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1. 发明授权

US06903486B2 Balanced microdevice 有权
标题翻译：平衡微型设备
公开(公告)号：US06903486B2
公开(公告)日：2005-06-07
申请号：US10251035
申请日：2002-09-19
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H01S3/1055 , H01S5/022 , H01S5/0687 , H01S5/14 , H02N1/00
CPC分类号： H02N1/008
摘要： A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.
摘要翻译：平衡微型装置，包括基板，覆盖基板的可移动结构，元件和杠杆组件，其具有联接到枢轴并且可围绕枢轴枢转的枢轴和杠杆。杠杆具有联接到可移动结构的第一末端和耦合到元件的相对的第二末端。可移动结构使得杠杆围绕枢轴枢转，以使元件沿行进方向移动。元件基本上是机械平衡的，以防止元件响应于外部施加的力在行进方向上的不期望的移动。

2. 发明授权

US6049650A Structure for micro-machine optical tooling and method for making and using 失效
标题翻译：微机光学工具结构及制作与使用方法
公开(公告)号：US6049650A
公开(公告)日：2000-04-11
申请号：US107221
申请日：1998-06-30
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： G03F7/40 , B25J7/00 , B81B7/00 , G02B6/36 , G02B6/38 , G02B6/42 , G11B7/22 , G02B6/00 , H01L21/70
CPC分类号： G02B6/3656 , B81C3/008 , G02B6/366 , G02B6/3692 , G11B7/22 , G02B6/3893 , G02B6/42 , G02B6/4219
摘要： Micro-machined tools and component holders useful for the manufacture, assembly, and testing of precision micro-miniature parts are provided, particurlarly embodiments well adapted for precision micro-miniature systems incorporating optical and/or electronic components including lenses, optical fibers, and the like. Structure and method find particular applicability in the precision optical systems of the read, write, or read/write heads of optically assisted storage devices for digital computers. Removable tools are used to temporarily position components while the components are glued or otherwise fixed into place during assembly, and then completely removed for use with another head assembly. Break-away tools or holders typically include three major portions: an element holder, a handle, and a break-away neck portion connecting the holder with the handle. The element holder provides a mounting block for an optical, electrical, or mechanical element. Once the elements are attached to the mounting blocks, they are moved into position within the larger assembly via the handle, the mounting block is glued to the assembly and a small predictable force is applied to the handle to break the neck and separate the handle from the holder which is at that time attached to the assembly. Tools may be formed by photolithographically patterened and etching a substrate such as silicon to selectively carve the substrate. Structures formed from plated metal, either on a base material, or made entirely of metal are also provided by the invention. Several embodiments of process for forming the inventive structures are also provided.
摘要翻译：提供了用于精密微型部件的制造，组装和测试的微加工工具和部件保持器，特别是适用于包括光学和/或电子部件的精密微型系统的实施例，包括透镜，光纤和喜欢。结构和方法在数字计算机的光辅助存储设备的读，写或读/写头的精密光学系统中发现特别适用。可拆卸工具用于临时定位部件，同时组件被胶合或以其他方式在组装期间固定到位，然后完全移除以与另一个头部组件一起使用。分离工具或支架通常包括三个主要部分：元件支架，手柄和将支架与手柄连接的脱离颈部。元件支架为光学，电气或机械元件提供安装块。一旦元件连接到安装块，它们通过手柄移动到更大的组件内的位置，安装块被粘合到组件上，并且将小的可预测的力施加到手柄以打破颈部并将手柄从当时在该大会上的持有人。工具可以通过光刻蚀刻和蚀刻诸如硅的衬底来选择性地雕刻衬底来形成。本发明还提供了由基底材料制成或完全由金属制成的电镀金属形成的结构。还提供了用于形成本发明结构的方法的几个实施例。

3. 发明授权

US5998906A Electrostatic microactuator and method for use thereof 有权
标题翻译：静电微致动器及其使用方法
公开(公告)号：US5998906A
公开(公告)日：1999-12-07
申请号：US135158
申请日：1998-08-17
申请人： John H. Jerman , John D. Grade , Joseph D. Drake
发明人： John H. Jerman , John D. Grade , Joseph D. Drake
IPC分类号： G02B6/35 , G02B6/42 , G02B26/08 , G11B7/135 , H02N1/00
CPC分类号： G02B6/357 , G02B26/0833 , G02B26/0841 , G02B6/4216 , G11B7/1384 , H02N1/008 , G02B6/3518 , G02B6/3548 , G02B6/358 , G02B6/3584
摘要： An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.
摘要翻译：一种静电微致动器，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。第一梳状驱动构件安装在基底上。至少一个梳子驱动组件设置在第一和第二间隔开的梁状弹簧构件之间。第二梳状驱动构件覆盖在基底上。第一和第二梁状构件中的每一个具有固定到基板的第一端部和固定到第二梳状驱动构件的第二端部，用于将第二梳状驱动构件悬挂在基板上。第二梳状驱动构件可以在第一和第二梳状驱动构件的梳状驱动指状物间隔开的第一位置和第一和第二梳状驱动构件的梳状驱动指状物交叉的第二位置之间移动。

4. 发明授权

US06882083B2 Miniature device with bossed suspension member 有权
标题翻译：具有凸起悬挂构件的微型装置
公开(公告)号：US06882083B2
公开(公告)日：2005-04-19
申请号：US10100545
申请日：2002-03-14
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： B81B3/00 , H02N1/00
CPC分类号： H02N1/008
摘要： A miniature device comprising a substrate, a movable member overlying the substrate and first and second spaced-apart suspension members. Each of the first and second suspension members has a first bendable end portion coupled to the substrate and a second bendable end portion coupled to the movable member and a substantially rigid central portion. The first and second end portions of each suspension member have respective first and second lengths and the suspension member has an overall length. The sum of the first and second lengths of each suspension member ranges from 5% to 40% of the overall length of the suspension member.
摘要翻译：一种微型装置，包括基板，覆盖基板的可移动部件和第一和第二间隔开的悬挂部件。第一和第二悬挂构件中的每一个具有联接到基板的第一可弯曲端部和联接到可动构件的第二可弯曲端部部分和基本上刚性的中心部分。每个悬挂构件的第一和第二端部具有相应的第一和第二长度，并且悬挂构件具有总长度。每个悬挂构件的第一和第二长度的总和为悬架构件的总长度的5％至40％。

5. 发明授权

US06847151B2 Rotary electrostatic microactuator 有权
标题翻译：旋转静电微致动器
公开(公告)号：US06847151B2
公开(公告)日：2005-01-25
申请号：US10242005
申请日：2002-09-11
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H01S3/1055 , H01S5/022 , H01S5/0687 , H01S5/14 , H02N1/00 , A41F19/08
CPC分类号： H02N1/008
摘要： A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.
摘要翻译：一种平衡微型装置，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。第一梳状驱动构件安装在基底上，第二梳状驱动构件覆盖在基底上。提供至少一个弹簧构件，其具有联接到基底的第一端部和联接到第二梳状驱动构件的第二端部。第一梳状驱动构件具有多个间隔开的第一梳状驱动指状物，并且第二梳状驱动构件具有多个间隔开的第二梳状驱动指状物。第二梳状驱动构件可在其中第一和第二梳状驱动指状件基本上不完全相互交叉的第一位置和第一和第二梳状驱动指状件基本上完全相互交叉的第二位置之间移动。平衡物由衬底承载并且耦合到第二梳状驱动构件，用于防止第二梳状驱动构件响应于外部施加到微型装置的加速度的不期望的运动。

6. 发明授权

US06333584B1 Tiltable electrostatic microactuator and method for using same 有权
标题翻译：可倾式静电微致动器及其使用方法
公开(公告)号：US06333584B1
公开(公告)日：2001-12-25
申请号：US09755743
申请日：2001-01-05
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H02N100
CPC分类号： H02N1/008
摘要： A tiltable electrostatic microactuator comprising a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. A plurality of comb drive assemblies are provided and each has a first comb drive member mounted on the substrate and a second comb drive member coupled to the rotatable member. Each of the first and second comb drive members is provided with comb drive fingers. First and second spaced-apart springs are included in the microactuator and each has a first end portion coupled to the substrate and a second end portion coupled to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated. A controller is electrically coupled to the second comb drive members and the substrate for tilting the rotatable member relative to the substrate about a pivot axis extending parallel to the planar substrate. A method for using the microactuator is provided.
摘要翻译：一种可倾斜静电微致动器，包括基本上平面的基板和可旋转构件，该可旋转构件覆盖在基板上，用于围绕垂直于平面基板延伸的旋转轴线旋转。提供了多个梳状驱动组件，并且每个都具有安装在基底上的第一梳状驱动构件和联接到可旋转构件的第二梳状驱动构件。第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。第一和第二间隔开的弹簧包括在微致动器中，并且每个具有联接到基板的第一端部分和联接到第二梳状驱动构件中的至少一个的第二端部，用于悬挂第二梳状驱动构件和可旋转构件在基板上。第二梳状驱动构件可以在第一位置和第二梳状驱动构件的梳状驱动构件基本上完全相互交错的第一位置和第二位置之间沿着旋转轴线行进的方向移动，在第二位置，梳状驱动指的第一和第二梳状驱动构件基本上完全相互交错。控制器电耦合到第二梳状驱动构件和基底，用于围绕平行于平面基底延伸的枢转轴线相对于基底倾斜可旋转构件。提供了使用微致动器的方法。

7. 发明授权

US6128122A Micromachined mirror with stretchable restoring force member 有权
标题翻译：具有可拉伸恢复力构件的微加工镜
公开(公告)号：US6128122A
公开(公告)日：2000-10-03
申请号：US398259
申请日：1999-09-17
申请人： Joseph D. Drake , John H. Jerman , John D. Grade
发明人： Joseph D. Drake , John H. Jerman , John D. Grade
IPC分类号： G02B6/35 , G02B7/182 , G02B26/08 , G11B7/085 , G11B7/12 , G11B7/135 , G11B11/105 , H02N1/00
CPC分类号： G02B26/0833 , G02B26/0816 , G02B26/0841 , G02B26/085 , G02B7/1821 , G11B11/1058 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/1372 , G11B7/1384 , H02N1/006 , H02N1/008 , G02B6/3518 , G02B6/357 , G02B6/3584 , G11B11/10532 , G11B11/10543 , G11B11/10563 , G11B7/08576
摘要： A mirror assembly of micron dimensions for use in deflecting beam of light. The mirror assembly includes a planar base and a planar mirror spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions and a longitudinal axis extending between the first and second end portions. First and second torsional members extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes are carried by the planar base for driving the mirror between the first and second positions. A tether member extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base. The tether member regulates the rocking of the mirror.
摘要翻译：用于偏转光束的微米尺寸的镜子组件。镜组件包括平面底座和与平面基座间隔开并平行于平面基座设置的平面镜。平面镜具有第一和第二端部以及在第一和第二端部之间延伸的纵向轴线。第一和第二扭转构件沿着纵向轴线延伸并且连接到相应的第一和第二端部，以允许反射镜相对于平面基部围绕纵向轴线在第一和第二位置之间摇摆。第一和第二扭转构件固定到平面基座。反射镜的至少一部分由导电材料制成。第一和第二间隔开的电极由平面基座承载，用于在第一和第二位置之间驱动反射镜。系绳构件横向于纵向轴线延伸并且固定到第一扭转构件和平面基座。系绳构件调节镜子的摇摆。

8. 发明授权

US06836584B1 Optical microswitch 有权
标题翻译：光学微动开关
公开(公告)号：US06836584B1
公开(公告)日：2004-12-28
申请号：US09524727
申请日：2000-03-14
申请人： John H. Jerman , John D. Grade , Joseph D. Drake , Kurt E. Petersen
发明人： John H. Jerman , John D. Grade , Joseph D. Drake , Kurt E. Petersen
IPC分类号： G02B635
CPC分类号： G02B6/3548 , G02B6/3518 , G02B6/357 , G02B6/3582 , G02B6/3584 , G02B6/4216 , G02B26/0833 , G02B26/0841 , G11B7/0037 , G11B7/08564 , G11B7/122 , G11B7/1362 , G11B7/1384 , G11B11/10543 , G11B11/1058 , H02N1/008
摘要： An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.
摘要翻译：一种用于激光束的光学微动开关，其沿着包括具有适于接收激光束的入口端口和多个出口端口的主体的路径延伸。耦合到由身体携带的多个微型马达的多个反射镜。微型电动机选择性地将反射镜从第一位置移出激光束的路径到达激光束的路径的第二位置，以将激光束引导到出口之一。每个微型马达都具有至少一个静电驱动的梳齿驱动组件，用于将相应的反射镜移动到第一和第二位置之一。控制器电耦合到微型马达，用于向微型马达提供控制信号。

9. 发明授权

US06787969B2 Damped micromechanical device 失效
标题翻译：阻尼微机械装置
公开(公告)号：US06787969B2
公开(公告)日：2004-09-07
申请号：US09876265
申请日：2001-06-06
申请人： John D. Grade , John H. Jerman , Kevin Y. Yasumura , Joseph D. Drake
发明人： John D. Grade , John H. Jerman , Kevin Y. Yasumura , Joseph D. Drake
IPC分类号： H02N100
CPC分类号： H02N1/008 , B81B3/0051 , B81B2203/0136
摘要： A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.
摘要翻译：一种阻尼微机械装置，包括衬底，覆盖衬底的可移动结构和具有联接到衬底的第一端部的弯曲构件和联接到可移动结构的第二端部。可移动结构可相对于基板在第一和第二位置之间以共振频率移动。阻尼材料粘附到弯曲构件的至少一部分上，用于阻尼可动结构在共振频率下的移动。提供了一种制造微机械装置的方法。

10. 发明授权

US06329737B1 Rotary electrostatic microactuator 失效
标题翻译：旋转静电微致动器
公开(公告)号：US06329737B1
公开(公告)日：2001-12-11
申请号：US09464361
申请日：1999-12-15
申请人： John H. Jerman , John D. Grade
发明人： John H. Jerman , John D. Grade
IPC分类号： H02N100
CPC分类号： G02B6/3512 , G02B6/3548 , G02B6/3556 , G02B6/357 , G02B6/3584 , G11B7/08564 , G11B11/10563 , H02N1/008
摘要： A rotary electrostatic microactuator that includes a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. First and second spaced-apart springs and a plurality of comb drive assemblies are included. Each of the comb drive assemblies has a first comb drive member mounted on the substrate and a second comb drive member. Each of the first and second comb drive members are provided with arcuate comb drive fingers. Each of the first and second springs has a first end portion secured to the substrate and a second end portion secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated.
摘要翻译：一种旋转静电微致动器，其包括基本上平面的基板和覆盖所述基板的可旋转构件，用于围绕垂直于所述平面基板延伸的旋转轴线旋转。包括第一和第二间隔开的弹簧和多个梳子驱动组件。每个梳状驱动组件具有安装在基底上的第一梳状驱动构件和第二梳状驱动构件。第一和第二梳状驱动构件中的每一个设置有弓形梳状驱动指状物。第一和第二弹簧中的每一个具有固定到基板的第一端部和固定到至少一个第二梳状驱动构件的第二端部，用于将第二梳状驱动构件和可旋转构件悬挂在基板上。第二梳状驱动构件可以在第一位置和第二梳状驱动构件的梳状驱动构件基本上完全相互交错的第一位置和第二位置之间沿着旋转轴线行进的方向移动，在第二位置，梳状驱动指的第一和第二梳状驱动构件基本上完全相互交错。

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