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    • 3. 发明授权
    • High voltage transistor using P+ buried layer
    • 高压晶体管采用P +掩埋层
    • US06423590B2
    • 2002-07-23
    • US09846538
    • 2001-05-02
    • Jun-Lin TsaiRuey-Hsin LinJei-Feng HwangKuo-Chio Liu
    • Jun-Lin TsaiRuey-Hsin LinJei-Feng HwangKuo-Chio Liu
    • H01L2100
    • H01L29/66272H01L29/0821H01L29/7322
    • A new design for a high voltage bipolar transistor is disclosed. Instead of a buried subcollector (which would be N+ in an NPN device), a buried P+ layer is used. The presence of this P+ layer results in pinch-off between itself and the bipolar base. This allows much higher breakdown voltages to be achieved. In particular, the device will not break down at the bottom of the base-collector junction which is the weak spot for conventional devices. A process for manufacturing this device is described. A particular feature of this new process is that the N type epitaxial layer that is grown over the P+ layer is only about half the thickness of its counterpart in the conventional device. The process is fully compatible with conventional BiCMOS processes and has lower cost.
    • 公开了一种用于高电压双极晶体管的新设计。 代替埋置的子集电极(在NPN器件中将为N +),使用掩埋的P +层。 该P +层的存在导致其本身和双极基底之间的夹断。 这样可以实现更高的击穿电压。 特别地,该装置不会在作为常规装置的弱点的基极 - 集电极结的底部分解。 对该装置的制造方法进行说明。 这个新工艺的一个特点是在P +层上生长的N型外延层只是传统器件中其对应厚度的大约一半。 该工艺与传统的BiCMOS工艺完全兼容,成本较低。
    • 5. 发明授权
    • Twin current bipolar device with hi-lo base profile
    • 双电流双极型器件,具有Hi-lo基座型材
    • US06211028B1
    • 2001-04-03
    • US09245560
    • 1999-02-05
    • Jun-Lin TsaiRuey-Hsing LiuChiou-Shian PengKuo-Chio Liu
    • Jun-Lin TsaiRuey-Hsing LiuChiou-Shian PengKuo-Chio Liu
    • H01L21331
    • H01L29/66272H01L29/1004H01L29/732
    • A bipolar transistor is described whose I-V curve is such that it operates in two regions, one having low gain and low power consumption and another having higher gain and better current driving ability. Said transistor has a base region made up of two sub regions, the region closest to the emitter having a resistivity about an order a magnitude lower than the second region (which interfaces with the collector). A key feature of the invention is that the region closest to the collector is very uniformly doped, i.e. there is no gradient or built-in field present. In order to produce such a region, epitaxial growth along with boron doping is used rather than more conventional techniques such as ion implantation and/or diffusion.
    • 描述了一种双极性晶体管,其I-V曲线使得其工作在两个区域中,一个具有低增益和低功耗,另一个具有较高的增益和更好的电流驱动能力。 所述晶体管具有由两个子区域构成的基极区域,最靠近发射极的区域的电阻率大约低于第二区域(与集电极接口)的数量级。 本发明的关键特征是最靠近集电极的区域是非常均匀的掺杂的,即没有梯度或内置的场存在。 为了制造这样的区域,使用外延生长以及硼掺杂,而不是诸如离子注入和/或扩散的更常规的技术。
    • 6. 发明授权
    • Twin current bipolar device with hi-lo base profile
    • 双电流双极型器件,具有Hi-lo基座型材
    • US06747336B2
    • 2004-06-08
    • US09804389
    • 2001-03-13
    • Jun-Lin TsaiRuey-Hsing LiuChiou-Shian PengKuo-Chio Liu
    • Jun-Lin TsaiRuey-Hsing LiuChiou-Shian PengKuo-Chio Liu
    • H01L27082
    • H01L29/66272H01L29/1004H01L29/732
    • A bipolar transistor is described whose I-V curve is such that it operates in two regions, one having low gain and low power consumption and another having higher gain and better current driving ability. Said transistor has a base region made up of two sub regions, the region closest to the emitter having a resistivity about an order a magnitude lower than the second region (which interfaces with the collector). A key feature of the invention is that the region closest to the collector is very uniformly doped, i.e. there is no gradient or built-in field present. In order to produce such a region, epitaxial growth along with boron doping is used rather than more conventional techniques such as ion implantation and/or diffusion.
    • 描述了一种双极性晶体管,其I-V曲线使得其工作在两个区域中,一个具有低增益和低功耗,另一个具有较高的增益和更好的电流驱动能力。 所述晶体管具有由两个子区域构成的基极区域,最靠近发射极的区域的电阻率大约低于第二区域(与集电极接口)的数量级。 本发明的关键特征是最靠近集电极的区域是非常均匀的掺杂的,即没有梯度或内置的场存在。 为了制造这样的区域,使用外延生长以及硼掺杂,而不是诸如离子注入和/或扩散的更常规的技术。