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    • 5. 发明授权
    • Semiconductor integrated circuit device forming on a common substrate
MISFETs isolated by a field oxide and bipolar transistors isolated by a
groove
    • 在公共衬底上形成的半导体集成电路器件通过由沟槽隔离的场氧化物和双极晶体管隔离的MISFET
    • US5214302A
    • 1993-05-25
    • US807411
    • 1991-12-13
    • Akihisa UchidaKeiichi HigetaNobuo TambaMasanori OdakaKatsumi Ogiue
    • Akihisa UchidaKeiichi HigetaNobuo TambaMasanori OdakaKatsumi Ogiue
    • H01L27/06H01L27/11H01L29/732
    • H01L29/7325H01L27/0623H01L27/1112
    • A semiconductor integrated circuit device having a structure in which each of the following regions, that is, a first region for forming the base and emitter regions of each of the bipolar transistors, a second region for forming the collector lead-out region of the bipolar transistor, and a third region for forming each of the MISFETs, is projected from the main surface of a semiconductor substrate, whereby it is possible to effect isolation between the MISFETs and between these MISFETs and the bipolar transistors with the same isolation structure and in the same manufacturing step as those for the isolation between the bipolar transistors. In this device, furthermore, the base region of the bipolar transistor is electrically and self-alignedly connected to a base electrode which is formed over the main surface so as to surround the emitter region. The bipolar transistor is characterized as a self-alignment transistor and that the insulating side wall spacers corresponding to the gate and base (emitter) electrodes are formed by a same lever.
    • 一种半导体集成电路器件,具有以下结构,其中以下各个区域,即用于形成每个双极晶体管的基极和发射极区域的第一区域,用于形成双极性的集电极导出区域的第二区域 晶体管和用于形成每个MISFET的第三区域从半导体衬底的主表面突出,由此可以实现MISFET之间以及这些MISFET与具有相同隔离结构的双极晶体管之间的隔离,并且在 与双极晶体管之间的隔离相同的制造步骤。 此外,在该器件中,双极晶体管的基极区域电自自对准地连接到形成在主表面上以围绕发射极区域的基极。 双极晶体管的特征在于自对准晶体管,并且与栅极和基极(发射极)电极对应的绝缘侧壁间隔物由相同的杆形成。