的区域中进行蚀刻处理并获得新横截面的横截面观察图像来形成新的横截面。 获得包括样品上的标记和横截面的区域的表面观察图像。 在表面观察图像中识别标记的位置,并且通过关于标记的位置设置形成新横截面的聚焦离子束照射区域来对截面进行蚀刻处理。 因此,使用不具有SEM装置的聚焦离子束装置,能够连续有效地进行横截面加工和观察。