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    • 7. 发明授权
    • Semiconductor mismatch reduction
    • 半导体失配减少
    • US09287252B2
    • 2016-03-15
    • US13048411
    • 2011-03-15
    • Chung-Hui ChenRuey-Bin SheenYung-Chow PengPo-Zeng KangChung-Peng Hsieh
    • Chung-Hui ChenRuey-Bin SheenYung-Chow PengPo-Zeng KangChung-Peng Hsieh
    • H01L29/12H01L27/02
    • H01L27/0207
    • A system and method for reducing density mismatch is disclosed. An embodiment comprises determining a conductor density and an active area density in a high density area and a low density area of a semiconductor device. Dummy material may be added to the low density area in order to raise the conductor density and the active area density, thereby reducing the internal density mismatches between the high density area and the low density area. Additionally, a similar process may be used to reduce external mismatches between different regions on the semiconductor substrate. Once these mismatches have been reduced, empty regions surrounding the different regions may additionally be filled in order to reduce the conductor density mismatch and the active area density mismatches.
    • 公开了一种用于减小密度失配的系统和方法。 一个实施例包括确定半导体器件的高密度区域和低密度区域中的导体密度和有源面积密度。 为了提高导体密度和有效面积密度,可以向低密度区域添加虚拟材料,从而降低高密度区域和低密度区域之间的内部密度失配。 另外,可以使用类似的工艺来减少半导体衬底上不同区域之间的外部失配。 一旦这些失配被减小,则可以另外填充围绕不同区域的空区,以减少导体密度失配和有源区密度失配。
    • 8. 发明申请
    • Semiconductor Mismatch Reduction
    • 半导体失配减少
    • US20120235208A1
    • 2012-09-20
    • US13048411
    • 2011-03-15
    • Chung-Hui ChenRuey-Bin SheenYung-Chow PengPo-Zeng KangChung-Peng Hsieh
    • Chung-Hui ChenRuey-Bin SheenYung-Chow PengPo-Zeng KangChung-Peng Hsieh
    • H01L29/12H01L21/66
    • H01L27/0207
    • A system and method for reducing density mismatch is disclosed. An embodiment comprises determining a conductor density and an active area density in a high density area and a low density area of a semiconductor device. Dummy material may be added to the low density area in order to raise the conductor density and the active area density, thereby reducing the internal density mismatches between the high density area and the low density area. Additionally, a similar process may be used to reduce external mismatches between different regions on the semiconductor substrate. Once these mismatches have been reduced, empty regions surrounding the different regions may additionally be filled in order to reduce the conductor density mismatch and the active area density mismatches.
    • 公开了一种用于减小密度失配的系统和方法。 一个实施例包括确定半导体器件的高密度区域和低密度区域中的导体密度和有源面积密度。 为了提高导体密度和有效面积密度,可以向低密度区域添加虚拟材料,从而降低高密度区域和低密度区域之间的内部密度失配。 另外,可以使用类似的工艺来减少半导体衬底上不同区域之间的外部失配。 一旦这些失配被减小,则可以另外填充围绕不同区域的空区,以减少导体密度失配和有源区密度失配。
    • 10. 发明授权
    • Integrated circuits and fabrication methods thereof
    • 集成电路及其制造方法
    • US08803320B2
    • 2014-08-12
    • US13025763
    • 2011-02-11
    • Chung-Hui Chen
    • Chung-Hui Chen
    • H01L29/40
    • H01L23/552H01L23/5225H01L27/0248H01L2924/0002H01L2924/00
    • An integrated circuit includes a signal line routed in a first direction. A first shielding pattern is disposed substantially parallel with the signal line. The first shielding pattern has a first edge having a first dimension and a second edge having a second dimension. The first edge is substantially parallel with the signal line. The first dimension is larger than the second dimension. A second shielding pattern is disposed substantially parallel with the signal line. The second shielding pattern has a third edge having a third dimension and a fourth edge having a fourth dimension. The third edge is substantially parallel with the signal line. The third dimension is larger than the fourth dimension. The fourth edge faces the second edge. A first space is between the second and fourth edges.
    • 集成电路包括沿第一方向布线的信号线。 第一屏蔽图案基本上与信号线平行设置。 第一屏蔽图案具有具有第一尺寸的第一边缘和具有第二尺寸的第二边缘。 第一边缘基本上与信号线平行。 第一个维度大于第二个维度。 第二屏蔽图案基本上与信号线平行设置。 第二屏蔽图案具有具有第三尺寸的第三边缘和具有第四尺寸的第四边缘。 第三边缘基本上与信号线平行。 第三维度大于第四维度。 第四个边缘面向第二个边缘。 第一空间在第二和第四边之间。