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1. 发明授权

US07829863B2 Electron beam irradiation device 有权
标题翻译：电子束照射装置
公开(公告)号：US07829863B2
公开(公告)日：2010-11-09
申请号：US11920420
申请日：2005-11-18
申请人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G21K1/08
CPC分类号： H01J37/3175 , B82Y10/00 , B82Y40/00 , H01J37/073 , H01J37/3174 , H01J2237/06333 , H01J2237/06358 , H01J2237/31779 , H01J2237/31794
摘要： An electron beam irradiation device of the present invention includes: a projector 8 for generating a two-dimensional light pattern 13; a microchannel plate 11 for (i) generating an electron beam array based on the light pattern 13 having entered, (ii) amplifying the electron beam array, and (iii) emitting the electron beam array as an amplified electron beam array 14; and an electron beam lens section 12 for converging the amplified electron beam array 14. This electron beam irradiation device is capable of manufacturing a semiconductor device whose performance is improved through a finer processing by means of irradiation using an electron beam. Further, the electron beam irradiation device allows cost reduction, because the device allows collective irradiation using a two dimensional pattern.
摘要翻译：本发明的电子束照射装置包括：用于产生二维光图案13的投影仪8; 微通道板11，用于（i）基于已经进入的光图案13产生电子束阵列，（ii）放大电子束阵列，和（iii）发射电子束阵列作为放大的电子束阵列14; 以及用于会聚放大的电子束阵列14的电子束透镜部分12.该电子束照射装置能够通过使用电子束的照射通过更精细的处理来制造其性能得到改善的半导体器件。此外，电子束照射装置允许成本降低，因为该装置允许使用二维图案的集体照射。

2. 发明申请

US20100219819A1 APPARATUS AND METHOD OF OBTAINING FIELD BY MEASUREMENT 有权
标题翻译：设备和方法通过测量领域获得
公开(公告)号：US20100219819A1
公开(公告)日：2010-09-02
申请号：US12594050
申请日：2008-03-28
申请人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
发明人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
IPC分类号： G01R33/02 , G01Q60/08
CPC分类号： G01R33/10 , G01Q30/04 , G01Q60/50 , G01R33/0206 , G01R33/0385
摘要： Above the sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image with use of a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a minute distance d, and a difference between them is divided by the minute distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained with high accuracy. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field. The three-dimensional field obtaining method using the three-dimensional field obtaining equation can be used for various fields of magnetic, electric, temperature and gravity potential and so on satisfying the Laplace equation. The obtaining of the three-dimensional field can be extended to obtaining of an n-dimensional field having high-dimension.
摘要翻译：在具有磁畴的样品（9）上方，通过使用MFM获得在测量平面（91）中的磁力分布作为磁力图像，通过在测量平面中进行测量获得辅助磁力图像（ 92）远离测量平面（91）微小的距离d，并且它们之间的差除以微小距离d以获得磁力梯度图像。将磁力图像和辅助磁力图像进行傅里叶变换并代入由拉普拉斯方程的一般解导出的三维场获得方程，并且以高精度获得表示磁力的三维场。通过获得三维场，可以高精度地获得样品（9）的表面（93）处的磁畴的状态。使用三维场获得方程的三维场获取方法可以用于满足拉普拉斯方程的磁，电，温度和重力等各种领域。可以将三维场的获得扩展到获得具有高维度的n维场。

3. 发明授权

US08536862B2 Apparatus and method of obtaining field by measurement 有权
标题翻译：通过测量获得场的装置和方法
公开(公告)号：US08536862B2
公开(公告)日：2013-09-17
申请号：US12594050
申请日：2008-03-28
申请人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
发明人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
IPC分类号： G01R33/02
CPC分类号： G01R33/10 , G01Q30/04 , G01Q60/50 , G01R33/0206 , G01R33/0385
摘要： Above a sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image using a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a distance d, and a difference between them is divided by the distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field.
摘要翻译：在具有磁畴的样品（9）之上，通过使用MFM获得测量平面（91）中的磁力分布作为磁力图像，通过在测量平面（92）中进行测量来获得辅助磁力图像，离开测量平面（91）距离d，并且将它们之间的差除以距离d以获得磁力梯度图像。将磁力图像和辅助磁力图像进行傅立叶变换并代入由拉普拉斯方程的一般解导出的三维场获得方程式，得到表示磁力的三维场。通过获得三维场，可以高精度地获得样品（9）的表面（93）处的磁畴的状态。

4. 发明申请

US20090127473A1 Electron Beam Irradiation Device 有权
标题翻译：电子束照射装置
公开(公告)号：US20090127473A1
公开(公告)日：2009-05-21
申请号：US11920420
申请日：2005-11-18
申请人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： H01J3/14 , A61N5/00
CPC分类号： H01J37/3175 , B82Y10/00 , B82Y40/00 , H01J37/073 , H01J37/3174 , H01J2237/06333 , H01J2237/06358 , H01J2237/31779 , H01J2237/31794
摘要： An electron beam irradiation device of the present invention includes: a projector 8 for generating a two-dimensional light pattern 13; a microchannel plate 11 for (i) generating an electron beam array based on the light pattern 13 having entered, (ii) amplifying the electron beam array, and (iii) emitting the electron beam array as an amplified electron beam array 14; and an electron beam lens section 12 for converging the amplified electron beam array 14. This electron beam irradiation device is capable of manufacturing a semiconductor device whose performance is improved through a finer processing by means of irradiation using an electron beam. Further, the electron beam irradiation device allows cost reduction, because the device allows collective irradiation using a two dimensional pattern.
摘要翻译：本发明的电子束照射装置包括：用于产生二维光图案13的投影仪8; 微通道板11，用于（i）基于已经进入的光图案13产生电子束阵列，（ii）放大电子束阵列，和（iii）发射电子束阵列作为放大的电子束阵列14; 以及用于会聚放大电子束阵列14的电子束透镜部分12.该电子束照射装置能够通过使用电子束的照射通过更精细的处理来制造其性能得到改善的半导体器件。此外，电子束照射装置允许成本降低，因为该装置允许使用二维图案的集体照射。

5. 发明授权

US08796654B2 Scan device for microscope measurement instrument 有权
标题翻译：扫描仪用于显微镜测量仪器
公开(公告)号：US08796654B2
公开(公告)日：2014-08-05
申请号：US13056293
申请日：2008-07-31
申请人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G01N21/86 , G01V8/00 , G01N35/10 , G01Q10/06 , H01J37/20 , H01J37/26 , H01J37/28 , B82Y35/00
CPC分类号： G01N35/1011 , B82Y35/00 , G01Q10/065 , H01J37/20 , H01J37/265 , H01J37/28 , H01J2237/20228
摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
摘要翻译：将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。

6. 发明申请

US20110261352A1 Scan Device 有权
标题翻译：扫描设备
公开(公告)号：US20110261352A1
公开(公告)日：2011-10-27
申请号：US13056293
申请日：2008-07-31
申请人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G01N21/01
CPC分类号： G01N35/1011 , B82Y35/00 , G01Q10/065 , H01J37/20 , H01J37/265 , H01J37/28 , H01J2237/20228
摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
摘要翻译：将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。

7. 发明申请

US20120330581A1 POTENTIAL OBTAINING APPARATUS, MAGNETIC FIELD MICROSCOPE, INSPECTION APPARATUS, AND POTENTIAL OBTAINING METHOD 审中-公开
标题翻译：潜在获取装置，磁场显微镜，检查装置和潜在获取方法
公开(公告)号：US20120330581A1
公开(公告)日：2012-12-27
申请号：US13582151
申请日：2011-03-01
申请人： Kenjiro Kimura
发明人： Kenjiro Kimura
IPC分类号： G06F19/00
CPC分类号： G01R33/10 , G01N24/08 , G01R33/3808
摘要： In a magnetic field obtaining apparatus, a measuring part (21) that is sufficiently longer than the width of an area to be measured is disposed on a measurement plane that satisfies z=α, and scanning in an X′ direction perpendicular to the longitudinal direction of the measuring part (21) is repeated while changing an angle θ formed by a predetermined reference direction on the measurement plane and the longitudinal direction of the measuring part (21) to a plurality of angles. Assuming that x′ is a coordinate parameter in the X′ direction, measured values f(x′, θ) obtained by repetitions of the scanning are Fourier transformed so as to obtain g(kx′, θ) (where kx′ is a wavenumber in the X′ direction). Then, g(kx′, θ) is substituted into a predetermined two-dimensional potential obtaining equation so as to obtain φ(x, y, α) that indicates a two-dimensional potential on the measurement plane. Accordingly, it is possible to perform high-resolution two-dimensional potential measurement as a result of using the measuring part (21) that is sufficiently larger than the width of an area to be measured.
摘要翻译：在磁场获取装置中，在满足z =α的测量平面上设置足够长于待测区域宽度的测量部分（21），并且沿与纵向方向垂直的X'方向进行扫描在改变角度的同时重复测量部分（21）; 在测量平面上的预定参考方向和测量部分（21）的纵向方向上形成多个角度。假设x'是X'方向上的坐标参数，则通过扫描重复获得的测量值f（x'，＆amp; thetas）被傅立叶变换，从而获得g（kx'，＆Thetas;）（其中kx' 在X方向的波数）。然后，将g（kx'，＆thetas）代入预定的二维电位获取方程，以获得表示测量平面上的二维电位的（x，y，α）。因此，作为使用足够大于测量区域的宽度的测量部件（21）的结果，可以进行高分辨率二维电位测量。

8. 发明授权

US10295617B2 Distribution analyzing device and distribution analyzing method 有权
公开(公告)号：US10295617B2
公开(公告)日：2019-05-21
申请号：US14770113
申请日：2014-02-13
申请人： Kenjiro Kimura
发明人： Kenjiro Kimura
IPC分类号： G01R33/10
摘要： A distribution analyzing device (20) includes: an obtaining unit (21) which obtains measurement data of a field measured, through a sensor sensing area, independently at each of rotation angles and at each of grid coordinate positions of the sensor sensing area; and a calculation unit (22) which calculates a distribution of the field from the measurement data, using an arithmetic expression obtained by deriving a target harmonic function, which indicates the distribution of the field, using a condition that a convolution of the target harmonic function and a shape function, which indicates a shape of a cross section of the finite sensor sensing area along a plane parallel to the measurement plane, is equal to a provisional harmonic function derived by solving the Laplace equation using the measurement data and a size of the sensor sensing area in a direction perpendicular to the measurement plane.

9. 发明申请

US20070243560A1 Method for examining kidney diseases 审中-公开
标题翻译：检查肾脏疾病的方法
公开(公告)号：US20070243560A1
公开(公告)日：2007-10-18
申请号：US11812334
申请日：2007-06-18
申请人： Masaya Yamanouchi , Akiko Honda , Hiromi Hase , Takeshi Sugaya , Kenjiro Kimura
发明人： Masaya Yamanouchi , Akiko Honda , Hiromi Hase , Takeshi Sugaya , Kenjiro Kimura
IPC分类号： G01N33/53
CPC分类号： G01N33/6893 , G01N2800/347
摘要： Method for examining kidney disease, which comprises detecting fatty acid binding protein derived from kidney tissues, which is present in specimen collected from mammal excluding Rodents. By the present method, it is possible to obtain test results which may be very important information for diagnosis of prognosis of kidney disease, that has been very difficult in the past. Based on test results obtained by the present method, it may be possible to select a suitable method for treatment of kidney disease with taking into consideration risks as to the prognosis, etc. Besides, the present method can be applied to, in addition to the kidney tissue samples, urine samples as well, so that the examination procedure can be simple and efficient.
摘要翻译：用于检查肾脏疾病的方法，其包括检测来自肾组织的脂肪酸结合蛋白，其存在于不包括啮齿动物的哺乳动物收集的标本中。通过本方法，可以获得可能是诊断肾脏疾病预后的非常重要的信息的测试结果，这在过去是非常困难的。根据本方法得到的检测结果，考虑到预后的风险等，可以选择合适的肾病治疗方法。此外，本方法除了可以应用于肾组织样本，尿液样本，使检查程序简单有效。

10. 发明授权

US09568567B2 Distribution analysis device 有权
标题翻译：分布分析装置
公开(公告)号：US09568567B2
公开(公告)日：2017-02-14
申请号：US14115650
申请日：2012-05-01
申请人： Kenjiro Kimura
发明人： Kenjiro Kimura
IPC分类号： G01R33/10 , G01R33/12 , G06F17/13 , G01R33/00
CPC分类号： G01R33/10 , G01R33/0064 , G01R33/12 , G06F17/13
摘要： A distribution analysis device analyzes a distribution of a field having a property satisfying the Laplace equation, and includes: an obtainment unit that obtains measurement data indicating the distribution of the field measured through a sensor sensing area, the sensor sensing area being an area that moves in a measurement area where the distribution of the field is measured and being an area in which the field is sensed as an aggregate; and a calculation unit that calculates analysis data indicating the distribution of the field with a higher resolution than the measurement data, using an arithmetic expression that is obtained by deriving a solution of the Laplace equation using a boundary condition that an integral of the solution of the Laplace equation in a finite interval corresponding to a size of the sensor sensing area matches the measurement data.
摘要翻译：分布分析装置分析具有满足拉普拉斯方程的性质的场的分布，并且包括：获取单元，其获得指示通过传感器感测区域测量的场的分布的测量数据，所述传感器感测区域是移动的区域在测量场的分布的测量区域中，并且是将场作为聚集体感测的区域; 以及计算单元，使用通过使用以下的边界条件导出拉普拉斯方程得到的算术表达式来计算表示具有比测量数据更高的分辨率的场的分布的分析数据：对应于传感器感测区域的大小的有限间隔内的拉普拉斯方程与测量数据匹配。

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