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1. 发明授权

US09324589B2 Multiplexed heater array using AC drive for semiconductor processing 有权
标题翻译：多路加热器阵列采用交流驱动进行半导体处理
公开(公告)号：US09324589B2
公开(公告)日：2016-04-26
申请号：US13406978
申请日：2012-02-28
申请人： John Pease , Nell Benjamin
发明人： John Pease , Nell Benjamin
IPC分类号： H05B3/68 , H01L21/67 , H01L21/683
CPC分类号： H05B1/0233 , H01L21/67103 , H01L21/6831 , H05B3/26
摘要： A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic or polymer sheets having planar heater zones, branch transmission lines, common transmission lines and vias. The heating plate is capable of being driven by AC current or direct current phase alternating power, which has an advantage of minimizing DC magnetic field effects above the substrate support assembly and reduce plasma non-uniformity caused by DC magnetic fields.
摘要翻译：一种用于半导体等离子体处理设备中的基板支撑组件的加热板，包括以可伸缩复用布局布置的多个可独立控制的平面加热器区域，以及用于独立地控制和供电平面加热器区域的电子装置。其中结合加热板的基板支撑组件包括静电夹持电极和温度控制的基板。制造加热板的方法包括将具有平面加热器区域，分支传输线，公共传输线路和通孔的陶瓷或聚合物片材结合在一起。加热板能够通过交流电流或直流相交流功率驱动，其具有使基板支撑组件上方的直流磁场效应最小化的优点，并且减小由直流磁场引起的等离子体不均匀性。

2. 发明申请

US20130220989A1 MULTIPLEXED HEATER ARRAY USING AC DRIVE FOR SEMICONDUCTOR PROCESSING 有权
标题翻译：使用交流驱动的多路加热器阵列进行半导体加工
公开(公告)号：US20130220989A1
公开(公告)日：2013-08-29
申请号：US13406978
申请日：2012-02-28
申请人： John Pease , Nell Benjamin
发明人： John Pease , Nell Benjamin
IPC分类号： H05B3/68
CPC分类号： H05B1/0233 , H01L21/67103 , H01L21/6831 , H05B3/26
摘要： A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic or polymer sheets having planar heater zones, branch transmission lines, common transmission lines and vias. The heating plate is capable of being driven by AC current or direct current phase alternating power, which has an advantage of minimizing DC magnetic field effects above the substrate support assembly and reduce plasma non-uniformity caused by DC magnetic fields.
摘要翻译：一种用于半导体等离子体处理设备中的基板支撑组件的加热板，包括以可伸缩复用布局布置的多个可独立控制的平面加热器区域，以及用于独立地控制和供电平面加热器区域的电子装置。其中结合加热板的基板支撑组件包括静电夹持电极和温度控制的基板。制造加热板的方法包括将具有平面加热器区域，分支传输线，公共传输线路和通孔的陶瓷或聚合物片材结合在一起。加热板能够通过交流电流或直流相交流功率驱动，其具有使基板支撑组件上方的直流磁场效应最小化的优点，并且减小由直流磁场引起的等离子体不均匀性。

3. 发明申请

US20140048529A1 SYSTEM AND METHOD FOR MONITORING TEMPERATURES OF AND CONTROLLING MULTIPLEXED HEATER ARRAY 有权
标题翻译：用于监测多管加热器阵列温度和控制的系统和方法
公开(公告)号：US20140048529A1
公开(公告)日：2014-02-20
申请号：US13587454
申请日：2012-08-16
申请人： John Pease
发明人： John Pease
IPC分类号： H05B1/02
CPC分类号： H05B1/0202 , H05B1/0233
摘要： A system for measuring temperatures of and controlling a multi-zone heating plate in a substrate support assembly used to support a semiconductor substrate in a semiconductor processing includes a current measurement device and switching arrangements. A first switching arrangement connects power return lines selectively to an electrical ground, a voltage supply or an electrically isolated terminal, independent of the other power return lines. A second switching arrangement connects power supply lines selectively to the electrical ground, a power supply, the current measurement device or an electrically isolated terminal, independent of the other power supply lines. The system can be used to maintain a desired temperature profile of the heater plate by taking current readings of reverse saturation currents of diodes serially connected to planar heating zones, calculating temperatures of the heating zones and powering each heater zone to achieve the desired temperature profile.
摘要翻译：用于测量半导体处理中用于支撑半导体衬底的衬底支撑组件中的多区域加热板的温度和控制系统包括电流测量装置和开关装置。第一开关装置将电源返回线选择性地连接到电接地，电压源或电隔离端子，独立于其它功率返回线。第二开关装置将电源线选择性地连接到电接地，电源，电流测量装置或电隔离端子，独立于其它电源线。该系统可用于通过获取串联连接到平面加热区的二极管的反向饱和电流的当前读数来计算加热器板的期望温度分布，计算加热区的温度并为每个加热器区域供电以实现期望的温度分布。

4. 发明授权

US07209498B1 Method and apparatus for tuning a laser 有权
标题翻译：用于调谐激光的方法和装置
公开(公告)号：US07209498B1
公开(公告)日：2007-04-24
申请号：US09848914
申请日：2001-05-04
申请人： William B. Chapman , Timothy Day , John Pease , Paul Zorbedian
发明人： William B. Chapman , Timothy Day , John Pease , Paul Zorbedian
IPC分类号： H01S3/10
CPC分类号： H01S5/141 , H01S3/1062 , H01S5/02248 , H01S5/02284
摘要： The present invention provides a tunable laser with a compact form factor and precise tuning to any selected center wavelength of a selected wavelength grid. A novel tuning technique is disclosed which includes tuning the laser to selected passbands, as well as tuning the optical path length of the laser utilizing a variety of tuning elements and a feedback circuit working together.
摘要翻译：本发明提供了具有紧凑形状因数的可调谐激光器，并且精确地调谐到所选择的波长网格的任何选定的中心波长。公开了一种新颖的调谐技术，其包括将激光器调谐到选定的通带，以及利用各种调谐元件和一起工作的反馈电路调谐激光器的光程长度。

5. 发明申请

US20060121506A1 Particles for diagnostic and therapeutic use 有权
标题翻译：用于诊断和治疗用途的颗粒
公开(公告)号：US20060121506A1
公开(公告)日：2006-06-08
申请号：US11273275
申请日：2005-11-14
申请人： Sharat Singh , John Pease , Jacqueline Sadakian , Daniel Wagner , Edwin Ullman
发明人： Sharat Singh , John Pease , Jacqueline Sadakian , Daniel Wagner , Edwin Ullman
IPC分类号： C12Q1/68 , C07H21/04 , C12M1/34
CPC分类号： G01N33/587 , C12Q1/6816 , Y10T436/10 , C12Q2563/155 , C12Q2523/319
摘要： Methods, compositions and kits are disclosed. The compositions are light emitting and comprise a polymeric matrix having dissolved therein a photoactive compound. The composition has the characteristic that, after activation of the photoactive compound, the rate of decrease in the intensity of light emission at any time during a 20-fold decrease in the intensity is proportional to the intensity of the light emission. In one embodiment the polymeric matrix is comprised of particles of about 20 nm to about 100 μm in diameter to which is bound a specific binding pair member. The particles generally comprise a polymeric matrix having dissolved therein about 1 to about 20% by weight of a dopant. The compositions may be used in methods for determining an analyte. A combination is provided comprising (1) a medium suspected of containing the analyte, (2) and the aforementioned composition. The photoactive substance is activated and the effect of the activating on the optical properties of the combination is detected. The presence and amount of the effect is related to the presence and amount of the analyte in the medium. Also disclosed are kits for use in an assay.
摘要翻译：公开了方法，组合物和试剂盒。组合物是发光的并且包含其中溶解有光敏化合物的聚合物基质。该组合物具有以下特征：在光活性化合物活化后，强度降低20倍的任何时间的发光强度的降低率与发光强度成比例。在一个实施方案中，聚合物基质包括直径约20nm至约100μm的颗粒，其与特定结合对成员结合。颗粒通常包含其中溶解约1至约20重量％的掺杂剂的聚合物基质。该组合物可用于测定分析物的方法中。提供的组合包括（1）怀疑含有分析物的介质，（2）和上述组合物。光活性物质被激活，并且检测到激活对组合的光学性质的影响。影响的存在和数量与介质中分析物的存在和数量有关。还公开了用于测定的试剂盒。

6. 发明授权

US06304586B1 Method and apparatus for modulating a tunable laser 失效
标题翻译：用于调制可调激光器的方法和装置
公开(公告)号：US06304586B1
公开(公告)日：2001-10-16
申请号：US09393400
申请日：1999-09-10
申请人： John Pease , Robert A. Carney
发明人： John Pease , Robert A. Carney
IPC分类号： H01S300
CPC分类号： H01S5/02248 , H01S3/105 , H01S3/1055 , H01S5/0427 , H01S5/0617 , H01S5/06213 , H01S5/06804 , H01S5/06832 , H01S5/0687 , H01S5/1039 , H01S5/141 , H01S5/143
摘要： The present invention provides an optical signal generator for use in calibrating and testing optical components. The optical signal generator utilizes a tunable laser in conjunction with a novel modulation circuit to output an analog/digital optical signal. The modulator circuit combines a low-frequency, closed loop power control with a separate digital modulator. The output beam of the tunable laser may be modulated over a wide range of frequencies, duty cycles and amplitudes. Circuitry is also provided for modulation of an analog signal onto the output.
摘要翻译：本发明提供了用于校准和测试光学部件的光信号发生器。光信号发生器利用可调谐激光器结合新颖的调制电路来输出模拟/数字光信号。调制器电路将低频，闭环功率控制与单独的数字调制器相结合。可调激光器的输出光束可以在宽范围的频率，占空比和幅度上进行调制。还提供电路用于将模拟信号调制到输出上。

7. 发明授权

US09074285B2 Systems for detecting unconfined-plasma events 有权
标题翻译：无侧限等离子体事件检测系统
公开(公告)号：US09074285B2
公开(公告)日：2015-07-07
申请号：US12101804
申请日：2008-04-11
申请人： John Pease , Seyed Jafar Jafarian-Tehrani
发明人： John Pease , Seyed Jafar Jafarian-Tehrani
IPC分类号： C23C16/00 , C23F4/00 , H01J37/32 , H05H1/00
CPC分类号： C23F4/00 , H01J37/32935 , H05H1/0081
摘要： A system for detecting unconfined-plasma events in a plasma processing chamber is disclosed. The system may include a sensor disposed in the plasma processing chamber for providing a current when unconfined plasma is present in the plasma processing chamber. The system may also include a converter for converting the current into a voltage and a filter for removing noise from the voltage to provide a first signal. The system may also include a detector for determining presence of the unconfined plasma using an amplified level of the first signal and/or the first signal. The system may also include a conductor for coupling the sensor and the converter to conduct the current from the sensor to the converter. The system may also include a shield for enclosing at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.
摘要翻译：公开了一种用于检测等离子体处理室中的无约束等离子体事件的系统。该系统可以包括设置在等离子体处理室中的传感器，用于当等离子体处理室中存在无约束等离子体时提供电流。该系统还可以包括用于将电流转换成电压的转换器和用于从电压去除噪声以提供第一信号的滤波器。该系统还可以包括用于使用第一信号和/或第一信号的放大电平来确定无约束等离子体的存在的检测器。该系统还可以包括用于耦合传感器和转换器以将电流从传感器传导到转换器的导体。该系统还可以包括用于封闭导体的至少一部分以至少降低由导体接收的电磁噪声的屏蔽。

8. 发明申请

US20060070735A1 Apparatus and method for well completion 审中-公开
标题翻译：用于完井的装置和方法
公开(公告)号：US20060070735A1
公开(公告)日：2006-04-06
申请号：US11241683
申请日：2005-09-30
申请人： Ricardo Guerra , John Pease
发明人： Ricardo Guerra , John Pease
IPC分类号： E21B21/06 , E21B43/00
CPC分类号： E21B43/34 , E21B2021/006
摘要： A flow back process usable on a well during a drilling operation includes the steps of flowing the commingled well fluids and solids into a surface-mounted flow back system under wellbore pressure. Alternatively, a flow back process includes the steps of connecting a surface-mounted flow back system to the well while the well is in an underbalanced condition. The operation of sequentially drilling through each of a plurality of isolation plugs is then initiated while flowing the well fluids and plug fragments into a surface-mounted flow back system. In yet another aspect, a large particle filter includes a filter section, a monitoring assembly, a bypass system and a purge assembly. The large particle filter can be connected to a Christmas tree and used to remove plug fragments from commingled flow leaving the well during a drilling operation.
摘要翻译：在钻井操作期间可用于井的回流过程包括在井筒压力下将混合的井流体和固体流入表面安装的回流系统的步骤。或者，回流过程包括在井处于欠平衡状态时将表面安装的回流系统连接到井的步骤。然后在将井流体和塞子碎片流入表面安装的回流系统的同时启动顺序钻穿多个隔离塞中的每一个的操作。在另一方面，大颗粒过滤器包括过滤器部分，监控组件，旁路系统和吹扫组件。大颗粒过滤器可以连接到圣诞树，并用于在钻井操作期间从离开井的混合流中去除塞子碎片。

9. 发明授权

US5039818A Squaraine dye 失效
标题翻译：方酸染料
公开(公告)号：US5039818A
公开(公告)日：1991-08-13
申请号：US300996
申请日：1989-01-23
申请人： John Pease , Thomas L. Tarnowski , Donald Berger , Chiu C. Chang
发明人： John Pease , Thomas L. Tarnowski , Donald Berger , Chiu C. Chang
IPC分类号： C07C251/30 , C07C323/41 , C07F5/02 , C09B57/00
CPC分类号： C09B57/007 , C07C251/30 , C07C323/41 , C07F5/025
摘要： Squaraine dyes and compositions of matter containing such dyes are disclosed. The squaraine dyes have an absorption maximum greater than 600 nanometers and are particularly useful in conjunction with a helium/neon (He/Ne) laser. Some of the squaraine dyes are hydrophilic and are therefore water soluble or water compatible and others of the squaraine dyes are lipophilic.
摘要翻译：披露了方酸菁染料和含有这些染料的物质组合物。方酸染料的吸收最大值大于600纳米，特别适用于氦/氖（He / Ne）激光器。一些方酸菁染料是亲水性的，因此是水溶性的或水相容的，而其他方酸菁染料是亲脂性的。

10. 发明授权

US4830786A Squaraine dyes 失效
标题翻译：方酸染料
公开(公告)号：US4830786A
公开(公告)日：1989-05-16
申请号：US834168
申请日：1986-02-27
申请人： John Pease , Thomas L. Tarnowski , Donald Berger , Chiu C. Chang , Chun-Hua Chuang
发明人： John Pease , Thomas L. Tarnowski , Donald Berger , Chiu C. Chang , Chun-Hua Chuang
IPC分类号： C07C251/30 , C07C323/41 , C07F5/02 , C09B57/00
CPC分类号： C07F5/025 , C07C251/30 , C07C323/41 , C09B57/007
摘要： Squaraine dyes and compositions of matter containing such dyes are disclosed. The squaraine dyes have an absorption maximum greater than 600 nanometers and are particulary useful in conjunction with a helium/neon (He/Ne) laser. Some of the squaraine dyes are hydrophilic and are therefore water soluble or water compatible and others of the squaraine dyes are lipophilic.
摘要翻译：披露了方酸菁染料和含有这些染料的物质组合物。方酸菁染料的吸收最大值大于600纳米，特别适用于氦/氖（He / Ne）激光器。一些方酸菁染料是亲水性的，因此是水溶性的或水相容的，而其他方酸菁染料是亲脂性的。

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