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    • 2. 发明授权
    • Methods and apparatus for MOS capacitors in replacement gate process
    • 替代栅极工艺中MOS电容器的方法和装置
    • US09412883B2
    • 2016-08-09
    • US13303083
    • 2011-11-22
    • Pai-Chieh WangTung-Heng HsiehYimin HuangChung-Hui Chen
    • Pai-Chieh WangTung-Heng HsiehYimin HuangChung-Hui Chen
    • H01L29/94H01L27/06H01L27/08H01L49/02
    • H01L21/822H01L27/0629H01L27/0811H01L28/20H01L29/401H01L29/94
    • Methods and apparatus for polysilicon MOS capacitors in a replacement gate process. A method includes disposing a gate dielectric layer over a semiconductor substrate; disposing a polysilicon gate layer over the dielectric layer; patterning the gate dielectric layer and the polysilicon gate layer to form a plurality of polysilicon gates spaced by at least a minimum polysilicon to polysilicon pitch; defining a polysilicon resistor region containing at least one of the polysilicon gates and not containing at least one other of the polysilicon gates, which form dummy gates; depositing a mask layer over an inter-level dielectric layer; patterning the mask layer to expose the dummy gates; removing the dummy gates and the gate dielectric layer underneath the dummy gates to leave trenches in the inter-level dielectric layer; and forming high-k metal gate devices in the trenches in the inter-level dielectric layer. An apparatus produced by the method is disclosed.
    • 替代栅极工艺中多晶硅MOS电容器的方法和装置。 一种方法包括在半导体衬底上设置栅极电介质层; 在所述电介质层上设置多晶硅栅极层; 图案化栅介电层和多晶硅栅极层以形成由至少最小多晶硅与多晶硅间距隔开的多个多晶硅门; 限定包含至少一个所述多晶硅栅极并且不包含形成伪栅极的所述多晶硅栅极中的至少一个的多晶硅电阻器区域; 在层间电介质层上沉积掩模层; 图案化掩模层以暴露伪栅极; 去除虚拟栅极下面的伪栅极和栅极电介质层,以将沟槽留在层间电介质层中; 以及在层间电介质层的沟槽中形成高k金属栅极器件。 公开了通过该方法制造的装置。
    • 6. 发明授权
    • Semiconductor device feature density gradient verification
    • 半导体器件特征密度梯度校验
    • US08549453B2
    • 2013-10-01
    • US13362914
    • 2012-01-31
    • Young-Chow PengChung-Hui ChenChien-Hung ChenPo-Zeng Kang
    • Young-Chow PengChung-Hui ChenChien-Hung ChenPo-Zeng Kang
    • G06F17/50
    • G06F17/5081G03F1/36G03F1/70
    • A method for verifying that acceptable device feature gradients and device feature disparities are present in a semiconductor device layout, is provided. The method provides for dividing a device layout into a plurality of windows and measuring or otherwise determining the device feature density within each window. The device layout includes various device regions and the method provides for comparing an average device feature density within one region to surrounding areas or other regions and also for determining gradients of device feature densities. The gradients may be monitored from within a particular device region to surrounding regions. Instructions for carrying out the method may be stored on a computer readable storage medium and executed by a processor.
    • 提供了一种用于验证半导体器件布局中存在可接受的器件特征梯度和器件特征差异的方法。 该方法提供了将设备布局划分成多个窗口并且测量或以其他方式确定每个窗口内的设备特征密度。 设备布局包括各种设备区域,并且该方法提供了将一个区域内的平均设备特征密度与周围区域或其他区域进行比较,并且还用于确定设备特征密度的梯度。 可以从特定设备区域到周围区域监视梯度。 用于执行该方法的指令可以存储在计算机可读存储介质上并由处理器执行。
    • 9. 发明申请
    • Methods and Apparatus for MOS Capacitors in Replacement Gate Process
    • 替代栅极工艺中MOS电容器的方法与装置
    • US20130126953A1
    • 2013-05-23
    • US13303083
    • 2011-11-22
    • Pai-Chieh WangTung-Heng HsiehYimin HuangChung-Hui Chen
    • Pai-Chieh WangTung-Heng HsiehYimin HuangChung-Hui Chen
    • H01L29/94H01L21/02
    • H01L21/822H01L27/0629H01L27/0811H01L28/20H01L29/401H01L29/94
    • Methods and apparatus for polysilicon MOS capacitors in a replacement gate process. A method includes disposing a gate dielectric layer over a semiconductor substrate; disposing a polysilicon gate layer over the dielectric layer; patterning the gate dielectric layer and the polysilicon gate layer to form a plurality of polysilicon gates spaced by at least a minimum polysilicon to polysilicon pitch; defining a polysilicon resistor region containing at least one of the polysilicon gates and not containing at least one other of the polysilicon gates, which form dummy gates; depositing a mask layer over an inter-level dielectric layer; patterning the mask layer to expose the dummy gates; removing the dummy gates and the gate dielectric layer underneath the dummy gates to leave trenches in the inter-level dielectric layer; and forming high-k metal gate devices in the trenches in the inter-level dielectric layer. An apparatus produced by the method is disclosed.
    • 替代栅极工艺中多晶硅MOS电容器的方法和装置。 一种方法包括在半导体衬底上设置栅极电介质层; 在所述电介质层上设置多晶硅栅极层; 图案化栅介电层和多晶硅栅极层以形成由至少最小多晶硅与多晶硅间距隔开的多个多晶硅门; 限定包含至少一个所述多晶硅栅极并且不包含形成伪栅极的所述多晶硅栅极中的至少一个的多晶硅电阻器区域; 在层间电介质层上沉积掩模层; 图案化掩模层以暴露伪栅极; 去除虚拟栅极下面的伪栅极和栅极电介质层,以将沟槽留在层间电介质层中; 以及在层间电介质层的沟槽中形成高k金属栅极器件。 公开了通过该方法制造的装置。
    • 10. 发明申请
    • Semiconductor Mismatch Reduction
    • 半导体失配减少
    • US20120235208A1
    • 2012-09-20
    • US13048411
    • 2011-03-15
    • Chung-Hui ChenRuey-Bin SheenYung-Chow PengPo-Zeng KangChung-Peng Hsieh
    • Chung-Hui ChenRuey-Bin SheenYung-Chow PengPo-Zeng KangChung-Peng Hsieh
    • H01L29/12H01L21/66
    • H01L27/0207
    • A system and method for reducing density mismatch is disclosed. An embodiment comprises determining a conductor density and an active area density in a high density area and a low density area of a semiconductor device. Dummy material may be added to the low density area in order to raise the conductor density and the active area density, thereby reducing the internal density mismatches between the high density area and the low density area. Additionally, a similar process may be used to reduce external mismatches between different regions on the semiconductor substrate. Once these mismatches have been reduced, empty regions surrounding the different regions may additionally be filled in order to reduce the conductor density mismatch and the active area density mismatches.
    • 公开了一种用于减小密度失配的系统和方法。 一个实施例包括确定半导体器件的高密度区域和低密度区域中的导体密度和有源面积密度。 为了提高导体密度和有效面积密度,可以向低密度区域添加虚拟材料,从而降低高密度区域和低密度区域之间的内部密度失配。 另外,可以使用类似的工艺来减少半导体衬底上不同区域之间的外部失配。 一旦这些失配被减小,则可以另外填充围绕不同区域的空区,以减少导体密度失配和有源区密度失配。