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1. 发明申请

US20160322246A1 END EFFECTOR DEVICE 审中-公开
标题翻译：终端效应器
公开(公告)号：US20160322246A1
公开(公告)日：2016-11-03
申请号：US15108487
申请日：2014-12-22
申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
发明人： Takayuki FUKUSHIMA , Ryosuke KANAMARU , Daiki MIYAGAWA
IPC分类号： H01L21/677 , H01L21/67 , H01L21/687
CPC分类号： H01L21/67766 , B25J19/021 , H01L21/67259 , H01L21/67265 , H01L21/67781 , H01L21/68707 , H01L21/68771
摘要： An end effector device is provided with a hand; a plurality of holding portions that are provided to the hand, and that hold a plurality of semiconductor wafers such that the plurality of semiconductor wafers are arranged at intervals in the vertical direction in a parallel attitude; a single detector that is arranged outside the plurality of semiconductor wafers viewed from the vertical direction, and that is configured to be able to detect the presence of each one of the semiconductor wafers, opposing a peripheral portion of the semiconductor wafer; and a detector moving mechanism that moves the single detector relative to the plurality of semiconductor wafers in the vertical direction such that the single detector opposes the peripheral portion of every semiconductor wafer.
摘要翻译：端部执行器装置设有一只手; 多个保持部，其设置在手上，并且保持多个半导体晶片，使得所述多个半导体晶片以平行姿态在所述垂直方向上间隔排列; 从所述垂直方向观察多个半导体晶片的外侧的单个检测器，并且被配置为能够检测与所述半导体晶片的周边部分相对的每个所述半导体晶片的存在; 以及检测器移动机构，其在垂直方向上相对于多个半导体晶片移动单个检测器，使得单个检测器与每个半导体晶片的周边部分相对。

2. 发明申请

US20150357219A1 END EFFECTOR DEVICE 有权
标题翻译：终端效应器
公开(公告)号：US20150357219A1
公开(公告)日：2015-12-10
申请号：US14758263
申请日：2013-12-25
申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
发明人： Yasuhiko HASHIMOTO , Takayuki FUKUSHIMA , Ryosuke KANAMARU , Daiki MIYAGAWA
IPC分类号： H01L21/677 , B25J11/00
CPC分类号： H01L21/67742 , B25J11/0095 , H01L21/67766 , H01L21/67769 , H01L21/67781 , H01L21/68707
摘要： The end effector device includes a hand having a storing space, and a plurality of holding portions provided to the hand and configured to respectively peripheral portions of each plate member. Each holding portion includes a plurality of receiving portions which respectively receive a plurality of plate members keeping vertical pitches among them, and a pitch changing mechanism configured to change intervals by vertically moving the plurality of receiving portions respectively. A plurality of linearly moving portions configured to respectively move linearly integrally with the plurality of receiving portions are provided to the hand being exposed outside of the hand, and a plurality of drive portions configured to drive the plurality of linearly moving portions of the pitch changing mechanism are stored in the storing space of the hand.
摘要翻译：末端执行器装置包括具有存储空间的手，以及设置在手上并分别构成每个板构件的周边部分的多个保持部。每个保持部分包括分别容纳多个保持垂直间距的板构件的多个接收部分，以及分别通过垂直移动多个接收部分来改变间隔的间距改变机构。多个线性移动部分被配置为分别与多个接收部分一体地移动地移动到手被暴露在手外部，并且多个驱动部分被配置为驱动俯仰改变机构的多个线性运动部分存储在手的存储空间中。

3. 发明申请

US20180254210A1 WAFER TRANSFER METHOD AND WAFER TRANSFER DEVICE 审中-公开
公开(公告)号：US20180254210A1
公开(公告)日：2018-09-06
申请号：US15518092
申请日：2014-10-10
申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
发明人： Takayuki FUKUSHIMA , Ryosuke KANAMARU
IPC分类号： H01L21/677 , H01L21/687 , B25J15/00 , B25J9/16
CPC分类号： H01L21/67718 , B25J9/1664 , B25J15/00 , H01L21/677 , H01L21/67778 , H01L21/68707
摘要： A wafer transfer method which transfers a wafer with a disc shape to a groove for vertically placing the wafer therein, by use of a wafer holding hand, includes causing the wafer holding hand to hold the wafer at at least three support points on an edge of the wafer; moving the wafer holding hand holding the wafer to cause the wafer with a vertical posture in which the wafer is vertically oriented to be positioned above the groove for vertically placing the wafer therein; causing the wafer holding hand to cease to hold the wafer and to support the wafer at two support points on the wedge of the wafer; and moving the wafer holding hand supporting the wafer downward until the edge of the wafer moves into the groove for vertically placing the wafer therein.

4. 发明申请

US20160351434A1 SUBSTRATE CONVEYING SYSTEM AND METHOD 审中-公开
标题翻译：基板输送系统及方法
公开(公告)号：US20160351434A1
公开(公告)日：2016-12-01
申请号：US15114623
申请日：2014-06-27
申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
发明人： Yasuhiko HASHIMOTO , Takayuki FUKUSHIMA , Ryosuke KANAMARU , Shinya KINOSHITA , Daiki MIYAGAWA
IPC分类号： H01L21/687 , B25J9/04 , H01L21/677
CPC分类号： H01L21/68707 , B25J9/042 , H01L21/67766 , H01L21/67778 , H01L21/67781
摘要： The end effector has a first hand and a second hand which can be driven independently from each other. The first hand has a hand body which can be inserted between vertically adjacent substrates stored in a substrate storing portion, holding a substrate immediately above or immediately below the hand body. The second hand has a hand base portion which at least partially advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion and a substrate holding means provided to the hand base portion so as to hold two or more substrates including the lowermost substrate or the uppermost substrate. By the end effector, substrates can be conveyed without any problem even when use of a batch conveying type hand is restricted due to the condition on the substrate storing portion side.
摘要翻译：末端执行器具有彼此独立地驱动的第一只手和第二只手。第一只手具有可以插入在存储在基板存储部分中的垂直相邻的基板之间的手柄，在基体的正上方或紧靠手柄的正上方保持基板。第二手具有至少部分地在最下面的基板之下或在存储在基板存储部分中的多个基板的最上面的基板上方的基部，以及设置在手基部上的基板保持装置，以便保持两个或更多的衬底包括最下面的衬底或最上面的衬底。通过末端执行器，即使使用分批输送型手由于基板存储部分侧的状况而受到限制，基板也可以毫无问题地被输送。

5. 发明申请

US20200335372A1 SUBSTRATE HOLDING HAND AND SUBSTRATE CONVEYING APPARATUS 审中-公开
公开(公告)号：US20200335372A1
公开(公告)日：2020-10-22
申请号：US16482526
申请日：2018-01-29
申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
发明人： Tetsuya YOSHIDA , Ryosuke KANAMARU , Shinya KINOSHITA , Takayuki FUKUSHIMA
IPC分类号： H01L21/677 , H01L21/687 , B65G49/07 , B25J15/00
摘要： Substrate holding hand attached to hand tip portion of manipulator and configured to hold substrate having circular plate shape and placed in vertical or inclined postures, including: base plate spreading from base toward tip end sides, part of base plate located at base end side, fixed to hand tip portion, holding position at base plate; engaging claw at part of base plate located at tip end side, engaging claw configured to engage part of edge of substrate in vertical or inclined postures, part of edge located lower than center of substrate; moving portion at base end side of holding position and configured to move toward tip end side; and plurality of rotating bodies at the moving portion, being pressed by movement against edge of substrate located lower than holding position and engaged with claw, and plurality of rotating bodies pushing substrate upward holding position while rotating along edge of substrate.

6. 发明申请

US20160329227A1 END EFFECTOR AND SUBSTRATE CONVEYING ROBOT 审中-公开
标题翻译：终端效应器和基底输送机器人
公开(公告)号：US20160329227A1
公开(公告)日：2016-11-10
申请号：US15108387
申请日：2014-06-27
申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
发明人： Yasuhiko HASHIMOTO , Takayuki FUKUSHIMA , Ryosuke KANAMARU , Shinya KINOSHITA , Daiki MIYAGAWA
IPC分类号： H01L21/677 , H01L21/687 , H01L21/67
CPC分类号： H01L21/67766 , H01L21/67207 , H01L21/67265 , H01L21/67781 , H01L21/68707
摘要： An end effector has a hand base portion at least a part of which advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion, a substrate holding unit provided to the hand base portion so as to hold the two or more substrates including the lowermost substrate or the uppermost substrate, and a protrusion amount change unit for changing a protrusion amount of the substrate holding unit from a reference surface including the surface of the hand base portion opposed to the lowermost substrate or the uppermost substrate. The protrusion amount change unit has a single drive source applying a drive force to the whole substrate holding unit.
摘要翻译：端部执行器具有手基部，其至少一部分在最下面的基板之下或在存储在基板存储部分中的多个基板的最上面的基板之上进行，基板保持单元设置在手基部以便保持所述两个或更多个基板包括最下面的基板或最上面的基板，以及突出量改变单元，用于改变基板保持单元从包括与基底部分的表面相对的最基底或最上面的基准表面的突出量基质。突出量改变单元具有向整个基板保持单元施加驱动力的单个驱动源。

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