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1. 发明授权

US08793866B1 Method for providing a perpendicular magnetic recording head 有权
标题翻译：提供垂直磁记录头的方法
公开(公告)号：US08793866B1
公开(公告)日：2014-08-05
申请号：US11960596
申请日：2007-12-19
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Yizhong Wang , Hai Sun , Li He
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Yizhong Wang , Hai Sun , Li He
IPC分类号： G11B5/187 , C23C14/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A method provides a PMR transducer. In one aspect, the method includes forming a trench in an intermediate layer using reactive ion etch(es). The trench top is wider than its bottom. In this aspect, the method also includes providing a seed layer using atomic layer deposition and providing a PMR pole on the seed layer. Portion(s) of the seed layer and PMR pole reside in the trench. In another aspect, the method includes providing a mask including a trench having a top wider than its bottom. In this aspect, the method includes providing mask material in the trench, providing an intermediate layer on the mask material and removing the mask material to provide another trench in the intermediate layer. In this aspect, the method also includes providing a PMR pole in the additional trench.
摘要翻译：一种方法提供PMR换能器。一方面，该方法包括使用反应离子蚀刻在中间层中形成沟槽。沟槽顶部比底部宽。在这方面，该方法还包括使用原子层沉积提供种子层并在种子层上提供PMR极点。种子层和PMR极的部分位于沟槽中。在另一方面，该方法包括提供一种掩模，该掩模包括具有比其底部更宽的顶部的沟槽。在这方面，该方法包括在沟槽中提供掩模材料，在掩模材料上提供中间层并去除掩模材料以在中间层中提供另一个沟槽。在这方面，该方法还包括在附加沟槽中提供PMR极点。

2. 发明授权

US08284517B1 Perpendicular magnetic recording head 有权
标题翻译：垂直磁记录头
公开(公告)号：US08284517B1
公开(公告)日：2012-10-09
申请号：US13372775
申请日：2012-02-14
申请人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
发明人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49041
摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PMR head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a planarization stop layer adjacent to the first portion of the at least one side of the PMR pole.
摘要翻译：垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PMR头还包括围绕PMR极的底部和至少一侧的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层和与PMR极的相邻的平坦化停止层 PMR极点的至少一侧的第一部分。

3. 发明授权

US08136224B1 Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line 有权
标题翻译：用于使用具有底切线的掩模来提供垂直磁记录头的方法和系统
公开(公告)号：US08136224B1
公开(公告)日：2012-03-20
申请号：US12121540
申请日：2008-05-15
申请人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
发明人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49041
摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The line has at least one side, a top, and a bottom. The side(s) have an undercut such that the top of the line is wider than the bottom. The method further include providing a hard mask on the PMR transducer. The hard mask includes an aperture corresponding to the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
摘要翻译：公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。该方法和系统包括在中间层上提供包括线的掩模。该线至少有一边，顶部和底部。侧面具有底切，使得线的顶部比底部更宽。该方法还包括在PMR传感器上提供硬掩模。硬掩模包括对应于该线的孔。因此，提供了对应于该线的硬掩模中的孔。该方法和系统还包括在孔下方的中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法还包括提供PMR极，其至少一部分位于沟槽中。

4. 发明授权

US08166632B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08166632B1
公开(公告)日：2012-05-01
申请号：US12057611
申请日：2008-03-28
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Donghong Li
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Donghong Li
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench.
摘要翻译：一种用于提供包括中间层的PMR换能器的方法和系统。该方法和系统包括在中间层上提供硬掩模层。硬掩模层用于中间层的反应离子蚀刻。该方法和系统还包括在硬掩模层上提供底部抗反射涂层（BARC）层。 BARC层也是硬掩模层的掩模层。该方法和系统还包括使用至少一个反应离子蚀刻（RIE）在中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法和系统还包括提供PMR极点。 PMR极的至少一部分位于沟槽中。

5. 发明授权

US08310785B1 Perpendicular magnetic recording head 有权
标题翻译：垂直磁记录头
公开(公告)号：US08310785B1
公开(公告)日：2012-11-13
申请号：US13372316
申请日：2012-02-13
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49041
摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.
摘要翻译：垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PRM头还包括围绕PMR极的底部和至少一个侧面的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层以及邻近PMR极的硬掩模层 PMR极点的至少一侧的第一部分。

6. 发明授权

US08136225B1 Method and system for providing a perpendicular magnetic recording head 有权
标题翻译：用于提供垂直磁记录头的方法和系统
公开(公告)号：US08136225B1
公开(公告)日：2012-03-20
申请号：US12121624
申请日：2008-05-15
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49041
摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The method further include providing a hard mask layer on the mask and removing the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
摘要翻译：公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。该方法和系统包括在中间层上提供包括线的掩模。该方法还包括在掩模上提供硬掩模层并去除线。因此，提供了对应于该线的硬掩模中的孔。该方法和系统还包括在孔下方的中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法还包括提供PMR极，其至少一部分位于沟槽中。

7. 发明授权

US08196285B1 Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask 有权
标题翻译：使用多层硬掩模为垂直磁记录头提供磁极的方法和系统
公开(公告)号：US08196285B1
公开(公告)日：2012-06-12
申请号：US12336758
申请日：2008-12-17
申请人： Jinqiu Zhang , Liubo Hong
发明人： Jinqiu Zhang , Liubo Hong
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/315 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49052
摘要： A method and system for providing a PMR pole in a transducer including an intermediate layer are disclosed. A mask including line(s) having side(s) is provided. A hard mask is provided on the mask. Portions of the hard mask reside on the line side(s) and intermediate layer surface. The hard mask includes a wet-etchable layer and a high removal ratio layer on the wet-etchable layer. Part of the hard mask on the side(s) of the line is removed, exposing part of the line. The high removal ratio layer has a low angle removal rate on the line side(s) and a high angle removal rate on the intermediate layer surface. The low angle removal rate is at least four times the high angle removal rate. The line is removed, providing an aperture in the hard mask. A trench is provided in the intermediate layer. A PMR pole is provided.
摘要翻译：公开了一种用于在包括中间层的换能器中提供PMR极的方法和系统。提供包括具有侧面的线的面罩。在面罩上提供硬掩模。硬掩模的一部分位于线路侧和中间层表面。硬掩模在湿蚀刻层上包括湿蚀刻层和高去除率层。线的一侧的硬掩模的一部分被去除，露出部分线。高去除率层在线路侧具有低角度去除速率和在中间层表面上具有高角度去除速率。低角度去除率至少是高角度去除率的四倍。线被去除，在硬掩模中提供孔。在中间层设置沟槽。提供PMR极。

8. 发明授权

US09202480B2 Double patterning hard mask for damascene perpendicular magnetic recording (PMR) writer 有权
标题翻译：用于大马士革垂直磁记录（PMR）作者的双重图案化硬掩模
公开(公告)号：US09202480B2
公开(公告)日：2015-12-01
申请号：US12579316
申请日：2009-10-14
申请人： Xiaohai Xiang , Yun-Fei Li , Jinqiu Zhang , Hongping Yuan , Xianzhong Zeng , Hai Sun
发明人： Xiaohai Xiang , Yun-Fei Li , Jinqiu Zhang , Hongping Yuan , Xianzhong Zeng , Hai Sun
IPC分类号： B44C1/22 , C03C15/00 , H01L21/4763 , G11B5/31 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T428/11
摘要： Various embodiments of the subject disclosure provide a double patterning process that uses two patterning steps to produce a write structure having a nose shape with sharp corners. In one embodiment, a method for forming a write structure on a multi-layer structure comprising a substrate and an insulator layer on the substrate is provided. The method comprises forming a hard mask layer over the insulator layer, performing a first patterning process to form a pole and yoke opening in the hard mask layer, performing a second patterning process to remove rounded corners of the pole and yoke opening in the hard mask layer, removing a portion of the insulator layer corresponding to the pole and yoke opening in the hard mask layer to form a trench in the insulator layer, and filling the trench with a magnetic material.
摘要翻译：本发明公开的各种实施例提供一种双重图案化工艺，其使用两个图案化步骤来产生具有尖角的鼻子形状的写入结构。在一个实施例中，提供了一种用于在包括衬底和衬底上的绝缘体层的多层结构上形成写结构的方法。该方法包括在绝缘体层上形成硬掩模层，执行第一图案化工艺以在硬掩模层中形成极和轭开口，执行第二图案化处理以去除硬掩模中的极和轭开口的圆角去除与硬掩模层中的极和轭开口相对应的绝缘体层的一部分，以在绝缘体层中形成沟槽，并用磁性材料填充沟槽。

9. 发明授权

US08563146B1 Method and system for providing a magnetic recording pole having a dual sidewall angle 有权
标题翻译：用于提供具有双重侧壁角的磁记录极的方法和系统
公开(公告)号：US08563146B1
公开(公告)日：2013-10-22
申请号：US13169710
申请日：2011-06-27
申请人： Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
发明人： Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.
摘要翻译：一种制造具有空气轴承表面（ABS）的磁换能器的方法。提供具有第一和第二区域的底层以及连接这些区域的斜面。第一区域比第二区域更厚且更接近ABS。提供与底层共形的中间层。在中间层上形成具有垂直于ABS的顶表面的硬掩模层。除去硬掩模和中间层的一部分以提供沟槽。沟槽具有底表面和在底表面和中间层之间具有第一角度的侧壁和对应于硬掩模层的第二角度。在沟槽中设置一个极点。杆具有极尖，轭远端和底斜面。至少轭包括具有对应于第一和第二角度的侧壁角的侧壁。

10. 发明授权

US08649123B1 Method to eliminate reactive ion etching (RIE) loading effects for damascene perpendicular magnetic recording (PMR) fabrication 有权
标题翻译：消除用于大马士革垂直磁记录（PMR）制造的反应离子蚀刻（RIE）负载效应的方法
公开(公告)号：US08649123B1
公开(公告)日：2014-02-11
申请号：US12324519
申请日：2008-11-26
申请人： Jinqiu Zhang , Hai Sun , Hongping Yuan , Tsung Yuan Chen
发明人： Jinqiu Zhang , Hai Sun , Hongping Yuan , Tsung Yuan Chen
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing an insulating layer; covering the insulating layer with a hard mask material; forming a pre-defined shape in the hard mask material; forming a pole trench and a yoke area in the insulating layer by a first reactive ion etching (RIE) process in which the yoke area includes a loading prevention pattern; performing a wet etching process to remove the hard mask material from the pole trench and the yoke area; performing a second RIE process to remove the loading prevention pattern of the yoke area, wherein the pole trench and the remainder of the yoke area are not removed and remain having similar side wall angles; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.
摘要翻译：公开了一种用于提供垂直磁记录（PMR）头的方法。该方法包括：提供绝缘层; 用硬掩模材料覆盖绝缘层; 在硬掩模材料中形成预定形状; 通过第一反应离子蚀刻（RIE）工艺在绝缘层中形成极沟和轭区，其中轭区包括负载防止图案; 执行湿蚀刻工艺以从磁极沟槽和磁轭区域去除硬掩模材料; 执行第二RIE处理以去除轭区域的负载防止图案，其中极沟槽和轭区域的其余部分不被去除并保持具有相似的侧壁角度; 以及提供PMR极，其中PMR极的至少一部分位于极沟中。

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