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    • 1. 发明申请
    • NiO-based Resistive Random Access Memory and the Preparation Method Thereof
    • 基于NiO的电阻随机存取存储器及其制备方法
    • US20120305882A1
    • 2012-12-06
    • US13498973
    • 2011-09-23
    • Jingjing GuQingqing SunPengfei WangPeng ZhouWei Zhang
    • Jingjing GuQingqing SunPengfei WangPeng ZhouWei Zhang
    • H01L45/00H01L21/02
    • H01L45/146G11C13/0007H01L45/06H01L45/16
    • The present invention belongs to the technical field of memory storage and specially relates to a NiO-based resistive random access memory system (RRAM) and a preparation method thereof. The RRAM is comprised of a substrate and a metal-insulator-metal (MIM) structure, wherein the electrodes are metal films, such as copper, aluminum, etc., capable of being applied to the interconnection process, and the resistive switching insulator is an Al2O3/NiO/Al2O3 laminated dielectric film. The MIM structure in the invention shows stable switching between the bi-stable resistance states as well as memory features; compared with the RRAM that only uses a single NiO-based dielectric film, the storage window is increased, and the resistance stability is improved. Therefore, the NiO-based RRAM has a good prospect in actual application. The present invention further provides a method for preparing the abovementioned memory storage system.
    • 本发明属于存储器的技术领域,特别涉及一种基于NiO的电阻随机存取存储器(RRAM)及其制备方法。 RRAM由衬底和金属 - 绝缘体 - 金属(MIM)结构构成,其中电极是可应用于互连工艺的金属膜,例如铜,铝等,并且电阻式开关绝缘子是 Al2O3 / NiO / Al2O3层压电介质膜。 本发明的MIM结构显示了稳定的电阻状态和存储特征之间的稳定切换; 与仅使用单个NiO基电介质膜的RRAM相比,存储窗口增加,并且电阻稳定性得到改善。 因此,基于NiO的RRAM在实际应用中具有良好的前景。 本发明还提供了一种用于制备上述存储器存储系统的方法。
    • 4. 发明申请
    • SELF-ALIGNED VERTICAL NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
    • 自对准垂直非线性半导体存储器件
    • US20140167134A1
    • 2014-06-19
    • US13514032
    • 2012-02-02
    • Pengfei WangXi LinQingqing SunWei Zhang
    • Pengfei WangXi LinQingqing SunWei Zhang
    • H01L27/115
    • H01L27/11563G11C16/0475H01L21/84H01L27/1021H01L27/1026H01L27/1157H01L27/1203H01L29/7391H01L29/7923H01L29/8616
    • The present invention belongs to the technical field of semiconductor memory devices and specifically relates to a self-aligned vertical nonvolatile semiconductor memory device, Including: a semiconductor substrate, a drain region of a first doping type, two source regions of a second doping type, a stacked gate used to capture electrons; wherein the drain region, the two source regions and the stacked gate form two tunneling field effect transistors (TFETs) sharing one gate and one drain, the drain region current of each of the TFET is affected by the quantity and distribution of the charges in the stacked gate used to capture electrons, the drain is buried in the semiconductor substrate, the source regions above the drain region are separated from the drain through a channel and separated form each other through a region of the first doping type. The semiconductor memory device of the present invention features small unit area and simple manufacturing process. The memory chip using the present invention is of low manufacturing cost and high storage density.
    • 本发明属于半导体存储器件的技术领域,具体涉及一种自对准的垂直非易失性半导体存储器件,包括:半导体衬底,第一掺杂类型的漏极区域,第二掺杂型的两个源极区域, 用于捕获电子的堆叠栅; 其中漏极区域,两个源极区域和堆叠的栅极形成共享一个栅极和一个漏极的两个隧道场效应晶体管(TFET),每个TFET的漏极区域电流受到电荷的量和分布的影响 用于捕获电子的堆叠栅极,漏极埋在半导体衬底中,漏极区域上方的源极区域通过沟道与漏极分离,并通过第一掺杂类型的区域彼此分离。 本发明的半导体存储器件具有小的单位面积和简单的制造工艺。 使用本发明的存储芯片的制造成本低,存储密度高。
    • 5. 发明申请
    • SEMICONDUCTOR MEMORY STRUCTURE AND ITS MANUFACTURING METHOD THEREOF
    • 半导体存储器结构及其制造方法
    • US20140034891A1
    • 2014-02-06
    • US13376994
    • 2011-08-15
    • Pengfei WangXi LinQingqing SunWei Zhang
    • Pengfei WangXi LinQingqing SunWei Zhang
    • H01L27/24
    • H01L27/2463H01L27/2445H01L27/2472H01L29/7391H01L45/04H01L45/06H01L45/1233H01L45/144H01L45/146H01L45/1675
    • The present invention belongs to the technical field of microelectronic devices, specifically relates to a semiconductor memory structure and its manufacturing method thereof. The semiconductor memory structure which carries out erasing, writing and reading operation on the phase change memory or the resistance change memory through a tunneling field-effect transistor is formed, for one hand, the high current passed through the tunneling field-effect transistor when the p-n junction the biased positively, meeting the high current requirements for erasing of and writing of the phase change memory and the resistance change memory, and on the other hand, Vertical structure of the field-effect transistor can greatly improve the density of memory devices arrays. The present invention also discloses a method, which is very suitable for the memory chips, for the manufacturing of the semiconductor memory structure using self-aligned process.
    • 本发明属于微电子器件的技术领域,具体涉及一种半导体存储器结构及其制造方法。 形成通过隧道场效应晶体管对相变存储器或电阻变化存储器进行擦除,写入和读取操作的半导体存储器结构,一方面,当电流通过隧道场效应晶体管时, pn结积极偏置,满足擦除和写入相变存储器和电阻变化存储器的高电流要求,另一方面,场效应晶体管的垂直结构可以大大提高存储器件阵列的密度 。 本发明还公开了一种非常适用于存储芯片的方法,用于使用自对准工艺制造半导体存储器结构。
    • 6. 发明授权
    • Method for manufacturing a gate-control diode semiconductor memory device
    • 栅极控制二极管半导体存储器件的制造方法
    • US08574958B2
    • 2013-11-05
    • US13535032
    • 2012-06-27
    • Pengfei WangXiaoyong LiuQingqing SunWei Zhang
    • Pengfei WangXiaoyong LiuQingqing SunWei Zhang
    • H01L21/00
    • H01L29/7391H01L29/8616
    • This invention belongs to semiconductor device manufacturing field and discloses a method for manufacturing a gate-control diode semiconductor storage device. When the floating gate voltage is relatively high, the channel under the floating gate is of n type and a simple gate-control pn junction structure is configured; by controlling effective n-type concentration of the ZnO film through back-gate control, inverting the n-type ZnO into p-type through a floating gate and using NiO as a p-type semiconductor, an n-p-n-p doping structure is formed while the quantity of charges in the floating gate determines the device threshold voltage, thus realizing memory functions. This invention features capacity of manufacturing gate-control diode memory devices able to reduce the chip power consumption through advantages of high driving current and small sub-threshold swing. This invention is applicable to semiconductor devices manufacturing based on flexible substrate and flat panel displays and floating gate memories, etc.
    • 本发明属于半导体器件制造领域,并且公开了一种用于制造栅极控制二极管半导体存储器件的方法。 当浮动栅极电压相对较高时,浮动栅极下的沟道为n型,并配置了简单的栅极控制pn结结构; 通过背栅控制来控制ZnO膜的有效n型浓度,通过浮栅将n型ZnO反转为p型,并使用NiO作为p型半导体,形成npnp掺杂结构, 浮动门中的电荷决定了器件的阈值电压,从而实现了存储器的功能。 本发明具有制造栅极控制二极管存储器件的能力,其能够通过高驱动电流和小的次级阈值摆动的优点来降低芯片功耗。 本发明适用于基于柔性基板和平板显示器和浮动栅极存储器等的半导体器件制造。
    • 7. 发明申请
    • METHOD FOR MANUFACTURING A GATE-CONTROL DIODE SEMICONDUCTOR DEVICE
    • 制造门控二极管半导体器件的方法
    • US20130178013A1
    • 2013-07-11
    • US13534983
    • 2012-06-27
    • Pengfei WangChengwei CaoQingqing SunWei Zhang
    • Pengfei WangChengwei CaoQingqing SunWei Zhang
    • H01L21/34
    • H01L29/22H01L29/66356H01L29/7391
    • This invention belongs to semiconductor device manufacturing field and discloses a method for manufacturing a gate-control diode semiconductor device. When the gate voltage is relatively high, the channel under the gate has an n type and the device has a simple gate-control pn junction structure; by way of controlling the effective n-type concentration of the ZnO film through back-gate control, inverting the n-type ZnO into p-type through the gate and using NiO as a p-type semiconductor, an n-p-n-p doping structure is formed. The present invention features capacity of manufacturing gate-control diode devices able to reduce the chip power consumption through the advantages of a high driving current and small sub-threshold swing, is especially applicable to the manufacturing of reading & writing devices having flat panel displays & phase change memory, and semiconductor devices based on flexible substrates.
    • 本发明属于半导体器件制造领域,并且公开了一种用于制造栅极控制二极管半导体器件的方法。 当栅极电压相对较高时,栅极下方的沟道具有n型,器件具有简单的栅极控制pn结结构; 通过背栅控制来控制ZnO膜的有效n型浓度,通过栅极将n型ZnO转换成p型并使用NiO作为p型半导体,形成n-p-n-p掺杂结构。 本发明特征在于能够通过高驱动电流和小的次阈值摆幅的优点来制造能够降低芯片功耗的栅极控制二极管器件的能力,特别适用于具有平板显示器的读写装置的制造, 相变存储器以及基于柔性基板的半导体器件。