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1. 发明授权

US07302132B2 Electrical x-talk shield for MEMs micromirrors 有权
标题翻译：用于MEMs微镜的电气x对讲屏蔽
公开(公告)号：US07302132B2
公开(公告)日：2007-11-27
申请号：US11431665
申请日：2006-05-11
申请人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
发明人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
IPC分类号： G02B6/26 , G02B26/00
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。为了限制相邻反射镜之间的电串扰量，屏蔽可以位于电极之间。屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。当提供两种类型的屏蔽时，一组彼此偏移以防止其邻接，并且能够实现重叠效果，这增强了保护。

2. 发明授权

US07110635B2 Electrical x-talk shield for MEMS micromirrors 有权
标题翻译：用于MEMS微镜的电气x对讲屏蔽
公开(公告)号：US07110635B2
公开(公告)日：2006-09-19
申请号：US10850424
申请日：2004-05-21
申请人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
发明人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
IPC分类号： G02B6/26 , G02B6/35 , G02B26/08
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。为了限制相邻反射镜之间的电串扰量，屏蔽可以位于电极之间。屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。当提供两种类型的屏蔽时，一组彼此偏移以防止其邻接，并且能够实现重叠效果，这增强了保护。

3. 发明授权

US07432629B2 Articulated MEMs structures 有权
标题翻译：铰接式MEMs结构
公开(公告)号：US07432629B2
公开(公告)日：2008-10-07
申请号：US11354052
申请日：2006-02-15
申请人： Mohiuddin Mala , Barrie Keyworth , John Michael Miller , Thomas Ducellier , Graham McKinnon
发明人： Mohiuddin Mala , Barrie Keyworth , John Michael Miller , Thomas Ducellier , Graham McKinnon
IPC分类号： H02N1/00
CPC分类号： G02B6/3584 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B26/0833
摘要： The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.
摘要翻译：铰接式微电机械（MEMS）装置技术领域本发明涉及一种关节式微电机械（MEMS）装置，其以这样的方式构造，以使得几个装置能够紧密地包装在一起，即高填充因子，用于重定向来自将光信号分散到不同的输出端口。铰接的MEMS装置包括多个可枢转地连接的部分，其可围绕两个垂直轴线枢转，以限制当装置在不同位置之间旋转时的动态串扰量。

4. 发明申请

US20060210218A1 Electrical x-talk shield for MEMs micromirrors 有权
标题翻译：用于MEMs微镜的电气x对讲屏蔽
公开(公告)号：US20060210218A1
公开(公告)日：2006-09-21
申请号：US11431665
申请日：2006-05-11
申请人： John Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
发明人： John Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
IPC分类号： G02B6/26
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。为了限制相邻反射镜之间的电串扰量，屏蔽可以位于电极之间。屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。当提供两种类型的屏蔽时，一组彼此偏移以防止其邻接，并且能够实现重叠效果，这增强了保护。

5. 发明申请

US20050041916A1 Electrical x-talk shield for MEMS micromirrors 有权
标题翻译：用于MEMS微镜的电气x对讲屏蔽
公开(公告)号：US20050041916A1
公开(公告)日：2005-02-24
申请号：US10850424
申请日：2004-05-21
申请人： John Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
发明人： John Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
IPC分类号： G02B6/26
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。为了限制相邻反射镜之间的电串扰量，屏蔽可以位于电极之间。屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。当提供两种类型的屏蔽时，一组彼此偏移以防止其邻接，并且能够实现重叠效果，这增强了保护。

6. 发明授权

US06934439B2 Piano MEMs micromirror 有权
标题翻译：钢琴MEMs微镜
公开(公告)号：US06934439B2
公开(公告)日：2005-08-23
申请号：US10445360
申请日：2003-05-27
申请人： Mohiuddin Mala , John Michael Miller , Graham McKinnon , Yuan Ma
发明人： Mohiuddin Mala , John Michael Miller , Graham McKinnon , Yuan Ma
IPC分类号： B81B3/00 , B81B7/02 , B81B7/04 , G02B6/35 , H04J14/02 , G02B26/08
CPC分类号： B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B6/3544 , G02B6/356 , G02B6/357 , G02B6/3584 , Y10S359/904
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。

7. 发明申请

US20060222312A1 Articulated MEMs structures 有权
标题翻译：铰接式MEMs结构
公开(公告)号：US20060222312A1
公开(公告)日：2006-10-05
申请号：US11354052
申请日：2006-02-15
申请人： Mohiuddin Mala , Barrie Keyworth , John Miller , Thomas Ducellier , Graham McKinnon
发明人： Mohiuddin Mala , Barrie Keyworth , John Miller , Thomas Ducellier , Graham McKinnon
IPC分类号： G02B6/00
CPC分类号： G02B6/3584 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B26/0833
摘要： The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.
摘要翻译：铰接式微电机械（MEMS）装置技术领域本发明涉及一种关节式微电机械（MEMS）装置，其以这样的方式构造，以使得几个装置能够紧密地包装在一起，即高填充因子，用于重定向来自将光信号分散到不同的输出端口。铰接的MEMS装置包括多个可枢转地连接的部分，其可围绕两个垂直轴线枢转，以限制当装置在不同位置之间旋转时的动态串扰量。

8. 发明授权

US07110637B2 Two-step electrode for MEMs micromirrors 有权
标题翻译：用于MEMs微镜的两步电极
公开(公告)号：US07110637B2
公开(公告)日：2006-09-19
申请号：US10944840
申请日：2004-09-21
申请人： Yuan Ma , Mohiuddin Mala , John Michael Miller
发明人： Yuan Ma , Mohiuddin Mala , John Michael Miller
IPC分类号： G02B6/35 , G02B26/08
CPC分类号： B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B6/3544 , G02B6/356 , G02B6/357 , G02B6/3584
摘要： A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment the range of angular motion of a MEMs device's platform is increased by reducing the field strength, i.e. the force per unit area, that is sensed at the outer free ends of the platform. Ideally two-step electrodes are provided with a lower step positioned beneath the outer free end of the platform.
摘要翻译： “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在优选实施例中，通过减小在平台的外部自由端处感测到的场强（即每单位面积的力）来增加MEMs装置平台的角运动范围。理想地，两级电极设置有位于平台的外部自由端下方的下部台阶。

9. 发明申请

US20050089267A1 Two-step electrode for MEMs micromirrors 有权
标题翻译：用于MEMs微镜的两步电极
公开(公告)号：US20050089267A1
公开(公告)日：2005-04-28
申请号：US10944840
申请日：2004-09-21
申请人： Yuan Ma , Mohiuddin Mala , John Miller
发明人： Yuan Ma , Mohiuddin Mala , John Miller
IPC分类号： G02B6/26 , G02B6/35
CPC分类号： B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B6/3544 , G02B6/356 , G02B6/357 , G02B6/3584
摘要： A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment the range of angular motion of a MEMs device's platform is increased by reducing the field strength, i.e. the force per unit area, that is sensed at the outer free ends of the platform. Ideally two-step electrodes are provided with a lower step positioned beneath the outer free end of the platform.
摘要翻译： “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装，仅具有相对的两者之间的空气间隙较小。在优选实施例中，通过减小在平台的外部自由端处感测到的场强（即每单位面积的力）来增加MEMs装置平台的角运动范围。理想地，两级电极设置有位于平台的外部自由端下方的下部台阶。

10. 发明授权

US06462858B1 Fast attenuator 失效
标题翻译：快衰减器
公开(公告)号：US06462858B1
公开(公告)日：2002-10-08
申请号：US09783529
申请日：2001-02-15
申请人： Robert I. MacDonald , Lianxiang Yang , Phillipe Lonjoux , Paul Colbourne , Mohiuddin Mala
发明人： Robert I. MacDonald , Lianxiang Yang , Phillipe Lonjoux , Paul Colbourne , Mohiuddin Mala
IPC分类号： G02B2600
CPC分类号： G02B26/0825
摘要： The invention provides a fast variable optical attenuator including a reflective membrane that serves as a varifocal mirror. Electrostatic deflection of the mirror defocuses the optical system and attenuates an optical signal launched to the mirror from an input port to an output port. Since the mirror is generally limited to deflections less than 1 micron, fast attenuation within a small (
摘要翻译：本发明提供一种包括用作变焦镜的反射膜的快速可变光衰减器。镜的静电偏转使光学系统散焦，并将从反射镜发射的光信号从输入端口衰减到输出端口。由于镜子通常限制在小于1微米的偏转，所以在小（<5 dB）动态范围内实现快速衰减。通过将快衰减器与较慢的衰减器组合来提高动态范围。在优选实施例中，慢速和快速衰减器不通过光波导耦合，而是通过自由空间光学耦合或集成在同一设备中。有利地，这种紧凑的布置减少了与光纤耦合相关联的额外损耗并降低了封装成本。

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