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    • 1. 发明授权
    • Angular rate sensor
    • 角速度传感器
    • US5216315A
    • 1993-06-01
    • US809751
    • 1991-12-18
    • Jirou TeradaKazumitu UedaHiroshi TakenakaToshihiko Ichinose
    • Jirou TeradaKazumitu UedaHiroshi TakenakaToshihiko Ichinose
    • G01C19/56
    • G01C19/5607
    • A driving piezoelectric bimorph element for tuning fork vibration and a detecting piezoelectric bimorph element for angular rate detection are aligned and put together, end to end, with their vibration directions positioned perpendicular to each other.Two of the above structure are made into a tuning fork like angular rate sensor. The polarization directions of the piezoelectric elements, that make up the piezoelectric bimorph element by bonding them together are made the same and also the two outer electrodes of the bimorph element are connected electrically with each other, with a resultant angular rate sensor capable of detecting angular rates in a stable manner against changing ambient temperatures. Particularly, the use of a conductive film electrode for making a connection between two outer electrodes and the almost equal surface areas between two outer electrodes made it possible for the angular rate sensor to detect angular rates with much stability and less temperature drifts.
    • 用于音叉振动的驱动压电双压电元件和用于角速率检测的检测压电双晶片元件以其振动方向彼此垂直的方式端对齐地放置在一起。 上述结构中的两个被制成诸如角速率传感器的音叉。 通过将压电元件组合在一起构成压电元件的极化方向相同,并且双压电晶片元件的两个外部电极彼此电连接,合成的角速度传感器能够检测角度 以稳定的方式抵抗变化的环境温度。 特别地,使用用于在两个外部电极之间建立连接的导电膜电极和两个外部电极之间的几乎相等的表面积使得角速度传感器能够以更大的稳定性和更少的温度漂移来检测角速率。
    • 2. 发明申请
    • OPTICAL REFLECTION ELEMENT
    • 光学反射元件
    • US20120033279A1
    • 2012-02-09
    • US13264530
    • 2010-05-10
    • Shigeo FurukawaKiyomi FurukawaJirou TeradaShinsuke NakazonoSoichiro Hiraoka
    • Shigeo FurukawaKiyomi FurukawaJirou TeradaShinsuke NakazonoSoichiro Hiraoka
    • G02B26/10
    • G02B26/0833G02B27/01G02B27/017G02B2027/0147
    • An optical reflection element has a frame-shaped supporting body, a first oscillator and a second oscillator each having a meander shape, and a mirror portion. A line segment connecting a joining position between the mirror portion and the first oscillator to a joining position between the supporting body and the first oscillator, and a line segment connecting a joining position of the mirror portion and the second oscillator to a joining position of the supporting body and the second oscillator cross a mirror portion central axis. An outer circumference of at least any one of turn portions of the first oscillator and the second oscillator is deviated from a first end portion axis that is parallel to the mirror portion central axis and extends along a first side of the mirror portion. Alternatively, an outer circumference of at least any one of the turn portions of the first oscillator and the second oscillator is deviated from a second end portion axis T2 that is parallel to the mirror portion central axis and extends along a second side parallel to the first side of the mirror portion. At least any one of these two conditions is satisfied.
    • 光反射元件具有框形支撑体,第一振荡器和第二振荡器,每个具有曲折形状和反射镜部分。 将反射镜部分和第一振荡器之间的接合位置连接到支撑体和第一振荡器之间的接合位置的线段,以及将镜部分和第二振荡器的接合位置连接到第二振荡器的接合位置的线段 支撑体和第二振荡器穿过反射镜部分中心轴线。 第一振荡器和第二振荡器的旋转部分中的至少任一个的外圆周与第一端部轴线偏离,第一端部轴线平行于反射镜部分中心轴线并沿着反射镜部分的第一侧延伸。 或者,第一振荡器和第二振荡器的匝部中的至少任一个的外周与第二端部轴线T2偏离,第二端部轴线T2平行于反射镜部分中心轴线,并沿着与第一振荡器和第二振荡器的第一振荡器平行的第二侧延伸 侧部分。 这两个条件中至少有一个是满足的。
    • 3. 发明申请
    • ANGULAR VELOCITY SENSOR
    • 角速度传感器
    • US20100218604A1
    • 2010-09-02
    • US12377327
    • 2007-08-07
    • Jirou Terada
    • Jirou Terada
    • G01C19/56
    • G01C19/5726G01C19/574H01L41/08
    • Disclosed is an angular velocity sensor for achieving downsizing of a variety of electronic devices. For this purpose, the angular velocity sensor has a subtracter for outputting a first differential signal based on two sensor signals output from a first sensing electrode unit and a second sensing electrode unit, an adder for outputting a first additional signal, another subtracter for outputting a second differential signal based on two sensor signals output from a third sensing electrode unit and a fourth sensing electrode unit, and another adder for outputting a second additional signal. The sensor then detects an angular velocity from an additional signal obtained based on the first differential signal and the second differential signal and a differential signal obtained based on the first additional signal and the second additional signal.
    • 公开了一种用于实现各种电子设备的小型化的角速度传感器。 为此,角速度传感器具有减法器,用于基于从第一感测电极单元和第二感测电极单元输出的两个传感器信号输出第一差分信号,用于输出第一附加信号的加法器,用于输出第一信号的另一个减法器 基于从第三感测电极单元和第四感测电极单元输出的两个传感器信号的第二差分信号,以及用于输出第二附加信号的另一个加法器。 然后,传感器从基于第一差分信号和第二差分信号获得的附加信号和基于第一附加信号和第二附加信号获得的差分信号检测角速度。
    • 4. 发明授权
    • Optical reflection element
    • 光反射元件
    • US08422109B2
    • 2013-04-16
    • US12811592
    • 2009-01-29
    • Jirou TeradaShinsuke NakazonoShigeo FurukawaKazuki Komaki
    • Jirou TeradaShinsuke NakazonoShigeo FurukawaKazuki Komaki
    • G02B26/08
    • B41J2/471G02B26/0858G02B26/105H04N1/113
    • An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis.
    • 光反射装置包括具有被配置为反射光的反射表面的反射镜,连接到反射镜的第一支撑梁,连接到第一支撑梁的音叉振动器,连接到音叉振动器的第二支撑梁,以及支撑件 连接到第二支撑梁。 第一支撑梁具有连接到反射镜的第一端和位于与第一端相反的一侧的第二端,并沿着中心轴线延伸。 音叉振动器包括连接到第一支撑梁的第二端的接合部分,从第一接合部分延伸并与第一中心轴分离的第一臂,以及从第一接合部分对称地延伸到第一接合部分的第一臂 围绕第一个中心轴。 第二支撑梁具有连接到音叉振动器的接合部分的第三端和位于与第三端相反的一侧的第四端,并沿第一中心轴线延伸。
    • 5. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US08117913B2
    • 2012-02-21
    • US12377327
    • 2007-08-07
    • Jirou Terada
    • Jirou Terada
    • G01P9/04G01C19/56
    • G01C19/5726G01C19/574H01L41/08
    • Disclosed is an angular velocity sensor for achieving downsizing of a variety of electronic devices. For this purpose, the angular velocity sensor has a subtracter for outputting a first differential signal based on two sensor signals output from a first sensing electrode unit and a second sensing electrode unit, an adder for outputting a first additional signal, another subtracter for outputting a second differential signal based on two sensor signals output from a third sensing electrode unit and a fourth sensing electrode unit, and another adder for outputting a second additional signal. The sensor then detects an angular velocity from an additional signal obtained based on the first differential signal and the second differential signal and a differential signal obtained based on the first additional signal and the second additional signal.
    • 公开了一种用于实现各种电子设备的小型化的角速度传感器。 为此,角速度传感器具有减法器,用于基于从第一感测电极单元和第二感测电极单元输出的两个传感器信号输出第一差分信号,用于输出第一附加信号的加法器,用于输出第一信号的另一个减法器 基于从第三感测电极单元和第四感测电极单元输出的两个传感器信号的第二差分信号,以及用于输出第二附加信号的另一个加法器。 然后,传感器从基于第一差分信号和第二差分信号获得的附加信号和基于第一附加信号和第二附加信号获得的差分信号检测角速度。
    • 6. 发明申请
    • ANGULAR VELOCITY SENSOR
    • 角速度传感器
    • US20100011859A1
    • 2010-01-21
    • US12438765
    • 2007-09-19
    • Jirou Terada
    • Jirou Terada
    • G01C19/56
    • G01C19/5607H01L41/1132
    • An angular velocity sensor detects an angular velocity of an object. The angular velocity sensor includes a detecting element, and a driving unit. The detecting element includes a supporting part, a first arm extending from the supporting part and being adapted to be fixed to the object, a second arm extending from the supporting part, and a first weight connected with the second arm. The second arm has substantially a U-shape and includes a first extending part extending from the supporting part, a first facing part facing the first extending part and extending in parallel with the first extending part, and a first joint part joining the first extending part to the first facing part. The first weight is connected with the facing part of the second arm. The driving unit includes first to fourth drivers. The first driver is provided at the first extending part and extends and contracts the first extending part. The second driver is positioned at the first extending part at a more outer circumference of the U-shape of the second arm than the first driver. The second driver extends and contracts the first extending part. The third driver is positioned at the first facing part, and extends and contracts the first facing part. The fourth driver is positioned at the first facing part at a more inner circumference of the U-shape of the second arm than the third driver, and extends and contracts the first facing part. This angular velocity sensor has a small size along a rotation axis about which an angular velocity to be detected.
    • 角速度传感器检测物体的角速度。 角速度传感器包括检测元件和驱动单元。 检测元件包括支撑部分,从支撑部分延伸并适于固定到物体的第一臂,从支撑部分延伸的第二臂和与第二臂连接的第一重物。 所述第二臂具有大致U字形状并且包括从所述支撑部延伸的第一延伸部,面向所述第一延伸部并与所述第一延伸部平行延伸的第一面对部,以及将所述第一延伸部 到第一个面对的部分。 第一重物与第二臂的面对部分连接。 驱动单元包括第一至第四驱动器。 第一驱动器设置在第一延伸部分处并且延伸并收缩第一延伸部分。 第二驱动器位于比第一驱动器在第二臂的U形的更外侧的第一延伸部处。 第二个司机扩展和收缩第一个延伸部分。 第三驱动器位于第一面对部分,并且延伸并收缩第一面对部分。 第四驱动器位于第一面对部分处,比第三驱动器在第二臂的U形的更内圆周处延伸并收缩第一相对部分。 该角速度传感器沿着旋转轴线具有小的尺寸,围绕该角度速度传感器检测角速度。
    • 7. 发明授权
    • Optical reflection element
    • 光反射元件
    • US08279508B2
    • 2012-10-02
    • US13265139
    • 2010-04-16
    • Shinsuke NakazonoSoichiro HiraokaJirou TeradaShigeo FurukawaKiyomi Furukawa, legal representativeToshiaki HorieKazuki KomakiMasaki TadaYuta Yamamoto
    • Shinsuke NakazonoSoichiro HiraokaJirou TeradaShigeo FurukawaToshiaki HorieKazuki KomakiMasaki TadaYuta Yamamoto
    • G02B26/08
    • G02B26/0858
    • An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
    • 光反射元件包括反射镜,一对高频振动器和用于振动反射镜的一对低频振动器。 高频振动器包括基板,形成在基板上的底部电极层,压电层和驱动电极以及作为顶部电极层的第一监视电极。 低频振动器的一端具有与高频振动器共用的基板,底部电极层,压电层,驱动电极和作为顶部电极层的第二监视电极。 低频振动器的另一端具有与高频振子共用的基板,底电极层,压电层,驱动电极,第一监视电极和绝缘体层,作为防止压电的死区 由于压电层到达第一监视电极的作用。 设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。
    • 9. 发明申请
    • OPTICAL REFLECTION DEVICE AND IMAGE PROJECTOR INCLUDNG THE SAME
    • 光学反射装置和图像投影仪包括它们
    • US20090237628A1
    • 2009-09-24
    • US12404518
    • 2009-03-16
    • Shigeo FurukawaJirou TeradaShinsuke Nakazono
    • Shigeo FurukawaJirou TeradaShinsuke Nakazono
    • G03B21/28G02B26/08
    • G02B26/0858G02B26/101G03B21/28H04N5/7458
    • An optical reflection device includes a mirror adapted to reflect light thereon, a first meander vibration beam supporting the mirror rotatably about the first rotation axis, a movable frame connected to the first meander vibration beam, a second meander vibration beam supporting the movable frame rotatably about a second rotation axis, and a supporter connected to the second meander vibration beam. The first meander vibration beam meanderingly extends along a first rotation axis, and has a first end and a second end opposite to the first end. The movable frame is connected to the second end of the first meander vibration beam. The second meander vibration beam extends meanderingly along the second rotation axis perpendicular to the first rotation axis, and has a third end and a fourth end opposite to the third end. The supporter is connected to the fourth end of the second meander vibration beam. The mirror is coupled to the movable frame only via the first meander vibration beam. This optical reflection device has a large angle by which the mirror rotates about the first rotation axis.
    • 光学反射装置包括适于反射光的反射镜,围绕第一旋转轴可旋转地支撑镜子的第一曲折振动光束,连接到第一曲折振动光束的可移动框架,支撑可移动框架的第二曲折振动光束, 第二旋转轴线和与第二曲折振动梁连接的支撑件。 第一弯曲振动束沿着第一旋转轴线弯曲地延伸,并且具有与第一端相对的第一端和第二端。 可移动框架连接到第一弯曲振动梁的第二端。 第二曲折振动梁沿垂直于第一旋转轴线的第二旋转轴线蜿蜒延伸,并且具有与第三端相对的第三端和第四端。 支撑件连接到第二曲折振动梁的第四端。 反射镜仅通过第一弯曲振动光束耦合到可动框架。 该光反射装置具有大的角度,通过该角度,反射镜绕第一旋转轴线旋转。