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1. 发明申请

US20150294887A1 WAFER CONTAINER WITH PARTICLE SHIELD 审中-公开
标题翻译：带有颗粒屏蔽的容器
公开(公告)号：US20150294887A1
公开(公告)日：2015-10-15
申请号：US14115626
申请日：2012-05-03
申请人： John Burns , Matthew A. Fuller , Martin L. Forbes
发明人： John Burns , Matthew A. Fuller , Martin L. Forbes
IPC分类号： H01L21/673
CPC分类号： H01L21/67389 , H01L21/67386 , H01L21/67393 , H01L21/67396
摘要： Particulate shields above the top wafer in wafer containers such as FOUPS prevent accumulation of particulates on wafers. The shields may be formed of materials that are compatible to maintaining less than 5% RH, particularly materials that will not absorb meaningful amounts of water, and that will not bring absorbed moisture into the container, for example cyclic olefin polymers, cyclic olefin copolymers, liquid crystal polymers. A FOUP may be provided with an additional slot above industry standard 25 slots to receive a dedicated barrier. In embodiments, the barrier may be a shape corresponding to a wafer. The barrier may have inherent charge properties opposite to the particulates in the containers to attract the particulates. The barrier may have apertures to facilitate charge development. The barrier may be retrofitted to existing wafer containers. The shield may conform to FOUP configuration.
摘要翻译：在晶圆容器（如FOUPS）中的顶部晶片之上的颗粒屏蔽物防止颗粒在晶片上积聚。护罩可以由兼容保持小于5％RH的材料形成，特别是不吸收有意义量的水的材料，并且不会将吸收的水分带入容器中，例如环烯烃聚合物，环烯烃共聚物，液晶聚合物。 FOUP可以设置有工业标准25个槽上方的附加槽，以接收专用的屏障。在实施例中，阻挡层可以是对应于晶片的形状。阻挡层可以具有与容器中的微粒相反的固有电荷特性以吸引微粒。屏障可以具有孔以便于电荷开发。屏障可以改装到现有的晶片容器。屏蔽可以符合FOUP配置。

2. 发明授权

US07325693B2 Wafer container and door with cam latching mechanism 有权
标题翻译：晶圆容器和门与凸轮锁定机构
公开(公告)号：US07325693B2
公开(公告)日：2008-02-05
申请号：US10988993
申请日：2004-11-15
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
发明人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
IPC分类号： B65D85/30
CPC分类号： H01L21/67353 , H01L21/67373 , Y10T292/1049
摘要： A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.
摘要翻译：用于保持单个晶片的容器包括具有闩锁机构的门，所述闩锁机构具有凸轮，所述凸轮具有从其横向延伸的一对相对的翼。凸轮可选择性地可旋转地在第一有利位置之间移动，其中翼完全在门外壳内，以使门能够与门框接合和脱离，以及第二优选位置，其中翼从门外壳横向向外延伸，当门接合在门框中时，接合门框中的闩锁凹部。凸轮翼可以包括其上的斜坡部分，用于当凸轮从第一有利位置旋转到第二优选位置时，将门拉近门框中更紧密的接合。此外，闩锁机构还可以包括设置成提供用于将闩锁机构朝向第一和第二受惠位置中的每一个推动的偏置力的弹簧，以及用于在第一和第二位置以受控的方式减速凸轮的软停止润滑弹簧有利的位置和吸收由于凸轮与门底盘上的固定挡块碰撞而产生的振动。

3. 发明授权

US07201276B2 Front opening substrate container with bottom plate 有权
标题翻译：带底板的前开口基板容器
公开(公告)号：US07201276B2
公开(公告)日：2007-04-10
申请号：US10982400
申请日：2004-11-05
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
发明人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
IPC分类号： B65D85/30
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67393 , Y10S206/832
摘要： A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
摘要翻译：衬底容器和底板通过例如连接器机构的两个构件之间的螺纹连接的方式与用于调节容器和底板之间的距离的机构连接。还提供了用于排放容器的鸭嘴阀和用于使由冲击引起的损坏最小化的阻尼器。

4. 发明授权

US07182203B2 Wafer container and door with vibration dampening latching mechanism 有权
公开(公告)号：US07182203B2
公开(公告)日：2007-02-27
申请号：US10982402
申请日：2004-11-05
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
发明人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
IPC分类号： B65D85/30
CPC分类号： H01L21/67373 , E05B17/0041 , E05B65/006 , E05B2015/0468 , E05B2015/0479 , E05C9/042
摘要： A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.

5. 发明授权

US07857683B2 CMP retaining ring 失效
标题翻译： CMP保持环
公开(公告)号：US07857683B2
公开(公告)日：2010-12-28
申请号：US12568497
申请日：2009-09-28
申请人： John Burns , Martin L. Forbes , Matthew A. Fuller , Jeffery J. King , Mark V. Smith
发明人： John Burns , Martin L. Forbes , Matthew A. Fuller , Jeffery J. King , Mark V. Smith
IPC分类号： B24B29/00
CPC分类号： B24B37/32 , Y10T29/49826
摘要： An improved chemical mechanical polishing retaining ring. A representative embodiment comprises a base portion made from a wear-resistant plastic material, and an upper portion, or backbone portion, made from a stiffer and more wear resistant material. One of the base or backbone portion is preferably overmolded onto the other. The base portion can be generally defined by a flat pad-contacting surface, an outer surface, and an inner surface. The base portion can additionally include channels extending from the outer surface to the inner surface to facilitate transfer of slurry to and from the substrate to be polished during the process. One or both of the base portion or backbone portion further includes a plurality of circular ribs that serve to create additional bonding surface with the overmolded material. The retaining ring may additionally includes a plurality of bosses with threaded insert holes by which the retaining ring is attached to a chemical mechanical polishing system.
摘要翻译：改进的化学机械抛光保持环。代表性的实施例包括由耐磨塑料材料制成的基部，以及由更硬和更耐磨的材料制成的上部或主体部分。基部或骨架部分中的一个优选地包覆成型在另一个上。基部一般可以由平垫接触表面，外表面和内表面限定。基部可以另外包括从外表面延伸到内表面的通道，以便于在该过程期间将浆料转移到待抛光的基底上和从基底转移。基部或骨架部分中的一个或两个还包括多个圆形肋，其用于与包覆成型的材料产生附加的粘合表面。保持环可以另外包括具有螺纹插入孔的多个凸台，保持环通过该凸起附接到化学机械抛光系统。

6. 发明授权

US07677393B2 Wafer container and door with vibration dampening latching mechanism 有权
标题翻译：晶圆容器和门具有减震锁定机构
公开(公告)号：US07677393B2
公开(公告)日：2010-03-16
申请号：US11651779
申请日：2007-01-10
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
发明人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
IPC分类号： B65D85/30
CPC分类号： H01L21/67373 , E05B17/0041 , E05B65/006 , E05B2015/0468 , E05B2015/0479 , E05C9/042
摘要： A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
摘要翻译：用于将多个晶片保持在轴向对准的大致平行间隔开的布置中的容器包括具有顶部，底部，一对相对侧面，后部和敞开前部的外壳部分。在外壳中提供至少一个晶片支撑件以及在外壳的底部上的运动耦合。容器具有用于密封地封闭敞开的前部的门，该门包括底盘和在底盘上的可操作的闩锁机构。闩锁机构包括可选择地旋转的凸轮，以便在第一有利位置和第二偏好位置之间移动闩锁机构，以及至少一个振动阻尼器，用于抑制当锁定机构在第一和第二有利位置之间移动时产生的振动。

7. 发明授权

US07344030B2 Wafer carrier with apertured door for cleaning 有权
标题翻译：晶圆托架带有多孔清洁
公开(公告)号：US07344030B2
公开(公告)日：2008-03-18
申请号：US10983107
申请日：2004-11-05
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
发明人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
IPC分类号： B65D85/48
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
摘要翻译：具有内门部分和外门部分的晶片承载门。内门部分具有基本连续的内表面。外门部分在内门部分的至少一部分上延伸。外门部分具有形成在其中的多个孔。外门部分附接到内门部分。

8. 发明授权

US07073667B2 Photochromic substrate container 失效
标题翻译：光致变色底物容器
公开(公告)号：US07073667B2
公开(公告)日：2006-07-11
申请号：US10971556
申请日：2004-10-22
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
发明人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
IPC分类号： B65D85/30 , B65D85/48
CPC分类号： H01L21/67288 , B65D79/02 , G03F1/66 , H01L21/67366
摘要： A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
摘要翻译：包括暴露于不期望的电磁辐射的光致变色指示剂的半导体晶片，衬底或掩模版存储或运输装置。本发明包括将光致变色材料结合到用于制造半导体晶片，盘或掩模版运输或存储容器的至少一部分的塑料中。容器可以包括透明窗口形式的光致变色材料或容器的较大部分。响应于暴露于所选择的光波长范围，光致变色材料可以改变颜色或黑暗。

9. 发明授权

US08783463B2 Wafer container with tubular environmental control components 有权
标题翻译：晶圆容器带管状环境控制元件
公开(公告)号：US08783463B2
公开(公告)日：2014-07-22
申请号：US12922408
申请日：2009-03-13
申请人： James A. Watson , John Burns , Martin L. Forbes , Matthew A. Fuller , Mark V. Smith
发明人： James A. Watson , John Burns , Martin L. Forbes , Matthew A. Fuller , Mark V. Smith
IPC分类号： B65D85/00
CPC分类号： H01L21/67393
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.
摘要翻译：晶片容器利用具有槽的刚性聚合物管状塔和其中的“吸气剂”，用于吸收和过滤晶片容器内的水分和蒸气。塔优选在容器的底部使用吹扫索环，并且可以在其中具有止回阀以控制进入和离开容器的气体（包括空气）的流动方向并相对于塔。塔与护环密封连接。塔可以具有以细长的圆形方式卷绕的吸气剂介质片，其形成或成形为管，并且设置在塔内并且可以具有轴向延伸。介质可以提供主动和/或无源过滤以及具有再充电能力。用于300mm尺寸晶片的前开口晶片容器通常在容器部分的内侧后部的左侧和右侧各具有一对凹部。这些凹槽优选地用于细长塔，这种塔基本上从底部晶片位置延伸到顶部晶片位置。在替代实施例中，吸气剂材料的管状形状暴露在前开口容器内，而不会吸收除了末端之外的吸气剂。管状吸气剂形式优选地在离散位置处被支撑以最大程度地暴露于内部容器环境。阻挡件可以选择性地封闭孔。弹性帽可有助于管状部件固定在容器部分中。

10. 外观设计

USD611437S1 Wafer carrier door 有权
标题翻译：晶圆架门
公开(公告)号：USD611437S1
公开(公告)日：2010-03-09
申请号：US29305320
申请日：2008-03-18
申请人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith
设计人： John Burns , Matthew A. Fuller , Jeffery J. King , Martin L. Forbes , Mark V. Smith

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