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    • 6. 发明授权
    • Multiplexed heater array using AC drive for semiconductor processing
    • 多路加热器阵列采用交流驱动进行半导体处理
    • US09324589B2
    • 2016-04-26
    • US13406978
    • 2012-02-28
    • John PeaseNell Benjamin
    • John PeaseNell Benjamin
    • H05B3/68H01L21/67H01L21/683
    • H05B1/0233H01L21/67103H01L21/6831H05B3/26
    • A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic or polymer sheets having planar heater zones, branch transmission lines, common transmission lines and vias. The heating plate is capable of being driven by AC current or direct current phase alternating power, which has an advantage of minimizing DC magnetic field effects above the substrate support assembly and reduce plasma non-uniformity caused by DC magnetic fields.
    • 一种用于半导体等离子体处理设备中的基板支撑组件的加热板,包括以可伸缩复用布局布置的多个可独立控制的平面加热器区域,以及用于独立地控制和供电平面加热器区域的电子装置。 其中结合加热板的基板支撑组件包括静电夹持电极和温度控制的基板。 制造加热板的方法包括将具有平面加热器区域,分支传输线,公共传输线路和通孔的陶瓷或聚合物片材结合在一起。 加热板能够通过交流电流或直流相交流功率驱动,其具有使基板支撑组件上方的直流磁场效应最小化的优点,并且减小由直流磁场引起的等离子体不均匀性。
    • 7. 发明申请
    • SYSTEM AND METHOD FOR MONITORING TEMPERATURES OF AND CONTROLLING MULTIPLEXED HEATER ARRAY
    • 用于监测多管加热器阵列温度和控制的系统和方法
    • US20140048529A1
    • 2014-02-20
    • US13587454
    • 2012-08-16
    • John Pease
    • John Pease
    • H05B1/02
    • H05B1/0202H05B1/0233
    • A system for measuring temperatures of and controlling a multi-zone heating plate in a substrate support assembly used to support a semiconductor substrate in a semiconductor processing includes a current measurement device and switching arrangements. A first switching arrangement connects power return lines selectively to an electrical ground, a voltage supply or an electrically isolated terminal, independent of the other power return lines. A second switching arrangement connects power supply lines selectively to the electrical ground, a power supply, the current measurement device or an electrically isolated terminal, independent of the other power supply lines. The system can be used to maintain a desired temperature profile of the heater plate by taking current readings of reverse saturation currents of diodes serially connected to planar heating zones, calculating temperatures of the heating zones and powering each heater zone to achieve the desired temperature profile.
    • 用于测量半导体处理中用于支撑半导体衬底的衬底支撑组件中的多区域加热板的温度和控制系统包括电流测量装置和开关装置。 第一开关装置将电源返回线选择性地连接到电接地,电压源或电隔离端子,独立于其它功率返回线。 第二开关装置将电源线选择性地连接到电接地,电源,电流测量装置或电隔离端子,独立于其它电源线。 该系统可用于通过获取串联连接到平面加热区的二极管的反向饱和电流的当前读数来计算加热器板的期望温度分布,计算加热区的温度并为每个加热器区域供电以实现期望的温度分布。
    • 9. 发明申请
    • Particles for diagnostic and therapeutic use
    • 用于诊断和治疗用途的颗粒
    • US20060121506A1
    • 2006-06-08
    • US11273275
    • 2005-11-14
    • Sharat SinghJohn PeaseJacqueline SadakianDaniel WagnerEdwin Ullman
    • Sharat SinghJohn PeaseJacqueline SadakianDaniel WagnerEdwin Ullman
    • C12Q1/68C07H21/04C12M1/34
    • G01N33/587C12Q1/6816Y10T436/10C12Q2563/155C12Q2523/319
    • Methods, compositions and kits are disclosed. The compositions are light emitting and comprise a polymeric matrix having dissolved therein a photoactive compound. The composition has the characteristic that, after activation of the photoactive compound, the rate of decrease in the intensity of light emission at any time during a 20-fold decrease in the intensity is proportional to the intensity of the light emission. In one embodiment the polymeric matrix is comprised of particles of about 20 nm to about 100 μm in diameter to which is bound a specific binding pair member. The particles generally comprise a polymeric matrix having dissolved therein about 1 to about 20% by weight of a dopant. The compositions may be used in methods for determining an analyte. A combination is provided comprising (1) a medium suspected of containing the analyte, (2) and the aforementioned composition. The photoactive substance is activated and the effect of the activating on the optical properties of the combination is detected. The presence and amount of the effect is related to the presence and amount of the analyte in the medium. Also disclosed are kits for use in an assay.
    • 公开了方法,组合物和试剂盒。 组合物是发光的并且包含其中溶解有光敏化合物的聚合物基质。 该组合物具有以下特征:在光活性化合物活化后,强度降低20倍的任何时间的发光强度的降低率与发光强度成比例。 在一个实施方案中,聚合物基质包括直径约20nm至约100μm的颗粒,其与特定结合对成员结合。 颗粒通常包含其中溶解约1至约20重量%的掺杂剂的聚合物基质。 该组合物可用于测定分析物的方法中。 提供的组合包括(1)怀疑含有分析物的介质,(2)和上述组合物。 光活性物质被激活,并且检测到激活对组合的光学性质的影响。 影响的存在和数量与介质中分析物的存在和数量有关。 还公开了用于测定的试剂盒。