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1. 发明申请

US20080176365A1 Method of making double-gated self-aligned finFET having gates of different lengths 失效
标题翻译：制造具有不同长度的栅极的双门控自对准finFET的方法
公开(公告)号：US20080176365A1
公开(公告)日：2008-07-24
申请号：US12077973
申请日：2008-03-24
申请人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
发明人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
IPC分类号： H01L21/336
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7855 , H01L29/7856
摘要： A method is provided of making a gated semiconductor device. Such method can include patterning a single-crystal semiconductor region of a substrate to extend in a lateral direction parallel to a major surface of a substrate and to extend in a direction at least substantially vertical and at least substantially perpendicular to the major surface, the semiconductor region having a first side and a second side opposite, e.g., remote from the first side. A first gate may be formed overlying the first side, the first gate having a first gate length in the lateral direction. A second gate may be formed overlying the second side, the second gate having a second gate length in the lateral direction which is different from the first gate length. In one embodiment, the second gate length may be shorter than the first gate length. In one embodiment, the first gate may consist essentially of polycrystalline silicon germanium and the second gate may consist essentially of polysilicon.
摘要翻译：提供了一种制造门控半导体器件的方法。这种方法可以包括图案化衬底的单晶半导体区域，以在与衬底的主表面平行的横向方向上延伸并且沿至少基本上垂直且至少基本垂直于主表面的方向延伸，半导体区域具有第一侧和第二侧，例如远离第一侧。第一栅极可以形成在第一侧上，第一栅极在横向上具有第一栅极长度。第二栅极可以形成在第二侧上，第二栅极在横向上具有与第一栅极长度不同的第二栅极长度。在一个实施例中，第二栅极长度可以比第一栅极长度短。在一个实施例中，第一栅极可以主要由多晶硅锗组成，第二栅极可以由多晶硅组成。

2. 发明授权

US07785944B2 Method of making double-gated self-aligned finFET having gates of different lengths 失效
标题翻译：制造具有不同长度的栅极的双门控自对准finFET的方法
公开(公告)号：US07785944B2
公开(公告)日：2010-08-31
申请号：US12077973
申请日：2008-03-24
申请人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
发明人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
IPC分类号： H01L21/84
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7855 , H01L29/7856
摘要： A method is provided of making a gated semiconductor device. Such method can include patterning a single-crystal semiconductor region of a substrate to extend in a lateral direction parallel to a major surface of a substrate and to extend in a direction at least substantially vertical and at least substantially perpendicular to the major surface, the semiconductor region having a first side and a second side opposite, e.g., remote from the first side. A first gate may be formed overlying the first side, the first gate having a first gate length in the lateral direction. A second gate may be formed overlying the second side, the second gate having a second gate length in the lateral direction which is different from the first gate length. In one embodiment, the second gate length may be shorter than the first gate length. In one embodiment, the first gate may consist essentially of polycrystalline silicon germanium and the second gate may consist essentially of polysilicon.
摘要翻译：提供了一种制造门控半导体器件的方法。这种方法可以包括图案化衬底的单晶半导体区域，以在与衬底的主表面平行的横向方向上延伸并且沿至少基本上垂直且至少基本垂直于主表面的方向延伸，半导体区域具有第一侧和第二侧，例如远离第一侧。第一栅极可以形成在第一侧上，第一栅极在横向上具有第一栅极长度。第二栅极可以形成在第二侧上，第二栅极在横向上具有与第一栅极长度不同的第二栅极长度。在一个实施例中，第二栅极长度可以比第一栅极长度短。在一个实施例中，第一栅极可以主要由多晶硅锗组成，第二栅极可以由多晶硅组成。

3. 发明授权

US07348641B2 Structure and method of making double-gated self-aligned finFET having gates of different lengths 有权
标题翻译：制造具有不同长度的栅极的双门控自对准finFET的结构和方法
公开(公告)号：US07348641B2
公开(公告)日：2008-03-25
申请号：US10711182
申请日：2004-08-31
申请人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
发明人： Huilong Zhu , Bruce B. Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip J. Oldiges
IPC分类号： H01L29/94
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7855 , H01L29/7856
摘要： A gated semiconductor device is provided, in which the body has a first dimension extending in a lateral direction parallel to a major surface of a substrate, and second dimension extending in a direction at least substantially vertical and at least substantially perpendicular to the major surface, the body having a first side and a second side opposite the first side. The gated semiconductor device includes a first gate overlying the first side, and having a first gate length in the lateral direction. The gated semiconductor device further includes a second gate overlying the second side, the second gate having a second gate length in the lateral direction which is different from, and preferably shorter than the first gate length. In one embodiment, the first gate and the second gate being electrically isolated from each other. In another embodiment the first gate consists essentially of polycrystalline silicon germanium and the second gate consists essentially of polysilicon.
摘要翻译：提供了门控半导体器件，其中主体具有在平行于衬底的主表面的横向方向上延伸的第一尺寸，以及在至少基本上垂直且至少基本垂直于主表面的方向上延伸的第二尺寸，所述主体具有与所述第一侧相对的第一侧和第二侧。门控半导体器件包括覆盖第一侧的第一栅极，并且在横向上具有第一栅极长度。门控半导体器件还包括覆盖第二侧的第二栅极，第二栅极在横向上具有不同于第一栅极长度的第二栅极长度，并且优选地短于第一栅极长度。在一个实施例中，第一栅极和第二栅极彼此电隔离。在另一个实施例中，第一栅极主要由多晶硅锗组成，第二栅极主要由多晶硅组成。

4. 发明授权

US07452761B2 Hybrid SOI-bulk semiconductor transistors 失效
标题翻译：混合SOI体半导体晶体管
公开(公告)号：US07452761B2
公开(公告)日：2008-11-18
申请号：US11870436
申请日：2007-10-11
申请人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
发明人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
IPC分类号： H01L21/00 , H01L21/84 , H01L21/336
CPC分类号： H01L29/7849 , H01L29/0653 , H01L29/1054 , H01L29/7842 , H01L29/78603 , H01L29/78612 , H01L29/78618 , H01L29/78687
摘要： Channel depth in a field effect transistor is limited by an intra-layer structure including a discontinuous film or layer formed within a layer or substrate of semiconductor material. Channel depth can thus be controlled much in the manner of SOI or UT-SOI technology but with less expensive substrates and greater flexibility of channel depth control while avoiding floating body effects characteristic of SOI technology. The profile or cross-sectional shape of the discontinuous film may be controlled to an ogee or staircase shape to improve short channel effects and reduce source/drain and extension resistance without increase of capacitance. Materials for the discontinuous film may also be chosen to impose stress on the transistor channel from within the substrate or layer and provide increased levels of such stress to increase carrier mobility. Carrier mobility may be increased in combination with other meritorious effects.
摘要翻译：场效应晶体管中的沟道深度由包括在半导体材料的层或衬底内形成的不连续膜或层的层内结构限制。因此，可以以SOI或UT-SOI技术的方式控制通道深度，但是具有较便宜的衬底和更大的通道深度控制的灵活性，同时避免SOI技术的浮体效应特性。不连续膜的轮廓或横截面形状可以被控制为奥格或阶梯形状，以改善短通道效应，并且在不增加电容的情况下降低源极/漏极和延伸电阻。也可以选择用于不连续膜的材料以在衬底或层内从晶体管沟道施加应力，并提供增加的这种应力水平以增加载流子迁移率。携带者的流动性可能会与其他有利的影响相结合。

5. 发明授权

US07923782B2 Hybrid SOI/bulk semiconductor transistors 有权
标题翻译：混合SOI /体半导体晶体管
公开(公告)号：US07923782B2
公开(公告)日：2011-04-12
申请号：US10708378
申请日：2004-02-27
申请人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
发明人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
IPC分类号： H01L27/01 , H01L27/12
CPC分类号： H01L29/7849 , H01L29/0653 , H01L29/1054 , H01L29/7842 , H01L29/78603 , H01L29/78612 , H01L29/78618 , H01L29/78687
摘要： Channel depth in a field effect transistor is limited by an intra-layer structure including a discontinuous film or layer formed within a layer or substrate of semiconductor material. Channel depth can thus be controlled much in the manner of SOI or UT-SOI technology but with less expensive substrates and greater flexibility of channel depth control while avoiding floating body effects characteristic of SOI technology. The profile or cross-sectional shape of the discontinuous film may be controlled to an ogee or staircase shape to improve short channel effects and reduce source/drain and extension resistance without increase of capacitance. Materials for the discontinuous film may also be chosen to impose stress on the transistor channel from within the substrate or layer and provide increased levels of such stress to increase carrier mobility. Carrier mobility may be increased in combination with other meritorious effects.
摘要翻译：场效应晶体管中的沟道深度由包括在半导体材料的层或衬底内形成的不连续膜或层的层内结构限制。因此，可以以SOI或UT-SOI技术的方式控制通道深度，但是具有较便宜的衬底和更大的通道深度控制的灵活性，同时避免SOI技术的浮体效应特性。不连续膜的轮廓或横截面形状可以被控制为奥格或阶梯形状，以改善短通道效应，并且在不增加电容的情况下降低源极/漏极和延伸电阻。也可以选择用于不连续膜的材料以在衬底或层内从晶体管沟道施加应力，并提供增加的这种应力水平以增加载流子迁移率。携带者的流动性可能会与其他有利的影响相结合。

6. 发明授权

US07767503B2 Hybrid SOI/bulk semiconductor transistors 失效
标题翻译：混合SOI /体半导体晶体管
公开(公告)号：US07767503B2
公开(公告)日：2010-08-03
申请号：US12132853
申请日：2008-06-04
申请人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
发明人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
IPC分类号： H01L21/84 , H01L21/336
CPC分类号： H01L29/7849 , H01L29/0653 , H01L29/1054 , H01L29/7842 , H01L29/78603 , H01L29/78612 , H01L29/78618 , H01L29/78687
摘要： Channel depth in a field effect transistor is limited by an intra-layer structure including a discontinuous film or layer formed within a layer or substrate of semiconductor material. Channel depth can thus be controlled much in the manner of SOI or UT-SOI technology but with less expensive substrates and greater flexibility of channel depth control while avoiding floating body effects characteristic of SOI technology. The profile or cross-sectional shape of the discontinuous film may be controlled to an ogee or staircase shape to improve short channel effects and reduce source/drain and extension resistance without increase of capacitance. Materials for the discontinuous film may also be chosen to impose stress on the transistor channel from within the substrate or layer and provide increased levels of such stress to increase carrier mobility. Carrier mobility may be increased in combination with other meritorious effects.
摘要翻译：场效应晶体管中的沟道深度由包括在半导体材料的层或衬底内形成的不连续膜或层的层内结构限制。因此，可以以SOI或UT-SOI技术的方式控制通道深度，但是具有较便宜的衬底和更大的通道深度控制的灵活性，同时避免SOI技术的浮体效应特性。不连续膜的轮廓或横截面形状可以被控制为奥格或阶梯形状，以改善短通道效应，并且在不增加电容的情况下降低源极/漏极和延伸电阻。也可以选择用于不连续膜的材料以在衬底或层内从晶体管沟道施加应力，并提供增加的这种应力水平以增加载流子迁移率。携带者的流动性可能会与其他有利的影响相结合。

7. 发明申请

US20080242069A1 HYBRID SOI/BULK SEMICONDUCTOR TRANSISTORS 失效
标题翻译：混合SOI / BULK半导体晶体管
公开(公告)号：US20080242069A1
公开(公告)日：2008-10-02
申请号：US12132853
申请日：2008-06-04
申请人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
发明人： Huilong Zhu , Philip J. Oldiges , Bruce B. Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
IPC分类号： H01L21/3205
CPC分类号： H01L29/7849 , H01L29/0653 , H01L29/1054 , H01L29/7842 , H01L29/78603 , H01L29/78612 , H01L29/78618 , H01L29/78687
摘要： Channel depth in a field effect transistor is limited by an intra-layer structure including a discontinuous film or layer formed within a layer or substrate of semiconductor material. Channel depth can thus be controlled much in the manner of SOI or UT-SOI technology but with less expensive substrates and greater flexibility of channel depth control while avoiding floating body effects characteristic of SOI technology. The profile or cross-sectional shape of the discontinuous film may be controlled to an ogee or staircase shape to improve short channel effects and reduce source/drain and extension resistance without increase of capacitance. Materials for the discontinuous film may also be chosen to impose stress on the transistor channel from within the substrate or layer and provide increased levels of such stress to increase carrier mobility. Carrier mobility may be increased in combination with other meritorious effects.
摘要翻译：场效应晶体管中的沟道深度由包括在半导体材料的层或衬底内形成的不连续膜或层的层内结构限制。因此，可以以SOI或UT-SOI技术的方式控制通道深度，但是具有较便宜的衬底和更大的通道深度控制的灵活性，同时避免SOI技术的浮体效应特性。不连续膜的轮廓或横截面形状可以被控制为奥格或阶梯形状，以改善短通道效应，并且在不增加电容的情况下降低源极/漏极和延伸电阻。也可以选择用于不连续膜的材料以在衬底或层内从晶体管沟道施加应力，并提供增加的这种应力水平以增加载流子迁移率。携带者的流动性可能会与其他有利的影响相结合。

8. 发明授权

US06924517B2 Thin channel FET with recessed source/drains and extensions 失效
标题翻译：具有凹陷源/漏极和扩展的薄沟道FET
公开(公告)号：US06924517B2
公开(公告)日：2005-08-02
申请号：US10604907
申请日：2003-08-26
申请人： Huajie Chen , Bruce B. Doris , Philip J. Oldiges , Xinlin Wang , Huilong Zhu
发明人： Huajie Chen , Bruce B. Doris , Philip J. Oldiges , Xinlin Wang , Huilong Zhu
IPC分类号： H01L21/336 , H01L29/10 , H01L29/786
CPC分类号： H01L29/78696 , H01L29/1054 , H01L29/66772 , H01L29/78603 , H01L29/78618 , H01L29/78621 , H01L29/78684
摘要： A field effect transistor (FET), integrated circuit (IC) chip including the FETs and a method of forming the FETS. The devices have a thin channel, e.g., an ultra-thin (smaller than or equal to 10 nanometers (10 nm)) silicon on insulator (SOI) layer. Source/drain regions are located in recesses at either end of the thin channel and are substantially thicker (e.g., 30 nm) than the thin channel. Source/drain extensions and corresponding source/drain regions are self aligned to the FET gate and thin channel.
摘要翻译：包括FET的场效应晶体管（FET），集成电路（IC）芯片和形成FET的方法。器件具有薄沟道，例如超薄（小于或等于10纳米（10nm））绝缘体上硅（SOI）层。源极/漏极区位于薄沟道的任一端的凹槽中，并且比薄沟道基本上更厚（例如，30nm）。源/漏扩展和相应的源极/漏极区域与FET栅极和薄沟道自对准。

9. 发明申请

US20070181930A1 Structure and method of making double-gated self-aligned finfet having gates of different lengths 有权
标题翻译：制作具有不同长度的门的双门控自对准finfet的结构和方法
公开(公告)号：US20070181930A1
公开(公告)日：2007-08-09
申请号：US10711182
申请日：2004-08-31
申请人： Huilong Zhu , Bruce Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip Oldiges
发明人： Huilong Zhu , Bruce Doris , Xinlin Wang , Jochen Beintner , Ying Zhang , Philip Oldiges
IPC分类号： H01L27/108
CPC分类号： H01L29/785 , H01L29/66795 , H01L29/7855 , H01L29/7856
摘要： A gated semiconductor device is provided, in which the body has a first dimension extending in a lateral direction parallel to a major surface of a substrate, and second dimension extending in a direction at least substantially vertical and at least substantially perpendicular to the major surface, the body having a first side and a second side opposite the first side. The gated semiconductor device includes a first gate overlying the first side, and having a first gate length in the lateral direction. The gated semiconductor device further includes a second gate overlying the second side, the second gate having a second gate length in the lateral direction which is different from, and preferably shorter than the first gate length. In one embodiment, the first gate and the second gate being electrically isolated from each other. In another embodiment the first gate consists essentially of polycrystalline silicon germanium and the second gate consists essentially of polysilicon.
摘要翻译：提供了门控半导体器件，其中主体具有在平行于衬底的主表面的横向方向上延伸的第一尺寸，以及在至少基本上垂直且至少基本垂直于主表面的方向上延伸的第二尺寸，所述主体具有与所述第一侧相对的第一侧和第二侧。门控半导体器件包括覆盖第一侧的第一栅极，并且在横向上具有第一栅极长度。门控半导体器件还包括覆盖第二侧的第二栅极，第二栅极在横向上具有不同于第一栅极长度的第二栅极长度，并且优选地短于第一栅极长度。在一个实施例中，第一栅极和第二栅极彼此电隔离。在另一个实施例中，第一栅极主要由多晶硅锗组成，第二栅极主要由多晶硅组成。

10. 发明申请

US20080090366A1 Hybrid SOI-Bulk Semiconductor Transistors 失效
标题翻译：混合SOI-体半导体晶体管
公开(公告)号：US20080090366A1
公开(公告)日：2008-04-17
申请号：US11870436
申请日：2007-10-11
申请人： Huilong Zhu , Philip Oldiges , Bruce Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
发明人： Huilong Zhu , Philip Oldiges , Bruce Doris , Xinlin Wang , Oleg Gluschenkov , Huajie Chen , Ying Zhang
IPC分类号： H01L21/336
CPC分类号： H01L29/7849 , H01L29/0653 , H01L29/1054 , H01L29/7842 , H01L29/78603 , H01L29/78612 , H01L29/78618 , H01L29/78687
摘要： Channel depth in a field effect transistor is limited by an intra-layer structure including a discontinuous film or layer formed within a layer or substrate of semiconductor material. Channel depth can thus be controlled much in the manner of SOI or UT-SOI technology but with less expensive substrates and greater flexibility of channel depth control while avoiding floating body effects characteristic of SOI technology. The profile or cross-sectional shape of the discontinuous film may be controlled to an ogee or staircase shape to improve short channel effects and reduce source/drain and extension resistance without increase of capacitance. Materials for the discontinuous film may also be chosen to impose stress on the transistor channel from within the substrate or layer and provide increased levels of such stress to increase carrier mobility. Carrier mobility may be increased in combination with other meritorious effects.
摘要翻译：场效应晶体管中的沟道深度由包括在半导体材料的层或衬底内形成的不连续膜或层的层内结构限制。因此，可以以SOI或UT-SOI技术的方式控制通道深度，但是具有较便宜的衬底和更大的通道深度控制的灵活性，同时避免SOI技术的浮体效应特性。不连续膜的轮廓或横截面形状可以被控制为奥格或阶梯形状，以改善短通道效应，并且在不增加电容的情况下降低源极/漏极和延伸电阻。也可以选择用于不连续膜的材料以在衬底或层内从晶体管沟道施加应力，并提供增加的这种应力水平以增加载流子迁移率。携带者的流动性可能会与其他有利的影响相结合。

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