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1. 发明授权

US5925973A Electronic component and method for producing the same 失效
标题翻译：电子元件及其制造方法
公开(公告)号：US5925973A
公开(公告)日：1999-07-20
申请号：US787362
申请日：1997-01-22
申请人： Kazuo Eda , Yoshihiro Tomita , Akihiro Kanaboshi , Masato Sugimoto
发明人： Kazuo Eda , Yoshihiro Tomita , Akihiro Kanaboshi , Masato Sugimoto
IPC分类号： C04B37/00 , H01L21/02 , H01L27/12 , H01L41/04 , H01L41/18 , H03H3/02 , H03H3/08 , H03H9/10 , H03H9/17 , H03H9/25 , H01L41/08
CPC分类号： H03H9/0595 , H01L41/053 , H01L41/312 , H03H3/02 , H03H3/08 , H03H9/1035 , Y10T29/42
摘要： An electronic component of the present invention includes a first substrate, a second substrate, a first conductive layer constituting a terminal electrode on a first surface of the first substrate, and a first insulating layer formed on the first conductive layer, wherein the first insulating layer and the second substrate are directly bonded to each other by at least one bond selected from the group consisting of a hydrogen bond and a covalent bond.
摘要翻译：本发明的电子元件包括第一基板，第二基板，构成第一基板的第一表面上的端子电极的第一导电层和形成在第一导电层上的第一绝缘层，其中第一绝缘层并且第二底物通过选自氢键和共价键的至少一个键直接键合。

2. 发明授权

US5771555A Method for producing an electronic component using direct bonding 失效
标题翻译：使用直接接合制造电子部件的方法
公开(公告)号：US5771555A
公开(公告)日：1998-06-30
申请号：US433687
申请日：1995-05-04
申请人： Kazuo Eda , Yoshihiro Tomita , Akihiro Kanaboshi , Masato Sugimoto
发明人： Kazuo Eda , Yoshihiro Tomita , Akihiro Kanaboshi , Masato Sugimoto
IPC分类号： C04B37/00 , H01L21/02 , H01L27/12 , H01L41/04 , H01L41/18 , H03H3/02 , H03H3/08 , H03H9/10 , H03H9/17 , H03H9/25 , H01L41/22
CPC分类号： H03H9/0595 , H01L41/053 , H01L41/312 , H03H3/02 , H03H3/08 , H03H9/1035 , Y10T29/42
摘要： An electronic component includes a first substrate and a second substrate. A first conductive layer constituting a terminal electrode is formed on a first surface of the first substrate. A first insulating layer is formed on the first conductive layer. The first insulating layer and the second substrate are directly bonded to each other by at least one bond selected from the group consisting of a hydrogen bond and a covalent bond.
摘要翻译：电子部件包括第一基板和第二基板。构成端子电极的第一导电层形成在第一基板的第一表面上。在第一导电层上形成第一绝缘层。第一绝缘层和第二基板通过选自由氢键和共价键组成的组中的至少一个键彼此直接键合。

3. 发明授权

US6018211A Surface acoustic wave device and method of manufacturing the same 失效
标题翻译：表面声波装置及其制造方法
公开(公告)号：US6018211A
公开(公告)日：2000-01-25
申请号：US921499
申请日：1997-09-02
申请人： Akihiro Kanaboshi , Masato Sugimoto , Yutaka Taguchi , Kazuo Eda
发明人： Akihiro Kanaboshi , Masato Sugimoto , Yutaka Taguchi , Kazuo Eda
IPC分类号： H03H9/05 , H01L41/08
CPC分类号： H03H9/1092
摘要： A surface acoustic wave device is manufactured by directly or indirectly bonding a lid to a substrate having a surface acoustic wave element to seal the element under the lid. The lid is made of at least one material selected from the group comprising lithium niobate, lithium tantalete, lithium borate, glass and quartz. The substrate is made of at least one material selected from the group comprising quartz, lithium niobate, lithium tantalete and lithium borate.
摘要翻译：通过将盖直接或间接地接合到具有表面声波元件的基板上来密封盖下的元件来制造表面声波装置。该盖由选自铌酸锂，钽酸锂，硼酸锂，玻璃和石英的组中的至少一种材料制成。衬底由选自石英，铌酸锂，钽酸锂和硼酸锂的组中的至少一种材料制成。

4. 发明授权

US06270202B1 Liquid jetting apparatus having a piezoelectric drive element directly bonded to a casing 失效
标题翻译：液体喷射装置具有直接结合到壳体的压电驱动元件
公开(公告)号：US06270202B1
公开(公告)日：2001-08-07
申请号：US09064848
申请日：1998-04-23
申请人： Akihiko Namba , Yoshihiro Tomita , Tetsuyoshi Ogura , Osamu Kawasaki , Masato Sugimoto , Katsumi Imada , Atsushi Komatsu , Kazuo Eda
发明人： Akihiko Namba , Yoshihiro Tomita , Tetsuyoshi Ogura , Osamu Kawasaki , Masato Sugimoto , Katsumi Imada , Atsushi Komatsu , Kazuo Eda
IPC分类号： B41J2045
CPC分类号： B41J2/1623 , B41J2/14282 , B41J2/1614 , B41J2/1626 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1646 , B41J2202/03
摘要： A liquid jetting apparatus has a concave casing having an opened flat face, and a piezoelectric drive element for at least partly sealing the opened flat face to form a liquid reservoir to store a liquid, such as ink. The reservoir has a liquid injection port for injecting a liquid and a liquid jet port for jetting the stored liquid. The piezoelectric drive element is directly bonded to the open flat face.
摘要翻译：液体喷射装置具有开口的平坦面的凹形外壳和用于至少部分地密封打开的平坦表面以形成液体储存器以储存诸如墨水的液体的压电驱动元件。储存器具有用于喷射液体的液体注入口和用于喷射储存液体的液体喷射口。压电驱动元件直接接合到开口平面上。

5. 发明授权

US6098460A Acceleration sensor and shock detecting device using the same 失效
标题翻译：加速度传感器和使用其的冲击检测装置
公开(公告)号：US6098460A
公开(公告)日：2000-08-08
申请号：US727302
申请日：1996-10-08
申请人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
发明人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： G01R31/26 , G01L5/00 , G01P1/12 , G01P15/08 , G01P15/09 , G01R31/28 , G01R31/30 , G01R31/317 , H01L21/66
CPC分类号： G01P15/0891 , G01L5/0052 , G01P1/127 , G01P15/0802 , G01P15/0922 , G01R31/2834 , G01R31/30 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49789
摘要： A small accelaration sensor which is highly sensitive over a large frequency region and which varies little in characteristics such as sensitivity. A piezoelectric element is formed by connecting two main faces of retangular LiNbO.sub.3 piezoelectric substrates, in which the polarization axes are directed oppositely. Supporters comprising LiNbO.sub.3 directly connected to one end of the piezoelectric element. Eletrodes of chromium-gold being 0.2 .mu.m are thick are successively connected to the two main faces of the piozoelectric element and to the supporters, thus to produce a cantilever structure bimorph electromechanical transducer.
摘要翻译：一种小型加速传感器，在大频率区域内具有高灵敏度，灵敏度等特性变化不大。压电元件通过连接偏振轴相对地指向的矩形LiNbO 3压电基板的两个主面而形成。包含直接与压电元件的一端连接的LiNbO 3的支撑体。铬 - 金的0.2微米厚的铁素体连续地连接到波氮元素的两个主面和支撑体上，从而产生悬臂结构双压电晶片机电换能器。

6. 发明授权

US06615465B2 Method for producing an acceleration sensor 失效
标题翻译：加速度传感器的制造方法
公开(公告)号：US06615465B2
公开(公告)日：2003-09-09
申请号：US09573542
申请日：2000-05-19
申请人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
发明人： Tetsuro Otsuchi , Masato Sugimoto , Tetsuyoshi Ogura , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H04R1700
CPC分类号： G01P15/0891 , G01L5/0052 , G01P1/127 , G01P15/0802 , G01P15/0922 , G01R31/2834 , G01R31/30 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49789
摘要： A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two opposing main surfaces. The piezoelectric element is formed by directly connecting one of the main surfaces of one of the at least two piezoelectric substrates with an opposing one of the main surfaces of another one of the at least two piezoelectric substrates. Supporters are provided to support the electromechanical transducer and are directly connected to the at least two piezoelectric substrates composing the piezoelectric element. Electrodes that extend continuously from the unconnected main surfaces of the at least two piezoelectric substrates composing the piezoelectric element to surfaces of the supporters are then formed.
摘要翻译：一种用于制造包括具有压电元件的机电换能器的加速度传感器的方法包括提供至少两个压电基片，其中每个具有两个相对的主表面。压电元件通过将至少两个压电基片之一的主表面中的一个直接连接到至少两个压电基片中另一个的相对的一个主表面而形成。提供支撑器以支持机电换能器并且直接连接到构成压电元件的至少两个压电基板。然后形成从构成压电元件的至少两个压电基板的未连接的主表面连续延伸到支撑体的表面的电极。

7. 发明授权

US06243933B1 Piezoelectric resonator and method for fabricating the same 有权
标题翻译：压电谐振器及其制造方法
公开(公告)号：US06243933B1
公开(公告)日：2001-06-12
申请号：US09303682
申请日：1999-05-03
申请人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
发明人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H04R1700
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02031 , H03H9/0207 , H03H9/176 , Y10T29/42 , Y10T29/49004
摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要翻译：对于两个压电单晶板制备具有反向畴的晶片，并且通过直接接合而没有任何粘合剂制备大约相同的厚度。在晶片的两个主平面上形成驱动电极，具有反向的畴，以提供压电谐振器。具有反极化结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，并且抑制具有反向偏振的畴的厚度的散射。在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。因此，以简单的方式抑制杂散模式。

8. 发明授权

US5994821A Displacement control actuator 失效
标题翻译：位移控制执行器
公开(公告)号：US5994821A
公开(公告)日：1999-11-30
申请号：US978422
申请日：1997-11-25
申请人： Katsumi Imada , Tetsuro Otsuchi , Masato Sugimoto , Yoshihiro Tomita , Osamu Kawasaki
发明人： Katsumi Imada , Tetsuro Otsuchi , Masato Sugimoto , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H01L41/09 , H01L41/04
CPC分类号： H01L41/094
摘要： Rectangular piezoelectric substrates each of which has main surfaces opposed to each other, measures 50 .mu.m thick by 1 mm wide by 8 mm long, and is made of lithium niobate (LiNbO.sub.3), are directly bonded on the main surfaces so that their axes of polarization are set in directions reverse to each other, thereby composing a piezoelectric element. Electrodes which are 0.2 .mu.m thick and made of chromium-nickel are formed on the two main surfaces of the piezoelectric element opposed to each other, thereby resulting in a precision displacement control actuator of a bimorph type mechanical-electrical converter element. This configuration makes it possible to provide a compact precision displacement control actuator which has a large displacement and extremely small variations of characteristics such as displacement and resonance frequency.
摘要翻译：矩形压电基板各自具有彼此相对的主表面，其厚度为50μm厚×1mm×8mm长，由铌酸锂（LiNbO 3）构成，直接接合在主表面上，使得它们的轴线极化被设置在彼此相反的方向上，从而构成压电元件。在压电元件的两个主表面上形成厚度为0.2μm，由铬镍制成的电极，从而形成双压电晶片式机电转换元件的精密位移控制致动器。这种构造使得可以提供一种紧凑的精确位移控制致动器，其具有大的位移和极小的位移和共振频率等特性的变化。

9. 发明授权

US5929555A Piezoelectric resonator and method for fabricating the same 失效
标题翻译：压电谐振器及其制造方法
公开(公告)号：US5929555A
公开(公告)日：1999-07-27
申请号：US834207
申请日：1997-04-15
申请人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
发明人： Masato Sugimoto , Katsu Takeda , Yoshihiro Tomita , Osamu Kawasaki
IPC分类号： H03H3/04 , H03H9/02 , H03H9/17 , H03H9/56 , H01L41/08
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02031 , H03H9/0207 , H03H9/176 , Y10T29/42 , Y10T29/49004
摘要： A wafer with a reversed domain is prepared for two piezoelectric single crystal plates 11 and 12 having about the same thickness as each other by using direct bonding without any adhesive. Then, driving electrodes 13 are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reverses polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要翻译：通过使用没有任何粘合剂的直接粘合，为具有彼此具有大致相同厚度的两个压电单晶板11和12制备具有反向畴的晶片。然后，驱动电极13形成在具有反向域的晶片的两个主平面上，以提供压电谐振器。具有反转偏振结构和使用基波振荡的奇数振动模式的压电谐振器具有其厚度的波长，抑制具有反向偏振的畴的厚度的散射。在直接接合中，两个压电单晶板的自发极化的轴线彼此相反，并且除偏振轴之外的结晶轴有意地以不同于零的角度移动。因此，以简单的方式抑制杂散模式。

10. 发明授权

US06621194B1 Piezoelectric element having thickness shear vibration and mobile communication device using the same 失效
标题翻译：具有厚度剪切振动的压电元件和使用其的移动通信装置
公开(公告)号：US06621194B1
公开(公告)日：2003-09-16
申请号：US09710472
申请日：2000-11-10
申请人： Masato Sugimoto , Tetsuro Otsuchi , Katsunori Moritoki
发明人： Masato Sugimoto , Tetsuro Otsuchi , Katsunori Moritoki
IPC分类号： H01L4104
CPC分类号： H03H9/177 , H03H9/02031 , H03H9/02157
摘要： A piezoelectric element includes a piezoelectric substrate formed of a piezoelectric material and a pair of electrodes formed on a first principal plane and a second principal plane of the piezoelectric substrate, wherein thickness shear vibration occurs, and the vibration direction of the thickness shear vibration is nonparallel to the side walls of the piezoelectric substrate.
摘要翻译：压电元件包括由压电材料形成的压电基板和形成在压电基板的第一主平面和第二主平面上的一对电极，其中发生厚度剪切振动，并且厚度剪切振动的振动方向不平行到压电基板的侧壁。

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