会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Process for resist pattern formation using positive electrodeposition
photoresist compositions
    • 使用正电沉积光致抗蚀剂组合物的抗蚀剂图案形成方法
    • US5702872A
    • 1997-12-30
    • US610237
    • 1996-03-04
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • G03F7/004G03F7/039G03F7/16G03F7/027
    • G03F7/0045G03F7/039G03F7/164G03F7/168Y10S430/12Y10S430/122
    • A positive type electrodeposition photoresist composition includes, as essential components: (A) 100 parts by weight of a polymer having carboxyl group(s) in an amount of 0.5 to 10 equivalents per kg of said polymer and optionally having hydroxyphenyl group(s) in an amount of at least 1 equivalent per kg of the polymer, or (A') a carboxyl group-containing polymer and (A") a hydroxy-phenyl group-containing polymer; (B) 5 to 150 parts by weight of a compound having at least 2 vinyl ether groups in the molecule; and (C) 0.1 to 40 parts by weight per 100 parts by weight of the total of polymer (A), or the polymer (A') and the polymer (A"), and the vinyl ether group-containing compound (B), which generates an acid when irradiated with an actinic ray. The composition is dissolved or dispersed in an aqueous medium by neutralizing the carboxyl group(s) in the polymer (A) or (A') with a basic compound. The positive type electrodeposition photoresist composition allows the forming of a fine image pattern at high resolution. A process for a resist pattern formation using such a composition is also disclosed.
    • 正型电沉积光致抗蚀剂组合物包括作为必要组分的(A)100重量份的具有羧基的聚合物,其量为每当所述聚合物为0.5至10当量,并且任选地具有羟基苯基 至少1当量/ kg聚合物或(A')含羧基聚合物和(A“)含羟基苯基的聚合物的量; (B)5〜150重量份的分子中具有至少2个乙烯基醚基的化合物; 和(C)每100重量份聚合物(A)或聚合物(A')和聚合物(A“)和含乙烯基醚基化合物(B)的总量为0.1〜40重量份 ),当用光化射线照射时产生酸。 通过用碱性化合物中和聚合物(A)或(A')中的羧基,将组合物溶解或分散在水性介质中。 正型电沉积光致抗蚀剂组合物允许以高分辨率形成精细图像图案。 还公开了使用这种组合物的抗蚀剂图案形成方法。
    • 9. 发明授权
    • Positive type electrodeposition photoresist compositions
    • 正型电沉积光致抗蚀剂组合物
    • US5527656A
    • 1996-06-18
    • US233443
    • 1994-04-26
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • G03F7/004G03F7/039G03F7/16G03C1/73
    • G03F7/0045G03F7/039G03F7/164G03F7/168Y10S430/12Y10S430/122
    • A positive type electrodeposition photoresist composition includes, as essential components: (A) 100 parts by weight of a polymer having carboxyl group(s) in an amount of 0.5 to 10 equivalents per kg of said polymer and optionally having hydroxyphenyl group(s) in an amount of at least 1 equivalent per kg of the polymer, or (A') a carboxyl group-containing polymer and (A") a hydroxyphenyl group-containing polymer; (B) 5 to 150 parts by weight of a compound having at least 2 vinyl ether groups in the molecule; and (C) 0.1 to 40 parts by weight per 100 parts by weight of the total of polymer (A), or the polymer (A') and the polymer (A"), and the vinyl ether group-containing compound (B), which generates an acid when irradiated with an actinic ray. The composition is dissolved or dispersed in an aqueous medium by neutralizing the carboxyl group(s) in the polymer (A) or (A') with a basic compound. The positive type electrodeposition photoresist composition allows the forming of a fine image pattern at high resolution. A process for a resist pattern formation using such a composition is also disclosed.
    • 正型电沉积光致抗蚀剂组合物包括作为必要组分的(A)100重量份的具有羧基的聚合物,其量为每当所述聚合物为0.5至10当量,并且任选地具有羟基苯基 或(A')含有羧基的聚合物和(A“)含羟基苯基的聚合物的量为每千克聚合物至少1当量; (B)5〜150重量份的分子中具有至少2个乙烯基醚基的化合物; 和(C)每100重量份聚合物(A)或聚合物(A')和聚合物(A“)和含乙烯基醚基化合物(B)的总量为0.1〜40重量份 ),当用光化射线照射时产生酸。 通过用碱性化合物中和聚合物(A)或(A')中的羧基,将组合物溶解或分散在水性介质中。 正型电沉积光致抗蚀剂组合物允许以高分辨率形成精细图像图案。 还公开了使用这种组合物的抗蚀剂图案形成方法。