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1. 发明申请

US20120031500A1 FLUID CONTROL APPARATUS 有权
标题翻译：流体控制装置
公开(公告)号：US20120031500A1
公开(公告)日：2012-02-09
申请号：US13203866
申请日：2009-11-06
申请人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyonogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyonogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F17D1/16
CPC分类号： C23C16/45561 , H01L21/67017 , Y10T137/0396
摘要： To provide a fluid control apparatus capable of reducing the space, while reducing the cost.A fluid control apparatus 1 has a fluid controlling unit 2 and a fluid introducing unit 3. The fluid introducing unit 3 is divided into three parts: a first and a second inlet-side shutoff/open parts 5, 6 disposed on the inlet side, each made up of 2×N/2 on-off valves 23, and a fluid controlling unit-side shutoff/open part 7 made up of 4×M on-off valves 23, disposed between the first and second inlet-side shutoff/open parts 5, 6 and the fluid controlling unit 2.
摘要翻译：提供能够减少空间的流体控制装置，同时降低成本。流体控制装置1具有流体控制单元2和流体引入单元3.流体引入单元3被分成三部分：设置在入口侧的第一和第二入口侧截止/打开部分5,6，每个都由2×N / 2开关阀23和由4×M开关阀23构成的流体控制单元侧关闭/打开部分7，其设置在第一和第二入口侧截止阀/ 打开部分5,6和流体控制单元2。

2. 发明授权

US09169558B2 Fluid control apparatus 有权
标题翻译：流体控制装置
公开(公告)号：US09169558B2
公开(公告)日：2015-10-27
申请号：US13203866
申请日：2009-11-06
申请人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyomogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Jun Hirose , Kazuyuki Tezuka , Yohei Uchida , Mutsunori Koyomogi , Takahiro Matsuda , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： C23C16/455 , H01L21/67
CPC分类号： C23C16/45561 , H01L21/67017 , Y10T137/0396
摘要： To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2×N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.
摘要翻译：提供能够减少空间的流体控制装置，同时降低成本。流体控制装置具有流体控制单元和流体引入单元。流体引入单元被分为三部分：设置在入口侧的第一和第二入口侧截止/打开部分，每个由2×N / 2构成，设置在第一和第二入口侧截止/打开之间零件和流体控制单元。

3. 发明授权

US06606912B2 Structure or construction for mounting a pressure detector 有权
标题翻译：用于安装压力检测器的结构或结构
公开(公告)号：US06606912B2
公开(公告)日：2003-08-19
申请号：US09825340
申请日：2001-04-04
申请人： Tadahiro Ohmi , Takashi Hirose , Eiji Ideta , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino , Kazuhiro Yoshikawa , Satoshi Kagatsume , Jun Hirose , Kazuo Fukasawa , Hiroshi Koizumi , Hideki Nagaoka
发明人： Tadahiro Ohmi , Takashi Hirose , Eiji Ideta , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino , Kazuhiro Yoshikawa , Satoshi Kagatsume , Jun Hirose , Kazuo Fukasawa , Hiroshi Koizumi , Hideki Nagaoka
IPC分类号： G01L700
CPC分类号： G01L19/0023 , G01L19/0645 , G01L19/145 , G01L19/147
摘要： A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.
摘要翻译：用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变，因为检测器安装在设置在管线等中的夹具主体中，从而保持了输出特性和温度特性检测器在安装前后差异很大。压力检测器通过将具有隔膜的膜片基座和具有传感器元件的传感器基座组合并紧固在一起而构成，该传感器基座通过隔膜基座的位移而被激活。压力检测器，其上放置有垫圈，设置在安装在管道中的固定装置本体的安装孔中。压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。压板构件与隔膜基座的块上表面接触，并且垫圈也与隔膜基座的块下表面接触。浅槽在块体的下表面上在与金属垫片接触的部分的内侧的位置处以环的形式限定，使得浅槽吸收由压紧构件引起的应变。

4. 发明授权

US06302130B1 Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers 有权
标题翻译：用于检测压力型流量控制器孔堵塞的方法和装置
公开(公告)号：US06302130B1
公开(公告)日：2001-10-16
申请号：US09529985
申请日：2000-07-18
申请人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
IPC分类号： F17D116
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
摘要翻译：一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置，以延长流量控制单元的寿命并提高其安全性。检测压力型流量控制器中的孔口堵塞的装置具有控制阀（CV），用于测量其上游压力P1的孔口（2），压力检测器（14）和流量设定电路（32）其中，在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下，下游流量QC用等式QC = KP1（K =常数）计算，并且其中控制阀（CV）为由计算流量QC和设定流量QS之间的差分信号QY控制。该装置包括：存储存储器M，存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y（t），其中孔口（2）没有堵塞，用于确定上游压力P1的压力衰减数据P（t）的压力检测器（14），其中流量从高设定流量QSH切换到具有孔口（2）的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y（t）检测压力衰减数据P（t）的中央处理单元CPU以及当压力衰减数据P（t）偏离时引起堵塞报警的报警电路（46）从标准压力衰减数据Y（t）到特定程度或以上。

5. 发明授权

US06848470B2 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
标题翻译：平行分流式流体供给装置和流体切换式压力式流量控制方法以及用于同一流体供给装置的流体切换型压力式流量控制系统
公开(公告)号：US06848470B2
公开(公告)日：2005-02-01
申请号：US10775104
申请日：2004-02-11
申请人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
发明人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要翻译：一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处以特定延迟时间Deltat达到设定流量Qs。本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

6. 发明授权

US06820632B2 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
标题翻译：平行分流式流体供给装置和流体切换式压力式流量控制方法以及用于同一流体供给装置的流体切换型压力式流量控制系统
公开(公告)号：US06820632B2
公开(公告)日：2004-11-23
申请号：US10162552
申请日：2002-06-06
申请人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
发明人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
IPC分类号： G05D706
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要翻译：一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处达到特定延迟时间At的设定流量Qs。本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

7. 发明授权

US06422264B1 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
公开(公告)号：US06422264B1
公开(公告)日：2002-07-23
申请号：US09734640
申请日：2000-12-13
申请人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
发明人： Tadahiro Ohmi , Satoshi Kagatsume , Kazuhiko Sugiyama , Yukio Minami , Kouji Nishino , Ryousuke Dohi , Katsunori Yonehana , Nobukazu Ikeda , Michio Yamaji , Jun Hirose , Kazuo Fukazawa , Hiroshi Koizumi , Hideki Nagaoka , Akihiro Morimoto , Tomio Uno , Eiji Ideta , Atsushi Matsumoto , Toyomi Uenoyama , Takashi Hirose
IPC分类号： G05D706
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

8. 发明授权

US06450190B2 Method of detecting abnormalities in flow rate in pressure-type flow controller 有权
标题翻译：压力式流量控制器流量异常检测方法
公开(公告)号：US06450190B2
公开(公告)日：2002-09-17
申请号：US09826834
申请日：2001-04-06
申请人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kazuo Fukasawa , Hiroshi Koizumi , Hideki Nagaoka , Tomio Uno , Kouji Nishino , Nobukazu Ikeda , Ryousuke Dohi , Eiji Ideta
发明人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kazuo Fukasawa , Hiroshi Koizumi , Hideki Nagaoka , Tomio Uno , Kouji Nishino , Nobukazu Ikeda , Ryousuke Dohi , Eiji Ideta
IPC分类号： G05D706
CPC分类号： G05B23/0235 , G05B23/0256 , G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice—the pressure-type flow controller wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated by the equation QC=KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal QY between the calculated flow rate QC and the set flow rate QS.
摘要翻译：一种检测压力型流量控制器流量异常的方法。该方法在使用孔口压力型流量控制器控制压力型流量控制器FCS中的流体流量的同时检查异常流量，其中上游压力P1保持大于下游压力的两倍或更多倍 P2，通过等式QC = KP1（K：常数）计算下游流量QC，并且其中基于所计算的流量QC和设定流量QS之间的差信号QY来控制控制阀CV。

9. 发明授权

US09233347B2 Mixed gas supply device 有权
标题翻译：混合供气装置
公开(公告)号：US09233347B2
公开(公告)日：2016-01-12
申请号：US13520824
申请日：2010-10-22
申请人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K11/20 , B01J4/02 , G05D11/13 , H01L21/67
CPC分类号： B01J4/02 , G05D11/132 , H01L21/67017 , Y10T137/87249
摘要： A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.
摘要翻译：混合气体供给装置包括并列布置的多个气体供给管线，包括流量控制装置和出口侧切换阀，其中各个出口侧切换阀的气体出口与歧管连通，另一个气体供给管线位于关闭位置到歧管的混合气体出口供给低流量气体，其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接以及具有气体通道的安装台，其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部，其使出口侧切换阀和混合气体流路成为歧管彼此通信。

10. 发明申请

US20130319551A1 OPENING DEGREE DETECTION DEVICE FOR AUTOMATICALLY OPERATED VALVE 有权
标题翻译：用于自动操作阀的开启程度检测装置
公开(公告)号：US20130319551A1
公开(公告)日：2013-12-05
申请号：US13988836
申请日：2011-11-17
申请人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
发明人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
IPC分类号： F16K37/00
CPC分类号： F16K37/0041 , F16K31/1221 , F16K37/00 , F16K37/0083 , Y10T137/8158 , Y10T137/8242
摘要： To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.
摘要翻译：为了提供易于组装成自动操作的阀的自动操作阀的开度检测装置，能够容易地确保组装开度检测装置时的检测精度，并且容易应用于现有的自动操作阀。开度检测装置包括：可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上，并且传感器支撑构件21通过引导装置支撑在基板4上。

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