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1. 发明授权

US5885354A Method and apparatus for processing a specimen 失效
标题翻译：用于处理样品的方法和装置
公开(公告)号：US5885354A
公开(公告)日：1999-03-23
申请号：US762423
申请日：1996-12-09
申请人： Jurgen Frosien , Dieter Winkler , Hans Zimmermann
发明人： Jurgen Frosien , Dieter Winkler , Hans Zimmermann
IPC分类号： H01L21/66 , C23C16/04 , H01J37/305 , H01J37/317 , H01L21/00 , H01L21/768 , H01J37/285
CPC分类号： H01L21/76892 , C23C16/047 , H01J37/3056 , H01L21/67069 , H01J2237/049 , H01J2237/31732 , H01J2237/31744
摘要： The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.
摘要翻译：本发明涉及一种用于处理样品，特别是集成电路的方法和装置，其中待处理样品的区域用红细胞束扫描，并且至少一种气体供应到待处理区域上方，使得借助于红细胞束，待处理的区域发生化学反应。通过在探头区域使用磁场可以显着提高处理速度。

2. 发明授权

US5637538A Method and apparatus for processing a specimen 失效
标题翻译：用于处理样品的方法和装置
公开(公告)号：US5637538A
公开(公告)日：1997-06-10
申请号：US342743
申请日：1994-11-21
申请人： Jurgen Frosien , Dieter Winkler , Hans Zimmermann
发明人： Jurgen Frosien , Dieter Winkler , Hans Zimmermann
IPC分类号： H01L21/66 , C23C16/04 , H01J37/305 , H01J37/317 , H01L21/00 , H01L21/768 , H01L21/302
CPC分类号： H01L21/76892 , C23C16/047 , H01J37/3056 , H01L21/67069 , H01J2237/049 , H01J2237/31732 , H01J2237/31744
摘要： The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.
摘要翻译：本发明涉及一种用于处理样品，特别是集成电路的方法和装置，其中待处理样品的区域用红细胞束扫描，并且至少一种气体供应到待处理区域上方，使得借助于红细胞束，待处理的区域发生化学反应。通过在探头区域使用磁场可以显着提高处理速度。

3. 发明授权

US08785849B2 Ultra high precision measurement tool 有权
标题翻译：超高精度测量工具
公开(公告)号：US08785849B2
公开(公告)日：2014-07-22
申请号：US12133298
申请日：2008-06-04
申请人： Juergen Frosien , Dieter Winkler , Udo Weigel , Stefan Grimm
发明人： Juergen Frosien , Dieter Winkler , Udo Weigel , Stefan Grimm
IPC分类号： G21K5/04
CPC分类号： H01J37/08 , H01J27/26 , H01J37/28 , H01J2237/004 , H01J2237/061 , H01J2237/0807 , H01J2237/244 , H01J2237/24514 , H01J2237/24535 , H01J2237/24564 , H01J2237/24578 , H01J2237/2594 , H01J2237/2623 , H01J2237/2816 , H01J2237/2817
摘要： A focused ion beam device is described comprising a gas field ion source with an analyzer for analyzing and classifying the structure of a specimen, a controller for controlling and/or modifying the structure of the specimen according to the analysis of the analyzer, an emitter tip, the emitter tip has a base tip comprising a first material and a supertip comprising a material different from the first material, wherein the supertip is a single atom tip and the base tip is a single crystal base tip. Furthermore, the focused ion beam device has a probe current control and a sample charge control. A method of operating a focused ion beam device is provided comprising applying a voltage between a single emission center of the supertip and an electrode, supplying gas to the emitter tip, analyzing and classifying the structure of a specimen, and controlling the structure of the specimen.
摘要翻译：描述了一种聚焦离子束装置，其包括气体离子源，其具有用于分析和分类样品结构的分析器，用于根据分析仪的分析来控制和/或改变样品的结构的控制器，发射器尖端发射极尖端具有包括第一材料和超高压头的基座尖端，所述第一材料和第一材料包括不同于所述第一材料的材料，其中所述超高压是单个原子尖端，并且所述基座尖端是单晶基底尖端。此外，聚焦离子束装置具有探针电流控制和样品充电控制。提供了一种操作聚焦离子束装置的方法，包括在超高压的单个发射中心和电极之间施加电压，向发射极尖端供应气体，分析和分类样品的结构，以及控制样品的结构。

4. 发明授权

US08723117B2 Switchable multi perspective detector, optics therefor and method of operating thereof 有权
标题翻译：可切换多透视检测器及其操作方法
公开(公告)号：US08723117B2
公开(公告)日：2014-05-13
申请号：US13543593
申请日：2012-07-06
申请人： Stefan Lanio , Gerald Schönecker , Dieter Winkler
发明人： Stefan Lanio , Gerald Schönecker , Dieter Winkler
IPC分类号： H01J37/26
CPC分类号： H01J37/09 , H01J37/147 , H01J37/244 , H01J2237/0453 , H01J2237/04756 , H01J2237/24465 , H01J2237/24592 , H01J2237/2817
摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.
摘要翻译：描述了用于检测信号光束的二次带电粒子检测装置。该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中孔板被配置为偏置到围绕第一内孔的一个电位孔开口和至少一个外孔开口。

5. 发明授权

US08026492B2 Dual mode gas field ion source 有权
标题翻译：双模气体离子源
公开(公告)号：US08026492B2
公开(公告)日：2011-09-27
申请号：US12264859
申请日：2008-11-04
申请人： Juergen Frosien , Dieter Winkler
发明人： Juergen Frosien , Dieter Winkler
IPC分类号： H01J27/02
CPC分类号： H01J37/08 , H01J37/28 , H01J37/3056 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/0827 , H01J2237/31749
摘要： A focused ion beam device is provided, including: an ion beam column adapted to house a gas field ion source emitter with an emitter tip and an emitter area for generating ions, a heating means adapted to heat the emitter tip, one or more gas inlets adapted to introduce a first gas and at least one second gas to the emitter area, an objective lens adapted to focus the ion beam generated from the first gas or the second gas, and a controller adapted to switch between a first emitter tip temperature and a second emitter tip temperature for generating an ion beam of ions of the first gas or an ion beam of ions of the at least one second gas.
摘要翻译：提供了一种聚焦离子束装置，包括：离子束柱，其适于容纳具有发射极尖端的气体场离子源发射体和用于产生离子的发射极区域，适于加热发射极尖端的加热装置，一个或多个气体入口适于将第一气体和至少一个第二气体引入发射器区域，适于聚焦由第一气体或第二气体产生的离子束的物镜，以及适于在第一发射极尖端温度和用于产生所述第一气体的离子离子束或所述至少一个第二气体的离子离子束的第二发射极尖端温度。

6. 发明申请

US20100115960A1 Gas Turbine Installation with Flue Gas Recirculation 有权
标题翻译：燃气轮机安装与烟气再循环
公开(公告)号：US20100115960A1
公开(公告)日：2010-05-13
申请号：US12645302
申请日：2009-12-22
申请人： Andreas Brautsch , Dieter Winkler , Richard Carroni
发明人： Andreas Brautsch , Dieter Winkler , Richard Carroni
IPC分类号： F02C7/00
CPC分类号： F23C9/00 , F02C3/30 , F02C3/34 , F02C7/143 , F05D2270/08 , F23C6/042 , F23C2202/20 , F23C2900/9901 , F23J15/06 , Y02E20/18 , Y02E20/363
摘要： A method and installation are disclosed which can, for example, provide for reliable, low-Nox-emission operation of a gas turbine installation with hydrogen-rich fuel gas. An exemplary gas turbine installation includes an arrangement for flue gas recirculation into a compressor inlet and for fuel gas dilution. Oxygen content in combustion air can be reduced by recirculation of recooled flue gas, and the fuel gas can be diluted with compressed flue gas. The oxygen reduction in the combustion air can lead to minimum residual oxygen in the flue gas which can be used for fuel gas dilution. As a result of the flue gas recirculation, water content in the combustion air can be increased by feedback of the water which results as a combustion product. The oxygen reduction, increased water content, and fuel dilution can reduce the flame velocity of hydrogen-rich fuel gases and enable a robust, reliable and low-emission combustion.
摘要翻译：公开了一种方法和装置，其可以例如提供具有富氢燃料气体的燃气轮机装置的可靠的低NOx排放操作。示例性的燃气轮机装置包括用于烟道气再循环到压缩机入口和用于燃料气体稀释的装置。燃烧空气中的氧含量可以通过再冷却的烟道气的再循环来减少，燃料气体可以用压缩的烟道气稀释。燃烧空气中的氧气还原可导致烟道气中的最小残留氧气，可用于燃料气体稀释。作为烟道气再循环的结果，可以通过作为燃烧产物的水的反馈来增加燃烧空气中的含水量。减少氧气，增加含水量和燃料稀释可以降低富氢燃料气体的火焰速度，并实现坚固，可靠和低排放的燃烧。

7. 发明授权

US07589328B2 Gas field ION source for multiple applications 有权
标题翻译：气田ION源适用于多种应用
公开(公告)号：US07589328B2
公开(公告)日：2009-09-15
申请号：US11925609
申请日：2007-10-26
申请人： Juergen Frosien , Dieter Winkler
发明人： Juergen Frosien , Dieter Winkler
IPC分类号： H01J49/10 , H01J27/02 , H01J27/26
CPC分类号： H01J27/26 , H01J37/08 , H01J37/28 , H01J37/3056 , H01J2237/006 , H01J2237/0807 , H01J2237/0827 , H01J2237/244 , H01J2237/3174 , H01J2237/31749
摘要： A focused ion beam device is described. The device includes an ion beam column including an enclosure for housing an emitter with an emitter area for generating ions, a first gas inlet adapted to introduce a first gas to the emitter area, a second gas inlet adapted to introduce a second gas different from the first gas to the emitter area, and a switching unit adapted to switch between introducing the first gas and introducing the second gas.
摘要翻译：描述了聚焦离子束装置。该装置包括离子束柱，其包括用于容纳具有用于产生离子的发射极区域的发射极的外壳，适于将第一气体引入发射极区域的第一气体入口，适于引入不同于第二气体的第二气体的第二气体入口第一气体到发射极区域，以及开关单元，其适于在引入第一气体和引入第二气体之间切换。

8. 发明申请

US20080236168A1 OPERATING METHOD FOR A TURBOGROUP 有权
标题翻译： TURBOGROUP的操作方法
公开(公告)号：US20080236168A1
公开(公告)日：2008-10-02
申请号：US12051669
申请日：2008-03-19
申请人： Richard Carroni , Dieter Winkler , Andreas Brautsch
发明人： Richard Carroni , Dieter Winkler , Andreas Brautsch
IPC分类号： F02C3/30 , F02C3/20 , F02C3/26
CPC分类号： F02C3/30 , F02C7/1435 , F05D2270/082
摘要： The invention relates to a method for operating a turbogroup, especially of a power generating plant, in which combustion air is fed to a compressor, compressed therein, and fed to a burner, in which a fuel, which has a higher reactivity than natural gas, is fed to the burner, in which water is injected into the combustion air upstream of the burner and evaporated therein, in which the fuel in the burner is mixed with the combustion air-water vapor mixture and combusted, in which a burner exhaust gas which is produced in the burner is fed to a turbine and expanded therein.
摘要翻译：本发明涉及一种用于操作涡轮组，特别是发电设备的方法，其中燃烧空气被供给到压缩机中，压缩在其中并被供给到燃烧器中，其中具有比天然气更高的反应性的燃料被供给到燃烧器，其中水被喷射到燃烧器上游的燃烧空气中并在其中蒸发，其中燃烧器中的燃料与燃烧空气 - 水蒸汽混合物混合并燃烧，其中燃烧器排气在燃烧器中产生的燃料供应到涡轮并在其中膨胀。

9. 发明授权

US07268361B2 Electron emission device 有权
标题翻译：电子发射装置
公开(公告)号：US07268361B2
公开(公告)日：2007-09-11
申请号：US10483114
申请日：2002-07-01
申请人： Pavel Adamec , Dieter Winkler
发明人： Pavel Adamec , Dieter Winkler
IPC分类号： H01L29/06 , H01L21/00
CPC分类号： H01J1/3044 , H01J2201/319
摘要： The invention provides an electron beam device 1 comprising at least one field emission cathode 3 and at least one extracting electrode 5, whereby the field emission cathode 5 comprises a p-type semiconductor region 7 connected to an emitter tip 9 made of a semiconductor material, an n-type semiconductor region 11 forming a pn-diode junction 13 with the p-type semiconductor region 7 a first electric contact 15 on the p-type semiconductor region 7 and a second electric contact 17 on the n-type semiconductor region 11. The p-type semiconductor region 7 prevents the flux of free electrons to the emitter unless electrons are injected into the p-type semiconductor region 7 by the pn-diode junction 13. This way, the field emission cathode 3 can generate an electron beam where the electron beam current is controlled by the forward biasing second voltage V2 across the pn-diode junction. Such electron beam current has an improved current value stability. In addition the electron beam current does not have to be stabilized anymore by adjusting, the voltage between emitter tip 9 and extracting electrode 5 which would interfere with the electric field of electron beam optics. The present invention further provides the field emission cathode as described above and an array of field emission cathodes. The invention further provides a method to generate at least one electron beam.
摘要翻译：本发明提供一种包括至少一个场发射阴极3和至少一个提取电极5的电子束装置1，由此场发射阴极5包括连接到由半导体材料制成的发射极尖端9的p型半导体区域7，在p型半导体区域7上形成p型二极管结13的n型半导体区域11，p型半导体区域7上的第一电接触15和n型半导体区域11上的第二电接触17。 p型半导体区域7防止自由电子束流到发射极，除非电子被pn二极管结13注入到p型半导体区域7中。这样，场发射阴极3可以产生电子束，其中电子束电流由跨越pn二极管结的正向偏置第二电压V 2控制。这种电子束电流具有改善的电流值稳定性。此外，电子束电流不必通过调节发射极尖端9和提取电极5之间的电压，这将干扰电子束光学器件的电场。本发明还提供如上所述的场致发射阴极和场发射阴极阵列。本发明还提供了一种产生至少一个电子束的方法。

10. 发明申请

US20060192145A1 Charged particle beam apparatus and method for operating the same 有权
标题翻译：带电粒子束装置及其操作方法
公开(公告)号：US20060192145A1
公开(公告)日：2006-08-31
申请号：US11396751
申请日：2006-04-03
申请人： Pavel Adamec , Ralf Degenhardt , Hans-Peter Feuerbaum , Harry Munack , Dieter Winkler
发明人： Pavel Adamec , Ralf Degenhardt , Hans-Peter Feuerbaum , Harry Munack , Dieter Winkler
IPC分类号： G21G5/00
CPC分类号： H01J37/285 , H01J37/265 , H01J37/28 , H01J2237/0435 , H01J2237/049 , H01J2237/2855 , H01J2237/2857
摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam resulting in a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.
摘要翻译：提供一种带电粒子束装置，其包括用于产生带电粒子的一次束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主束的准直之间切换，导致适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度;用于聚集所述带电粒子的一次束的聚光透镜;用于偏转所述主要束带电的扫描装置颗粒，用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。

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