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1. 发明授权

US07196018B2 Semiconductor etching paste and the use thereof for localized etching of semiconductor substrates 失效
标题翻译：半导体蚀刻膏及其半导体衬底的局部蚀刻用途
公开(公告)号：US07196018B2
公开(公告)日：2007-03-27
申请号：US10609015
申请日：2003-06-27
申请人： Jozef Szlufcik , Emmanuel Van Kerschaver , Christophe Allebé
发明人： Jozef Szlufcik , Emmanuel Van Kerschaver , Christophe Allebé
IPC分类号： H01L21/302
CPC分类号： H01L31/1804 , C09K13/02 , H01L31/068 , H01L31/0682 , H01L31/18 , Y02E10/547 , Y02P70/521
摘要： A method of etching a semiconductor substrate is described, the method comprising the steps of applying a paste containing an etchant to the substrate, and carrying out a thermal processing step to etch a part or a layer of the substrate where the paste has been applied. The etchant paste is preferably a caustic etching paste. The etchant paste may be applied selectively to a major surface of the substrate to form a pattern of applied paste. For example, the paste may be applied by a printing method, such as screen-printing. The method may be used to produce solar cells.
摘要翻译：描述了蚀刻半导体衬底的方法，该方法包括以下步骤：将含有蚀刻剂的膏体施加到衬底上，并且执行热处理步骤以蚀刻已经施加糊料的衬底的部分或多层。蚀刻剂浆料优选为苛性蚀刻浆料。蚀刻剂浆料可以选择性地施加到基底的主表面上以形成施加的糊剂的图案。例如，可以通过诸如丝网印刷的印刷方法来施加糊状物。该方法可用于生产太阳能电池。

2. 发明授权

US06384317B1 Solar cell and process of manufacturing the same 有权
标题翻译：太阳能电池和制造过程相同
公开(公告)号：US06384317B1
公开(公告)日：2002-05-07
申请号：US09445099
申请日：2000-04-03
申请人： Emmanuel Van Kerschaver , Jozef Szlufcik , Roland Einhaus , Johan Nijs
发明人： Emmanuel Van Kerschaver , Jozef Szlufcik , Roland Einhaus , Johan Nijs
IPC分类号： H01L310224
CPC分类号： H01L31/1804 , H01L31/02245 , H01L31/03529 , Y02E10/547 , Y02P70/521
摘要： The solar cell in the semiconductor substrate includes at least a radiation receiving front surface and a second surface. The substrate includes a first region of one type of conductivity and a second region of the opposite conductivity type with at least a first part located adjacent to the front surface and a second part located adjacent to the second surface. The front surface includes conductive contacts to the second region and the second surface has separated contacts to the first region and to the second region. The contacts to the second region at the second surface are connected to the contacts at the front surface through a limited number of vias.
摘要翻译：半导体衬底中的太阳能电池至少包括辐射接收前表面和第二表面。衬底包括一种导电类型的第一区域和相反导电类型的第二区域，其中至少第一部分位于邻近前表面的第一部分和与第二表面相邻的第二部分。前表面包括到第二区域的导电触点，并且第二表面具有到第一区域和第二区域的分离的触点。在第二表面处的第二区域的触点通过有限数量的通孔连接到前表面上的触点。

3. 发明授权

US09490377B2 Use of a uniform layer of insulating material in back-contact solar cells 有权
标题翻译：在背接触太阳能电池中使用均匀的绝缘材料层
公开(公告)号：US09490377B2
公开(公告)日：2016-11-08
申请号：US13883326
申请日：2011-11-03
申请人： Tom Borgers , Jozef Szlufcik
发明人： Tom Borgers , Jozef Szlufcik
IPC分类号： H01L31/0224 , H01L31/05
CPC分类号： H01L31/02245 , H01L31/022458 , H01L31/0516 , Y02E10/50
摘要： A uniform layer of insulating material is used to separate the connectors from the non-illuminated side of a back-contact solar cell, particularly a cell of the MWT type, the layer preferably being a uniform woven or non-woven fabric of a heat-resistant material such as glass fiber, and the electrical connection between the contact points of the cell and the connectors being made through the uniform layer thereby partially embedding the insulating material in the connection.
摘要翻译：使用均匀的绝缘材料层将连接器与背接触太阳能电池的非照射侧分离，特别是MWT型电池，该层优选为均匀的织造或非织造织物，耐热材料如玻璃纤维，并且电池和连接器的接触点之间的电连接通过均匀层制成，从而部分地将绝缘材料嵌入连接中。

4. 发明授权

US6117266A Furnace for continuous, high throughput diffusion processes from various diffusion sources 失效
标题翻译：用于来自各种扩散源的连续，高通量扩散过程的炉
公开(公告)号：US6117266A
公开(公告)日：2000-09-12
申请号：US64648
申请日：1998-04-22
申请人： Jorg Horzel , Jozef Szlufcik , Johan Nijs
发明人： Jorg Horzel , Jozef Szlufcik , Johan Nijs
IPC分类号： H01L21/00 , A23F1/02 , H05B3/02
CPC分类号： H01L21/67173 , H01L21/67109 , H01L21/67115 , H01L21/67236 , Y10S438/907
摘要： An open apparatus is described for the processing of planar thin semiconductor substrates, particularly for the processing of solar cells. The apparatus includes a first zone for the drying and burn-out of organic components from solid or liquid based dopant sources pre-applied to the substrates. The zone is isolated from the remaining zones of the apparatus by an isolating section to prevent cross-contamination between burn-out zone and the remaining processing zones. All the zones of the apparatus may be formed from a quartz tube around which heaters are placed for raising the temperature inside the quartz tube. Each zone may be purged with a suitable mixture of gases, e.g. inert gases such as argon, as well as oxygen and nitrogen. The zones may also be provided with gaseous dopants such as POCl.sub.3 and the present invention includes the sequential diffusion of more than one dopant into the substrates. Some of the zones may be used for driving-in the dopants alternatively, for other processes, e.g. oxidation. The present invention also includes a method of operating the apparatus and the use of the apparatus in processing solar cells.
摘要翻译：描述了用于处理平面薄型半导体衬底，特别是用于太阳能电池的处理的开放式设备。该装置包括用于从预先施加到基底的固体或液体基础的掺杂剂源干燥和燃尽有机成分的第一区域。该区域通过隔离部分与设备的其余区域隔离，以防止燃尽区域和其余处理区域之间的交叉污染。设备的所有区域可以由石英管形成，在该石英管周围放置加热器以提高石英管内的温度。每个区域可以用合适的气体混合物吹扫，例如，惰性气体如氩气，以及氧气和氮气。这些区域还可以设置有气体掺杂剂例如POCl 3，本发明包括多于一种掺杂剂顺序扩散到衬底中。一些区域可以用于驱动掺杂剂，或者用于其它工艺，例如，氧化。本发明还包括操作该装置的方法以及该装置在处理太阳能电池中的用途。

5. 发明申请

US20130327390A1 USE OF A UNIFORM LAYER OF INSULATING MATERIAL IN BACK-CONTACT SOLAR CELLS 有权
标题翻译：在反接触太阳能电池中使用绝缘材料绝缘层
公开(公告)号：US20130327390A1
公开(公告)日：2013-12-12
申请号：US13883326
申请日：2011-11-03
申请人： Tom Borgers , Jozef Szlufcik
发明人： Tom Borgers , Jozef Szlufcik
IPC分类号： H01L31/0224
CPC分类号： H01L31/02245 , H01L31/022458 , H01L31/0516 , Y02E10/50
摘要： A uniform layer of insulating material is used to separate the connectors from the non-illuminated side of a back-contact solar cell, particularly a cell of the MWT type, the layer preferably being a uniform woven or non-woven fabric of a heat-resistant material such as glass fibre, and the electrical connection between the contact points of the cell and the connectors being made through the uniform layer thereby partially embedding the insulating material in the connection.
摘要翻译：使用均匀的绝缘材料层将连接器与背接触太阳能电池的非照射侧分离，特别是MWT型电池，该层优选为均匀的织造或非织造织物，耐热材料如玻璃纤维，并且电池和连接器的接触点之间的电连接通过均匀层制成，从而部分地将绝缘材料嵌入连接中。

6. 发明申请

US20110005582A1 PHOTOVOLTAIC CELLS HAVING METAL WRAP THROUGH AND IMPROVED PASSIVATION 有权
标题翻译：具有金属带的光伏电池通过并改善了钝化
公开(公告)号：US20110005582A1
公开(公告)日：2011-01-13
申请号：US12792624
申请日：2010-06-02
申请人： Jozef Szlufcik , Christophe Allebe , Frederic Dross , Guy Baucarne
发明人： Jozef Szlufcik , Christophe Allebe , Frederic Dross , Guy Baucarne
IPC分类号： H01L31/04 , H01L31/18
CPC分类号： H01L31/1804 , H01L31/0224 , H01L31/022425 , H01L31/022441 , H01L31/02245 , Y02E10/547 , Y02P70/521
摘要： A photovoltaic device is disclosed. In one aspect, the device is formed in a semiconductor substrate. It has a radiation receiving front surface and a rear surface. The device may have a first region of one conductivity type, a second region with the opposite conductivity type adjacent to the front surface, and an antireflection layer. The rear surface is covered by a dielectric layer covering also an inside surface of the via. The front surface has current collecting conductive contacts. The rear surface has conductive contacts extending through the dielectric. A conductive path is in the via for photogenerated current from the front surface. By having the dielectric all over, no aligning and masking is needed. The same dielectric serves to insulate, provide thermal protection, and helps in surface and bulk passivation. It also avoids the need for a junction region near the via, hence reducing unwanted recombination currents.
摘要翻译：公开了一种光电器件。在一个方面中，器件形成在半导体衬底中。它具有辐射接收前表面和后表面。该器件可以具有一种导电类型的第一区域，具有与前表面相邻的相反导电类型的第二区域和抗反射层。后表面被也覆盖通孔内表面的电介质层覆盖。前表面具有集流导电触点。后表面具有延伸穿过电介质的导电触点。导电路径在通孔中，用于来自前表面的光生电流。通过使电介质全部结束，不需要对准和掩蔽。相同的电介质用于绝缘，提供热保护，并有助于表面和体积钝化。它也避免了需要靠近通孔的结区域，从而减少不必要的复合电流。

7. 发明申请

US20050022863A1 Method for backside surface passivation of solar cells and solar cells with such passivation 失效
标题翻译：太阳能电池和太阳能电池背面钝化方法
公开(公告)号：US20050022863A1
公开(公告)日：2005-02-03
申请号：US10871531
申请日：2004-06-17
申请人： Guido Agostinelli , Jozef Szlufcik , Petko Vitanov , Antoaneta Harizanova
发明人： Guido Agostinelli , Jozef Szlufcik , Petko Vitanov , Antoaneta Harizanova
IPC分类号： H01L31/00 , H01L31/18
CPC分类号： H01L31/1868 , H01L31/02167 , Y02E10/50 , Y02P70/521 , Y10T428/31678
摘要： The present invention provides a method for dielectric passivating the surface of a solar cell by accumulation of negative fixed charges of a first type at the interface between semiconductor material and a passivating material. According to the invention the passivating material comprises an oxide system, for example a binary oxide system, comprising Al2O3 and at least one metal oxide or metalloid oxide which enhances the tetrahedral structure of Al2O3, for example, an (Al2O3)x(TiO2)1-x alloy. In this way it is possible to combine the desirable properties from at least two different oxides, while eliminating the undesirable properties of each individual material. The oxide system can be deposited onto the semiconductor surface by means of a sol-gel method, comprising the steps of formation of the metal oxide and/or metalloid oxide sol and the aluminum solution and then carefully mixing these together under stirring and ultrasonic treatment. Thin films of the oxide system can then be deposited onto the semiconductor surface by means of spin coating followed by a temperature treatment.
摘要翻译：本发明提供一种通过在半导体材料和钝化材料之间的界面处堆积第一类型的负固定电荷来电介质钝化太阳能电池表面的方法。根据本发明，钝化材料包括氧化物系统，例如二氧化碳系统，其包含Al 2 O 3和至少一种增强Al 2 O 3的四面体结构的金属氧化物或类金属氧化物，例如（Al 2 O 3）x（TiO 2）1 -x合金。以这种方式，可以组合来自至少两种不同氧化物的期望性质，同时消除每种单独材料的不期望的性质。可以通过溶胶 - 凝胶法将氧化物体系沉积在半导体表面上，包括形成金属氧化物和/或准金属氧化物溶胶和铝溶液，然后在搅拌和超声波处理下仔细地将它们混合在一起。氧化物体系的薄膜随后通过旋涂然后进行温度处理而沉积到半导体表面上。

8. 发明授权

US06552414B1 Semiconductor device with selectively diffused regions 有权
标题翻译：具有选择性扩散区域的半导体器件
公开(公告)号：US06552414B1
公开(公告)日：2003-04-22
申请号：US09331932
申请日：1999-08-27
申请人： Jörg Horzel , Jozef Szlufcik , Mia Honoré , Johan Nijs
发明人： Jörg Horzel , Jozef Szlufcik , Mia Honoré , Johan Nijs
IPC分类号： H01L29167
CPC分类号： H01L21/67115 , H01L21/67109 , H01L31/022425 , H01L31/068 , H01L31/0684 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： The present invention describes a method of manufacturing a semiconductor device, comprising a semiconductor substrate (2) in the shape of a slice, the method comprising the steps of: step 1) selectively applying a pattern of a solids-based dopant source to a first major surface of said semiconducting substrate (2); step 2) diffusing the dopant atoms from said solids-based dopant source into said substrate (2) by a controlled heat treatment step in a gaseous environment surrounding said semi-conducting substrate (2), the dopant from said solids-based dopant source diffusing directly into said substrate (2) to form a first diffusion region (12) and, at the time, diffusing said dopant from said solids-based dopant source indirectly via said gaseous environment into said substrate (2) to form a second diffusion region (15) in at least some areas of said substrate (2) not covered by said pattern; and step 3) forming a metal contact pattern (20) substantially in alignment with said first diffusion region (12) without having etched said second diffusion region (15) substantially.
摘要翻译：本发明描述了一种制造半导体器件的方法，包括半导体衬底（2），其形状为切片，该方法包括以下步骤：步骤1）选择性地将基于固体的掺杂剂源的图案施加到第一所述半导体衬底（2）的主表面; 步骤2）通过在围绕所述半导体衬底（2）的气态环境中的受控热处理步骤将掺杂剂原子从所述基于固体的掺杂剂源扩散到所述衬底（2）中，所述基于固体的掺杂剂源扩散直接进入所述衬底（2）以形成第一扩散区（12），并且此时将所述掺杂剂从所述固体基掺杂剂源经由所述气态环境间接扩散到所述衬底（2）中以形成第二扩散区（ 15）在所述衬底（2）的至少一些未被所述图案覆盖的区域中; 和步骤3）形成基本上与所述第一扩散区域（12）对准的金属接触图案（20），而没有基本上蚀刻所述第二扩散区域（15）。

9. 发明授权

US09246044B2 Photovoltaic cells having metal wrap through and improved passivation 有权
标题翻译：具有金属包裹和改善钝化的光伏电池
公开(公告)号：US09246044B2
公开(公告)日：2016-01-26
申请号：US12792624
申请日：2010-06-02
申请人： Jozef Szlufcik , Christophe Allebe , Frederic Dross , Guy Beaucarne
发明人： Jozef Szlufcik , Christophe Allebe , Frederic Dross , Guy Beaucarne
IPC分类号： H01L31/04 , H01L31/18 , H01L31/0224
CPC分类号： H01L31/1804 , H01L31/0224 , H01L31/022425 , H01L31/022441 , H01L31/02245 , Y02E10/547 , Y02P70/521
摘要： A photovoltaic device is disclosed. In one aspect, the device is formed in a semiconductor substrate. It has a radiation receiving front surface and a rear surface. The device may have a first region of one conductivity type, a second region with the opposite conductivity type adjacent to the front surface, and an antireflection layer. The rear surface is covered by a dielectric layer covering also an inside surface of the via. The front surface has current collecting conductive contacts. The rear surface has conductive contacts extending through the dielectric. A conductive path is in the via for photogenerated current from the front surface. By having the dielectric all over, no aligning and masking is needed. The same dielectric serves to insulate, provide thermal protection, and helps in surface and bulk passivation. It also avoids the need for a junction region near the via, hence reducing unwanted recombination currents.
摘要翻译：公开了一种光电器件。在一个方面中，器件形成在半导体衬底中。它具有辐射接收前表面和后表面。该器件可以具有一种导电类型的第一区域，具有与前表面相邻的相反导电类型的第二区域和抗反射层。后表面被也覆盖通孔内表面的电介质层覆盖。前表面具有集流导电触点。后表面具有延伸穿过电介质的导电触点。导电路径在通孔中，用于来自前表面的光生电流。通过使电介质全部结束，不需要对准和掩蔽。相同的电介质用于绝缘，提供热保护，并有助于表面和体积钝化。它也避免了需要靠近通孔的结区域，从而减少不必要的复合电流。

10. 发明授权

US07659475B2 Method for backside surface passivation of solar cells and solar cells with such passivation 失效
标题翻译：太阳能电池和太阳能电池背面钝化方法
公开(公告)号：US07659475B2
公开(公告)日：2010-02-09
申请号：US10871531
申请日：2004-06-17
申请人： Guido Agostinelli , Jozef Szlufcik , Petko Vitanov , Antoaneta Harizanova
发明人： Guido Agostinelli , Jozef Szlufcik , Petko Vitanov , Antoaneta Harizanova
IPC分类号： H01L31/00
CPC分类号： H01L31/1868 , H01L31/02167 , Y02E10/50 , Y02P70/521 , Y10T428/31678
摘要： The present invention provides a method for dielectric passivating the surface of a solar cell by accumulation of negative fixed charges of a first type at the interface between semiconductor material and a passivating material. According to the invention the passivating material comprises an oxide system, for example a binary oxide system, comprising Al2O3 and at least one metal oxide or metalloid oxide which enhances the tetrahedral structure of Al2O3, for example, an (Al2O3)x(TiO2)1-x alloy. In this way it is possible to combine the desirable properties from at least two different oxides, while eliminating the undesirable properties of each individual material. The oxide system can be deposited onto the semiconductor surface by means of a sol-gel method, comprising the steps of formation of the metal oxide and/or metalloid oxide sol and the aluminum solution and then carefully mixing these together under stirring and ultrasonic treatment. Thin films of the oxide system can then be deposited onto the semiconductor surface by means of spin coating followed by a temperature treatment.
摘要翻译：本发明提供一种通过在半导体材料和钝化材料之间的界面处堆积第一类型的负固定电荷来电介质钝化太阳能电池表面的方法。根据本发明，钝化材料包括氧化物系统，例如二氧化物系统，其包含Al 2 O 3和至少一种增强Al 2 O 3的四面体结构的金属氧化物或类金属氧化物，例如（Al 2 O 3）x（TiO 2）1 -x合金。以这种方式，可以组合来自至少两种不同氧化物的期望性质，同时消除每种单独材料的不期望的性质。可以通过溶胶 - 凝胶法将氧化物体系沉积在半导体表面上，包括形成金属氧化物和/或准金属氧化物溶胶和铝溶液，然后在搅拌和超声波处理下仔细地将它们混合在一起。氧化物体系的薄膜随后通过旋涂然后进行温度处理而沉积到半导体表面上。

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