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    • 7. 发明授权
    • Method for manufacturing vertically structured light emitting diode
    • 制造垂直结构发光二极管的方法
    • US07473571B2
    • 2009-01-06
    • US11541674
    • 2006-10-03
    • Hae Yeon HwangYung Ho RyuDa Mi ShimSe Hwan Ahn
    • Hae Yeon HwangYung Ho RyuDa Mi ShimSe Hwan Ahn
    • H01L21/00
    • H01L33/0079H01L33/62H01L2924/0002H01L2924/00
    • There is provided a method for manufacturing a vertically structured LED capable of performing a chip separation process with ease. In the method, a light-emitting structure is formed on a growth substrate having a plurality of device regions and at least one device isolation region, wherein the light-emitting structure has an n-type clad layer, an active layer and a p-type clad layer which are disposed on the growth substrate in sequence. A p-electrode is formed on the light-emitting structure. Thereafter, a first plating layer is formed on the p-electrode such that it connects the plurality of device isolation regions. A pattern of a second plating layer is formed on the first plating layer of the device region. The growth substrate is removed, and an n-electrode is then formed on the n-type clad layer.
    • 提供了一种制造能够容易地进行芯片分离处理的垂直结构的LED的方法。 在该方法中,在具有多个器件区域和至少一个器件隔离区域的生长衬底上形成发光结构,其中,所述发光结构体具有n型覆盖层,有源层和p- 型覆盖层依次设置在生长基板上。 在发光结构上形成p电极。 此后,在p电极上形成第一镀层,使得它连接多个器件隔离区。 在器件区域的第一镀层上形成第二镀层的图案。 去除生长衬底,然后在n型覆盖层上形成n电极。
    • 9. 发明授权
    • Method for manufacturing vertical structure light emitting diode
    • 垂直结构发光二极管的制造方法
    • US07442565B2
    • 2008-10-28
    • US11522407
    • 2006-09-18
    • Yung Ho RyuHae Youn Hwang
    • Yung Ho RyuHae Youn Hwang
    • H01L21/00
    • H01L33/0079H01L33/62H01L33/64H01L2924/0002H01L2933/0075H01L2924/00
    • A method for manufacturing a vertical light emitting diode of the invention allows an easier process of individually separating chips. A light emitting structure is formed on a growth substrate having a plurality of device areas and at least one device isolation area. The light emitting structure has an n-type clad layer, an active layer and a p-type clad layer sequentially formed therein. Corresponding p-type electrodes are formed on the light emitting structure on the device areas. A glass substrate having through holes perforated therein is provided on the p-electrodes so that the through holes are disposed corresponding to the p-electrodes. Also, the through holes are plated with a metal material to form patterns of a plating layer on the p-electrodes. Then, the growth substrate is removed to form n-electrodes on the n-type clad layer. The glass substrate is removed via etching.
    • 本发明的垂直发光二极管的制造方法能够容易地分离芯片。 在具有多个器件区域和至少一个器件隔离区域的生长衬底上形成发光结构。 发光结构具有依次形成的n型覆盖层,有源层和p型覆盖层。 相应的p型电极形成在器件区域上的发光结构上。 在p电极上设置有在其上穿孔的玻璃基板,使得贯通孔对应于p电极。 此外,通孔用金属材料镀覆以在p电极上形成电镀层的图案。 然后,去除生长衬底以在n型覆盖层上形成n电极。 通过蚀刻去除玻璃基板。