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    • 1. 发明授权
    • Angular rate sensor
    • 角速度传感器
    • US5216315A
    • 1993-06-01
    • US809751
    • 1991-12-18
    • Jirou TeradaKazumitu UedaHiroshi TakenakaToshihiko Ichinose
    • Jirou TeradaKazumitu UedaHiroshi TakenakaToshihiko Ichinose
    • G01C19/56
    • G01C19/5607
    • A driving piezoelectric bimorph element for tuning fork vibration and a detecting piezoelectric bimorph element for angular rate detection are aligned and put together, end to end, with their vibration directions positioned perpendicular to each other.Two of the above structure are made into a tuning fork like angular rate sensor. The polarization directions of the piezoelectric elements, that make up the piezoelectric bimorph element by bonding them together are made the same and also the two outer electrodes of the bimorph element are connected electrically with each other, with a resultant angular rate sensor capable of detecting angular rates in a stable manner against changing ambient temperatures. Particularly, the use of a conductive film electrode for making a connection between two outer electrodes and the almost equal surface areas between two outer electrodes made it possible for the angular rate sensor to detect angular rates with much stability and less temperature drifts.
    • 用于音叉振动的驱动压电双压电元件和用于角速率检测的检测压电双晶片元件以其振动方向彼此垂直的方式端对齐地放置在一起。 上述结构中的两个被制成诸如角速率传感器的音叉。 通过将压电元件组合在一起构成压电元件的极化方向相同,并且双压电晶片元件的两个外部电极彼此电连接,合成的角速度传感器能够检测角度 以稳定的方式抵抗变化的环境温度。 特别地,使用用于在两个外部电极之间建立连接的导电膜电极和两个外部电极之间的几乎相等的表面积使得角速度传感器能够以更大的稳定性和更少的温度漂移来检测角速率。