会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Test structure for detecting bonding-induced cracks
    • 用于检测接合引起的裂纹的测试结构
    • US06781150B2
    • 2004-08-24
    • US10229601
    • 2002-08-28
    • Qwai H. LowRamaswamy RanganathanAnwar AliTauman T. Lau
    • Qwai H. LowRamaswamy RanganathanAnwar AliTauman T. Lau
    • H01L2358
    • H01L24/05H01L22/34H01L24/48H01L2224/04042H01L2224/05001H01L2224/05073H01L2224/05093H01L2224/05095H01L2224/05624H01L2224/48463H01L2224/85399H01L2924/00014H01L2924/01013H01L2924/01019H01L2924/01029H01L2924/14H01L2224/45099H01L2924/00
    • An integrated circuit having a crack detection structure. A control structure is formed having interleaved electrically conductive layers and non electrically conductive layers in a vertical orientation. Electrically conductive vias are disposed vertically through all of the non electrically conductive layers, which vias electrically connect all of the electrically conductive layers one to another. A test structure is formed having a bonding pad for probing and bonding, with underlying interleaved electrically conductive layers and non electrically conductive layers disposed in a vertical orientation. At least one of the non electrically conductive layers has no vias formed therein, simulating active circuitry under other bonding pads of the integrated circuit. At least one of the interleaved electrically conductive layers of the control structure extends from within the control structure to within the test structure as a sensing layer. The sensing layer immediately underlies the at least one of the non electrically conductive layers in the test structure that has no vias formed therein. Thus, a crack in the at least one of the non electrically conductive layers in the test structure that has no vias formed therein is detectable as a leakage current between the bonding pad of the test structure and a top most electrically conductive layer of the control structure.
    • 具有裂纹检测结构的集成电路。 形成具有垂直取向的交错导电层和非导电层的控制结构。 导电通孔垂直地设置在所有非导电层上,通孔将所有的导电层彼此电连接。 形成具有用于探测和结合的接合焊盘的测试结构,其中底层交错的导电层和以垂直取向设置的非导电层。 非导电层中的至少一个在其中没有形成通孔,模拟集成电路的其它接合焊盘下的有源电路。 控制结构的交错导电层中的至少一个从控制结构内延伸到作为感测层的测试结构内。 感测层紧邻在其中形成有通孔的测试结构中的非导电层中的至少一个之上。 因此,测试结构中没有形成通孔的非导电层中的至少一个的裂纹可以被检测为在测试结构的焊盘与控制结构的最高导电层之间的漏电流 。