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    • 2. 发明授权
    • Optical position-measuring device having two crossed scales
    • 具有两个十字刻度的光学位置测量装置
    • US08822907B2
    • 2014-09-02
    • US13288007
    • 2011-11-02
    • Ralph JoergerMichael HermannWolfgang HolzapfelWalter Huber
    • Ralph JoergerMichael HermannWolfgang HolzapfelWalter Huber
    • G01D5/34G01B11/24G01D5/38
    • G01D5/38G01B11/2441
    • An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.
    • 光学位置测量装置包括沿第一或第二方向延伸的扫描杆和沿另一个方向延伸的刻度。 在与第一和第二方向垂直的第三方向上,刻度尺距离扫描杆的扫描距离偏移。 该装置具有光源,其光在扫描条和刻度的交点处穿过扫描条,落在刻度上并返回扫描条。 在检测器处,通过衍射将光分解成不同的部分光束,在扫描条和刻度的光学有效结构上再次组合。 在检测器中响应于由于组合的部分光束的干扰而在第一方向上的扫描条和标尺之间的偏移以及扫描条和标尺之间的扫描距离的变化而在检测器中获得周期性信号。
    • 4. 发明申请
    • Optical Position-Measuring Device
    • 光学位置测量装置
    • US20120099118A1
    • 2012-04-26
    • US13236250
    • 2011-09-19
    • Wolfgang HolzapfelFlorian Flossmann
    • Wolfgang HolzapfelFlorian Flossmann
    • G01B11/14
    • G01S17/42G01S7/4812G01S7/4817G01S17/08G01S17/66
    • An optical position-measuring device includes a light source, a measuring reflector movable in space, a detection unit and a light-beam deflection unit that can align at least one beam of rays, emitted by the light source, in the direction of the measuring reflector. The light-beam deflection unit includes a cardan system having two cardan frames. A first cardan frame is adjustable by motor about a first axis of rotation, and a second cardan frame within the first cardan frame is adjustable by motor about a second axis of rotation oriented in a direction perpendicular to the first axis of rotation. The two axes of rotation intersect in a fixed reference point, at which a reference reflector is disposed. A plurality of mirrors are disposed rigidly on the cardan frames, so that the beam of rays can be pivoted about the fixed reference point via the mirrors during alignment.
    • 一种光学位置测量装置,包括光源,可在空间中移动的测量反射器,检测单元和光束偏转单元,其可以将由光源发射的至少一束光线沿测量方向对准 反射器。 光束偏转单元包括具有两个万向节框架的万向节系统。 第一万向节框架可通过马达围绕第一旋转轴线进行调节,并且第一万向节框架内的第二万向节框架可通过马达围绕绕垂直于第一旋转轴线的方向定向的第二旋转轴线进行调节。 两个旋转轴在固定的参考点相交,在该参考点处设置参考反射器。 多个反射镜刚性地布置在万向节框架上,使得光束可以在对准期间经由反射镜围绕固定的参考点枢转。
    • 5. 发明授权
    • Optical position measuring arrangement
    • 光学位置测量装置
    • US07516561B2
    • 2009-04-14
    • US11800908
    • 2007-05-08
    • Wolfgang Holzapfel
    • Wolfgang Holzapfel
    • G01D5/347G01B11/14
    • G01D5/36G01D5/38
    • An optical position measuring arrangement for detecting the position of a first object and a second object which are movable in relation to each other in a measuring direction. The optical position measuring arrangement including a scale which is connected with the first object, the scale including an incremental graduation extending in the measuring direction and having the graduation period (TPINC). The optical position measuring arrangement including a reference marking at a reference position, wherein the reference marking includes a structure with a graduation period (TPREF), which changes locally, wherein the reference marking has a mean graduation period (TPREF,m) within a range of the graduation period (TPINC) of the incremental graduation. A scanning unit connected with the second object and including a scanning system for generating a reference signal at the reference position.
    • 一种光学位置测量装置,用于检测在测量方向上可相对于彼此移动的第一物体和第二物体的位置。 所述光学位置测量装置包括与所述第一物体连接的刻度,所述刻度尺包括在所述测量方向上延伸并具有所述刻度周期(TPINC)的渐增刻度。 所述光学位置测量装置包括在参考位置处的参考标记,其中所述参考标记包括具有局部变化的刻度周期(TPREF)的结构,其中所述参考标记具有范围内的平均刻度周期(TPREF,m) 的毕业时期(TPINC)的渐进式毕业。 与第二物体连接并包括用于在参考位置产生参考信号的扫描系统的扫描单元。
    • 6. 发明申请
    • POSITION-MEASURING DEVICE
    • 位置测量装置
    • US20080067333A1
    • 2008-03-20
    • US11942413
    • 2007-11-19
    • Wolfgang HolzapfelMichael HermannKarsten Saendig
    • Wolfgang HolzapfelMichael HermannKarsten Saendig
    • H01J40/14
    • G01D5/2457G01D5/34784G01D5/38
    • A position-measuring device includes a scanning unit and a measuring graduation that is displaceable thereto in at least one measuring direction. The measuring graduation includes two incremental-graduation tracks extending in parallel in the measuring direction, between which a reference-marking track having at least one reference marking at a reference position extends. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the incremental signals, a scanning beam acts at least once upon each incremental graduation in an incremental-signal scanning field. Alternatively, the measuring graduation includes two reference-marking tracks extending in parallel in the measuring graduation and having reference markings at least one reference position, which are formed in symmetry with an axis in the measuring direction. Situated between the reference-marking tracks is an incremental-graduation track. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the reference-pulse signal and the incremental signals, a scanning beam acts upon the reference markings at least once in a reference-pulse signal scanning field, and a scanning beam acts upon the incremental graduation at least once in two incremental-signal scanning fields.
    • 位置测量装置包括扫描单元和在至少一个测量方向上可移动到其的测量刻度。 测量刻度包括在测量方向上平行延伸的两个增量刻度轨迹,在该基准标记轨道上具有在参考位置处具有至少一个参考标记的参考标记轨迹延伸。 扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。 为了生成增量信号,扫描光束在增量信号扫描场中的每个增量刻度上至少起作用一次。 或者,测量刻度包括在测量刻度中平行延伸的两个参考标记轨迹,并且具有与测量方向上的轴对称形成的至少一个参考位置的参考标记。 位于参考标记轨道之间的是增量式毕业曲目。 扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。 为了生成参考脉冲信号和增量信号,扫描光束在参考脉冲信号扫描场中至少起作用于参考标记,扫描光束在两次增量信号扫描中至少起作用于增量刻度 领域。
    • 7. 发明授权
    • Optoelectronic harmonically filtered detector system for a scanning unit
    • 用于扫描单元的光电谐波滤波检测系统
    • US07268883B2
    • 2007-09-11
    • US10838619
    • 2004-05-03
    • Wolfgang Holzapfel
    • Wolfgang Holzapfel
    • G01B9/02
    • G01D5/38G01D5/34715G01D5/366
    • An optoelectronic detector system is for generating a plurality of periodic, phase-shifted scanning signals from the scanning of a periodic fringe pattern. The fringe pattern extends in a detection plane with fringe-pattern period P in a fringe-displacement direction. The detector system is made up of a plurality of detector elements, the geometrical shape of the detector elements being selected such that a defined filtering of unwanted harmonics from the scanning signals thereby results. Within one fringe-pattern period P, a total of N detector elements of the same geometrical shape are arranged one immediately after the other in measuring direction x.
    • 光电检测器系统用于从周期性条纹图案的扫描产生多个周期性的相移扫描信号。 条纹图案在边缘位移方向上的条纹图案周期P的检测平面中延伸。 检测器系统由多个检测器元件组成,检测器元件的几何形状被选择为使得从扫描信号定义的不期望的谐波滤波得到。 在一个条纹图案周期P内,相同几何形状的总共N个检测元件在测量方向x上紧接着排列。
    • 8. 发明授权
    • Position measuring system
    • 位置测量系统
    • US07164482B2
    • 2007-01-16
    • US10840812
    • 2004-05-07
    • Ulrich BennerElmar MayerWolfgang Holzapfel
    • Ulrich BennerElmar MayerWolfgang Holzapfel
    • G01B11/14
    • G01D5/34715
    • A position measuring system that includes a scale having a measuring graduation extending along a first line and a scanning device. The scanning device includes a light source that transmits light beams that scan the measuring graduation, wherein the measuring graduation generates modified light from the transmitted light beams and a detector unit that receives the modified light from the measuring graduation. A lens arrangement, arranged between the scale and the detector unit, the lens arrangement generating a defined image of the measuring graduation on the, detector unit, wherein the defined image extends along a second line, whose curvature is different from a curvature of the first line.
    • 一种位置测量系统,包括具有沿着第一线延伸的测量刻度的刻度和扫描装置。 扫描装置包括透射扫描测量刻度的光束的光源,其中测量刻度产生来自透射光束的修正光,以及从测量刻度接收修改光的检测器单元。 布置在刻度尺和检测器单元之间的透镜布置,透镜装置在检测器单元上产生测量刻度的定义图像,其中限定的图像沿着第二线延伸,其第二线的曲率不同于第一 线。
    • 9. 发明授权
    • Position measuring device
    • 位置测量装置
    • US07057161B2
    • 2006-06-06
    • US10483971
    • 2002-07-05
    • Alexander GruberMichael HermannWolfgang HolzapfelMarkus KühlerHerbert PronoldSebastian Tondorf
    • Alexander GruberMichael HermannWolfgang HolzapfelMarkus KühlerHerbert PronoldSebastian Tondorf
    • G01D5/34
    • G01D5/366G01D5/2457G01D5/38
    • A position measuring device having a scanning device and a scale, wherein the scanning device is movable in relation to the scale in a measuring direction. The scale including a measuring graduation, wherein periodic measuring signals are generated when the scanning device scans the measuring graduation and a reference marking, wherein a reference marking signal is generated when the scanning device scans the reference marking with a scanning beam bundle. The scale further includes a first optically scannable area marking next to the reference marking and a second optically scannable area marking next to the reference marking and which has a different optical deflection property than the first optically scannable area marking, wherein photoelectric scanning of the first and second optically scannable area markings with the scanning beam bundle from the scanning device generates an area signal that differentiates characteristics of the first and second optically scannable area markings. A first photo-receiver receives light from the first optically scannable area marking and a second photo-receiver receives light from the second optically scannable area marking.
    • 一种具有扫描装置和刻度的位置测量装置,其中所述扫描装置可相对于所述刻度尺在测量方向上移动。 所述刻度包括测量刻度,其中当扫描设备扫描测量刻度时产生周期性测量信号和参考标记,其中当扫描设备用扫描光束扫描参考标记时产生参考标记信号。 比例还包括在参考标记旁边标记的第一可光学扫描区域和与参考标记相邻的第二可光扫描区域,并且具有与第一可光学扫描区域标记不同的光学偏转性质,其中光电扫描第一和 来自扫描装置的扫描束束的第二可光扫描区域标记产生区分第一和第二可光扫描区域标记的特性的区域信号。 第一光接收器接收来自第一可光扫描区域标记的光,第二光接收器接收来自第二可光扫描区域标记的光。