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    • 10. 发明授权
    • High vacuum in-situ refining method for high-purity materials and an apparatus thereof
    • 用于高纯度材料的高真空原位精制方法及其装置
    • US07753987B2
    • 2010-07-13
    • US12067835
    • 2006-04-11
    • Xiaolong DuZhaoquan ZengHongtao YuanHandong LiQikun XueJinfeng Jia
    • Xiaolong DuZhaoquan ZengHongtao YuanHandong LiQikun XueJinfeng Jia
    • C22B9/04C22B9/05C22B26/00C22B30/04
    • C22B9/02C22B9/04C22B9/14C22B19/12C22B19/18F27B14/04F27B14/20Y02P10/234
    • The present invention concerns a high vacuum in-situ refining method for high-purity and superhigh-purity materials and the apparatus thereof, characterized in heating the upper part and lower part of crucible separately using double-heating-wires diffusion furnace under vacuum, thereby forming the temperature profile which is high at upper part and low at lower part of crucible, or in reverse during different stages; then heating the crucible in two steps to remove impurities with high saturation vapor pressure and low saturation vapor pressure respectively in efficiency; and obtaining high-purity materials eventually. The whole procedure is isolated from atmosphere, reducing contamination upon stuff remarkably. The present invention could provide products with high-quality and high production capacity, which are stable in performance, therefore is reliable and free from contamination. The present invention is appropriate for manufacture of high-purity and superhigh-purity materials, particularly for manufacture of high-activity high-purity materials.
    • 本发明涉及一种用于高纯度和超高纯度材料的高真空原位精制方法及其装置,其特征在于使用双重加热丝扩散炉在真空下分别加热坩埚的上部和下部,由此 形成坩埚上部和下部较高的温度分布,或在不同阶段形成相反的温度分布; 然后分两步加热坩埚以分别以高饱和蒸气压和低饱和蒸气压去除杂质; 并最终获得高纯度材料。 整个过程与大气隔离,减少了污染物的显着。 本发明可以提供具有高质量和高生产能力的产品,性能稳定,因此可靠,无污染。 本发明适用于制造高纯度和超高纯度材料,特别是用于制造高活性高纯度材料。