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1. 发明授权

US06235634B1 Modular substrate processing system 失效
标题翻译：模块化基板处理系统
公开(公告)号：US06235634B1
公开(公告)日：2001-05-22
申请号：US09082483
申请日：1998-05-20
申请人： John M. White , Robert B. Conner , Kam S. Law , Norman L. Turner , William T. Lee , Shinichi Kurita
发明人： John M. White , Robert B. Conner , Kam S. Law , Norman L. Turner , William T. Lee , Shinichi Kurita
IPC分类号： H01L2144
CPC分类号： H01L21/67167 , H01L21/67161 , H01L21/67173 , H01L21/67236 , H01L21/67721 , H01L21/67727 , H01L21/67736 , H01L21/68707
摘要： The invention provides an apparatus and method for performing a process on a substrate. At least two types of structures may be used to provide a flow path for a substrate so that the substrate may be moved from one processing or loading position to another. The first is a conveyor. The second is a track. The flow path may be a closed continuous loop. Each processing island has a valve for introduction and extraction of the substrate into and out of an interior of the island. The processing island may include load locks, and may include in conjunction therewith an inspection station, a CVD chamber, a PECVD chamber, a PVD chamber, a post-anneal chamber, a cleaning chamber, a descumming chamber, an etch chamber, or a combination of such chambers.
摘要翻译：本发明提供了一种在衬底上进行处理的装置和方法。可以使用至少两种类型的结构来提供用于衬底的流动路径，使得衬底可以从一个处理或装载位置移动到另一个。第一个是输送机。第二是轨道。流动路径可以是闭合的连续环路。每个处理岛具有用于将基板引入和提取到岛内部的阀。处理岛可以包括负载锁，并且可以包括检查站，CVD室，PECVD室，PVD室，后退火室，清洁室，除污室，蚀刻室或这些室的组合。

2. 发明授权

US06557967B1 Method for making ink-jet printer nozzles 失效
标题翻译：制造喷墨打印机喷嘴的方法
公开(公告)号：US06557967B1
公开(公告)日：2003-05-06
申请号：US09722891
申请日：2000-11-27
申请人： William T. Lee
发明人： William T. Lee
IPC分类号： B41S214
CPC分类号： B41J2/1628 , B41J2/1433 , B41J2/162 , B41J2/1629
摘要： A method for forming a chamber or nozzle structure in a substrate. The chamber is formed by first creating a surface feature, such as a pit or trench, on the surface of the substrate. A layer of resist is applied to the sidewall of the surface feature and the substrate is isotropically etched such that the etch works back up the inside of the resist on the surface feature sidewall to form a re-entrant angle between the surface feature sidewall and the top of the chamber wall. This results in a chamber that is wider than the opening between the sidewalls of the surface feature. An anisotropic etch step may be performed before or after the isotropic etch step or steps to control the final shape of the chamber.
摘要翻译：一种在衬底中形成腔或喷嘴结构的方法。通过首先在衬底的表面上产生诸如凹坑或沟槽的表面特征来形成腔室。将抗蚀剂层施加到表面特征的侧壁上，并且基板被各向同性地蚀刻，使得蚀刻在表面特征侧壁上的抗蚀剂的内部起作用以在表面特征侧壁和室壁顶部。这导致比表面特征的侧壁之间的开口更宽的室。可以在各向同性蚀刻步骤之前或之后进行各向异性蚀刻步骤或控制室的最终形状的步骤。

3. 发明授权

US08518815B2 Methods, devices, and materials for metallization 有权
标题翻译：用于金属化的方法，装置和材料
公开(公告)号：US08518815B2
公开(公告)日：2013-08-27
申请号：US12832034
申请日：2010-07-07
申请人： Artur Kolics , William T. Lee , Fritz Redeker
发明人： Artur Kolics , William T. Lee , Fritz Redeker
IPC分类号： H01L21/44
CPC分类号： H01L24/04 , H01L21/76849 , H01L23/481 , H01L24/03 , H01L24/05 , H01L2224/03464 , H01L2224/0401 , H01L2224/05026 , H01L2224/05099 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05157 , H01L2224/05571 , H01L2224/05573 , H01L2224/05599 , H01L2224/05611 , H01L2224/05639 , H01L2224/05647 , H01L2224/05655 , H01L2224/05657 , H01L2224/05666 , H01L2224/13 , H01L2224/13023 , H01L2224/13025 , H01L2224/13099 , H01L2224/131 , H01L2224/13599 , H01L2224/29099 , H01L2224/29599 , H01L2924/00012 , H01L2924/00013 , H01L2924/00014 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/014 , H01L2924/14 , H01L2224/05552 , H01L2924/00
摘要： A method of making an electronic device which in one embodiment comprises providing a substrate, electrolessly depositing a barrier metal at least on portions of the substrate, and using wet chemistry such as electroless deposition to deposit a substantially gold-free wetting layer having solder wettability onto the barrier metal. An electronic device which in one embodiment comprises a metallization stack. The metallization stack comprises a barrier metal deposited electrolessly and a substantially gold-free wetting layer deposited on the barrier metal, and the wetting layer is wettable by solder.
摘要翻译：一种制造电子器件的方法，其在一个实施例中包括提供衬底，至少在衬底的一部分上无电沉积阻挡金属，并且使用湿化学如无电镀沉积将具有焊料润湿性的基本上无金的润湿层沉积到屏障金属。在一个实施例中的电子设备包括金属化堆叠。金属化堆叠包括无电沉积的阻挡金属和沉积在阻挡金属上的基本无金的润湿层，并且润湿层可被焊料润湿。

4. 发明授权

US5244796A Cloned Leuconostoc mesenteroides glucose-6-phosphate dehydrogenase genes and method of making glucose-6-phospate dehydrogenase 失效
标题翻译：克隆的紫球藻MESENTEROIDES GLUCOSE-6-PHOSPHATE DEHYDROGENASE基因及其制备葡萄糖-6-磷酸脱氢酶的方法
公开(公告)号：US5244796A
公开(公告)日：1993-09-14
申请号：US596867
申请日：1990-10-12
申请人： Hans R. Levy , William T. Lee
发明人： Hans R. Levy , William T. Lee
IPC分类号： C12N9/04 , C12N15/09 , C12N15/53 , C12R1/01
CPC分类号： C12N9/0006
摘要： The Glc6PD genome of Leuconostoc mesenteroides is isolated. Oligonucleotides complementary to sequences upstream and downstream to the Glc6PD genome are prepared and used to amplify the genome by the polymerase chain reaction. The amplified gene is isolated and cloned into pUC19. The recombinant plasmid expresses the gene in E. coli.
摘要翻译：分离出肠道明串珠菌的Glc6PD基因组。制备与Glc6PD基因组上游和下游序列互补的寡核苷酸，并用于通过聚合酶链反应扩增基因组。将扩增的基因分离并克隆到pUC19中。重组质粒在大肠杆菌中表达该基因。

5. 发明授权

US4074775A Power swivel 失效
标题翻译：电动旋转
公开(公告)号：US4074775A
公开(公告)日：1978-02-21
申请号：US688464
申请日：1976-05-20
申请人： William T. Lee
发明人： William T. Lee
IPC分类号： E21B3/02 , E21B3/06
CPC分类号： E21B3/02
摘要： A power swivel particularly adapted for downhole cementing operations. The power swivel includes a housing having a fluid passageway therethrough and a stem assembly mounted for rotational movement with respect to the housing and having a fluid passageway communicating with the housing passageway. A hollow bore motor mounted with the housing receives the stem assembly through a central bore of the motor and rotates the stem assembly with respect to the housing.
摘要翻译：一种电动旋转装置，特别适用于井下固井作业。动力旋转件包括具有穿过其中的流体通道的壳体和安装成相对于壳体旋转运动并具有与壳体通道连通的流体通道的杆组件。安装有壳体的中空孔马达通过马达的中心孔接收杆组件，并使杆组件相对于壳体旋转。

6. 发明申请

US20120007239A1 METHODS, DEVICES, AND MATERIALS FOR METALLIZATION 有权
标题翻译：用于金属化的方法，装置和材料
公开(公告)号：US20120007239A1
公开(公告)日：2012-01-12
申请号：US12832034
申请日：2010-07-07
申请人： Artur Kolics , William T. Lee , Fritz Redeker
发明人： Artur Kolics , William T. Lee , Fritz Redeker
IPC分类号： H01L23/488 , H01L21/768
CPC分类号： H01L24/04 , H01L21/76849 , H01L23/481 , H01L24/03 , H01L24/05 , H01L2224/03464 , H01L2224/0401 , H01L2224/05026 , H01L2224/05099 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05157 , H01L2224/05571 , H01L2224/05573 , H01L2224/05599 , H01L2224/05611 , H01L2224/05639 , H01L2224/05647 , H01L2224/05655 , H01L2224/05657 , H01L2224/05666 , H01L2224/13 , H01L2224/13023 , H01L2224/13025 , H01L2224/13099 , H01L2224/131 , H01L2224/13599 , H01L2224/29099 , H01L2224/29599 , H01L2924/00012 , H01L2924/00013 , H01L2924/00014 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01074 , H01L2924/014 , H01L2924/14 , H01L2224/05552 , H01L2924/00
摘要： A method of making an electronic device which in one embodiment comprises providing a substrate, electrolessly depositing a barrier metal at least on portions of the substrate, and using wet chemistry such as electroless deposition to deposit a substantially gold-free wetting layer having solder wettability onto the barrier metal. An electronic device which in one embodiment comprises a metallization stack. The metallization stack comprises a barrier metal deposited electrolessly and a substantially gold-free wetting layer deposited on the barrier metal, and the wetting layer is wettable by solder.
摘要翻译：一种制造电子器件的方法，其在一个实施例中包括提供衬底，至少在衬底的一部分上无电沉积阻挡金属，并且使用湿化学如无电镀沉积将具有焊料润湿性的基本上无金的润湿层沉积到屏障金属。在一个实施例中的电子设备包括金属化堆叠。金属化堆叠包括无电沉积的阻挡金属和沉积在阻挡金属上的基本无金的润湿层，并且润湿层可被焊料润湿。

7. 发明授权

US06171510B2 Method for making ink-jet printer nozzles 失效
标题翻译：制造喷墨打印机喷嘴的方法
公开(公告)号：US06171510B2
公开(公告)日：2001-01-09
申请号：US08960769
申请日：1997-10-30
申请人： William T. Lee
发明人： William T. Lee
IPC分类号： G01D1520
CPC分类号： B41J2/1628 , B41J2/1433 , B41J2/162 , B41J2/1629
摘要： A method for forming a chamber or nozzle structure in a substrate. The chamber is formed by first creating a surface feature, such as a pit or trench, on the surface of the substrate. A layer of resist is applied to the sidewall of the surface feature and the substrate is isotropically etched such that the etch works back up the inside of the resist on the surface feature sidewall to form a re-entrant angle between the surface feature sidewall and the top of the chamber wall. This results in a chamber that is wider than the opening between the sidewalls of the surface feature. An anisotropic etch step may be performed before or after the isotropic etch step or steps to control the final shape of the chamber.
摘要翻译：一种在衬底中形成腔或喷嘴结构的方法。通过首先在衬底的表面上产生诸如凹坑或沟槽的表面特征来形成腔室。将抗蚀剂层施加到表面特征的侧壁上，并且基板被各向同性地蚀刻，使得蚀刻在表面特征侧壁上的抗蚀剂的内部起作用以在表面特征侧壁和室壁顶部。这导致比表面特征的侧壁之间的开口更宽的室。可以在各向同性蚀刻步骤之前或之后进行各向异性蚀刻步骤或控制室的最终形状的步骤。

8. 发明授权

US5530372A Method of probing a net of an IC at an optimal probe-point 失效
标题翻译：在最佳探针点探测IC网络的方法
公开(公告)号：US5530372A
公开(公告)日：1996-06-25
申请号：US228027
申请日：1994-04-15
申请人： William T. Lee , Ronny Soetarman , Christopher G. Talbot
发明人： William T. Lee , Ronny Soetarman , Christopher G. Talbot
IPC分类号： G01R31/26 , G01R31/28 , G01R31/302 , G01R31/303
CPC分类号： G01R31/303 , G01R31/2886 , H01J2237/2594 , H01J2237/30416
摘要： Probe-point placement methods are described. A layout description, a netlist description and a cross-reference description of an IC are retrieved from storage. The data structures associate with each net name a list of polygons. Polygons of a selected net are broken into segments of a specified step size. Each segment is evaluated in accordance with a set of prober rules. Values produced by the prober rules are weighted and combined to obtain a prober score for each segment. The prober score indicates suitability of the corresponding net location for probing. If the best prober score indicates an optimal segment exists for probing, the coordinates of that segment are stored and used to direct a probe to the corresponding location of the IC. If the best prober score indicates no optimal segment exists for probing, each segment of the net is evaluated in accordance with a set of probe-point cutter rules. Values produced by the probe-point cutter rules are weighted and combined to obtain a cutter score for each segment. The cutter score indicates suitability of the corresponding net location for cutting a probe-point hole. A segment having the best cutter score is considered optimal for placing a probe point. The methods can be used, e.g., with electron-beam, focused-ion-beam and laser-beam systems, and with mechanical probe systems.
摘要翻译：描述探针点放置方法。从存储器检索布局描述，网表描述和IC的交叉引用描述。数据结构与每个网络名称相关联的多边形列表。所选网络的多边形被分解成指定步长的段。每个段都按照一组探测器规则进行评估。由探测器规则产生的值被加权并组合以获得每个段的探测器得分。探测器分数表示相应的净位置适用于探测。如果最好的探针分数表示存在用于探测的最佳分段，则该段的坐标被存储并用于将探针引导到IC的对应位置。如果最佳探测器分数表示探测不存在最佳分段，则根据一组探针切割器规则评估网络的每个分段。由探针切割器规则产生的值被加权并组合以获得每个切片的切割分数。切割分数表示用于切割探针孔的相应净位置的适用性。具有最佳切割分数的片段被认为是放置探针点的最佳选择。该方法可以用于例如电子束，聚焦离子束和激光束系统以及机械探针系统。

9. 发明授权

US5675499A Optimal probe point placement 失效
标题翻译：最佳探针点放置
公开(公告)号：US5675499A
公开(公告)日：1997-10-07
申请号：US626484
申请日：1996-04-02
申请人： William T. Lee , Ronny Soetarman , Christopher Graham Talbot
发明人： William T. Lee , Ronny Soetarman , Christopher Graham Talbot
IPC分类号： G01R31/26 , G01R31/28 , G01R31/302 , G01R31/303
CPC分类号： G01R31/303 , G01R31/2886 , H01J2237/2594 , H01J2237/30416
摘要： Probe-point placement methods are described. A layout description, a netlist description and a cross-reference description of an IC are retrieved from storage. The data structures associate with each net name a list of polygons. Polygons of a selected net are broken into segments of a specified step size. Each segment is evaluated in accordance with a set of prober rules. Values produced by the prober rules are weighted and combined to obtain a prober score for each segment. The prober score indicates suitability of the corresponding net location for probing. If the best prober score indicates an optimal segment exists for probing, the coordinates of that segment are stored and used to direct a probe to the corresponding location of the IC. If the best prober score indicates no optimal segment exists for probing, each segment of the net is evaluated in accordance with a set of probe-point cutter rules. Values produced by the probe-point cutter rules are weighted and combined to obtain a cutter score for each segment. The cutter score indicates suitability of the corresponding net location for cutting a probe-point hole. A segment having the best cutter score is considered optimal for placing a probe point. The methods can be used, e.g., with electron-beam, focused-ion-beam and laser-beam systems, and with mechanical probe systems.
摘要翻译：描述探针点放置方法。从存储器检索布局描述，网表描述和IC的交叉引用描述。数据结构与每个网络名称相关联的多边形列表。所选网络的多边形被分解成指定步长的段。每个段都按照一组探测器规则进行评估。由探测器规则产生的值被加权并组合以获得每个段的探测器得分。探测器分数表示相应的净位置适用于探测。如果最好的探针分数表示存在用于探测的最佳分段，则该段的坐标被存储并用于将探针引导到IC的对应位置。如果最佳探测器分数表示探测不存在最佳分段，则根据一组探针切割器规则评估网络的每个分段。由探针切割器规则产生的值被加权并组合以获得每个切片的切割分数。切割分数表示用于切割探针孔的相应净位置的适用性。具有最佳切割分数的片段被认为是放置探针点的最佳选择。该方法可以用于例如电子束，聚焦离子束和激光束系统以及机械探针系统。

10. 发明授权

US4830092A Heat enhancers and salt purifiers for thermal energy storage canister 失效
标题翻译：用于热能储存罐的增氧剂和盐净化器
公开(公告)号：US4830092A
公开(公告)日：1989-05-16
申请号：US923441
申请日：1986-10-27
申请人： William T. Lee
发明人： William T. Lee
IPC分类号： F02G1/044 , F28D20/02
CPC分类号： F02G1/0445 , F28D20/02 , F02G2250/18 , F02G2254/30 , Y02E60/145 , Y02E70/30
摘要： A solar collector thermal power system 10 which includes thermal energy storage units (22) containing thermal energy storage canisters (28) with the associated heat enhancers and purifiers. A fluid is directed through the canisters to heat a phase change salt contained therein, which stored heat may later be utilized such as in a space station heat engine.
摘要翻译：一种太阳能收集器火力发电系统10，其包括含有热能储存罐（28）的热能存储单元（28）和相关联的热增强器和净化器。流体被引导通过罐以加热其中所含的相变盐，其后可以使用储存的热量，例如在空间站热机中。

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