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    • 6. 发明授权
    • Fabrication method employing and energy beam source
    • 采用制造方法和能量束源
    • US5989779A
    • 1999-11-23
    • US544108
    • 1995-10-17
    • Masahiro HatakeyamaKatsunori IchikiTadasuke KobataYotaro HatamuraMasayuki Nakao
    • Masahiro HatakeyamaKatsunori IchikiTadasuke KobataYotaro HatamuraMasayuki Nakao
    • H01J37/305H01J37/317H05H3/02G03C5/00B23K15/00G21K5/10
    • H05H3/02H01J37/3053H01J37/3178
    • An energy beam source is used in micro-fabrication tasks, such as fabrication of specific patterns, in-situ bonding, repair, connection and disconnection of electrical paths, applicable to semiconductor devices and other micro-sized circuits in integrated circuits. The beam source is made compact so that several sources can be located inside a vacuum vessel and in conjunction with micro-manipulators or micro-movement stages operated under light or an electron microscope. The beam source is provided with at least three electrodes, and by applying a selected voltage, i.e., high frequency voltage, direct current voltage and ground voltage, on each the three electrodes in association with film-forming substance(s), virtually any type of deposit can be formed at any location of a workpiece. Different types of particle beams, such as positive and negative ion beams, a highspeed neutral atomic beam, a radical particle beam, an electron beam can be produced from the beam source by judicious choice of operating-parameters and the film-forming material which may be a process gas or an applied coating. By using the beam source and the method of deposit forming presented, virtually any type of fabrication task can be carried out on any surface and any location of a workpiece in a three-dimensional space.
    • 能量束源用于微加工任务,例如制造特定图案,原位粘合,修复,连接和断开电路径,适用于集成电路中的半导体器件和其他微型尺寸电路。 光束源是紧凑的,使得几个源可以位于真空容器内并且与在微光或电子显微镜下操作的微操纵器或微移动台结合。 光束源设置有至少三个电极,并且通过在与成膜物质相关联的三个电极上的每一个上施加选择的电压,即高频电压,直流电压和接地电压,实际上任何类型 的沉积物可以形成在工件的任何位置。 可以通过明智地选择操作参数和成膜材料,从光束源产生不同类型的粒子束,例如正离子束和负离子束,高速中性原子束,自由基粒子束,电子束, 作为工艺气体或涂覆涂层。 通过使用光束源和沉积物形成方法,几乎​​任何类型的制造任务可以在三维空间中的工件的任何表面和任何位置上进行。
    • 7. 发明授权
    • Method of constructing process workflow having decision subprocesses and routine subprocesses and combining subprocesses to form one unit process
    • 构建具有决策子过程和常规子过程的流程工作流的方法,并组合子流程以形成一个单元流程
    • US07409686B2
    • 2008-08-05
    • US10640145
    • 2003-08-13
    • Shinjiro YamadaMasayuki NakaoTomohito OhmoriMichiyo Kuwabara
    • Shinjiro YamadaMasayuki NakaoTomohito OhmoriMichiyo Kuwabara
    • G06N5/04G06F9/45
    • G06N5/04B33Y80/00G06Q10/06
    • Disclosed is a method of constructing and executing a process. A conventional process is minutely divided into minimum unit subprocesses, and the minutely divided subprocesses are classified into a decision subprocesses and a routine subprocess by whether they require decision-making. Any subprocess which is executable using the setup condition in a specific decision subprocess is classified into the routine subprocess in such a manner that the classified routine subprocess follows on the specific decision subprocess. One or a series of decision subprocesses are combined with one or a series of routine subprocesses which are executable on the condition of the completion of the decision subprocesses to form one unit process, and a job-support computer program is created to allow the plurality of subprocesses included in the one unit process to be successively executed. A plurality of subprocesses which are executable in accordance with common input data are detected from the minutely divided minimum unit subprocesses, and a job flow is constructed to allow the respective jobs in the plurality of subprocesses to be simultaneously initiated and executed in parallel. The present invention can drastically reduce the lead-time of a process while facilitating execution of the entire process with high efficiency.
    • 公开了一种构建和执行过程的方法。 一个传统的过程被细分为最小单位子过程,微分子过程被分为决策子流程和常规子流程,是否需要决策。 使用特定决策子过程中的设置条件可执行的任何子处理被分类为例程子过程,使得分类的例程子过程遵循特定决策子过程。 一个或一系列决策子过程与一个或一系列常规子过程组合,这些子程序可以在完成决策子过程的条件下执行以形成一个单元过程,并且创建一个作业支持计算机程序以允许多个 包含在一个单元处理中的子处理被连续执行。 根据公共输入数据可执行的多个子处理从微小划分的最小单位子处理中检测到,并且构造作业流程以允许同时启动和执行多个子处理中的各个作业。 本发明可以显着地减少过程的交付时间,同时以高效率促进整个过程的执行。
    • 8. 发明授权
    • Fabrication method employing energy beam source
    • 采用能量束源的制造方法
    • US5998097A
    • 1999-12-07
    • US300844
    • 1999-04-28
    • Masahiro HatakeyamaKatsunori IchikiTadasuke KobataYotaro HatamuraMasayuki Nakao
    • Masahiro HatakeyamaKatsunori IchikiTadasuke KobataYotaro HatamuraMasayuki Nakao
    • H01J37/305H01J37/317H05H3/02G03C5/00G21K5/10
    • H05H3/02H01J37/3053H01J37/3178
    • An energy beam source is used in micro-fabrication tasks, such as fabrication of specific patterns, in-situ bonding, repair, connection and disconnection of electrical paths, applicable to semiconductor devices and other micro-sized circuits in integrated circuits. The beam source is made compact so that several sources can be located inside a vacuum vessel and in conjunction with micro-manipulators or micro-movement stages operated under light or an electron microscope. The beam source is provided with at least three electrodes, and by applying a selected voltage, i.e., high frequency voltage, direct current voltage and ground voltage, on each the three electrodes in association with film-forming substance(s), virtually any type of deposit can be formed at any location of a workpiece. Different types of particle beams, such as positive and negative ion beams, a highspeed neutral atomic beam, a radical particle beam, an electron beam can be produced from the beam source by judicious choice of operating-parameters and the film-forming material which may be a process gas or an applied coating. By using the beam source and the method of deposit forming presented, virtually any type of fabrication task can be carried out on any surface and any location of a workpiece in a three-dimensional space.
    • 能量束源用于微加工任务,例如制造特定图案,原位粘合,修复,连接和断开电路径,适用于集成电路中的半导体器件和其他微型尺寸电路。 光束源是紧凑的,使得几个源可以位于真空容器内并且与在微光或电子显微镜下操作的微操纵器或微移动台结合。 光束源设置有至少三个电极,并且通过在与成膜物质相关联的三个电极上的每一个上施加选择的电压,即高频电压,直流电压和接地电压,实际上任何类型 的沉积物可以形成在工件的任何位置。 可以通过明智地选择操作参数和成膜材料,从光束源产生不同类型的粒子束,例如正离子束和负离子束,高速中性原子束,自由基粒子束,电子束, 作为工艺气体或涂覆涂层。 通过使用光束源和沉积物形成方法,几乎​​任何类型的制造任务都可以在三维空间中的工件的任何表面和任何位置上进行。