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1. 发明授权

US07230717B2 Pixelated phase-mask interferometer 有权
标题翻译：像素相位掩模干涉仪
公开(公告)号：US07230717B2
公开(公告)日：2007-06-12
申请号：US10838694
申请日：2004-05-04
申请人： Neal J. Brock , James E. Millerd , James C. Wyant , John B. Hayes
发明人： Neal J. Brock , James E. Millerd , James C. Wyant , John B. Hayes
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B9/02022 , G01B9/02057 , G01B9/02081 , G01B9/02083 , G01B2290/70
摘要： A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a pixelated phase-mask aligned to and imaged on a pixelated detector array. Each adjacent pixel of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide, single-shot, simultaneous phase-shifting measurements.
摘要翻译：相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。传感器被构造为与像素化检测器阵列对准并成像的像素化相位掩模。相位掩模的每个相邻像素测量正交极化参考和测试光束之间的预定相对相移。因此，通过组合具有相同相移的像素，可以同时合成多个相移干涉图。可以组合多个相移干涉图以计算标准参数，例如调制指数或平均相位步长。可以将产生正交极化参考和物体光束的干涉仪的任何配置与本发明的相位差传感器组合以提供单次同时相移测量。

2. 发明授权

US07057737B2 Common optical-path testing of high-numerical-aperture wavefronts 有权
标题翻译：高数值孔径波前的普通光路测试
公开(公告)号：US07057737B2
公开(公告)日：2006-06-06
申请号：US10652903
申请日：2003-08-29
申请人： James E. Millerd , Neal J. Brock , John B. Hayes , James C. Wyant
发明人： James E. Millerd , Neal J. Brock , John B. Hayes , James C. Wyant
IPC分类号： G01B9/02
CPC分类号： G01B9/02022 , G01B9/02023 , G01B9/02024 , G01B9/02038 , G01B9/02057 , G01B9/02081 , G01B9/02097 , G01B2290/30 , G01B2290/70 , G01J9/02
摘要： A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.
摘要翻译：偏振点衍射板用于产生具有来自输入波前的相互正交偏振的共路径测试和参考波前。公共路径测试和参考波前被准直，相移和干扰，并将所得的干涉图成像在检测器上。然后使用常规算法处理干涉图案以表征输入光波前。

3. 发明授权

US06552808B2 Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry 有权
公开(公告)号：US06552808B2
公开(公告)日：2003-04-22
申请号：US09906542
申请日：2001-07-16
申请人： James E. Millerd , Neal J. Brock
发明人： James E. Millerd , Neal J. Brock
IPC分类号： G01B902
CPC分类号： G01B11/2441 , G01B9/0201 , G01B9/02081 , G01B9/02087 , G01B2290/45 , G01B2290/70 , G01J9/02 , G01N21/45
摘要： Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms. A computer connected to the imaging element measures various parameters of the objects based on the phase-shifted interferograms. Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.

4. 发明授权

US07079251B2 Calibration and error correction in multi-channel imaging 有权
标题翻译：多通道成像中的校准和纠错
公开(公告)号：US07079251B2
公开(公告)日：2006-07-18
申请号：US10687308
申请日：2003-10-16
申请人： James E. Millerd , Neal J. Brock , Larry Denneau, Jr.
发明人： James E. Millerd , Neal J. Brock , Larry Denneau, Jr.
IPC分类号： G01B9/02
CPC分类号： G01B9/02072 , G01B9/0207 , G01B9/02083 , G01B2290/70 , G01J3/2803 , G01J9/02 , G06T5/006 , G06T5/008 , G06T7/80
摘要： A multi-channel imaging system is calibrated by measuring the geometric distortion in each sub-image, generating corresponding correction factors, and applying such factors to correct subsequent image data. In addition, intensity transfer-function arrays are measured at each pixel, and further used to correct for system and detector nonlinearities and nonuniformity between images. The procedure is repeated over a range of wavelengths to produce a complete set of correction coefficients and transfer functions. When the system is used for interferometric phase measurements, multiple measurements are preferably taken and a random phase offset in the reference path length is introduced at each measurement. The multiple phase data so derived are then averaged to reduce phase-dependent systematic measurement errors.
摘要翻译：通过测量每个子图像中的几何失真来校准多通道成像系统，产生相应的校正因子，并应用这些因素来校正随后的图像数据。此外，在每个像素处测量强度传递函数阵列，并进一步用于校正系统和检测器的非线性和图像之间的不均匀性。该过程在波长范围内重复以产生一整套校正系数和传递函数。当系统用于干涉测量时，优选进行多次测量，并在每次测量时引入参考路径长度的随机相位偏移。然后平均如此导出的多相数据以减少相位依赖的系统测量误差。

5. 发明授权

US07298497B2 Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry 有权
标题翻译：在干涉测量中分离，成像和测量波前的方法和装置
公开(公告)号：US07298497B2
公开(公告)日：2007-11-20
申请号：US11349843
申请日：2006-02-07
申请人： James E. Millerd , Neal J. Brock
发明人： James E. Millerd , Neal J. Brock
IPC分类号： G01B9/02
CPC分类号： G01B11/2441 , G01B9/0201 , G01B9/02081 , G01B9/02087 , G01B2290/45 , G01B2290/70 , G01J9/02 , G01N21/45
摘要： Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms. A computer connected to the imaging element measures various parameters of the objects based on the phase-shifted interferograms. Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.
摘要翻译：用于使用参考波阵面和物体波阵面分割，成像和测量波前的装置。波前组合元素从对象和参考波阵面接收并组合成组合波阵面对象波前。波前分割元件以这样的方式将组合的波前分割成多个子波前，使得每个子波前与至少一个其它子波阵边基本相邻。波前分割元件可以使基准波前和子波前的物体波前之间的相对相位偏移，以产生相应的多个相移子波前。然后，波前分割元件可能干扰相移子波前的参考波和对象波前，产生相应的多个相移干涉图。成像元件接收并成像相移干涉图。连接到成像元件的计算机基于相移干涉图来测量对象的各种参数。测量的实例包括流动参数，例如所选气态物质的浓度，温度分布，颗粒和液滴分布，密度等。除了流量参数之外，可以测量物体的位移（例如振动）和轮廓。

6. 发明授权

US07170611B2 Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry 有权
公开(公告)号：US07170611B2
公开(公告)日：2007-01-30
申请号：US10251729
申请日：2002-09-21
申请人： James E. Millerd , Neal J. Brock
发明人： James E. Millerd , Neal J. Brock
IPC分类号： G01B9/02
CPC分类号： G01B11/2441 , G01B9/0201 , G01B9/02081 , G01B9/02087 , G01B2290/45 , G01B2290/70 , G01J9/02 , G01N21/45
摘要： Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms. A computer connected to the imaging element measures various parameters of the objects based on the phase-shifted interferograms. Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.

7. 发明授权

US06304330B1 Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry 失效
标题翻译：在干涉测量中分离，成像和测量波前的方法和装置
公开(公告)号：US06304330B1
公开(公告)日：2001-10-16
申请号：US09413829
申请日：1999-10-06
申请人： James E. Millerd , Neal J. Brock
发明人： James E. Millerd , Neal J. Brock
IPC分类号： G01B902
CPC分类号： G01B11/2441 , G01B9/0201 , G01B9/02081 , G01B9/02087 , G01B2290/45 , G01B2290/70 , G01J9/02 , G01N21/45
摘要： Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfere the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms. A computer connected to the imaging element measures various parameters of the objects based on the phase-shifted interferograms. Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.
摘要翻译：用于使用参考波阵面和物体波阵面分割，成像和测量波前的装置。波前组合元素从对象和参考波阵面接收并组合成组合波阵面对象波前。波前分割元件以这样的方式将组合的波前分割成多个子波前，使得每个子波前与至少一个其它子波阵边基本相邻。波前分割元件可以使基准波前和子波前的物体波前之间的相对相位偏移，以产生相应的多个相移子波前。然后，波前分割元件可以干扰相移子波前的参考波和对象波前，产生相应的多个相移干涉图。成像元件接收并成像相移干涉图。连接到成像元件的计算机基于相移干涉图来测量对象的各种参数。测量的实例包括流动参数，例如所选气态物质的浓度，温度分布，颗粒和液滴分布，密度等。除了流量参数之外，可以测量物体的位移（例如振动）和轮廓。

8. 发明授权

US07057738B2 Simultaneous phase-shifting Fizeau interferometer 有权
标题翻译：同步相移Fizeau干涉仪
公开(公告)号：US07057738B2
公开(公告)日：2006-06-06
申请号：US10746228
申请日：2003-12-24
申请人： James E. Millerd , James C. Wyant
发明人： James E. Millerd , James C. Wyant
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , G01B9/02003 , G01B9/02091 , G01B11/303 , G01B2290/45 , G01B2290/50 , G01B2290/70
摘要： The tilted relationship between the reference and test mirrors of a Fizeau interferometer is used to spatially separate the reflections from the two surfaces. The separate beams are filtered through a spatial polarization element that provides different states of polarization to the beams. The beams are subsequently recombined to form a substantially collinear beam that is processed using a spatial-phase-shift interferometer that permits quantitative phase measurement in a single video frame. Alternatively, two beams with orthogonal polarization are injected into the Fizeau cavity at different angles, such that after reflection from the reference and test optics they are substantially collinear. Unwanted reflections are blocked at the focal plane through the use of a circular aperture. Short coherence length light and a delay line may be used to mitigate stray reflections, reduce measurement integration times, and implement temporal phase averaging.
摘要翻译：使用Fizeau干涉仪的参考镜和测试镜之间的倾斜关系用于在空间上分离两个表面的反射。单独的光束通过空间偏振元件被滤波，该偏振元件向光束提供不同的偏振状态。随后将光束重新组合以形成基本上共线的光束，其使用允许在单个视频帧中进行定量相位测量的空间相移干涉仪进行处理。或者，具有正交偏振的两个光束以不同的角度注入到Fizeau腔中，使得在来自参考和测试光学器件的反射之后，它们基本上共线。不需要的反射通过使用圆形孔径在焦平面处被阻挡。短相干长度光和延迟线可用于减轻杂散反射，减少测量积分时间，并实现时间相位平均。

9. 发明授权

US07230718B2 Simultaneous phase-shifting fizeau interferometer 有权
标题翻译：同步相移菲索干涉仪
公开(公告)号：US07230718B2
公开(公告)日：2007-06-12
申请号：US11430447
申请日：2006-05-09
申请人： James E. Millerd , James C. Wyant
发明人： James E. Millerd , James C. Wyant
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , G01B9/02003 , G01B9/02091 , G01B11/303 , G01B2290/45 , G01B2290/50 , G01B2290/70
摘要： The tilted relationship between the reference and test mirrors (24,26) of a Fizeau interferometer is used to spatially separate the reflections (R,T) from the two surfaces. The separate beams (R,T) are filtered through a spatial polarization element (32) that provides different states of polarization to the beams. The beams (R,T) are subsequently recombined to form a substantially collinear beam that is processed using a spatial-phase-shift interferometer (44) that permits quantitative phase measurement in a single video frame. Alternatively, two beams (104,106) with orthogonal polarization are injected into the Fizeau cavity (20) at different angles, such that after reflection from the reference and test optics (24,26) they are substantially collinear. Unwanted reflections are blocked at the focal plane through the use of a circular aperture (112). Short coherence length light and a delay line (84) may be used to mitigate stray reflections, reduce measurement integration times, and implement temporal phase averaging.
摘要翻译：使用Fizeau干涉仪的参考和测试镜（24,26）之间的倾斜关系在空间上分离两个表面的反射（R，T）。单独的光束（R，T）通过空间偏振元件（32）被滤波，该空间偏振元件（32）向光束提供不同的偏振状态。光束（R，T）随后重新组合以形成使用允许在单个视频帧中进行定量相位测量的空间相移干涉仪（44）来处理的基本上共线的光束。或者，具有正交偏振的两个光束（104,106）以不同的角度注入到Fizeau腔（20）中，使得在来自参考和测试光学器件（24,26）的反射之后，它们基本上共线。不需要的反射通过使用圆形孔径（112）在焦平面处被阻挡。短相干长度光和延迟线（84）可用于减轻杂散反射，减少测量积分时间，并实现时间相位平均。

10. 发明授权

US08345258B2 Synchronous frequency-shift mechanism in fizeau interferometer 有权
标题翻译： fizeau干涉仪中的同步变频机构
公开(公告)号：US08345258B2
公开(公告)日：2013-01-01
申请号：US12701535
申请日：2010-02-06
申请人： James E. Millerd , Michael North-Morris
发明人： James E. Millerd , Michael North-Morris
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , G01B9/02002 , G01B9/02045 , G01B9/02065 , G01B9/0209 , G01B2290/70
摘要： An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.
摘要翻译：用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束每对具有正交偏振状态并且具有与预定频移不同的频率。第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。

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