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    • 5. 发明授权
    • Coating apparatus and manufacturing method of coated body
    • 涂层装置及涂层体的制造方法
    • US09275914B2
    • 2016-03-01
    • US13789862
    • 2013-03-08
    • KABUSHIKI KAISHA TOSHIBA
    • Tsuyoshi SatoKenichi Ooshiro
    • B05C11/10B05C11/02H01L21/66H01L21/67
    • H01L22/20H01L21/6715H01L22/12H01L22/26H01L2924/0002H01L2924/00
    • According to one embodiment, a coating apparatus includes a stage having a mounting surface on which a coating target is mounted, a rotating mechanism that rotates the stage, a coating nozzle that discharges a coating material, a moving mechanism that moves the coating nozzle, a supply device that supplies a material to the coating nozzle, an ejection device that ejects the material, a communication tube that allows the supply device, and a valve device. Further, the coating apparatus includes a control unit which rotates the stage by the rotating mechanism, switches the valve device to achieve the continuity of the supply unit and the coating nozzle, drives the moving mechanism to move the coating nozzle, and applies the coating material to the coating target on the stage.
    • 根据一个实施例,涂覆装置包括具有安装表面的载置台,载置旋转载物台的旋转机构,喷涂涂料的涂布喷嘴,移动涂布喷嘴的移动机构, 供给装置,其向涂料喷嘴供给材料,喷射装置喷射材料,允许供给装置的连通管和阀装置。 此外,涂布装置包括:控制单元,其通过旋转机构使台架旋转,切换阀装置以实现供给单元和涂布喷嘴的连续性,驱动移动机构移动涂布喷嘴,并施加涂布材料 到舞台上的涂层目标。
    • 6. 发明申请
    • SPIRAL COATING APPARATUS
    • 螺旋涂装
    • US20150075423A1
    • 2015-03-19
    • US14456016
    • 2014-08-11
    • Kabushiki Kaisha Toshiba
    • Toshiyuki KISHIYasuhiko FuchikamiKenichi Ooshiro
    • B05B15/02B05B3/18B05C11/08B05C5/02
    • B05B15/55B05B15/555B05B15/557B05C5/0208G03F7/162
    • According to one embodiment, a spiral coating apparatus includes: a stage; a nozzle; a movement unit; a gas supply unit; a cleaning liquid supply unit; and a nozzle cleaner. The stage has a placement surface. The nozzle is configured to dispense a liquid onto a coating object placed on the stage. The movement unit is configured to move the nozzle relative to the stage. The gas supply unit is configured to supply a gas. The cleaning liquid supply unit is configured to supply a cleaning liquid. The nozzle cleaner has a gas supply port and a cleaning liquid supply port. The nozzle cleaner is configured to force the gas supplied by the gas supply unit from the gas supply port toward the nozzle and dispense the cleaning liquid supplied by the cleaning liquid supply unit from the cleaning liquid supply port toward the nozzle.
    • 根据一个实施例,螺旋涂覆装置包括:一个台; 一个喷嘴; 运动单位 气体供应单元; 清洗液供应单元; 和喷嘴清洁剂。 舞台有一个放置面。 喷嘴构造成将液体分配到放置在载物台上的涂层物体上。 移动单元构造成相对于台移动喷嘴。 气体供给单元构成为供给气体。 清洗液供给单元构成为供给清洗液。 喷嘴清洁器具有供气口和清洁液供给口。 喷嘴清洁器被配置为迫使由气体供应单元供应的气体从气体供给口朝向喷嘴,并且将从清洗液供给单元供应的清洗液从清洗液供给口向喷嘴分配。
    • 7. 发明申请
    • COATING APPARATUS AND MANUFACTURING METHOD OF COATED BODY
    • 涂层装置的涂装和制造方法
    • US20130236990A1
    • 2013-09-12
    • US13789862
    • 2013-03-08
    • KABUSHIKI KAISHA TOSHIBA
    • Tsuyoshi SATOKenichi Ooshiro
    • H01L21/66
    • H01L22/20H01L21/6715H01L22/12H01L22/26H01L2924/0002H01L2924/00
    • According to one embodiment, a coating apparatus includes a stage having a mounting surface on which a coating target is mounted, a rotating mechanism that rotates the stage, a coating nozzle that discharges a coating material, a moving mechanism that moves the coating nozzle, a supply device that supplies a material to the coating nozzle, an ejection device that ejects the material, a communication tube that allows the supply device, and a valve device. Further, the coating apparatus includes a control unit which rotates the stage by the rotating mechanism, switches the valve device to achieve the continuity of the supply unit and the coating nozzle, drives the moving mechanism to move the coating nozzle, and applies the coating material to the coating target on the stage.
    • 根据一个实施例,涂覆装置包括具有安装表面的载置台,载置旋转载物台的旋转机构,喷涂涂料的涂布喷嘴,移动涂布喷嘴的移动机构, 供给装置,其向涂料喷嘴供给材料,喷射装置喷射材料,允许供给装置的连通管和阀装置。 此外,涂布装置包括:控制单元,其通过旋转机构旋转台,切换阀装置以实现供给单元和涂布喷嘴的连续性,驱动移动机构移动涂布喷嘴,并施加涂料 到舞台上的涂层目标。