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1. 发明授权

US07161139B2 Position-measuring system and method for operating a position-measuring system 有权
标题翻译：位置测量系统和操作位置测量系统的方法
公开(公告)号：US07161139B2
公开(公告)日：2007-01-09
申请号：US10488640
申请日：2002-09-02
申请人： Wolfgang Holzapfel , Karsten Saendig
发明人： Wolfgang Holzapfel , Karsten Saendig
IPC分类号： G01D5/34 , G01D5/36 , G01B11/24 , G01B11/14
CPC分类号： G01D5/366
摘要： In a position measuring system and a method for operating such a position measuring system, e.g., for the purpose of producing at least one reference pulse signal, the position measuring system includes a gauge with a track in which a periodic incremental scale is disposed and extends in one direction of measurement. The track displays a discontinuity with respect to an optical property in at least one defined reference position. The position measuring system further a scanner unit that may be displaced across a predetermined measuring length relative to the gauge in the direction of measurement and that is provided, in addition to a light source, with a plurality of detector elements for the photoelectric scanning of the incremental scale. In adjacent sections of the measuring length, the incremental scale has different transverse substructures that deflect incident ray beams in first and second directions in space. Reference pulse detectors are disposed in the various directions in space on the scanning unit end and are supplied with partial reference pulse signals or area signals which are processed to give the reference pulse signal.
摘要翻译：在位置测量系统和用于操作这种位置测量系统的方法中，例如，为了产生至少一个参考脉冲信号，位置测量系统包括具有轨道的量规，其中设置周期性增量刻度并延伸在一个测量方向。轨道在至少一个定义的参考位置上显示相对于光学特性的不连续性。位置测量系统还包括扫描仪单元，扫描器单元可以相对于测量方向在测量方向上跨过预定的测量长度移位，并且除了光源之外还提供了用于光电扫描的多个检测器元件增量量表。在测量长度的相邻部分中，增量刻度具有不同的横向子结构，其在空间中在第一和第二方向偏转入射光束。参考脉冲检测器设置在扫描单元端的空间中的各个方向上，并且被提供有部分参考脉冲信号或被处理以给出参考脉冲信号的区域信号。

2. 发明申请

US20050067561A1 Position-measuring device 有权
标题翻译：位置测量装置
公开(公告)号：US20050067561A1
公开(公告)日：2005-03-31
申请号：US10946986
申请日：2004-09-21
申请人： Karsten Saendig
发明人： Karsten Saendig
IPC分类号： G01D5/36 , G01D5/34 , H01J5/16
CPC分类号： G01D5/366
摘要： A position-measuring device for generating a measuring signal includes a track, which has an incremental graduation having a specified graduation period that extends along a measuring direction, having at least one discontinuity of the incremental graduation at a reference position for generating a reference signal and having a scanning unit movable relative to the track along the measuring direction, for scanning the incremental graduation, the at least one discontinuity formed by a modification of a transverse substructure of the incremental graduation that extends perpendicular to the measuring direction, and that deflects radiation beams originating from the scanning unit. The deflection direction at the discontinuity deviates from the deflection direction in other regions of the incremental graduation. The scanning unit includes at least two reference-pulse detectors provided for receiving radiation beams having a different deflection direction. Upstream of the reference-pulse detectors, at least one imaging optics system is arranged in the beam path of the respective deflected radiation beam.
摘要翻译：一种用于产生测量信号的位置测量装置包括具有渐变刻度的轨道，该渐变刻度具有沿着测量方向延伸的指定的刻度周期，在用于产生参考信号的参考位置处具有至少一个不连续的增量刻度，具有沿测量方向相对于轨道移动的扫描单元，用于扫描增量刻度，所述至少一个不连续部分是通过垂直于测量方向延伸的增量刻度的横向子结构的修改形成的，并且使辐射束源自扫描单元。不连续处的偏转方向偏离增量刻度的其他区域的偏转方向。扫描单元包括至少两个参考脉冲检测器，用于接收具有不同偏转方向的辐射束。在参考脉冲检测器的上游，至少一个成像光学系统布置在相应偏转的辐射束的光束路径中。

3. 发明申请

US20080067333A1 POSITION-MEASURING DEVICE 有权
标题翻译：位置测量装置
公开(公告)号：US20080067333A1
公开(公告)日：2008-03-20
申请号：US11942413
申请日：2007-11-19
申请人： Wolfgang Holzapfel , Michael Hermann , Karsten Saendig
发明人： Wolfgang Holzapfel , Michael Hermann , Karsten Saendig
IPC分类号： H01J40/14
CPC分类号： G01D5/2457 , G01D5/34784 , G01D5/38
摘要： A position-measuring device includes a scanning unit and a measuring graduation that is displaceable thereto in at least one measuring direction. The measuring graduation includes two incremental-graduation tracks extending in parallel in the measuring direction, between which a reference-marking track having at least one reference marking at a reference position extends. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the incremental signals, a scanning beam acts at least once upon each incremental graduation in an incremental-signal scanning field. Alternatively, the measuring graduation includes two reference-marking tracks extending in parallel in the measuring graduation and having reference markings at least one reference position, which are formed in symmetry with an axis in the measuring direction. Situated between the reference-marking tracks is an incremental-graduation track. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the reference-pulse signal and the incremental signals, a scanning beam acts upon the reference markings at least once in a reference-pulse signal scanning field, and a scanning beam acts upon the incremental graduation at least once in two incremental-signal scanning fields.
摘要翻译：位置测量装置包括扫描单元和在至少一个测量方向上可移动到其的测量刻度。测量刻度包括在测量方向上平行延伸的两个增量刻度轨迹，在该基准标记轨道上具有在参考位置处具有至少一个参考标记的参考标记轨迹延伸。扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。为了生成增量信号，扫描光束在增量信号扫描场中的每个增量刻度上至少起作用一次。或者，测量刻度包括在测量刻度中平行延伸的两个参考标记轨迹，并且具有与测量方向上的轴对称形成的至少一个参考位置的参考标记。位于参考标记轨道之间的是增量式毕业曲目。扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。为了生成参考脉冲信号和增量信号，扫描光束在参考脉冲信号扫描场中至少起作用于参考标记，扫描光束在两次增量信号扫描中至少起作用于增量刻度领域。

4. 发明授权

US08159681B2 Measuring device for determining the relative offset between two components 有权
标题翻译：用于确定两个组件之间的相对偏移量的测量装置
公开(公告)号：US08159681B2
公开(公告)日：2012-04-17
申请号：US11800893
申请日：2007-05-07
申请人： Gerhard Bock , Michael Hermann , Wolfgang Holzapfel , Karsten Saendig , Johannes Trautner
发明人： Gerhard Bock , Michael Hermann , Wolfgang Holzapfel , Karsten Saendig , Johannes Trautner
IPC分类号： G01B3/30
CPC分类号： G01B21/16
摘要： A measuring device for determining the relative offset between two components in a z-direction includes two measuring members. A first measuring member is affixable on a first component, and the second measuring member is affixable on a second component. Furthermore, the measuring device includes a sensor device for determining the relative position of the two measuring members. The first measuring member and the second measuring member are affixable on the first components at a rigid angle. At least one of the measuring members is able to be brought into adhesive contact with the first component or the second component. The measuring device includes support members for at least one measuring member so that the measuring member is able to assume a parking or an operating position. The measuring members are precisely and reproducibly aligned in space relative to each other in the parking position.
摘要翻译：用于确定z方向上的两个部件之间的相对偏移的测量装置包括两个测量部件。第一测量构件可固定在第一构件上，第二测量构件可固定在第二构件上。此外，测量装置包括用于确定两个测量构件的相对位置的传感器装置。第一测量构件和第二测量构件以刚性角度固定在第一构件上。至少一个测量构件能够与第一部件或第二部件粘合接触。测量装置包括用于至少一个测量构件的支撑构件，使得测量构件能够采取停车或操作位置。测量构件在停车位置相对于彼此在空间上精确地和可重复地对准。

5. 发明授权

US07714273B2 Position-measuring device 有权
标题翻译：位置测量装置
公开(公告)号：US07714273B2
公开(公告)日：2010-05-11
申请号：US11942435
申请日：2007-11-19
申请人： Karsten Saendig
发明人： Karsten Saendig
IPC分类号： G01D5/34
CPC分类号： G01D5/38 , G01D5/24438 , G01D5/2457 , G01D5/366
摘要： A position-measuring device for generating a reference-pulse signal at at least one reference position includes a scanning unit and also a reflection-measuring graduation displaceable relative thereto in at least one measuring direction. The scanning unit for generating the reference-pulse signal includes a plurality of optical elements, including at least one imaging optics as well as at least two diaphragm structures, which are disposed in a diaphragm plane and have a plurality of diaphragm openings in each case. Furthermore, a light source as well as at least two detector elements are assigned to the scanning unit. The reflection-measuring graduation has a reference marking at the at least one reference position. It includes at least one set of first structure elements, which is arranged in the plane of the reflection-measuring graduation, perpendicular to the measuring direction, periodically at a first transversal periodicity. Furthermore, the reference marking has at least one set of second structure elements, which is arranged in the plane of the reflection-measuring graduation, perpendicular to the measuring direction, periodically at a second, different transversal periodicity. The structure elements are arranged as diffractive structure elements, which, in the measuring direction, optically act like a cylinder lens having a specific focal length and, perpendicular to the measuring direction, act like a deflecting grating having the graduation period.
摘要翻译：用于在至少一个基准位置产生参考脉冲信号的位置测量装置包括扫描单元以及在至少一个测量方向上可相对于其移位的反射测量刻度。用于产生参考脉冲信号的扫描单元包括多个光学元件，包括至少一个成像光学元件以及至少两个光阑结构，它们设置在光阑平面中并且在每种情况下都具有多个光阑开口。此外，将光源以及至少两个检测器元件分配给扫描单元。反射测量刻度在至少一个参考位置具有参考标记。它包括至少一组第一结构元件，其以与第一横向周期性周期性地垂直于测量方向布置在反射测量刻度的平面中。此外，参考标记具有至少一组第二结构元件，其被布置在垂直于测量方向的反射测量刻度的平面中，周期性地以不同的横向周期性周期性地布置。结构元件被布置为衍射结构元件，其在测量方向上具有类似于具有特定焦距并且垂直于测量方向的柱面透镜的光学作用，像具有刻度周期的偏转光栅。

6. 发明申请

US20070273893A1 Measuring device for determining the relative offset between two components 有权
标题翻译：用于确定两个组件之间的相对偏移量的测量装置
公开(公告)号：US20070273893A1
公开(公告)日：2007-11-29
申请号：US11800893
申请日：2007-05-07
申请人： Gerhard Bock , Michael Hermann , Wolfgang Holzapfel , Karsten Saendig , Johannes Trautner
发明人： Gerhard Bock , Michael Hermann , Wolfgang Holzapfel , Karsten Saendig , Johannes Trautner
IPC分类号： G01B11/14
CPC分类号： G01B21/16
摘要： A measuring device for determining the relative offset between two components in a z-direction includes two measuring members. A first measuring member is affixable on a first component, and the second measuring member is affixable on a second component. Furthermore, the measuring device includes a sensor device for determining the relative position of the two measuring members. The first measuring member and the second measuring member are affixable on the first components at a rigid angle. At least one of the measuring members is able to be brought into adhesive contact with the first component or the second component. The measuring device includes support members for at least one measuring member so that the measuring member is able to assume a parking or an operating position. The measuring members are precisely and reproducibly aligned in space relative to each other in the parking position.
摘要翻译：用于确定z方向上的两个部件之间的相对偏移的测量装置包括两个测量部件。第一测量构件可固定在第一构件上，第二测量构件可固定在第二构件上。此外，测量装置包括用于确定两个测量构件的相对位置的传感器装置。第一测量构件和第二测量构件以刚性角度固定在第一构件上。至少一个测量构件能够与第一部件或第二部件粘合接触。测量装置包括用于至少一个测量构件的支撑构件，使得测量构件能够采取停车或操作位置。测量构件在停车位置相对于彼此在空间上精确地和可重复地对准。

7. 发明授权

US07858922B2 Position-measuring device 有权
标题翻译：位置测量装置
公开(公告)号：US07858922B2
公开(公告)日：2010-12-28
申请号：US11942413
申请日：2007-11-19
申请人： Wolfgang Holzapfel , Michael Hermann , Karsten Saendig
发明人： Wolfgang Holzapfel , Michael Hermann , Karsten Saendig
IPC分类号： G01D5/34
CPC分类号： G01D5/2457 , G01D5/34784 , G01D5/38
摘要： A position-measuring device includes a scanning unit and a measuring graduation that is displaceable thereto in at least one measuring direction. The measuring graduation includes two incremental-graduation tracks extending in parallel in the measuring direction, between which a reference-marking track having at least one reference marking at a reference position extends. The scanning unit includes a first scanning device for generating the reference-pulse signal and a second scanning device for generating the incremental signals. To generate the incremental signals, a scanning beam acts at least once upon each incremental graduation in an incremental-signal scanning field.
摘要翻译：位置测量装置包括扫描单元和在至少一个测量方向上可移动到其的测量刻度。测量刻度包括在测量方向上平行延伸的两个增量刻度轨迹，在该基准标记轨道上具有在参考位置处具有至少一个参考标记的参考标记轨迹延伸。扫描单元包括用于产生参考脉冲信号的第一扫描装置和用于产生增量信号的第二扫描装置。为了生成增量信号，扫描光束在增量信号扫描场中的每个增量刻度上至少起作用一次。

8. 发明申请

US20080117440A1 POSITION-MEASURING DEVICE 有权
标题翻译：位置测量装置
公开(公告)号：US20080117440A1
公开(公告)日：2008-05-22
申请号：US11942435
申请日：2007-11-19
申请人： Karsten SAENDIG
发明人： Karsten SAENDIG
IPC分类号： G01B11/14
CPC分类号： G01D5/38 , G01D5/24438 , G01D5/2457 , G01D5/366
摘要： A position-measuring device for generating a reference-pulse signal at at least one reference position includes a scanning unit and also a reflection-measuring graduation displaceable relative thereto in at least one measuring direction. The scanning unit for generating the reference-pulse signal includes a plurality of optical elements, including at least one imaging optics as well as at least two diaphragm structures, which are disposed in a diaphragm plane and have a plurality of diaphragm openings in each case. Furthermore, a light source as well as at least two detector elements are assigned to the scanning unit. The reflection-measuring graduation has a reference marking at the at least one reference position. It includes at least one set of first structure elements, which is arranged in the plane of the reflection-measuring graduation, perpendicular to the measuring direction, periodically at a first transversal periodicity. Furthermore, the reference marking has at least one set of second structure elements, which is arranged in the plane of the reflection-measuring graduation, perpendicular to the measuring direction, periodically at a second, different transversal periodicity. The structure elements are arranged as diffractive structure elements, which, in the measuring direction, optically act like a cylinder lens having a specific focal length and, perpendicular to the measuring direction, act like a deflecting grating having the graduation period.
摘要翻译：用于在至少一个基准位置产生参考脉冲信号的位置测量装置包括扫描单元以及在至少一个测量方向上可相对于其移位的反射测量刻度。用于产生参考脉冲信号的扫描单元包括多个光学元件，包括至少一个成像光学元件以及至少两个光阑结构，它们设置在光阑平面中并且在每种情况下都具有多个光阑开口。此外，将光源以及至少两个检测器元件分配给扫描单元。反射测量刻度在至少一个参考位置具有参考标记。它包括至少一组第一结构元件，其以与第一横向周期性周期性地垂直于测量方向布置在反射测量刻度的平面中。此外，参考标记具有至少一组第二结构元件，其被布置在垂直于测量方向的反射测量刻度的平面中，周期性地以不同的横向周期性周期性地布置。结构元件被布置为衍射结构元件，其在测量方向上具有类似于具有特定焦距并且垂直于测量方向的柱面透镜的光学作用，像具有刻度周期的偏转光栅。

9. 发明授权

US07196319B2 Position-measuring device 有权
标题翻译：位置测量装置
公开(公告)号：US07196319B2
公开(公告)日：2007-03-27
申请号：US10946986
申请日：2004-09-21
申请人： Karsten Saendig
发明人： Karsten Saendig
IPC分类号： G01D5/34 , G01D5/36 , G01B11/24 , G01B11/14
CPC分类号： G01D5/366
摘要： A position-measuring device for generating a measuring signal includes a track, which has an incremental graduation having a specified graduation period that extends along a measuring direction, having at least one discontinuity of the incremental graduation at a reference position for generating a reference signal and having a scanning unit movable relative to the track along the measuring direction, for scanning the incremental graduation, the at least one discontinuity formed by a modification of a transverse substructure of the incremental graduation that extends perpendicular to the measuring direction, and that deflects radiation beams originating from the scanning unit. The deflection direction at the discontinuity deviates from the deflection direction in other regions of the incremental graduation. The scanning unit includes at least two reference-pulse detectors provided for receiving radiation beams having a different deflection direction. Upstream of the reference-pulse detectors, at least one imaging optics system is arranged in the beam path of the respective deflected radiation beam.
摘要翻译：一种用于产生测量信号的位置测量装置包括具有渐变刻度的轨道，该渐变刻度具有沿着测量方向延伸的指定的刻度周期，在用于产生参考信号的参考位置处具有至少一个不连续的增量刻度，具有沿测量方向相对于轨道移动的扫描单元，用于扫描增量刻度，所述至少一个不连续部分是通过垂直于测量方向延伸的增量刻度的横向子结构的修改形成的，并且使辐射束源自扫描单元。不连续处的偏转方向偏离增量刻度的其他区域的偏转方向。扫描单元包括至少两个参考脉冲检测器，用于接收具有不同偏转方向的辐射束。在参考脉冲检测器的上游，至少一个成像光学系统布置在相应偏转的辐射束的光束路径中。

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