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1. 发明授权

US08466440B2 Charged particle beam drawing apparatus and control method thereof 有权
标题翻译：带电粒子束描绘装置及其控制方法
公开(公告)号：US08466440B2
公开(公告)日：2013-06-18
申请号：US13163111
申请日：2011-06-17
申请人： Jun Yashima , Yasuo Kato , Akihito Anpo
发明人： Jun Yashima , Yasuo Kato , Akihito Anpo
IPC分类号： G21K5/10 , G03F7/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31771 , H01J2237/31776
摘要： A charged particle beam drawing apparatus applies a predetermined dose of a charged particle beam for drawing patterns corresponding to figures included in a drawing data, in a whole of a drawing area of a workpiece, before a result of calculation of a fogging effect correction dose is obtained, wherein a proximity effect correction dose is incorporated in the predetermined dose, and the fogging effect correction dose is not incorporated in the predetermined dose, then, the charged particle beam drawing apparatus applies a predetermined dose of the charged particle beam for drawing the patterns which overlap the patterns drawn before the result of calculation of the fogging effect correction dose is obtained, in the whole of the drawing area of the workpiece, after the calculation of the fogging effect correction dose, wherein the proximity effect correction dose and the fogging effect correction dose are incorporated in the predetermined dose.
摘要翻译：带电粒子束描绘装置在雾化效应校正剂量的计算结果是在工件的整个绘图区域中之前，将预定剂量的带电粒子束用于绘制对应于包括在绘图数据中的图形的图案得到的，其中以预定剂量并入接近效应校正剂量，并且雾化效应校正剂量不包含在预定剂量中，然后，带电粒子束描绘装置施加预定剂量的带电粒子束以绘制图案在计算雾化效果校正剂量之前，在整个绘图区域中获得在雾化效果校正剂量的计算结果之前绘制的图案重叠，其中邻近效应校正剂量和起雾效果校正剂量以预定剂量掺入。

2. 发明申请

US20120001097A1 CHARGED PARTICLE BEAM DRAWING APPARATUS AND CONTROL METHOD THEREOF 有权
标题翻译：充电颗粒光束绘图装置及其控制方法
公开(公告)号：US20120001097A1
公开(公告)日：2012-01-05
申请号：US13163111
申请日：2011-06-17
申请人： Jun YASHIMA , Yasuo Kato , Akihito Anpo
发明人： Jun YASHIMA , Yasuo Kato , Akihito Anpo
IPC分类号： G21K5/10
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31771 , H01J2237/31776
摘要： A charged particle beam drawing apparatus applies a predetermined dose of a charged particle beam for drawing patterns corresponding to figures included in a drawing data, in a whole of a drawing area of a workpiece, before a result of calculation of a fogging effect correction dose is obtained, wherein a proximity effect correction dose is incorporated in the predetermined dose, and the fogging effect correction dose is not incorporated in the predetermined dose, then, the charged particle beam drawing apparatus applies a predetermined dose of the charged particle beam for drawing the patterns which overlap the patterns drawn before the result of calculation of the fogging effect correction dose is obtained, in the whole of the drawing area of the workpiece, after the calculation of the fogging effect correction dose, wherein the proximity effect correction dose and the fogging effect correction dose are incorporated in the predetermined dose.
摘要翻译：带电粒子束描绘装置在雾化效应校正剂量的计算结果是在工件的整个绘图区域中之前，将预定剂量的带电粒子束用于绘制对应于包括在绘图数据中的图形的图案得到的，其中以预定剂量并入接近效应校正剂量，并且雾化效应校正剂量不包含在预定剂量中，然后，带电粒子束描绘装置施加预定剂量的带电粒子束以绘制图案在计算雾化效果校正剂量之前，在整个绘图区域中获得在雾化效果校正剂量的计算结果之前绘制的图案重叠，其中邻近效应校正剂量和起雾效果校正剂量以预定剂量掺入。

3. 发明授权

US08309283B2 Method and apparatus for writing 有权
标题翻译：写作方法和装置
公开(公告)号：US08309283B2
公开(公告)日：2012-11-13
申请号：US12649846
申请日：2009-12-30
申请人： Yasuo Kato , Jun Yashima , Hiroshi Matsumoto , Tomoo Motosugi , Tomohiro Iijima , Takayuki Abe
发明人： Yasuo Kato , Jun Yashima , Hiroshi Matsumoto , Tomoo Motosugi , Tomohiro Iijima , Takayuki Abe
IPC分类号： G03C5/00
CPC分类号： G03F1/68 , B82Y10/00 , B82Y40/00 , G21K1/025 , H01J37/3174
摘要： A writing method includes calculating a proximity effect-corrected dose for correcting a proximity effect in charged particle beam writing, for each first mesh region made by virtually dividing a writing region of a target object into a plurality of first mesh regions of a first mesh size, calculating a fogging effect-corrected dose by using the proximity effect-corrected dose calculated and an area density in the first mesh size with respect to a part of a calculation region for calculating the fogging effect-corrected dose for correcting a fogging effect in the charged particle beam writing, and by using an area density in a second mesh size larger than the first mesh size with respect to a remaining part of the calculation region, synthesizing the fogging effect-corrected dose and the proximity effect-corrected dose for the each first mesh region, and writing a pattern on the target object by using a charged particle beam based on a synthesized correction dose.
摘要翻译：一种写入方法包括计算用于校正带电粒子束写入中的邻近效应的邻近效应校正剂量，对于通过将目标对象的写入区域虚拟地分成多个第一网格尺寸的第一网格区域而制成的每个第一网格区域通过使用计算的邻近效应校正剂量和相对于计算区域的一部分的第一网格尺寸的面积密度来计算雾化效果校正剂量，以计算用于校正雾化效果的雾化效果校正剂量带电粒子束写入，并且相对于计算区域的剩余部分使用相对于第一网格尺寸大的第二网格尺寸的面积密度，合成每个图像的雾化效果校正剂量和邻近效应校正剂量第一网格区域，并且通过使用基于合成校正剂量的带电粒子束将目标物体上的图案写入。

4. 发明授权

US09063440B2 Charged particle beam writing apparatus and charged particle beam writing method 有权
标题翻译：带电粒子束写入装置和带电粒子束写入方法
公开(公告)号：US09063440B2
公开(公告)日：2015-06-23
申请号：US13370835
申请日：2012-02-10
申请人： Yasuo Kato
发明人： Yasuo Kato
IPC分类号： G21K5/00 , G03F1/78 , H01J37/302 , H01J37/317 , B82Y10/00 , B82Y40/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G03F1/78 , H01J37/3026 , H01J2237/31764 , H01J2237/31771 , H01J2237/31776 , H01J2237/31796
摘要： A charged particle beam writing apparatus includes a storage unit to store each pattern data of plural figure patterns arranged in each of plural small regions made by virtually dividing a writing region of a target workpiece to be written on which resist being coated. The charged particle beam writing apparatus further including an assignment unit to assign each pattern data of each figure pattern to be arranged in each of the plural small regions concerned, and a writing unit to write, for each of plural groups, each figure pattern in each of the plural small regions concerned by using a charged particle beam.
摘要翻译：带电粒子束写入装置包括：存储单元，用于存储多个图形图案中的每个图案数据，所述多个图形图案布置在通过实际上划分要涂覆的抗蚀剂的目标工件的写入区域而制成的多个小区域中。所述带电粒子束写入装置还包括分配单元，用于分配要布置在所述多个小区域中的每一个中的每个图形模式的每个图案数据;以及写入单元，用于为每个所述多个组中的每一个写入每个图形模式的多个小区域使用带电粒子束。

5. 发明申请

US20100062709A1 Communication System 失效
标题翻译：通讯系统
公开(公告)号：US20100062709A1
公开(公告)日：2010-03-11
申请号：US11883363
申请日：2006-01-25
申请人： Yasuo Kato
发明人： Yasuo Kato
IPC分类号： H04B5/00 , H01Q7/08
CPC分类号： H04B13/005 , G01R29/0878 , H01Q1/2216 , H04B5/0018 , H04B5/0043 , H04B5/0087 , H04B5/02 , H04B17/23 , H04B17/318
摘要： Stable receiving action is achieved with a receiver of simpler configuration.When a human hand is held over the panel unit 201, the electric field in the vicinity of the human body is coupled to the sensor electrode 2122 of the coil sensor 212 from the receiving electrode 211 of the panel unit 201, and alternate current is generated at the sensor electrode 2122. This alternate current then induces a magnetic flux inside the central opening of the coil 2121 in proportion to the strength of the electric field in the vicinity of the human body. Depending on the changes in this magnetic flux, electric current passes through the coil 2121. The electric current passing through the coil 2121 is converted by the electric current detecting circuit 2124 of the coil sensor 212 to voltage signals and transmitted as received signals to the demodulator 22. As a result, the received signals corresponding to the electric field in the vicinity of the human body, namely the transmission signals applied by the transmitter 1 to the human body, are obtained.
摘要翻译：采用简单配置的接收机实现稳定的接收动作。当人的手被夹持在面板单元201上时，人体附近的电场从面板单元201的接收电极211耦合到线圈传感器212的传感器电极2122，并且产生交流电流传感器电极2122.然后，该交流电流在线圈2121的中心开口内与人体附近的电场强度成比例地引起磁通。取决于该磁通量的变化，电流通过线圈2121.通过线圈2121的电流被线圈传感器212的电流检测电路2124转换成电压信号并作为接收信号发送到解调器结果，获得对应于人体附近的电场的接收信号，即由发射机1施加到人体的传输信号。

6. 发明申请

US20090070001A1 CONTROLLER FOR HYBRID VEHICLE 审中-公开
标题翻译：混合动力车控制器
公开(公告)号：US20090070001A1
公开(公告)日：2009-03-12
申请号：US12202474
申请日：2008-09-02
申请人： Shinsuke Takakura , Yasuo Kato , Masao Kano , Yuusaku Nishimura
发明人： Shinsuke Takakura , Yasuo Kato , Masao Kano , Yuusaku Nishimura
IPC分类号： F02D45/00
CPC分类号： F02D41/0032 , B60K6/48 , F02D2250/41 , F02N11/0829 , Y02T10/48 , Y02T10/6221
摘要： A fuel vapor treatment apparatus includes: a detection passage provided with a restrictor therein; a pump generating a gas-flow in the detection passage; and a differential pressure sensor detecting a pressure loss at the restrictor. A fuel vapor concentration is computed based on a pressure loss when air passes through the detection passage and a pressure loss when an air-fuel mixture passes through the detection passage. When the computed fuel vapor concentration reaches a specified value, an internal combustion engine is started and the fuel vapor treatment apparatus starts to supply the fuel vapor adsorbed by the canister to the internal combustion engine.
摘要翻译：一种燃料蒸气处理设备，包括：在其中设置有限流器的检测通道; 在检测通道中产生气流的泵; 以及检测限流器的压力损失的差压传感器。基于空气通过检测通道时的压力损失和空气 - 燃料混合物通过检测通道时的压力损失来计算燃料蒸气浓度。当计算出的燃料蒸气浓度达到规定值时，起动内燃机，燃料蒸气处理装置开始向罐内供给由罐吸附的燃料蒸气。

7. 发明授权

US07344246B2 Observation apparatus 有权
标题翻译：观察装置
公开(公告)号：US07344246B2
公开(公告)日：2008-03-18
申请号：US10862462
申请日：2004-06-08
申请人： Toru Noda , Kazuhiko Onuma , Yasufumi Fukuma , Koji Nishio , Hidetaka Aeba , Yoshio Okazaki , Masaru Sato , Yasuo Kato
发明人： Toru Noda , Kazuhiko Onuma , Yasufumi Fukuma , Koji Nishio , Hidetaka Aeba , Yoshio Okazaki , Masaru Sato , Yasuo Kato
IPC分类号： A61B3/10 , A61B3/00
CPC分类号： A61B3/132
摘要： An observation apparatus is provided. An apex angle of a contact prism is inputted by operating an apex angle setting knob of a control panel. A fining angle of the contact prism is inputted by operating a fitting angle setting knob. A control unit determines the amount of correction for astigmatism of a left observation optical system and the amount of correction for astigmatism of a right observation optical system based on a recognized observation magnification and the inputted apex angle. An axial angle for the astigmatism of the left observation optical system and an axial angle for the astigmatism of the right observation optical system are determined based on the inputted fitting angle. Variable cross cylinder lens rotating drive units are controlled to rotate cylinder lenses of each of the right and left observation optical systems, thereby obtaining the determined axial angle and the determined amount of correction.
摘要翻译：提供观察装置。通过操作控制面板的顶角设置旋钮输入接触棱镜的顶角。通过操作配合角度设置旋钮输入接触棱镜的澄清角度。控制单元基于识别的观察倍率和输入的顶角来确定左观察光学系统的像散的校正量和右观察光学系统的散光的校正量。基于输入的拟合角度来确定左观察光学系统的像散的轴向角度和右侧观察光学系统的像散的轴向角度。控制可变十字圆柱透镜旋转驱动单元以旋转左右观察光学系统中的每一个的圆柱透镜，从而获得确定的轴向角度和确定的校正量。

8. 发明申请

US20050012896A1 Ophthalmologic apparatus and ophthalmologic chart 有权
标题翻译：眼科仪器和眼科图
公开(公告)号：US20050012896A1
公开(公告)日：2005-01-20
申请号：US10495467
申请日：2002-11-15
申请人： Yasufumi Fukuma , Kohji Nishio , Takefumi Hayashi , Eiichi Yanagi , Noriyuki Nagai , Yasuo Kato , Yukio Ikezawa , Mineki Hayafuji , Tadashi Okamoto , Masakazu Hayashi
发明人： Yasufumi Fukuma , Kohji Nishio , Takefumi Hayashi , Eiichi Yanagi , Noriyuki Nagai , Yasuo Kato , Yukio Ikezawa , Mineki Hayafuji , Tadashi Okamoto , Masakazu Hayashi
IPC分类号： A61B3/032 , A61B3/15 , A61B3/08
CPC分类号： A61B3/08 , A61B3/032 , A61B3/152
摘要： An optometric apparatus 2 according to the present invention comprises a body portion 5r provided with an optical system for a right eye for projecting a chart for the right eye in order to inspect visual function of both eye of an examinee and a body portion 5l provided with an optical system for a left eye for projecting a chart for the left eye, the optical systems for the right and left eyes projecting the same fusion patterns to perform fusion of the both eyes of the examinee.
摘要翻译：根据本发明的验光装置2包括主体部分5r，其设置有用于右眼的光学系统，用于投射用于右眼的图表，以便检查被检体的眼睛的视觉功能和设置有受检者的身体部分51 用于左眼用于投影左眼的图表的光学系统，用于右眼和左眼的光学系统投射相同的融合图案以进行受检者的双眼融合。

9. 发明授权

US06631495B2 Electronic document identification, filing, and retrieval system 失效
标题翻译：电子文件识别，归档和检索系统
公开(公告)号：US06631495B2
公开(公告)日：2003-10-07
申请号：US09095574
申请日：1998-06-11
申请人： Yasuo Kato , Masahito Sakakibara , Etsushi Sato , Satoshi Koyama , Ryuichi Horigane , Hiroshi Iida , Jun Miyazaki
发明人： Yasuo Kato , Masahito Sakakibara , Etsushi Sato , Satoshi Koyama , Ryuichi Horigane , Hiroshi Iida , Jun Miyazaki
IPC分类号： G06F1500
CPC分类号： G06F17/30017
摘要： An electronic document filing method and a system using the same is disclosed. The system comprises identification code addition means for adding identification code proper to the electronic document thereto, electronic document transfer means for registering the electronic document to which the identification code is added to the document server, print means for printing the registered electronic document and the identification code on the same paper face, identification code read means for reading the identification code printed on the paper face, identification code interpretation means for interpreting the identification code read by the identification code read means, and identification code transfer means for transferring the identification code interpreted by the identification code interpretation means to the document server.
摘要翻译：公开了一种电子文档归档方法及其使用方法。该系统包括用于添加适用于电子文档的识别码的识别码附加装置，用于将添加有识别码的电子文档登记到文档服务器的电子文档传送装置，用于打印注册的电子文档的打印装置和用于打印注册的电子文档的标识同一纸面上的代码，用于读取印在纸面上的识别码的识别码读取装置，用于解释由识别码读取装置读取的识别码的识别码解释装置，以及用于传送识别码解释的识别码传送装置通过识别码解释装置到文件服务器。

10. 发明授权

US5844661A Ophthalmic apparatus 失效
标题翻译：眼科仪器
公开(公告)号：US5844661A
公开(公告)日：1998-12-01
申请号：US911977
申请日：1997-08-15
申请人： Saeko Uchida , Yasuo Kato , Takeshi Nakamura
发明人： Saeko Uchida , Yasuo Kato , Takeshi Nakamura
IPC分类号： A61B3/103 , A61B3/10
CPC分类号： A61B3/103
摘要： An objective refraction measuring system of an ophthalmic apparatus measures a refractive power of an eye to be examined in an objective manner under the condition that a gazing chart of a gazing target system is fixed to the eye to be examined. An arithmetic-logic unit obtains an objective measurement value of the eye to be examined on the basis of the measurement result by the objective refraction measuring system and the gazing target system. A control unit controls a continuous objective measurement while fogging the gazing chart after setting the gazing chart of the gazing chart system to a far-sight position of the eye to be examined which is obtained by using the gazing target system. With such measurement, the continuous objective measurement values by fogging the gazing chart of the gazing target system is obtained from the far-sight position based upon the objective measurement of the eye to be examined. Thus, the limit of the adjustment force of the eye to be examined is precisely measured.
摘要翻译：眼科装置的客观折射测量系统在目标系统的注视图固定在待检眼上的条件下，以客观的方式测量被检眼的屈光度。算术逻辑单元基于目标折射测量系统和注视目标系统的测量结果来获得要检查的眼睛的客观测量值。控制单元控制连续的客观测量，同时在将注视图系统的注视图设置到通过使用注视目标系统获得的被检眼的远视位置之后使注视图发生雾化。通过这样的测量，基于要检查的眼睛的客观测量，从远景位置获得通过使注视目标系统的注视图发生雾化的连续客观测量值。因此，精确地测量被检眼的调节力的极限。

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