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    • 8. 发明申请
    • Using bilayer lithography process to define neck height for PMR
    • 使用双层光刻工艺来定义PMR的颈部高度
    • US20060002021A1
    • 2006-01-05
    • US10881444
    • 2004-06-30
    • Donghong LiYoshitaka Sasaki
    • Donghong LiYoshitaka Sasaki
    • G11B5/147
    • G11B5/3163G11B5/1278Y10T29/49021
    • A method for independently forming neck height (NH) and pole width dimensions in a main pole layer of a PMR write head is described. A main pole layer with a pole tip region is formed on a bottom yoke. The pole tip region is trimmed by an ion milling process to give a pole width. A bilayer resist is patterned to form an opening with an undercut on the main pole layer. The opening uncovers the pole tip region except for an NH length adjacent to the pole tip. A top yoke comprised of CoFeN with a thickness of about 0.2 microns is deposited in the opening and the bilayer resist is removed by a lift-off process. Thereafter, a write gap layer is formed on the pole tip region and then first, second, and third write shield layers are formed above the write gap layer along the ABS.
    • 描述了在PMR写头的主极层中独立地形成颈部高度(NH)和极宽度尺寸的方法。 具有极尖区域的主极层形成在底架上。 通过离子铣削工艺修剪极尖区域以产生极宽度。 图案化双层抗蚀剂以在主极层上形成具有底切的开口。 除了与极尖相邻的NH长度之外,开口露出磁极尖端区域。 由厚度约0.2微米的CoFeN组成的顶部磁轭沉积在开口中,并通过剥离过程去除双层抗蚀剂。 此后,在极尖区域上形成写间隙层,然后沿着ABS形成在写间隙层上方的第一,第二和第三写屏蔽层。
    • 10. 发明授权
    • Pole width control on plated bevel main pole design of a perpendicular magnetic recording head
    • 极板宽度控制电镀斜面主极设计的垂直磁记录头
    • US07672079B2
    • 2010-03-02
    • US10886284
    • 2004-07-07
    • Donghong LiYoshitaka Sasaki
    • Donghong LiYoshitaka Sasaki
    • G11B5/127
    • G11B5/3163G11B5/1278Y10T29/49032Y10T29/49043Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • A main pole layer is deposited within an opening in a patterned photoresist layer on a substrate. The photoresist is thinned to expose an upper portion of a pole tip region that is then trimmed to a rectangular shape while a lower portion retains an inverted trapezoidal shape. Thereafter, a second trimming process forms a pole tip with a first width in the upper rectangular portion and a second thickness and second width which is less than the first width in the lower portion. A CMP step subsequently thins the upper portion to a first thickness of 0.04 to 0.08 microns while the second thickness remains at 0.16 to 0.32 microns. The bottom surface of the lower portion along the ABS becomes the trailing edge in a recording operation. The pole tip has a consistent first width (track width) that is not influenced by CMP process variations.
    • 主极层沉积在衬底上的图案化光致抗蚀剂层的开口内。 光致抗蚀剂变薄以暴露极尖区域的上部,然后将其修剪成矩形,而下部保持倒梯形形状。 此后,第二修整处理在上部矩形部分中形成具有第一宽度的极尖,并且在下部形成小于第一宽度的第二厚度和第二宽度。 CMP步骤随后将上部部分变薄至0.04至0.08微米的第一厚度,而第二厚度保持在0.16至0.32微米。 沿着ABS的下部的底面在记录操作中成为后缘。 极尖具有不受CMP工艺变化影响的一致的第一宽度(轨道宽度)。