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    • 6. 发明授权
    • Variable gap device and method of manufacture
    • 可变间隙装置及其制造方法
    • US4617608A
    • 1986-10-14
    • US744382
    • 1985-06-13
    • Greg E. BlonderAngelo A. LamolaRobert A. Lieberman
    • Greg E. BlonderAngelo A. LamolaRobert A. Lieberman
    • G01L9/00G02B6/26G02B6/35G09F9/37H01G5/16H01G5/18H01G7/00
    • G02B6/352G01L9/0072G02B6/266G09F9/372H01G5/16G02B6/355G02B6/3552Y10T29/435
    • A variable gap device which comprises a suitable material with a cavity formed therein mounted over a body. Elements are formed on the surface of the body and on the top surface of the cavity. In one embodiment, the elements are electrodes of a variable capacitance device, and in another embodiment the elements are partial or total reflectors of incident light from an optical fiber. The surface of the cavity opposite the body is preferably flat and of the order of microns from the body.The device is fabricated by forming a removable layer over a temporary substrate. An appropriate element pattern is formed over the removable layer and the layer is etched in a configuration which will define the cavity. The deformable material is encapsulated over this structure and then removed from the substrate with the element remaining in the cavity. Any removable material remaining in the cavity can then be etched away.
    • 一种可变间隙装置,其包括其中形成有腔体的合适材料,其安装在主体上。 元件形成在主体表面和空腔顶表面上。 在一个实施例中,元件是可变电容器件的电极,在另一实施例中,元件是来自光纤的入射光的部分或全反射器。 与身体相对的空腔的表面优选是平坦的,并且距身体的微米级数。 通过在临时衬底上形成可移除层来制造器件。 在可移除层上形成适当的元件图案,并且以限定空腔的构造蚀刻该层。 该可变形材料被封装在该结构上,然后将该元件留在空腔中,从衬底上移除。 然后可以将留在空腔中的任何可移除材料蚀刻掉。