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1. 发明申请

US20050282151A1 Method and apparatus for sorting particles with a MEMS device 有权
标题翻译：用MEMS装置分选颗粒的方法和装置
公开(公告)号：US20050282151A1
公开(公告)日：2005-12-22
申请号：US11196291
申请日：2005-08-04
申请人： John Foster , John Harley , Steven Hovey , Richard Martin , Hung Nguyen , Paul Rubel
发明人： John Foster , John Harley , Steven Hovey , Richard Martin , Hung Nguyen , Paul Rubel
IPC分类号： A61M1/36 , B01L3/00 , C12M1/34 , C12Q1/00 , G01N15/02 , G01N21/05 , G01N21/64 , H01L21/00
CPC分类号： C12M47/04 , A61M1/36 , A61M1/3633 , A61M1/3678 , A61M2202/0437 , B01L3/5027 , G01N21/6428 , G01N2015/0288 , G01N2015/149 , Y10T436/11 , Y10T436/112499 , Y10T436/2575
摘要： A micromechanical particle sorting chip uses laser light directed through at least one of a reflective and refractive surface to come to a focus in an optically transparent layer. The laser light impinges on a particle of interest, causing it to fluoresce. Upon detecting the fluorescence, a micromemchanical actuator is activated, which directs the particle of interest into one of a plurality of possible exit paths.
摘要翻译：微机械粒子分选芯片使用通过反射和折射表面中的至少一个引导的激光在光学透明层中进行聚焦。激光照射在感兴趣的颗粒上，使其发出荧光。在检测到荧光时，微机械致动器被激活，其将感兴趣的颗粒引导到多个可能的出口路径中的一个。

2. 发明申请

US20060062698A1 MEMS actuator and method of manufacture for MEMS particle sorting device 有权
标题翻译： MEMS致动器及MEMS粒子分选装置的制造方法
公开(公告)号：US20060062698A1
公开(公告)日：2006-03-23
申请号：US11260367
申请日：2005-10-28
申请人： John Foster , John Harley , Steven Hovey , Richard Martin , Hung Nguyen , Paul Rubel
发明人： John Foster , John Harley , Steven Hovey , Richard Martin , Hung Nguyen , Paul Rubel
IPC分类号： B01L3/00
CPC分类号： B01L3/502707 , A61M1/3633 , A61M1/3678 , B01L3/5027 , B01L3/50273 , B01L3/502761 , B01L2200/0647 , B01L2300/0864 , B01L2400/0484 , C12M47/04 , G01N21/6428 , G01N2015/0288 , G01N2015/149 , Y10T436/11 , Y10T436/112499 , Y10T436/2575
摘要： A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.
摘要翻译：微机械粒子分选芯片基于从感兴趣的部件发出的荧光信号的检测，使用分成两部分的致动器将感兴趣的部件引导到多个可能的出口路径中的一个。两部分致动器可以包括力产生部分和微致动器部分。微致动器部分可以是一次性的，而力产生部分可以是可再利用的。通过使力产生部分靠近微致动器部分，微致动器被诱导移动，从而将感兴趣的部件与流体流的其余部分分离。力产生部分和微致动器部分可以分开优化和制造，从而导致更快，更可靠和更便宜的颗粒分选。

3. 发明申请

US20060266692A1 Microfabricated cross flow filter and method of manufacture 审中-公开
标题翻译：微型交叉流过滤器及其制造方法
公开(公告)号：US20060266692A1
公开(公告)日：2006-11-30
申请号：US11136552
申请日：2005-05-25
申请人： John Foster , John Harley , Steven Hovey , Richard Martin , Paul Rubel , Hung Nguyen
发明人： John Foster , John Harley , Steven Hovey , Richard Martin , Paul Rubel , Hung Nguyen
IPC分类号： B01D63/00
CPC分类号： B01D61/14 , B01D63/00 , B01D65/08 , B01D67/0062 , B01D69/02 , B01D2321/2058 , G01N1/4077
摘要： A microfabricated cross flow filter may have multiple filtration stages. The filtration stages may include microfabricated filter barriers and gaps created in a substrate, thereby allowing very tight tolerances in the filter barrier and gap dimensions to be maintained. Using the microfabrication techniques, the filter barriers can be made having arbitrary shapes, and arranged at an angle or curved with respect to the flow direction, making the pressure drop across the filtration stage more uniform in the cross flow direction.
摘要翻译：微制造的交叉流过滤器可以具有多个过滤阶段。过滤阶段可以包括微制造的过滤器屏障和在衬底中产生的间隙，从而允许保持过滤器屏障和间隙尺寸的非常严格的公差。使用微细加工技术，过滤器屏障可以制成具有任意形状，并且以相对于流动方向成一定角度或弯曲的方式布置，使跨越过滤台的压降在横向方向上更均匀。

4. 发明申请

US20060063307A1 Method and apparatus for assembling an array of micro-devices 有权
标题翻译：用于组装微器件阵列的方法和装置
公开(公告)号：US20060063307A1
公开(公告)日：2006-03-23
申请号：US11272689
申请日：2005-11-15
申请人： Patrick Feierabend , John Foster , Richard Martin , Paul Rubel , John Stocker , Jeffery Summers , Andrew Wallis
发明人： Patrick Feierabend , John Foster , Richard Martin , Paul Rubel , John Stocker , Jeffery Summers , Andrew Wallis
IPC分类号： G02B6/26
CPC分类号： B81C3/008 , G02B6/3512 , G02B6/3518 , G02B6/353 , G02B6/3546 , G02B6/3572 , G02B6/3578 , G02B6/3584 , G02B6/3586 , Y10T29/41
摘要： The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electromechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.
摘要翻译：本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。然后通过锯切和切割原始制造晶片来将器件彼此分离。将装置旋转成正交取向并固定到第二晶片。第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

5. 发明申请

US20050003631A1 Method and apparatus for assembling an array of micro-devices 有权
标题翻译：用于组装微器件阵列的方法和装置
公开(公告)号：US20050003631A1
公开(公告)日：2005-01-06
申请号：US10866123
申请日：2004-06-12
申请人： Patrick Feierabend , Richard Martin , Jeffery Summers , Andrew Wallis , Paul Rubel , John Foster , John Stocker
发明人： Patrick Feierabend , Richard Martin , Jeffery Summers , Andrew Wallis , Paul Rubel , John Foster , John Stocker
IPC分类号： G02B6/35 , H01L21/30 , H01L21/44 , H01L29/06
CPC分类号： B81C3/008 , G02B6/3512 , G02B6/3518 , G02B6/353 , G02B6/3546 , G02B6/3572 , G02B6/3578 , G02B6/3584 , G02B6/3586 , Y10T29/41
摘要： The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.
摘要翻译：本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。然后通过锯切和切割原始制造晶片来将器件彼此分离。将装置旋转成正交取向并固定到第二晶片。第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

6. 发明申请

US20070096860A1 Compact MEMS thermal device and method of manufacture 审中-公开
标题翻译：紧凑型MEMS热装置及其制造方法
公开(公告)号：US20070096860A1
公开(公告)日：2007-05-03
申请号：US11263912
申请日：2005-11-02
申请人： John Foster , Paul Rubel
发明人： John Foster , Paul Rubel
IPC分类号： H01H61/00
CPC分类号： H01H61/04 , H01H1/0036 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A MEMS thermal device is made in a smaller size by decreasing the distance that the two cantilevered portions, a spring cantilever and a latch cantilever, of the device must travel. The smaller distance is accomplished by positioning the two contact surfaces of the spring cantilever and the latch cantilever adjacent to each other in the quiescent state of the switch. When the switch is closed, the spring cantilever moves laterally to clear the contact surface of the latch cantilever, and then the latch cantilever moves its contact surface into position. To close the switch, the spring cantilever is allowed to relax and return to nearly its original position, except for the presence of the latch contact surface. When the spring cantilever is allowed to relax, it stays in the closed position because of friction or because of an angled shape of the contact surfaces.
摘要翻译：通过减小装置的两个悬臂部分（弹簧悬臂和闩锁悬臂）必须行进的距离来制造更小尺寸的MEMS热装置。通过在开关的静止状态下将弹簧悬臂和闩锁悬臂的两个接触表面彼此相邻地定位，实现较小的距离。当开关关闭时，弹簧悬臂横向移动以清除闩锁悬臂的接触表面，然后闩锁悬臂将其接触表面移动到位。为了闭合开关，除了存在闩锁接触面之外，弹簧悬臂可以松弛并返回到其初始位置。当弹簧悬臂被允许松弛时，由于摩擦或由于接触表面的成角度，它停留在关闭位置。

7. 发明申请

US20070196998A1 System and method for forming moveable features on a composite substrate 有权
标题翻译：用于在复合基底上形成可移动特征的系统和方法
公开(公告)号：US20070196998A1
公开(公告)日：2007-08-23
申请号：US11359558
申请日：2006-02-23
申请人： John Foster , Paul Rubel , Kimon Rybnicek , Paulo Motta
发明人： John Foster , Paul Rubel , Kimon Rybnicek , Paulo Motta
IPC分类号： H01L21/30 , H01L21/46
CPC分类号： B81C1/00936 , B81C2201/0132
摘要： A method for forming moveable features suspended over a substrate is described, wherein a cavity beneath the moveable feature is first formed using a liquid etchant applied through one or more release holes. After formation of the cavity, the outline of the moveable feature is formed using a dry etch process. Since the moveable feature is free to move upon its formation using the dry etch process, no stiction issues arise using the systems and methods described here.
摘要翻译：描述了一种用于形成悬挂在衬底上的可移动特征的方法，其中首先使用通过一个或多个释放孔施加的液体蚀刻剂形成可移动特征之下的空腔。在形成空腔之后，使用干蚀刻工艺形成可移动特征的轮廓。由于可移动特征在使用干蚀刻工艺形成时可以自由移动，所以不使用本文所述的系统和方法产生静电问题。

8. 发明申请

US20060277997A1 MEMS teeter-totter apparatus with curved beam and method of manufacture 有权
标题翻译：具有弯曲梁的MEMS跷跷板装置和制造方法
公开(公告)号：US20060277997A1
公开(公告)日：2006-12-14
申请号：US11151442
申请日：2005-06-14
申请人： John Foster , Paul Rubel
发明人： John Foster , Paul Rubel
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis accelerometer which is sensitive to an acceleration applied in any direction Damping plates may be added to the accelerometers to reduce unwanted motion.
摘要翻译：跷跷板装置使用弯曲光束来产生差分输出，其可以指示施加到装置的加速度。弯梁式跷跷板装置可以与x轴和y轴加速度计组合，以产生对任何方向施加的加速度敏感的三轴加速度计阻尼板可以添加到加速度计，以减少不必要的运动。

9. 发明申请

US20070236313A1 Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture 有权
标题翻译：具有气密密封和制造方法的双基板静电MEMS开关
公开(公告)号：US20070236313A1
公开(公告)日：2007-10-11
申请号：US11211623
申请日：2005-08-26
申请人： Andrew Wallis , John Foster , Paul Rubel , Kimon Rybnicek , Michael Shillinger , Jeffery Summers
发明人： Andrew Wallis , John Foster , Paul Rubel , Kimon Rybnicek , Michael Shillinger , Jeffery Summers
IPC分类号： H01F7/08
CPC分类号： H01H59/0009
摘要： Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
摘要翻译：用于形成静电MEMS开关的系统和方法包括在第一基板上形成悬臂梁，在第二基板上形成电触头，并且使用气密密封来连接两个基板。气密密封可以是金/铟合金，通过加热镀在一层金上的铟层而形成。可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。

10. 发明授权

US09957629B2 Electroplated coatings 有权
公开(公告)号：US09957629B2
公开(公告)日：2018-05-01
申请号：US14836229
申请日：2015-08-26
申请人： John Foster , Zhihong Tang , Kevin Garing , Bradley J. Burton , Thomas F. Lewis, III
发明人： John Foster , Zhihong Tang , Kevin Garing , Bradley J. Burton , Thomas F. Lewis, III
IPC分类号： C25D15/00 , C25D3/56 , C22C19/05 , C25D7/00 , F01D5/28 , B32B15/01 , C22C1/04
CPC分类号： C25D3/562 , B32B15/01 , C22C1/0433 , C22C19/057 , C25D7/00 , C25D15/00 , F01D5/288 , F05D2230/90 , F05D2300/177
摘要： A modified electroplated nickel-based metallic alloy coating and method of forming the same is provided. The electroplated coatings exhibit unique microstructure and composition which improves performance over conventional metallic materials. The coatings have significantly higher strength at elevated service temperatures.

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