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1. 发明授权

US07277464B2 Method and apparatus for controlling the output of a gas discharge laser system 有权
标题翻译：用于控制气体放电激光系统的输出的方法和装置
公开(公告)号：US07277464B2
公开(公告)日：2007-10-02
申请号：US11035938
申请日：2005-01-13
申请人： John A. Rule , Paolo Zambon , Tom A. Watson , Omez S. Mesina , Weijie Zheng
发明人： John A. Rule , Paolo Zambon , Tom A. Watson , Omez S. Mesina , Weijie Zheng
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/097 , H01S3/10069 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/225 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要： The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
摘要翻译：本发明涉及一种氟气放电激光器系统，并且当气体放电激光器工作并消耗氟时，控制补充氟气。

2. 发明授权

US07209507B2 Method and apparatus for controlling the output of a gas discharge MOPA laser system 有权
标题翻译：用于控制气体放电MOPA激光系统的输出的方法和装置
公开(公告)号：US07209507B2
公开(公告)日：2007-04-24
申请号：US10740659
申请日：2003-12-18
申请人： John A. Rule , Paolo Zambon
发明人： John A. Rule , Paolo Zambon
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/134 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region.
摘要翻译：公开了一种用于控制包括振荡器气体放电激光器和放大器气体放电激光器的二腔气体放电激光器的输出的方法和装置，其可以包括建立包括具有至少两个坐标的坐标系的多维可变状态空间，每个坐标包括表示振荡器或放大器的工作参数的选定变量; 根据所述振荡器或放大器中的任一个或两者中的所选变量的变化来跟踪所述多维可变状态空间中的多维工作点，以确定所述多维工作点在所述多维状态空间中的位置; 从所述多维操作空间中的所述多维操作区域中的所述多维操作区域中的所述多维操作区域中的所述多维操作区域的位置确定所述多维操作空间中的所述多维操作空间，并识别所述区域。

3. 发明申请

US20050238077A9 Method and apparatus for controlling the output of a gas discharge MOPA laser system 有权
公开(公告)号：US20050238077A9
公开(公告)日：2005-10-27
申请号：US10740659
申请日：2003-12-18
申请人： John Rule , Paolo Zambon
发明人： John Rule , Paolo Zambon
IPC分类号： H01S3/134 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/225 , H01S3/134 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region; based upon the identity of the identified region, and parameters of that region relative to the condition of an actuator in each of the oscillator and the amplifier, determining a necessary modification to the actuator for each of the oscillator and the amplifier to attempt to move the multidimensional operating point from the parameters indicated by the position of the multidimensional operating point being in the particular region to a preselected region in the coordinate system. The method and apparatus may also comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; changing the gas mixture in one or both of the oscillator and amplifier by injection of at least one constituent gas in the gas mixture at least part of which injection for the respective oscillator and amplifier is based upon a calculated estimate of consumption of the at least one constituent gas in the gas mixture in the respective oscillator and amplifier from a prior change in the gas mixture; allowing the oscillator and amplifier to operate for a selected period of time with the changed gas mixture; determining the position of an operating point in the multidimensional variable state space and based upon the location of the operating point in the multidimensional state space determining a respective boost factor to modify the calculated estimate of consumption for the current change of the gas mixture in the respective oscillator and amplifier. A third dimension may be added relating to a spectral characteristic of the output of the oscillator or the amplifier, which may be bandwidth of the output of the amplifier, and including modifying that output with a beam correction device.

4. 发明授权

US06320892B1 Energy efficient lithography laser 失效
标题翻译：节能光刻激光
公开(公告)号：US06320892B1
公开(公告)日：2001-11-20
申请号：US09420297
申请日：1999-10-18
申请人： Gamaralalage G. Padmabandu , Palash P. Das , Tom A. Watson , Paolo Zambon
发明人： Gamaralalage G. Padmabandu , Palash P. Das , Tom A. Watson , Paolo Zambon
IPC分类号： H01S3223
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F2 “sweet spot” in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines &Dgr;E/&Dgr;V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on &Dgr;E/&Dgr;V without the need to actually measure the fluorine concentration. The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.
摘要翻译：一种具有自动氟控制系统的准分子激光系统，用于在气体放电激光室中精确控制F2“甜点”内的氟浓度。这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTAE / DELTAV，脉冲能量随电压的变化，并且可以根据DELTAE / DELTAV自动精确控制氟浓度，而无需实际测量氟浓度。本发明在使用具有宽灵敏度范围的光刻胶的光刻环境中特别有用。本发明允许激光器在宽范围的脉冲能量输出上以基本最大的效率进行操作。

5. 发明申请

US20140248048A1 SIMPLE LOW COST TIP-TILT WAVEFRONT SENSOR HAVING EXTENDED DYNAMIC RANGE 有权
标题翻译：简单的低成本TIP-TILT WAVEFRONT传感器具有延长的动态范围
公开(公告)号：US20140248048A1
公开(公告)日：2014-09-04
申请号：US13785441
申请日：2013-03-05
申请人： Malcolm J. Northcott , J. Elon Graves , Siegfried Fleischer , Paolo Zambon , Jeffrey Tuttle , Rebecca Chang
发明人： Malcolm J. Northcott , J. Elon Graves , Siegfried Fleischer , Paolo Zambon , Jeffrey Tuttle , Rebecca Chang
IPC分类号： H04B10/2507
CPC分类号： H04B10/1125
摘要： A low cost, high reliability system for correcting aberrations in optical signals is disclosed. A foreoptic assembly, such as a telescope, receives an incoming optical signal and directs it to an active optical element, such as a fast steering mirror. The incoming optical signal is diffracted by a diffractive optical element to shape the image that is formed at a wavefront sensor, such as a quad-cell. The wavefront sensor measures a tip-tilt aberration of the incoming optical signal and the active optical element is adjusted to correct the measured aberration. An outgoing optical signal can be transmitted along substantially the same optical path as the incoming optical signal, but in the opposite direction. Thus, the aberration measured from the incoming optical signal can be automatically accounted for in the outgoing optical signal.
摘要翻译：公开了一种用于校正光信号中的像差的低成本，高可靠性系统。诸如望远镜的前置组件接收输入光信号并将其引导到诸如快速转向镜的有源光学元件。入射光信号被衍射光学元件衍射以对形成在波前传感器（例如四单元）上的图像进行成形。波前传感器测量入射光信号的尖端倾斜像差，并且调整有源光学元件以校正测量的像差。出射光信号可以沿着与入射光信号基本相同的光路而沿相反方向传输。因此，可以在出射光信号中自动考虑从入射光信号测量的像差。

6. 发明授权

US06882674B2 Four KHz gas discharge laser system 有权
标题翻译：四KHz气体放电激光系统
公开(公告)号：US06882674B2
公开(公告)日：2005-04-19
申请号：US10036676
申请日：2001-12-21
申请人： Christian J. Wittak , William N. Partlo , Richard L. Sandstrom , Paul C. Melcher , David M. Johns , Robert B. Saethre , Richard M. Ness , Curtis L. Rettig , Robert A. Shannon , Richard C. Ujazdowski , Shahryar Rokni , Scott T. Smith , Stuart L. Anderson , John M. Algots , Ronald L. Spangler , Igor V. Fomenkov , Thomas D. Steiger , Jerome A. Emilo , Clay C. Titus , Alex P. Ivaschenko , Paolo Zambon , Gamaralalage G. Padmabandu , Mark S. Branham , Sunjay Phatak , Raymond F. Cybulski
发明人： Christian J. Wittak , William N. Partlo , Richard L. Sandstrom , Paul C. Melcher , David M. Johns , Robert B. Saethre , Richard M. Ness , Curtis L. Rettig , Robert A. Shannon , Richard C. Ujazdowski , Shahryar Rokni , Scott T. Smith , Stuart L. Anderson , John M. Algots , Ronald L. Spangler , Igor V. Fomenkov , Thomas D. Steiger , Jerome A. Emilo , Clay C. Titus , Alex P. Ivaschenko , Paolo Zambon , Gamaralalage G. Padmabandu , Mark S. Branham , Sunjay Phatak , Raymond F. Cybulski
IPC分类号： H01S3/097 , G03F7/20 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/0975 , H01S3/134 , H01S3/139 , H01S3/225 , H01S3/23 , H01S3/22
CPC分类号： G03F7/70025 , G03F7/70933 , H01S3/0057 , H01S3/036 , H01S3/0385 , H01S3/041 , H01S3/0975 , H01S3/134 , H01S3/139 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2366
摘要： The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.
摘要翻译：本发明提供了一种准分子激光器，其能够以约5mJ或更大的脉冲能量产生脉冲速率约为4000Hz的高质量脉冲激光束。优选的实施方案是专门设计为用于集成电路光刻的光源的ArF准分子激光器。具有特殊软件的改进型波长测量仪监测输出光束参数，并控制非常快的PZT驱动调光镜和脉冲功率充电电压，以将波长和脉冲能量保持在所需的极限内。在优选实施例中，两个风扇马达驱动单个切向风扇，其提供足够的气流以在脉冲之间的大约0.25毫秒期间从放电区域清除放电碎片。

7. 发明授权

US06392743B1 Control technique for microlithography lasers 失效
标题翻译：微光刻激光器的控制技术
公开(公告)号：US06392743B1
公开(公告)日：2002-05-21
申请号：US09515974
申请日：2000-02-29
申请人： Paolo Zambon , Gamaralalage G. Padmabandu , Tom A. Watson , Palash P. Das
发明人： Paolo Zambon , Gamaralalage G. Padmabandu , Tom A. Watson , Palash P. Das
IPC分类号： G03B2772
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70525 , G03F7/70558 , H01S3/1022 , H01S3/1024 , H01S3/1305
摘要： A lithograph quality optimization process for controlling laser beam parameters when changing operating modes. The laser is programmed to automatically conduct an optimization procedure preferably in less than one minute to adjust laser operating parameters such as blower speed, total gas pressure and F2 partial pressure in order to optimize beam quality parameters.
摘要翻译：用于在改变工作模式时控制激光束参数的光刻胶质量优化过程。激光器被编程为优选在不到一分钟内自动进行优化程序以调整激光器操作参数，例如鼓风机速度，总气体压力和F2分压，以优化光束质量参数。

8. 发明申请

US20050185690A1 Method and apparatus for controlling the output of a gas discharge laser system 有权
标题翻译：用于控制气体放电激光系统的输出的方法和装置
公开(公告)号：US20050185690A1
公开(公告)日：2005-08-25
申请号：US11035938
申请日：2005-01-13
申请人： John Rule , Paolo Zambon , Tom Watson , Omez Mesina , Weijie Zheng
发明人： John Rule , Paolo Zambon , Tom Watson , Omez Mesina , Weijie Zheng
IPC分类号： H01S3/134 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/036 , H01S3/097 , H01S3/10069 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/225 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要： The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
摘要翻译：本发明涉及一种氟气放电激光器系统，并且当气体放电激光器工作并消耗氟时，控制补充氟气。

9. 发明申请

US20050135451A1 Method and apparatus for controlling the output of a gas discharge MOPA laser system 有权
公开(公告)号：US20050135451A1
公开(公告)日：2005-06-23
申请号：US10740659
申请日：2003-12-18
申请人： John Rule , Paolo Zambon
发明人： John Rule , Paolo Zambon
IPC分类号： H01S3/134 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/225 , H01S3/134 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region; based upon the identity of the identified region, and parameters of that region relative to the condition of an actuator in each of the oscillator and the amplifier, determining a necessary modification to the actuator for each of the oscillator and the amplifier to attempt to move the multidimensional operating point from the parameters indicated by the position of the multidimensional operating point being in the particular region to a preselected region in the coordinate system. The method and apparatus may also comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; changing the gas mixture in one or both of the oscillator and amplifier by injection of at least one constituent gas in the gas mixture at least part of which injection for the respective oscillator and amplifier is based upon a calculated estimate of consumption of the at least one constituent gas in the gas mixture in the respective oscillator and amplifier from a prior change in the gas mixture; allowing the oscillator and amplifier to operate for a selected period of time with the changed gas mixture; determining the position of an operating point in the multidimensional variable state space and based upon the location of the operating point in the multidimensional state space determining a respective boost factor to modify the calculated estimate of consumption for the current change of the gas mixture in the respective oscillator and amplifier. A third dimension may be added relating to a spectral characteristic of the output of the oscillator or the amplifier, which may be bandwidth of the output of the amplifier, and including modifying that output with a beam correction device.

10. 发明申请

US20050100072A1 High power laser output beam energy density reduction 审中-公开
标题翻译：大功率激光输出光束能量密度降低
公开(公告)号：US20050100072A1
公开(公告)日：2005-05-12
申请号：US10925746
申请日：2004-08-24
申请人： Rajasekhar Rao , Weiman Zhang , James Howey , Gamaralalage Padmabandu , Paolo Zambon , Richard Sandstrom
发明人： Rajasekhar Rao , Weiman Zhang , James Howey , Gamaralalage Padmabandu , Paolo Zambon , Richard Sandstrom
IPC分类号： H01S3/22
CPC分类号： G03F7/70183 , G02B27/0927 , G03F7/70025
摘要： A high power gas discharge laser for and method of producing laser output light pulses of high energy density is disclosed which may comprise a laser output light pulse beam optical track having a plurality of modular components arranged in order from a laser light source to a laser system output port and defining a laser output light pulse beam path having a single centerline axis; a first optical module and a second optical module in series in the optical track; a flexible interface element intermediate the first and the second optical module and rigidly attached to each of the first and second optical modules; and an optical element having a fixed position in the output laser pulse beam path comprising a rigid attachment to the first optical module, and extending within the flexible interface element. The optical element may comprise a beam expander, which may comprise a lensed beam expander. The optical element may comprise at least a part of a telescoping lens set forming an optical beam expander and the at least a part of a telescoping lens set comprises the entire telescoping lens set forming the optical beam expander or the at least a part of a telescoping lens set may comprise a first part of the beam expander cooperating with at least a second part located in a subsequent optical module in the laser output pulse beam optical track along the same optical centerline axis. A plurality of aligning mechanisms may align the optical element to a first and a second axis of the laser output pulse beam, the first and second axes being generally orthogonal to each other and orthogonal to the optical centerline axis, and also along the optical centerline axis. The beam expander may incorporate as one optic the output coupler optic and may have a moveable lens to enable a range of magnifications.
摘要翻译：公开了一种用于产生高能量密度的激光输出光脉冲的高功率气体放电激光器及其制造方法，其可以包括激光输出光脉冲光束光学轨道，其具有从激光光源到激光系统的顺序排列的多个模块化部件输出端口并且限定具有单个中心线轴线的激光输出光脉冲光束路径; 在光轨中串联的第一光模块和第二光模块; 柔性接口元件，其位于第一和第二光学模块之间，并刚性地附接到第一和第二光学模块中的每一个; 以及在所述输出激光脉冲光束路径中具有固定位置的光学元件，包括与所述第一光学模块的刚性附件，并且在所述柔性接口元件内延伸。光学元件可以包括光束扩展器，其可以包括透镜光束扩展器。光学元件可以包括形成光束扩展器的伸缩透镜组的至少一部分，并且伸缩透镜组的至少一部分包括形成光束扩展器的整个伸缩透镜组或伸缩透镜组的至少一部分透镜组可以包括光束扩展器的第一部分，其与位于激光输出脉冲光束光轨中的后续光学模块中的至少第二部分沿着相同的光学中心线轴协作。多个对准机构可将光学元件对准激光输出脉冲光束的第一和第二轴线，第一和第二轴线基本上彼此正交并且与光学中心线轴线正交，并且还沿着光学中心线轴线。光束扩展器可以并入作为输出耦合器光学器件的一个光学元件，并且可以具有可移动透镜以实现一定范围的放大率。

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