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    • 3. 发明授权
    • Optical position-measuring device
    • 光学位置测量装置
    • US08890057B2
    • 2014-11-18
    • US13472274
    • 2012-05-15
    • Michael Hermann
    • Michael Hermann
    • G01D5/38G01D5/36
    • G01D5/366G01D5/38
    • An optical position-measuring device includes a measuring standard and a scanning unit. The measuring standard includes an incremental graduation and at least one reference marking at a reference position. The reference marking has two reference-marking subfields disposed in mirror symmetry relative to a reference-marking axis of symmetry, each of the subfields including a grating structure having a locally changeable graduation period. The scanning unit includes a divergently emitting light source, one or more gratings, and a reference-signal detector system. The reference-signal detector system has at least four detector arrays formed and positioned such that, from the scanning of the reference marking via the reference-signal detector system, first and second pairs of partial reference signals result, in each case having a signal pattern in phase opposition. The first pair of partial reference signals is offset by an offset amount relative to the second pair of partial reference signals.
    • 光学位置测量装置包括测量标准和扫描单元。 测量标准包括增量刻度和参考位置上的至少一个参考标记。 参考标记具有相对于参考标记对称轴以镜像对称的两个参考标记子场,每个子场包括具有局部可变的刻度周期的光栅结构。 扫描单元包括分散发射光源,一个或多个光栅和参考信号检测器系统。 参考信号检测器系统具有形成和定位的至少四个检测器阵列,使得从参考标记经由参考信号检测器系统的扫描,得到第一和第二对部分参考信号,在每种情况下都具有信号模式 同阶段反对。 第一对部分参考信号相对于第二对部分参考信号偏移偏移量。
    • 4. 发明授权
    • Optical position-measuring device having two crossed scales
    • 具有两个十字刻度的光学位置测量装置
    • US08822907B2
    • 2014-09-02
    • US13288007
    • 2011-11-02
    • Ralph JoergerMichael HermannWolfgang HolzapfelWalter Huber
    • Ralph JoergerMichael HermannWolfgang HolzapfelWalter Huber
    • G01D5/34G01B11/24G01D5/38
    • G01D5/38G01B11/2441
    • An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.
    • 光学位置测量装置包括沿第一或第二方向延伸的扫描杆和沿另一个方向延伸的刻度。 在与第一和第二方向垂直的第三方向上,刻度尺距离扫描杆的扫描距离偏移。 该装置具有光源,其光在扫描条和刻度的交点处穿过扫描条,落在刻度上并返回扫描条。 在检测器处,通过衍射将光分解成不同的部分光束,在扫描条和刻度的光学有效结构上再次组合。 在检测器中响应于由于组合的部分光束的干扰而在第一方向上的扫描条和标尺之间的偏移以及扫描条和标尺之间的扫描距离的变化而在检测器中获得周期性信号。
    • 7. 发明申请
    • Optical Position-Measuring Device
    • 光学位置测量装置
    • US20110188055A1
    • 2011-08-04
    • US13061485
    • 2009-07-08
    • Michael Hermann
    • Michael Hermann
    • G11B11/14
    • G01D5/38
    • An optical position-measuring device for detecting the position of two objects movable relative to each other in at least one measuring direction includes a measuring standard which is joined to one of the two objects and possesses an incremental graduation extending in the measuring direction, as well as at least one reference marking at a reference position. The reference marking includes two reference-marking subfields disposed in mirror symmetry with respect to a reference-marking axis of symmetry, each of the subfields being made up of a structure extending in the measuring direction and having a locally changeable graduation period. In addition, the position-measuring device has a scanning unit which is joined to the other of the two objects and to which a scanning device is assigned that is used to generate at least one reference signal at the reference position. The scanning device includes at least one light source emitting divergently in the direction of the measuring standard, as well as a detector system having elements which are disposed along the measuring direction such that, starting from a central detector-system axis of symmetry in the measuring direction, the center-to-center distances between adjacent elements in the same direction change like the graduation periods of the structures in the reference-marking subfields starting from the reference-marking axis of symmetry.
    • 用于检测在至少一个测量方向上相对于彼此移动的两个物体的位置的光学位置测量装置包括测量标准,其连接到两个物体之一并且具有在测量方向上延伸的渐变刻度 作为参考位置处的至少一个参考标记。 参考标记包括相对于参考标记对称轴对称设置的两个参考标记子场,每个子场由在测量方向上延伸并且具有局部可变的刻度周期的结构构成。 此外,位置测量装置具有连接到两个物体中的另一个的扫描单元,并且分配有用于在基准位置产生至少一个参考信号的扫描装置。 扫描装置包括沿测量标准方向发散的至少一个光源,以及具有沿着测量方向设置的元件的检测器系统,使得从测量的中心检测器系统对称轴开始 方向,相同方向上的相邻元件之间的中心到中心的距离如从基准标记对称轴开始的参考标记子场中的结构的刻度周期改变。
    • 9. 发明申请
    • POSITION-MEASURING DEVICE
    • 位置测量装置
    • US20080067333A1
    • 2008-03-20
    • US11942413
    • 2007-11-19
    • Wolfgang HolzapfelMichael HermannKarsten Saendig
    • Wolfgang HolzapfelMichael HermannKarsten Saendig
    • H01J40/14
    • G01D5/2457G01D5/34784G01D5/38
    • A position-measuring device includes a scanning unit and a measuring graduation that is displaceable thereto in at least one measuring direction. The measuring graduation includes two incremental-graduation tracks extending in parallel in the measuring direction, between which a reference-marking track having at least one reference marking at a reference position extends. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the incremental signals, a scanning beam acts at least once upon each incremental graduation in an incremental-signal scanning field. Alternatively, the measuring graduation includes two reference-marking tracks extending in parallel in the measuring graduation and having reference markings at least one reference position, which are formed in symmetry with an axis in the measuring direction. Situated between the reference-marking tracks is an incremental-graduation track. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the reference-pulse signal and the incremental signals, a scanning beam acts upon the reference markings at least once in a reference-pulse signal scanning field, and a scanning beam acts upon the incremental graduation at least once in two incremental-signal scanning fields.
    • 位置测量装置包括扫描单元和在至少一个测量方向上可移动到其的测量刻度。 测量刻度包括在测量方向上平行延伸的两个增量刻度轨迹,在该基准标记轨道上具有在参考位置处具有至少一个参考标记的参考标记轨迹延伸。 扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。 为了生成增量信号,扫描光束在增量信号扫描场中的每个增量刻度上至少起作用一次。 或者,测量刻度包括在测量刻度中平行延伸的两个参考标记轨迹,并且具有与测量方向上的轴对称形成的至少一个参考位置的参考标记。 位于参考标记轨道之间的是增量式毕业曲目。 扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。 为了生成参考脉冲信号和增量信号,扫描光束在参考脉冲信号扫描场中至少起作用于参考标记,扫描光束在两次增量信号扫描中至少起作用于增量刻度 领域。
    • 10. 发明授权
    • Position measuring device
    • 位置测量装置
    • US07057161B2
    • 2006-06-06
    • US10483971
    • 2002-07-05
    • Alexander GruberMichael HermannWolfgang HolzapfelMarkus KühlerHerbert PronoldSebastian Tondorf
    • Alexander GruberMichael HermannWolfgang HolzapfelMarkus KühlerHerbert PronoldSebastian Tondorf
    • G01D5/34
    • G01D5/366G01D5/2457G01D5/38
    • A position measuring device having a scanning device and a scale, wherein the scanning device is movable in relation to the scale in a measuring direction. The scale including a measuring graduation, wherein periodic measuring signals are generated when the scanning device scans the measuring graduation and a reference marking, wherein a reference marking signal is generated when the scanning device scans the reference marking with a scanning beam bundle. The scale further includes a first optically scannable area marking next to the reference marking and a second optically scannable area marking next to the reference marking and which has a different optical deflection property than the first optically scannable area marking, wherein photoelectric scanning of the first and second optically scannable area markings with the scanning beam bundle from the scanning device generates an area signal that differentiates characteristics of the first and second optically scannable area markings. A first photo-receiver receives light from the first optically scannable area marking and a second photo-receiver receives light from the second optically scannable area marking.
    • 一种具有扫描装置和刻度的位置测量装置,其中所述扫描装置可相对于所述刻度尺在测量方向上移动。 所述刻度包括测量刻度,其中当扫描设备扫描测量刻度时产生周期性测量信号和参考标记,其中当扫描设备用扫描光束扫描参考标记时产生参考标记信号。 比例还包括在参考标记旁边标记的第一可光学扫描区域和与参考标记相邻的第二可光扫描区域,并且具有与第一可光学扫描区域标记不同的光学偏转性质,其中光电扫描第一和 来自扫描装置的扫描束束的第二可光扫描区域标记产生区分第一和第二可光扫描区域标记的特性的区域信号。 第一光接收器接收来自第一可光扫描区域标记的光,第二光接收器接收来自第二可光扫描区域标记的光。