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    • 7. 发明申请
    • Optical semiconductor devices on InP substrate
    • InP衬底上的光学半导体器件
    • US20070051937A1
    • 2007-03-08
    • US11500292
    • 2006-08-08
    • Katsumi KishinoIchiro NomuraKoshi TamamuraHitoshi Nakamura
    • Katsumi KishinoIchiro NomuraKoshi TamamuraHitoshi Nakamura
    • H01L29/06
    • H01S5/347B82Y20/00H01L31/0296H01L31/035236H01L33/06H01L33/28H01S5/0218H01S2304/02
    • The present invention aims at providing a structure in which a high p-type carrier concentration of 1×1017 cm−3 or more is obtained in a material in which, although it shows normally p-type conductivity, a carrier concentration smaller than 1×1017 cm−3 is only obtained. Also, the present invention aims at providing highly reliable semiconductor element and device each of which has excellent characteristics such as light emitting characteristics and a long lifetime. Each specific layer, i.e., each ZnSe0.53Te0.47 layer (2ML) is inserted between host layers, i.e., Mg0.5Zn0.29Cd0.21Se layers (each having 10ML (atomic layer) thickness) each of which is lattice matched to an InP substrate. In this case, each specific layer in which a sufficient carrier concentration of 1×1018 cm−3 or more is obtained when a single layer is inserted at suitable intervals. As a result, a sufficient hole concentration of 1×1017 cm−3 or more is obtained in the overall crystal in a material in which a hole concentration smaller than 1×1017 cm−3 has been only conventionally obtained.
    • 本发明的目的在于提供一种结构,其中在其中显示出1×10 17 -3 -3以上的高p型载流子浓度的材料中获得 通常是p型导电性,仅获得小于1×10 17 cm -3的载流子浓度。 另外,本发明的目的在于提供高度可靠的半导体元件和器件,其各自具有优异的特性,例如发光特性和长寿命。 每个特定层,即每个ZnSe 0.53 Te 0.47层(2ML)被插入到主体层之间,即Mg 0.5 Zn 2+ 每个都具有与InP衬底晶格匹配的Se层(每个具有10ML(原子层)厚度)。 在这种情况下,当以适当的间隔插入单层时,获得其中足够的载流子浓度为1×10 18 cm -3以上的特定层。 结果,在其中空穴浓度小于1×10 6Ω的材料中,在整个晶体中获得足够的空穴浓度为1×10 17 cm -3以上的空穴浓度。 只有传统上获得了17厘米-3 -3。
    • 8. 发明授权
    • Optical semiconductor devices on InP substrate
    • InP衬底上的光学半导体器件
    • US07772586B2
    • 2010-08-10
    • US11500292
    • 2006-08-08
    • Katsumi KishinoIchiro NomuraKoshi TamamuraHitoshi Nakamura
    • Katsumi KishinoIchiro NomuraKoshi TamamuraHitoshi Nakamura
    • H01L33/00
    • H01S5/347B82Y20/00H01L31/0296H01L31/035236H01L33/06H01L33/28H01S5/0218H01S2304/02
    • The present invention aims at providing a structure in which a high p-type carrier concentration of 1×1017 cm−3 or more is obtained in a material in which, although it shows normally p-type conductivity, a carrier concentration smaller than 1×1017 cm−3 is only obtained. Also, the present invention aims at providing highly reliable semiconductor element and device each of which has excellent characteristics such as light emitting characteristics and a long lifetime.Each specific layer, i.e., each ZnSe0.53Te0.47 layer (2 ML) is inserted between host layers, i.e., Mg0.5Zn0.29Cd0.21Se layers (each having 10 ML (atomic layer) thickness) each of which is lattice matched to an InP substrate. In this case, each specific layer in which a sufficient carrier concentration of 1×1018 cm−3 or more is obtained when a single layer is inserted at suitable intervals. As a result, a sufficient hole concentration of 1×1017 cm−3 or more is obtained in the overall crystal in a material in which a hole concentration smaller than 1×1017 cm−3 has been only conventionally obtained.
    • 本发明的目的在于提供一种结构,其中虽然其表现出正常的p型导电性,但载流子浓度小于1×10 7的材料,其中获得1×1017cm-3以上的高p型载流子浓度 仅获得1017厘米-3。 另外,本发明的目的在于提供高度可靠的半导体元件和器件,其各自具有优异的特性,例如发光特性和长寿命。 每个特定层,即每个ZnSe0.53Te0.47层(2ML)被插入在主层之间,即Mg0.5Zn0.29Cd0.21Se层(每层具有10ML(原子层)厚度),每层具有格子匹配 到InP衬底。 在这种情况下,当以适当的间隔插入单层时,获得其中1×10 18 cm -3以上的载流子浓度足够的每个特定层。 结果,在通常获得的空穴浓度小于1×1017cm-3的材料中,在整个晶体中获得足够的空穴浓度为1×10 17 cm -3以上。