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    • 3. 发明申请
    • APPARATUS OF SUPPLYING ORGANOMETALLIC COMPOUND
    • 供应有机化合物的装置
    • US20080121182A1
    • 2008-05-29
    • US11941139
    • 2007-11-16
    • Toshimitsu AbeNaoyuki Ide
    • Toshimitsu AbeNaoyuki Ide
    • C23C16/18
    • C23C16/4481C23C16/4483
    • An apparatus of supplying an organometallic compound comprising a vessel into which a solid organometallic compound at room temperature is placed and a carrier gas to sublimate the organometallic compound is supported, a supporter plate capable of maintaining an organometallic compound supported on an inert support in the lower part of the vessel with passing a carrier gas therethrough, a carrier gas inlet in the upper part of the vessel, and a carrier gas outlet downward of the supporter plate of being the bottom part of the vessel are disposed, and wherein the carrier gas is passed through the organometallic compound supported on the inert support loaded on the supporter plate from the above downward, is provided.
    • 一种供给有机金属化合物的装置,其中载置有室温固体有机金属化合物的容器和载气使有机金属化合物升华的有机金属化合物被支撑,能够将负载在惰性载体上的有机金属化合物保持在下层的载体板 容器的通过载气的部分,容器上部的载气入口和作为容器底部的载板向下的载气出口,其中载气是 提供了从上面向下穿过负载在载体板上的惰性载体上的有机金属化合物。