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1. 发明授权

US08963294B2 Dense chevron finFET and method of manufacturing same 有权
标题翻译：密集人字形finFET及其制造方法
公开(公告)号：US08963294B2
公开(公告)日：2015-02-24
申请号：US11857806
申请日：2007-09-19
申请人： Jochen Beintner , Thomas Ludwig , Edward Joseph Nowak
发明人： Jochen Beintner , Thomas Ludwig , Edward Joseph Nowak
IPC分类号： H01L29/04 , H01L21/84 , H01L27/12 , H01L29/66 , H01L29/78
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/66795 , H01L29/785
摘要： A method, structure and alignment procedure, for forming a finFET. The method including, defining a first fin of the finFET with a first mask and defining a second fin of the finFET with a second mask. The structure including integral first and second fins of single-crystal semiconductor material and longitudinal axes of the first and second fins aligned in the same crystal direction but offset from each other. The alignment procedure including simultaneously aligning alignment marks on a gate mask to alignment targets formed separately by a first masked used to define the first fin and a second mask used to define the second fin.
摘要翻译：用于形成finFET的方法，结构和取向程序。该方法包括：用第一掩模限定finFET的第一鳍片，并用第二掩模限定finFET的第二鳍片。该结构包括单晶半导体材料的整体第一和第二鳍片以及第一和第二鳍片的纵向轴线在相同的晶体方向上排列但彼此偏移。对准过程包括同时将栅极掩模上的对准标记对准由通过用于限定第一鳍片的第一掩模单独形成的对准靶和用于限定第二鳍片的第二掩模。

2. 发明授权

US07323374B2 Dense chevron finFET and method of manufacturing same 有权
标题翻译：密集人字形finFET及其制造方法
公开(公告)号：US07323374B2
公开(公告)日：2008-01-29
申请号：US11162663
申请日：2005-09-19
申请人： Jochen Beintner , Thomas Ludwig , Edward Joseph Nowak
发明人： Jochen Beintner , Thomas Ludwig , Edward Joseph Nowak
IPC分类号： H01L21/00
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/66795 , H01L29/785
摘要： A method, structure and alignment procedure, for forming a finFET. The method including, defining a first fin of the finFET with a first mask and defining a second fin of the finFET with a second mask. The structure including integral first and second fins of single-crystal semiconductor material and longitudinal axes of the first and second fins aligned in the same crystal direction but offset from each other. The alignment procedure including simultaneously aligning alignment marks on a gate mask to alignment targets formed separately by a first masked used to define the first fin and a second mask used to define the second fin.
摘要翻译：用于形成finFET的方法，结构和取向程序。该方法包括：用第一掩模限定finFET的第一鳍片，并用第二掩模限定finFET的第二鳍片。该结构包括单晶半导体材料的整体第一和第二鳍片以及第一和第二鳍片的纵向轴线在相同的晶体方向上排列但彼此偏移。对准过程包括同时将栅极掩模上的对准标记对准由通过用于限定第一鳍片的第一掩模单独形成的对准靶和用于限定第二鳍片的第二掩模。

3. 发明申请

US20070063276A1 DENSE CHEVRON finFET AND METHOD OF MANUFACTURING SAME 有权
标题翻译： DENSE CHEVRON finFET及其制造方法
公开(公告)号：US20070063276A1
公开(公告)日：2007-03-22
申请号：US11162663
申请日：2005-09-19
申请人： Jochen Beintner , Thomas Ludwig , Edward Nowak
发明人： Jochen Beintner , Thomas Ludwig , Edward Nowak
IPC分类号： H01L27/12 , H01L21/20
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/66795 , H01L29/785
摘要： A method, structure and alignment procedure, for forming a finFET. The method including, defining a first fin of the finFET with a first mask and defining a second fin of the finFET with a second mask. The structure including integral first and second fins of single-crystal semiconductor material and longitudinal axes of the first and second fins aligned in the same crystal direction but offset from each other. The alignment procedure including simultaneously aligning alignment marks on a gate mask to alignment targets formed separately by a first masked used to define the first fin and a second mask used to define the second fin.
摘要翻译：用于形成finFET的方法，结构和取向程序。该方法包括：用第一掩模限定finFET的第一鳍片，并用第二掩模限定finFET的第二鳍片。该结构包括单晶半导体材料的整体第一和第二鳍片以及第一和第二鳍片的纵向轴线在相同的晶体方向上排列但彼此偏移。对准过程包括同时将栅极掩模上的对准标记对准由通过用于限定第一鳍片的第一掩模单独形成的对准靶和用于限定第二鳍片的第二掩模。

4. 发明申请

US20080006852A1 DENSE CHEVRON finFET AND METHOD OF MANUFACTURING SAME 有权
标题翻译： DENSE CHEVRON finFET及其制造方法
公开(公告)号：US20080006852A1
公开(公告)日：2008-01-10
申请号：US11857806
申请日：2007-09-19
申请人： Jochen Beintner , Thomas Ludwig , Edward Nowak
发明人： Jochen Beintner , Thomas Ludwig , Edward Nowak
IPC分类号： H01L29/78
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/66795 , H01L29/785
摘要： A method, structure and alignment procedure, for forming a finFET. The method including, defining a first fin of the finFET with a first mask and defining a second fin of the finFET with a second mask. The structure including integral first and second fins of single-crystal semiconductor material and longitudinal axes of the first and second fins aligned in the same crystal direction but offset from each other. The alignment procedure including simultaneously aligning alignment marks on a gate mask to alignment targets formed separately by a first masked used to define the first fin and a second mask used to define the second fin.
摘要翻译：用于形成finFET的方法，结构和取向程序。该方法包括：用第一掩模限定finFET的第一鳍片，并用第二掩模限定finFET的第二鳍片。该结构包括单晶半导体材料的整体第一和第二鳍片以及第一和第二鳍片的纵向轴线在相同的晶体方向上排列但彼此偏移。对准过程包括同时将栅极掩模上的对准标记对准由通过用于限定第一鳍片的第一掩模单独形成的对准靶和用于限定第二鳍片的第二掩模。

5. 发明申请

US20080176365A1 Method of making double-gated self-aligned finFET having gates of different lengths 失效
标题翻译：制造具有不同长度的栅极的双门控自对准finFET的方法
公开(公告)号：US20080176365A1
公开(公告)日：2008-07-24
申请号：US12077973
申请日：2008-03-24
申请人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
发明人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
IPC分类号： H01L21/336
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7855 , H01L29/7856
摘要： A method is provided of making a gated semiconductor device. Such method can include patterning a single-crystal semiconductor region of a substrate to extend in a lateral direction parallel to a major surface of a substrate and to extend in a direction at least substantially vertical and at least substantially perpendicular to the major surface, the semiconductor region having a first side and a second side opposite, e.g., remote from the first side. A first gate may be formed overlying the first side, the first gate having a first gate length in the lateral direction. A second gate may be formed overlying the second side, the second gate having a second gate length in the lateral direction which is different from the first gate length. In one embodiment, the second gate length may be shorter than the first gate length. In one embodiment, the first gate may consist essentially of polycrystalline silicon germanium and the second gate may consist essentially of polysilicon.
摘要翻译：提供了一种制造门控半导体器件的方法。这种方法可以包括图案化衬底的单晶半导体区域，以在与衬底的主表面平行的横向方向上延伸并且沿至少基本上垂直且至少基本垂直于主表面的方向延伸，半导体区域具有第一侧和第二侧，例如远离第一侧。第一栅极可以形成在第一侧上，第一栅极在横向上具有第一栅极长度。第二栅极可以形成在第二侧上，第二栅极在横向上具有与第一栅极长度不同的第二栅极长度。在一个实施例中，第二栅极长度可以比第一栅极长度短。在一个实施例中，第一栅极可以主要由多晶硅锗组成，第二栅极可以由多晶硅组成。

6. 发明授权

US07129564B2 Structure and method of forming a notched gate field effect transistor 有权
标题翻译：形成陷波栅场效应晶体管的结构和方法
公开(公告)号：US07129564B2
公开(公告)日：2006-10-31
申请号：US11059819
申请日：2005-02-17
申请人： Jochen Beintner , Yujun Li , Naim Moumen , Porshia Shane Wrschka
发明人： Jochen Beintner , Yujun Li , Naim Moumen , Porshia Shane Wrschka
IPC分类号： H01L31/117
CPC分类号： H01L29/6659 , H01L21/26586 , H01L21/28044 , H01L21/28114 , H01L29/42376 , H01L29/49 , H01L29/665 , Y10S438/933
摘要： The structure and method of forming a notched gate MOSFET disclosed herein addresses such problems as device reliability. A gate dielectric (e.g. gate oxide) is formed on the surface of an active area on the semiconductor substrate, preferably defined by an isolation trench region. A layer of polysilicon is then deposited on the gate dielectric. This step is followed by depositing a layer of silicon germanium) (SiGe). The sidewalls of the polysilicon layer are then laterally etched, selective to the SiGe layer to create a notched gate conductor structure, with the SiGe layer being broader than the underlying polysilicon layer. Sidewall spacers are preferably formed on sidewalls of the SiGe layer and the polysilicon layer. A silicide layer is preferably formed as a self-aligned silicide from a polysilicon layer deposited over the SiGe layer, to reduce resistance of the gate conductor. One or more other processing steps (e.g. source and drain implants, extension implants, and pocket lightly doped drain (LDD) implants), gate conductor stack doping, and silicidation are preferably performed in completing the transistor.
摘要翻译：本文公开的形成缺口栅极MOSFET的结构和方法解决了诸如器件可靠性的问题。栅电介质（例如栅极氧化物）形成在半导体衬底上的有源区的表面上，优选由隔离沟槽区限定。然后在栅极电介质上沉积多晶硅层。该步骤之后是沉积一层硅锗）（SiGe）。然后横向蚀刻多晶硅层的侧壁，对SiGe层有选择性，以产生刻蚀的栅极导体结构，其中SiGe层比下面的多晶硅层宽。侧壁间隔物优选形成在SiGe层和多晶硅层的侧壁上。硅化物层优选从沉积在SiGe层上的多晶硅层形成为自对准硅化物，以降低栅极导体的电阻。优选在完成晶体管时执行一个或多个其它处理步骤（例如源极和漏极注入，延伸注入和袖带轻掺杂漏极（LDD）注入），栅极导体堆叠掺杂和硅化。

7. 发明授权

US07087952B2 Dual function FinFET, finmemory and method of manufacture 有权
标题翻译：双功能FinFET，Finmemory和制造方法
公开(公告)号：US07087952B2
公开(公告)日：2006-08-08
申请号：US10978951
申请日：2004-11-01
申请人： Huilong Zhu , Bruce B. Doris , Jochen Beintner
发明人： Huilong Zhu , Bruce B. Doris , Jochen Beintner
IPC分类号： H01L29/788
CPC分类号： H01L29/78684 , H01L21/28273 , H01L27/115 , H01L27/11521 , H01L29/4908 , H01L29/66795 , H01L29/785 , H01L29/7881
摘要： A non-volatile storage cell in a Fin Field Effect Transistor (FinFET) and a method of forming an Integrated Circuit (IC) chip including the non-volatile storage cell. Each FET includes a control gate along one side of a semiconductor (e.g., silicon) fin, a floating gate along an opposite of the fin and a program gate alongside the floating gate. Control gate device thresholds are adjusted by adjusting charge on the floating gate.
摘要翻译： Fin场效应晶体管（FinFET）中的非易失性存储单元以及形成包括非易失性存储单元的集成电路（IC）芯片的方法。每个FET包括沿着半导体（例如硅）翅片的一侧的控制栅极，沿着鳍片的相对的浮动栅极和沿着浮动栅极的编程栅极。通过调节浮动栅极上的电荷来调节控制栅极器件的阈值。

8. 发明申请

US20060024930A1 Method of implanting using a shadow effect 有权
标题翻译：使用阴影效果进行植入的方法
公开(公告)号：US20060024930A1
公开(公告)日：2006-02-02
申请号：US11235330
申请日：2005-09-26
申请人： Helmut Tews , Jochen Beintner
发明人： Helmut Tews , Jochen Beintner
IPC分类号： H01L21/425
CPC分类号： H01L21/823462 , H01L21/26506 , H01L21/26586 , H01L21/2822 , H01L21/823481 , H01L27/0629 , H01L27/10873 , Y10S438/981
摘要： A semiconductor body has a first portion, a second portion, and an active area located between the first portion and the second portion. The first portion and the second portion are a shallow trench isolation region having an exposed surface extending above the surface of the active area. A first ion implantation is performed at a first angle such that a first shaded area defined by the exposed surface of the first portion and the first angle is exposed to fewer ions than a first unshaded area. A second ion implantation is performed at a second angle such that a second shaded area defined by the exposed surface of the second portion and the second angle is exposed to fewer ions than a second unshaded area.
摘要翻译：半导体本体具有位于第一部分和第二部分之间的第一部分，第二部分和有源区域。第一部分和第二部分是具有在有源区域的表面上方延伸的暴露表面的浅沟槽隔离区域。以第一角度执行第一离子注入，使得由第一部分的暴露表面限定的第一阴影区域和第一角度暴露于比第一未阴影区域更少的离子。以第二角度执行第二离子注入，使得由第二部分的暴露表面限定的第二阴影区域和第二角度暴露于比第二未阴影区域更少的离子。

9. 发明授权

US06987042B2 Method of forming a collar using selective SiGe/Amorphous Si Etch 失效
标题翻译：使用选择性SiGe /无定形Si蚀刻法形成套环的方法
公开(公告)号：US06987042B2
公开(公告)日：2006-01-17
申请号：US10250046
申请日：2003-05-30
申请人： Jochen Beintner , Naim Moumen , Porshia S. Wrschka
发明人： Jochen Beintner , Naim Moumen , Porshia S. Wrschka
IPC分类号： H01L21/8242
CPC分类号： H01L27/1087 , H01L21/30604 , H01L29/66181 , H01L29/945
摘要： A method of forming collar isolation for a trench storage memory cell structure is provided in which amorphous Si (a:Si) and silicon germanium (SiGe) are first formed into a trench structure. An etching process that is selective to a:Si as compared to SiGe is employed in defining the regions in which the collar isolation will be formed. The selective etching process employed in the present invention is a wet etch process that includes etching with HF, rinsing, etching with NH4OH, rinsing, and drying with a monohydric alcohol such as isopropanol. The sequence of NH4OH etching and rinsing may be repeated any number of times. The conditions used in the selective etching process of the present invention are capable of etching a:Si at a faster rate than SiGe.
摘要翻译：提供了一种形成沟槽存储单元结构的套环隔离的方法，其中首先将非晶硅（a：Si）和硅锗（SiGe）形成沟槽结构。与SiGe相比，对a：Si有选择性的蚀刻工艺用于限定将形成套环隔离的区域。在本发明中采用的选择性蚀刻方法是湿式蚀刻工艺，其包括用HF蚀刻，漂洗，用NH 4 OH蚀刻，漂洗和用一元醇如异丙醇干燥。 NH 4 OH蚀刻和漂洗的顺序可以重复任意次数。在本发明的选择性蚀刻工艺中使用的条件能够以比SiGe更快的速度蚀刻Si。

10. 发明申请

US20050158927A1 Structure and method of forming a notched gate field effect transistor 有权
公开(公告)号：US20050158927A1
公开(公告)日：2005-07-21
申请号：US11059819
申请日：2005-02-17
申请人： Jochen Beintner , Yujun Li , Naim Moumen , Porshia Wrschka
发明人： Jochen Beintner , Yujun Li , Naim Moumen , Porshia Wrschka
IPC分类号： H01L29/423 , H01L21/265 , H01L21/28 , H01L21/336 , H01L29/49 , H01L29/78 , H01L29/786 , H01L21/00 , H01L21/8238 , H01L21/84
CPC分类号： H01L29/6659 , H01L21/26586 , H01L21/28044 , H01L21/28114 , H01L29/42376 , H01L29/49 , H01L29/665 , Y10S438/933
摘要： The structure and method of forming a notched gate MOSFET disclosed herein addresses such problems as device reliability. A gate dielectric (e.g. gate oxide) is formed on the surface of an active area on the semiconductor substrate, preferably defined by an isolation trench region. A layer of polysilicon is then deposited on the gate dielectric. This step is followed by depositing a layer of silicon germanium) (SiGe). The sidewalls of the polysilicon layer are then laterally etched, selective to the SiGe layer to create a notched gate conductor structure, with the SiGe layer being broader than the underlying polysilicon layer. Sidewall spacers are preferably formed on sidewalls of the SiGe layer and the polysilicon layer. A silicide layer is preferably formed as a self-aligned silicide from a polysilicon layer deposited over the SiGe layer, to reduce resistance of the gate conductor. One or more other processing steps (e.g. source and drain implants, extension implants, and pocket lightly doped drain (LDD) implants), gate conductor stack doping, and silicidation are preferably performed in completing the transistor.

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