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1. 发明授权

US07247975B2 Thin-film piezoelectric element and method of making same 有权
标题翻译：薄膜压电元件及其制造方法
公开(公告)号：US07247975B2
公开(公告)日：2007-07-24
申请号：US11078565
申请日：2005-03-14
申请人： Kenichi Tochi , Takao Noguchi , Hiroshi Yamazaki , Ken Unno , Masahiro Miyazaki , Shigeru Shoji
发明人： Kenichi Tochi , Takao Noguchi , Hiroshi Yamazaki , Ken Unno , Masahiro Miyazaki , Shigeru Shoji
IPC分类号： H01L41/08
CPC分类号： H01L41/0471 , H01L41/0477 , H01L41/083 , H01L41/1875 , H01L41/27 , H01L41/316
摘要： Provided is a thin-film piezoelectric element which reduces the influence of an oxide film left on the electrode film on the degradation of element characteristics, and a method of making the thin-film piezoelectric element. The thin-film piezoelectric element has ZrO2 as the main component of the outermost layer of the oxide film which covers the laminate. Young's modulus of the ZrO2 is 190 GPa, giving a significantly low value compared with Young's modulus of MgO, 245 GPa. Consequently, the influence of the oxide film on the reduction in the displacement magnitude of the piezoelectric film is smaller than the influence of the MgO thin film left in the conventional thin-film piezoelectric element. As a result, the thin-film piezoelectric element decreases the influence of the oxide film on the degradation of element characteristics compared with the conventional thin-film piezoelectric element.
摘要翻译：本发明提供一种能够减少留在电极膜上的氧化膜对元件特性劣化的影响的薄膜压电元件，以及制造该薄膜压电元件的方法。薄膜压电元件以覆盖层叠体的氧化膜的最外层的主要成分为ZrO 2。 ZrO 2的杨氏模量为190GPa，与MgO的杨氏模量245GPa相比，显着低得多。因此，氧化膜对压电膜的位移幅度的减小的影响小于常规薄膜压电元件中残留的MgO薄膜的影响。结果，与传统的薄膜压电元件相比，薄膜压电元件降低了氧化膜对元件特性的降低的影响。

2. 发明申请

US20050212389A1 Thin-film piezoelectric element and method of making same 有权
标题翻译：薄膜压电元件及其制造方法
公开(公告)号：US20050212389A1
公开(公告)日：2005-09-29
申请号：US11078565
申请日：2005-03-14
申请人： Kenichi Tochi , Takao Noguchi , Hiroshi Yamazaki , Ken Unno , Masahiro Miyazaki , Shigeru Shoji
发明人： Kenichi Tochi , Takao Noguchi , Hiroshi Yamazaki , Ken Unno , Masahiro Miyazaki , Shigeru Shoji
IPC分类号： H01L41/083 , H01L41/047 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/313 , H01L41/316
CPC分类号： H01L41/0471 , H01L41/0477 , H01L41/083 , H01L41/1875 , H01L41/27 , H01L41/316
摘要： Provided is a thin-film piezoelectric element which reduces the influence of an oxide film left on the electrode film on the degradation of element characteristics, and a method of making the thin-film piezoelectric element. The thin-film piezoelectric element has ZrO2 as the main component of the outermost layer of the oxide film which covers the laminate. Young's modulus of the ZrO2 is 190 GPa, giving a significantly low value compared with Young's modulus of MgO, 245 GPa. Consequently, the influence of the oxide film on the reduction in the displacement magnitude of the piezoelectric film is smaller than the influence of the MgO thin film left in the conventional thin-film piezoelectric element. As a result, the thin-film piezoelectric element decreases the influence of the oxide film on the degradation of element characteristics compared with the conventional thin-film piezoelectric element.
摘要翻译：本发明提供一种能够减少留在电极膜上的氧化膜对元件特性劣化的影响的薄膜压电元件，以及制造该薄膜压电元件的方法。薄膜压电元件以覆盖层叠体的氧化膜的最外层的主要成分为ZrO 2。 ZrO 2的杨氏模量为190GPa，与MgO的杨氏模量245GPa相比，显着低得多。因此，氧化膜对压电膜的位移幅度的减小的影响小于常规薄膜压电元件中残留的MgO薄膜的影响。结果，与传统的薄膜压电元件相比，薄膜压电元件降低了氧化膜对元件特性的降低的影响。

3. 发明授权

US07183696B2 Thin film piezoelectric element, suspension assembly, and hard disk drive 有权
标题翻译：薄膜压电元件，悬挂组件和硬盘驱动器
公开(公告)号：US07183696B2
公开(公告)日：2007-02-27
申请号：US11054427
申请日：2005-02-10
申请人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
发明人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
IPC分类号： H01L41/08
CPC分类号： H01L41/0986 , G11B5/484 , G11B5/486
摘要： A thin film piezoelectric element has a laminate including a piezoelectric film and a pair of electrode films placed so as to sandwich the piezoelectric film in between, a resin film formed so as to cover the laminate, and an electrode formed on the resin film and electrically connected to the electrode film. The resin film is formed so that a thickness of a region where the electrode is formed is larger than a thickness of a region corresponding to a displaced portion of the laminate.
摘要翻译：薄膜压电元件具有层压体，其包括压电薄膜和将压电薄膜夹在其间的一对电极薄膜，形成为覆盖层叠体的树脂薄膜和形成在树脂薄膜上的电极，连接到电极膜。形成树脂膜，使得形成电极的区域的厚度大于对应于层压体的位移部分的区域的厚度。

4. 发明授权

US07420785B2 Suspension assembly, hard disk drive, and method of manufacturing suspension assembly 有权
标题翻译：悬挂组件，硬盘驱动器和制造悬架组件的方法
公开(公告)号：US07420785B2
公开(公告)日：2008-09-02
申请号：US11054280
申请日：2005-02-10
申请人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
发明人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
IPC分类号： G11B21/24
CPC分类号： G11B5/56 , G11B5/483 , G11B5/5552
摘要： A head slider having a thin film magnetic head is mounted on a suspension assembly. The suspension assembly is comprised of a metal plate-like member, and a piezoelectric actuator for displacing the head slider relative to the suspension assembly. The piezoelectric actuator has a piezoelectric film, and a pair of electrode films placed so as to sandwich the piezoelectric film in between. The piezoelectric film and the pair of electrode films are formed in an order of one electrode film, the piezoelectric film, and the other electrode film on the plate-like member.
摘要翻译：具有薄膜磁头的磁头滑块安装在悬架组件上。悬架组件由金属板状构件和用于相对于悬架组件移位头滑块的压电致动器构成。压电致动器具有压电膜和一对电极膜，以将压电膜夹在其间。压电膜和一对电极膜按板状构件上的一个电极膜，压电膜和另一个电极膜的顺序形成。

5. 发明申请

US20050200237A1 Thin film piezoelectric element, suspension assembly, and hard disk drive 有权
标题翻译：薄膜压电元件，悬挂组件和硬盘驱动器
公开(公告)号：US20050200237A1
公开(公告)日：2005-09-15
申请号：US11054427
申请日：2005-02-10
申请人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
发明人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
IPC分类号： H01L41/09 , G11B5/48 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/23
CPC分类号： H01L41/0986 , G11B5/484 , G11B5/486
摘要： A thin film piezoelectric element has a laminate including a piezoelectric film and a pair of electrode films placed so as to sandwich the piezoelectric film in between, a resin film formed so as to cover the laminate, and an electrode formed on the resin film and electrically connected to the electrode film. The resin film is formed so that a thickness of a region where the electrode is formed is larger than a thickness of a region corresponding to a displaced portion of the laminate.
摘要翻译：薄膜压电元件具有层压体，其包括压电薄膜和将压电薄膜夹在其间的一对电极薄膜，形成为覆盖层叠体的树脂薄膜和形成在树脂薄膜上的电极，连接到电极膜。形成树脂膜，使得形成电极的区域的厚度大于对应于层压体的位移部分的区域的厚度。

6. 发明申请

US20050195531A1 Suspension assembly, hard disk drive, and method of manufacturing suspension assembly 有权
标题翻译：悬挂组件，硬盘驱动器和制造悬架组件的方法
公开(公告)号：US20050195531A1
公开(公告)日：2005-09-08
申请号：US11054280
申请日：2005-02-10
申请人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
发明人： Hiroshi Yamazaki , Ken Unno , Kenichi Tochi , Masahiro Miyazaki , Shigeru Shoji
IPC分类号： G11B5/596 , G11B5/56 , G11B21/10 , G11B21/21
CPC分类号： G11B5/56 , G11B5/483 , G11B5/5552
摘要： A head slider having a thin film magnetic head is mounted on a suspension assembly. The suspension assembly is comprised of a metal plate-like member, and a piezoelectric actuator for displacing the head slider relative to the suspension assembly. The piezoelectric actuator has a piezoelectric film, and a pair of electrode films placed so as to sandwich the piezoelectric film in between. The piezoelectric film and the pair of electrode films are formed in an order of one electrode film, the piezoelectric film, and the other electrode film on the plate-like member.
摘要翻译：具有薄膜磁头的磁头滑块安装在悬架组件上。悬架组件由金属板状构件和用于相对于悬架组件移位头滑块的压电致动器构成。压电致动器具有压电膜和一对电极膜，以将压电膜夹在其间。压电膜和一对电极膜按板状构件上的一个电极膜，压电膜和另一个电极膜的顺序形成。

7. 发明授权

US07909604B2 Root apex position detection apparatus 有权
标题翻译：根顶位置检测仪
公开(公告)号：US07909604B2
公开(公告)日：2011-03-22
申请号：US11297993
申请日：2005-12-09
申请人： Shigeru Shoji , Masahiro Otsuka
发明人： Shigeru Shoji , Masahiro Otsuka
IPC分类号： A61C19/04 , A61B5/05 , A61B5/103
CPC分类号： A61C19/04 , A61C19/042
摘要： Root apex position model data associated with electrical characteristic values between a measurement electrode and a mouth electrode in a state in which the distal end of the measurement electrode is located at a root apex position of a root canal is stored in a storage unit. A power supply applies measurement signals of 500 Hz and 2 kHz between the measurement electrode and the mouth electrode. Two different current values flowing between the measurement electrode and the mouth electrode are detected. These current values are compared with the root apex position mode data stored in the storage unit. If the root apex position data includes any data which coincides with the current values, it is detected that the distal end of the measurement electrode is located at the root apex position.
摘要翻译：在测量电极的远端位于根管的根尖位置的状态下，与测量电极和口电极之间的电特性值相关联的根顶位置模型数据被存储在存储单元中。电源在测量电极和嘴电极之间施加500 Hz和2 kHz的测量信号。检测在测量电极和嘴电极之间流动的两个不同的电流值。将这些当前值与存储在存储单元中的根顶点位置模式数据进行比较。如果根顶位置数据包括与当前值一致的任何数据，则检测到测量电极的远端位于根顶位置。

8. 发明授权

US07645685B2 Method for producing a thin IC chip using negative pressure 失效
标题翻译：使用负压制造薄IC芯片的方法
公开(公告)号：US07645685B2
公开(公告)日：2010-01-12
申请号：US11377273
申请日：2006-03-17
申请人： Masaharu Ishizuka , Shigeru Shoji
发明人： Masaharu Ishizuka , Shigeru Shoji
IPC分类号： H01L21/00
CPC分类号： H01L21/78 , B32B37/12 , B32B38/1833 , B32B38/1858 , B32B2309/68 , B32B2457/14 , H01L21/6836 , H01L2221/68327
摘要： The present invention relates to a method for bonding a first thin plate having a first adhesion surface and a first back surface and a second thin plate having a second adhesion surface and a second back surface by an adhesive, the adhesive being sandwiched between said first adhesion surface and said second adhesion surface. The method comprises the steps of: applying said adhesive to said second adhesion surface of said second thin plate; holding said first thin plate by applying negative pressure to said first back surface, wherein said first thin plate is held at said first back surface, and said first adhesion surface faces downward; holding said second thin plate by applying negative pressure to said second back surface, wherein said second thin plate is held at said second back surface, and said second adhesion surface faces upward; temporarily bonding said first thin plate and said second thin plate by putting said first and second adhesion surfaces into contact with each other, wherein said first thin plate and said second thin plate are held by negative pressure; and bonding said first thin plate and said second thin plate by curing said adhesive, wherein said first thin plate and said second thin plate are temporarily bonded.
摘要翻译：本发明涉及一种通过粘合剂粘合具有第一粘合表面和第一后表面的第一薄板和具有第二粘合表面和第二后表面的第二薄板的方法，所述粘合剂夹在所述第一粘合剂表面和所述第二粘附表面。该方法包括以下步骤：将所述粘合剂施加到所述第二薄板的所述第二粘附表面; 通过对所述第一后表面施加负压来保持所述第一薄板，其中所述第一薄板保持在所述第一后表面，并且所述第一粘合表面面向下; 通过对所述第二后表面施加负压来保持所述第二薄板，其中所述第二薄板保持在所述第二后表面，并且所述第二粘合表面面向上; 通过使所述第一和第二粘合表面彼此接触来临时粘合所述第一薄板和所述第二薄板，其中所述第一薄板和所述第二薄板由负压保持; 以及通过固化所述粘合剂来粘合所述第一薄板和所述第二薄板，其中所述第一薄板和所述第二薄板暂时粘合。

9. 发明授权

US07543498B2 Spring member for acceleration sensor, acceleration sensor and magnetic disk drive apparatus 失效
标题翻译：加速度传感器，加速度传感器和磁盘驱动装置的弹簧构件
公开(公告)号：US07543498B2
公开(公告)日：2009-06-09
申请号：US11549820
申请日：2006-10-16
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： G01P15/11
CPC分类号： G01P15/105 , G01P15/0891 , G01P15/18
摘要： A spring member used in an acceleration sensor, for supporting weight members that cooperate as magnetic field generation members or magnetic field detection sensors includes at least one strip-shaped plate spring with a fulcrum and support sections separated from the fulcrum for supporting the weight members. The at least one strip-shaped plate spring is configured to produce a bending stress in response to an external force applied so as to displace the weight members.
摘要翻译：用于加速度传感器的用于支撑作为磁场产生构件或磁场检测传感器配合的配重构件的弹簧构件包括至少一个具有支点的带状板簧和与用于支撑配重构件的支点分离的支撑部分。所述至少一个带状板簧构造成响应于施加的外力而产生弯曲应力，以便使所述配重构件移位。

10. 发明授权

US07501928B2 Current sensor 有权
标题翻译：电流传感器
公开(公告)号：US07501928B2
公开(公告)日：2009-03-10
申请号：US11281540
申请日：2005-11-18
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： H01L43/00
CPC分类号： G01R15/205
摘要： The present invention provides a compact current sensor capable of measuring a current to be detected with high precision. A current sensor includes: a first magnetoresistive element including a plurality of element patterns which extend in an X axis direction at a first level, are disposed so as to be adjacent to each other in a Y axis direction orthogonal to the X axis direction, and are connected in parallel with each other; and a thin film coil which includes a plurality of winding body portions extending in the X axis direction in correspondence with the element patterns and winds at a second level different from the first level, and applies a current magnetic field to each of the element patterns when a current to be detected is supplied. Therefore, the absolute value of the resistance change amount in the magnetoresistive element increases. While realizing a compact configuration, the current to be detected, flowing in the thin film coil can be measured with high precision.
摘要翻译：本发明提供一种能够以高精度测量待检测电流的紧凑型电流传感器。电流传感器包括：第一磁阻元件，其包括沿X轴方向在第一水平方向延伸的多个元件图案，在与X轴方向正交的Y轴方向上彼此相邻配置;以及彼此并联; 以及薄膜线圈，其包括在与所述元件图案相对应的X轴方向上延伸的多个绕组主体部分和与所述第一电平不同的第二电平的风，并且当每个所述元件图案上施加电流磁场时，提供要检测的电流。因此，磁阻元件中的电阻变化量的绝对值增加。在实现紧凑的结构的同时，可以高精度地测量流过薄膜线圈的待检测电流。

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