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1. 发明申请

US20090190117A1 Exposure apparatus, manufacturing method and supporting method thereof 审中-公开
标题翻译：曝光装置及其制造方法及其辅助方法
公开(公告)号：US20090190117A1
公开(公告)日：2009-07-30
申请号：US12320267
申请日：2009-01-22
申请人： Kazuya Ono , Toshimasa Shimoda , Yoichi Arai , Jin Nishikawa
发明人： Kazuya Ono , Toshimasa Shimoda , Yoichi Arai , Jin Nishikawa
IPC分类号： G03B27/54
CPC分类号： G03F7/709 , G03F7/70833
摘要： An exposure apparatus includes an illumination optical system that guides illumination light to a mask; a projection optical system that projects the pattern irradiated with the illumination light, onto a substrate; and a supporting device that integrally suspendingly supports at least part of the illumination optical system and the projection optical system, with a supporting member having a flexible structure.
摘要翻译：曝光装置包括将照明光引导到面罩的照明光学系统; 将照射光照射的图案投影到基板上的投影光学系统; 以及支撑装置，其利用具有柔性结构的支撑构件一体地悬挂地支撑照明光学系统和投影光学系统的至少一部分。

2. 发明申请

US20090147228A1 Exposure apparatus, manufacturing method thereof, and maintenance method of exposure apparatus 审中-公开
标题翻译：曝光装置及其制造方法以及曝光装置的维护方法
公开(公告)号：US20090147228A1
公开(公告)日：2009-06-11
申请号：US12314411
申请日：2008-12-10
申请人： Kazuya Ono , Toshimasa Shimoda , Yoichi Arai
发明人： Kazuya Ono , Toshimasa Shimoda , Yoichi Arai
IPC分类号： G03B27/42
CPC分类号： G03F7/70833 , G03F7/70808 , G03F7/70975
摘要： A projection optical system PL is used to project an image of a pattern. A manufacturing method of an exposure apparatus includes: a positioning step of positioning the projection optical system at a predetermined position; and a support step of supporting the positioned projection optical system. The positioning step includes a step of moving the projection optical system upward from below at the time of positioning.
摘要翻译：投影光学系统PL用于投影图案的图像。曝光装置的制造方法包括：将投影光学系统定位在预定位置的定位步骤; 以及支撑定位的投影光学系统的支撑步骤。定位步骤包括在定位时将投影光学系统从下方向上移动的步骤。

3. 发明申请

US20060285092A1 Exposure apparatus and device fabrication method 审中-公开
公开(公告)号：US20060285092A1
公开(公告)日：2006-12-21
申请号：US11412079
申请日：2006-04-27
申请人： Kazuya Ono
发明人： Kazuya Ono
IPC分类号： G03B27/52 , G03B27/42 , G01J1/00
CPC分类号： G03F7/706 , G03F7/70266 , G03F7/70341 , G03F7/70591 , G03F7/707 , G03F7/70716 , G03F7/70825 , G03F7/7085
摘要： An exposure apparatus for forming a predetermined pattern on a substrate by using exposure light, includes a stage apparatus which is movable with respect to an optical axis of the exposure light; a light-transmissive member provided at the stage apparatus, wherein a liquid is supplied on an upper surface of the light-transmissive member; and a measurement device which is settable below the light-transmissive member when measurement using the measurement device is performed. Leakage or entrance of a liquid used for exposure into an optical measurement device such as a wavefront aberration measurement device can be prevented, thereby enabling preferable optical adjustment such as imaging performance or optical characteristics.

4. 发明申请

US20060126045A1 Coupling apparatus, exposure apparatus, and device fabricating method 审中-公开
公开(公告)号：US20060126045A1
公开(公告)日：2006-06-15
申请号：US11350937
申请日：2006-02-10
申请人： Kazuya Ono , Yuichi Shibazaki
发明人： Kazuya Ono , Yuichi Shibazaki
IPC分类号： G03B27/42
CPC分类号： G03F7/70341 , G03F7/70833
摘要： An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.

5. 发明授权

US06724466B2 Stage assembly including a damping assembly 失效
标题翻译：舞台组合包括阻尼组件
公开(公告)号：US06724466B2
公开(公告)日：2004-04-20
申请号：US10107663
申请日：2002-03-26
申请人： Kazuya Ono , Andrew J. Hazelton
发明人： Kazuya Ono , Andrew J. Hazelton
IPC分类号： G03B2758
CPC分类号： G03F7/70766 , G03F7/70716
摘要： A stage assembly (10) for moving and positioning a device (30) includes a stage (14), a stage mover assembly (16), a device table (18), a table mover assembly (20) and a damping assembly (22). The table mover assembly (20) moves the device table (18) along a Z axis, about an X axis and about a Y axis relative to the stage (14) and generates reaction forces. The damping assembly (22) is coupled to the table mover assembly (20). Uniquely, the damping assembly (22) reduces the reaction forces created by the table mover assembly (20) that are transferred to the stage (14).
摘要翻译：用于移动和定位装置（30）的平台组件（10）包括台架（14），平台移动器组件（16），装置台（18），台动机组件（20）和阻尼组件（22））。台式移动器组件（20）沿Z轴围绕X轴移动设备台（18），并相对于平台（14）绕Y轴移动并产生反作用力。阻尼组件（22）联接到台式推动器组件（20）。唯一地，阻尼组件（22）减小了由移动器组件（20）产生的反作用力，这些反作用力被传递到载物台（14）。

6. 发明授权

US06333572B1 Article positioning apparatus and exposing apparatus having the article positioning apparatus 有权
标题翻译：具有物品定位装置的物品定位装置和曝光装置
公开(公告)号：US06333572B1
公开(公告)日：2001-12-25
申请号：US09702887
申请日：2000-11-01
申请人： Kazuya Ono
发明人： Kazuya Ono
IPC分类号： B65G4907
CPC分类号： G03F7/70716 , G03F9/70
摘要： There is disclosed an article positioning apparatus for positioning an article composed of an electric conductive material over a predetermined base, the apparatus comprising: levitating means for levitating the article over the base; driving force generating means including current generating means for inducing a current in the article and magnetic field generating means for generating a magnetic field in a direction perpendicular to the current induced by the current generating means, and the driving force generating means being for generating a driving force composed of Lorentz force to the article in the direction perpendicular to the current and the magnetic field; and displacement detecting means for detecting a displacement of the article, wherein the article is positioned through the driving force generating means in accordance with a result detected by the displacement detecting means.
摘要翻译：公开了一种用于将由导电材料构成的制品定位在预定基底上的物品定位装置，该装置包括：用于将物品悬浮在基座上的悬浮装置; 驱动力产生装置，包括用于产生物品中的电流的电流产生装置和用于在垂直于由电流产生装置感应的电流的方向上产生磁场的磁场产生装置，并且驱动力产生装置用于产生驱动力由洛伦兹力组成的物品在垂直于电流和磁场的方向上; 以及位移检测装置，用于检测物品的位移，其中根据由位移检测装置检测到的结果，物品通过驱动力产生装置定位。

7. 发明授权

US5780943A Exposure apparatus and method 失效
标题翻译：曝光装置和方法
公开(公告)号：US5780943A
公开(公告)日：1998-07-14
申请号：US831940
申请日：1997-04-02
申请人： Kazuya Ono
发明人： Kazuya Ono
IPC分类号： F16F15/03 , G03F7/20 , H01J37/20 , H01L21/68 , H02N15/00 , H02K41/00
CPC分类号： G03F7/70691 , F16F15/035 , H01J37/20 , H01L21/682 , H02N15/00 , H01J2237/202 , H01J2237/3175
摘要： A stage apparatus has a pair of permanent-magnets fixed to a magnet holder and a coil fixed to a coil holder and positioned between the permanent-magnets. When electric current is supplied to the coil, an attractive force is generated between the coil and the upper permanent-magnet, while a repulsive force is generated between the coil and the lower permanent-magnet, thereby moving the coil holder in the vertical direction relative to the magnet holder. When the attractive force and repulsive force act on the coil simultaneously, the resultant force has high linearity with respect to the electric current because the attractive force and the repulsive force cancel the nonlinear characteristics of each other.
摘要翻译：舞台装置具有固定到磁体保持器的一对永磁体和固定到线圈架并且定位在永磁体之间的线圈。当向线圈提供电流时，在线圈和上永磁体之间产生吸引力，同时在线圈和下永磁体之间产生排斥力，从而使线圈架在垂直方向相对移动到磁铁架。当吸引力和排斥力同时作用于线圈时，合力相对于电流具有高线性度，因为吸引力和排斥力抵消了彼此的非线性特性。

8. 发明授权

US5598927A Packaging container 失效
标题翻译：包装容器
公开(公告)号：US5598927A
公开(公告)日：1997-02-04
申请号：US442107
申请日：1995-05-16
申请人： Tadakatsu Ikenoya , Kazuya Ono
发明人： Tadakatsu Ikenoya , Kazuya Ono
IPC分类号： B65D5/40 , B29D22/00 , B31B1/74 , B32B27/08 , B65B51/00 , B65D5/42 , B65D5/56 , B65D65/40 , B65D85/72 , B65D3/22
CPC分类号： B65D5/563 , B31B1/00 , B32B27/08 , B65D5/4279 , B31B2201/621
摘要： A packaging container having an enhanced sealing performance includes a packaging material, an outside strip and a strip tape. The opposite side edges of the packaging material are overlapped with each other so that the outermost layer and the innermost layer of the packaging material face each other. The outside strip is interposed between the outermost layer and the innermost layer and is fused and joined with these layers so that a longitudinal sealing portion is formed. The outside strip has an outside layer and an inside layer. The strip tape is placed on the inner surface of the packaging container along the sealing portion, and is joined thereto by heat fusion. The innermost layer of the packaging material and the outside layer of the outside strip are made of a non-olefin flavor-retaining resin, and the outermost layer of the packaging material and the inside layer of the outside strip are made of a polyolefin resin. Since portions to be joined at the longitudinal sealing portion are both polyolefin, an enhanced sealing performance can be obtained.
摘要翻译：具有增强的密封性能的包装容器包括包装材料，外部条带和剥离带。包装材料的相对侧边缘彼此重叠，使得包装材料的最外层和最内层彼此面对。外侧带介于最外层和最内层之间，并与这些层熔合并接合，从而形成纵向密封部。外部带有外层和内层。带状带沿密封部分放置在包装容器的内表面上，并通过热熔接合在一起。包装材料的最内层和外带的外层由非烯烃香味保持树脂制成，包装材料的最外层和外带的内层由聚烯烃树脂制成。由于在纵向密封部分处连接的部分都是聚烯烃，因此可以获得增强的密封性能。

9. 发明授权

US4966928A Epoxy resin based powder coating composition 失效
标题翻译：环氧树脂粉末涂料组合物
公开(公告)号：US4966928A
公开(公告)日：1990-10-30
申请号：US232989
申请日：1988-08-17
申请人： Katugi Kitagawa , Ichiro Akutagawa , Kazuya Ono
发明人： Katugi Kitagawa , Ichiro Akutagawa , Kazuya Ono
IPC分类号： C09D5/03 , C08G59/42 , C09D163/00
CPC分类号： C08G59/4215 , C09D163/00
摘要： An epoxy resin based powder coating composition is disclosed, comprising an epoxy resin, a reaction product of dicyclopentadiene and maleic anhydride, and a cure accelerator.The coating composition may further comprise an aromatic acid anhydride based curing agent, an impact modifier and a surface smoothing agent.The coating composition has stable powder characteristic and provides good heat resistance and electrical insulation.
摘要翻译：公开了一种环氧树脂基粉末涂料组合物，其包含环氧树脂，二环戊二烯与马来酸酐的反应产物和固化促进剂。涂料组合物可以进一步包括基于芳族酸酐的固化剂，抗冲改性剂和表面平滑剂。涂料组合物具有稳定的粉末特性，提供良好的耐热性和电绝缘性。

10. 发明授权

US09312159B2 Transport apparatus and exposure apparatus 有权
标题翻译：运输设备和曝光装置
公开(公告)号：US09312159B2
公开(公告)日：2016-04-12
申请号：US12795939
申请日：2010-06-08
申请人： Kazuya Ono
发明人： Kazuya Ono
IPC分类号： H01L21/677 , G03B27/52 , H01L21/67 , G03F7/20
CPC分类号： H01L21/67748 , G03B27/52 , G03F7/7075 , H01L21/67126
摘要： A substrate is transported between a first space and a second space, which are separated by a partition wall, through an opening portion formed in the partition wall. A transport apparatus includes a support device having a support portion which supports the substrate, the support device being provided so as to block the opening portion while a clearance between the partition wall and the support device is formed, the support device moving the support portion from a state where the support portion faces the first space to a state where the support portion faces the second space; and an adjustment device which adjusts an amount of the clearance, thereby suppressing the movement of fluid from the first space to the second space.
摘要翻译：基板通过形成在分隔壁上的开口部分在第一空间和第二空间之间传输，第一空间和第二空间被分隔壁隔开。一种输送装置，具备支撑装置，该支撑装置具有支撑基板的支撑部，支撑装置设置成在形成分隔壁与支撑装置之间的间隙的同时阻挡开口部，支撑装置将支撑部从支撑部分面向第一空间到支撑部分面向第二空间的状态; 以及调节装置，其调节间隙的量，从而抑制流体从第一空间到第二空间的移动。

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