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1. 发明申请

US20180261422A1 Scanning Electron Microscope 审中-公开
公开(公告)号：US20180261422A1
公开(公告)日：2018-09-13
申请号：US15914498
申请日：2018-03-07
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto , Yuichiro Ohori , Yoshinori Matsuda , Makoto Aoshima
IPC分类号： H01J37/09 , H01J37/28 , H01J37/244 , H01J37/14 , H01J37/30
CPC分类号： H01J37/09 , H01J37/023 , H01J37/14 , H01J37/244 , H01J37/28 , H01J37/3005 , H01J37/3056 , H01J2237/024 , H01J2237/0262 , H01J2237/14 , H01J2237/24475 , H01J2237/2448 , H01J2237/2804 , H01J2237/2806
摘要： A scanning electron microscope having a charged particle device that processes a specimen using a charged particle beam, the scanning electron microscope includes: an electron source; a secondary-electron detector that detects secondary electrons generated from the specimen; a backscattered-electron detector that is disposed closer to the electron source than a detection surface of the secondary-electron detector to detect backscattered electrons generated from the specimen; a shielding plate for shielding a detection surface of the backscattered-electron detector; and a moving mechanism that moves the shielding plate. In a state where the shielding plate is moved by the moving mechanism so as to shield the detection surface of the backscattered-electron detector, the shielding plate is located between the detection surface of the backscattered-electron detector and the detection surface of the secondary-electron detector.

2. 发明授权

US10361062B2 Scanning electron microscope 有权
公开(公告)号：US10361062B2
公开(公告)日：2019-07-23
申请号：US15902251
申请日：2018-02-22
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto , Yuichiro Ohori , Yoshinori Matsuda , Makoto Aoshima
IPC分类号： H01J37/28 , H01J37/244 , H01J37/10 , H01J37/147
摘要： A scanning electron microscope includes: a liner tube which transmits an electron beam; a scintillator having a through-hole into which the liner tube is inserted; a light guide which guides light generated by the scintillator; a conductive layer provided on a sensitive surface of the scintillator; and a conductive member provided in the scintillator, wherein the shortest distance between the liner tube and the conductive member is shorter than the shortest distance between the liner tube and the conductive layer, a voltage for accelerating electrons is applied to the conductive layer, and the conductive layer and the conductive member have a same potential.

3. 发明授权

US09396905B2 Image evaluation method and charged particle beam device 有权
标题翻译：图像评估方法和带电粒子束装置
公开(公告)号：US09396905B2
公开(公告)日：2016-07-19
申请号：US14932069
申请日：2015-11-04
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto
IPC分类号： H01J37/22 , H01J37/285
CPC分类号： H01J37/222 , G06K9/6202 , G06T7/74 , G06T2207/10061 , G06T2207/30148 , H01J37/28 , H01J2237/31745
摘要： An image evaluation method includes: a template image acquisition step that designates part of a reference image to acquire a template image; a first comparative image acquisition step that acquires a first comparative image in which the position of the template image is moved in a first direction by a first moving amount relative to the reference image; a first evaluation step that performs a pattern matching process on the template image and the first comparative image and evaluates the template image; a second comparative image acquisition step that acquires a second comparative image in which the position of the template image is moved in a second direction that is orthogonal to the first direction by a second moving amount relative to the reference image; and a second evaluation step that performs the pattern matching process on the template image and the second comparative image and evaluates the template image.
摘要翻译：图像评估方法包括：模板图像获取步骤，指定参考图像的一部分以获取模板图像; 第一比较图像获取步骤，获取其中模板图像的位置相对于参考图像沿第一方向移动第一移动量的第一比较图像; 第一评估步骤，对模板图像和第一比较图像执行模式匹配处理，并评估模板图像; 第二比较图像获取步骤，获取第二比较图像，其中模板图像的位置沿与第一方向正交的第二方向相对于参考图像移动第二移动量; 以及第二评估步骤，对模板图像和第二比较图像执行模式匹配处理，并评估模板图像。

4. 发明授权

US10269531B2 Scanning electron microscope 有权
公开(公告)号：US10269531B2
公开(公告)日：2019-04-23
申请号：US15914498
申请日：2018-03-07
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto , Yuichiro Ohori , Yoshinori Matsuda , Makoto Aoshima
IPC分类号： H01J37/09 , H01J37/02 , H01J37/244 , H01J37/28 , H01J37/305 , H01J37/14 , H01J37/30
摘要： A scanning electron microscope having a charged particle device that processes a specimen using a charged particle beam, the scanning electron microscope includes: an electron source; a secondary-electron detector that detects secondary electrons generated from the specimen; a backscattered-electron detector that is disposed closer to the electron source than a detection surface of the secondary-electron detector to detect backscattered electrons generated from the specimen; a shielding plate for shielding a detection surface of the backscattered-electron detector; and a moving mechanism that moves the shielding plate. In a state where the shielding plate is moved by the moving mechanism so as to shield the detection surface of the backscattered-electron detector, the shielding plate is located between the detection surface of the backscattered-electron detector and the detection surface of the secondary-electron detector.

5. 发明申请

US20180240644A1 Scanning Electron Microscope 审中-公开
公开(公告)号：US20180240644A1
公开(公告)日：2018-08-23
申请号：US15902251
申请日：2018-02-22
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto , Yuichiro Ohori , Yoshinori Matsuda , Makoto Aoshima
IPC分类号： H01J37/244 , H01J37/147 , H01J37/10
CPC分类号： H01J37/244 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/2443
摘要： A scanning electron microscope includes: a liner tube which transmits an electron beam; a scintillator having a through-hole into which the liner tube is inserted; a light guide which guides light generated by the scintillator; a conductive layer provided on a sensitive surface of the scintillator; and a conductive member provided in the scintillator, wherein the shortest distance between the liner tube and the conductive member is shorter than the shortest distance between the liner tube and the conductive layer, a voltage for accelerating electrons is applied to the conductive layer, and the conductive layer and the conductive member have a same potential.

6. 发明申请

US20160133434A1 Image Evaluation Method and Charged Particle Beam Device 有权
标题翻译：图像评估方法和带电粒子束装置
公开(公告)号：US20160133434A1
公开(公告)日：2016-05-12
申请号：US14932069
申请日：2015-11-04
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto
IPC分类号： H01J37/22 , H01J37/285
CPC分类号： H01J37/222 , G06K9/6202 , G06T7/74 , G06T2207/10061 , G06T2207/30148 , H01J37/28 , H01J2237/31745
摘要： An image evaluation method includes: a template image acquisition step that designates part of a reference image to acquire a template image; a first comparative image acquisition step that acquires a first comparative image in which the position of the template image is moved in a first direction by a first moving amount relative to the reference image; a first evaluation step that performs a pattern matching process on the template image and the first comparative image and evaluates the template image; a second comparative image acquisition step that acquires a second comparative image in which the position of the template image is moved in a second direction that is orthogonal to the first direction by a second moving amount relative to the reference image; and a second evaluation step that performs the pattern matching process on the template image and the second comparative image and evaluates the template image.
摘要翻译：图像评估方法包括：模板图像获取步骤，指定参考图像的一部分以获取模板图像; 第一比较图像获取步骤，获取其中模板图像的位置相对于参考图像沿第一方向移动第一移动量的第一比较图像; 第一评估步骤，对模板图像和第一比较图像执行模式匹配处理，并评估模板图像; 第二比较图像获取步骤，获取第二比较图像，其中模板图像的位置沿与第一方向正交的第二方向相对于参考图像移动第二移动量; 以及第二评估步骤，对模板图像和第二比较图像执行模式匹配处理，并评估模板图像。

7. 发明授权

US08957372B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US08957372B2
公开(公告)日：2015-02-17
申请号：US14027424
申请日：2013-09-16
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto
IPC分类号： H01J37/26 , H01J37/04 , H01J37/147
CPC分类号： H01J37/265 , H01J37/04 , H01J37/1472
摘要： A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing toward an objective lens (13). The first and second condenser lenses are disposed between the electron source (50) and the objective lens (13). First deflecting means (133) is disposed in a beam passage opening formed in the first condenser lens (121). Second deflecting means (136) is disposed in a beam passage opening formed in the second condenser lens (122). An aperture plate (113) having a plurality of apertures (113a) of different diameters is mounted between the first deflecting means (133) and the second deflecting means (136). An electron detector (102) having a beam passage aperture (102a) is mounted between the second deflecting means (136) and the objective lens (13).
摘要翻译：扫描电子显微镜具有具有面向电子源（50）的透镜间隙（121a）的第一聚光透镜（121）和具有面向物镜（13）的透镜间隙（122a）的第二聚光透镜（122）。第一和第二聚光透镜设置在电子源（50）和物镜（13）之间。第一偏转装置（133）设置在形成在第一聚光透镜（121）中的光束通道开口中。第二偏转装置（136）设置在形成在第二聚光透镜（122）中的光束通道开口中。具有不同直径的多个孔径（113a）的孔板（113）安装在第一偏转装置（133）和第二偏转装置（136）之间。具有光束通过孔（102a）的电子检测器（102）安装在第二偏转装置（136）和物镜（13）之间。

8. 发明申请

US20140084158A1 Scanning Electron Microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20140084158A1
公开(公告)日：2014-03-27
申请号：US14027424
申请日：2013-09-16
申请人： JEOL Ltd.
发明人： Tatsuru Kuramoto
IPC分类号： H01J37/26
CPC分类号： H01J37/265 , H01J37/04 , H01J37/1472
摘要： A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing toward an objective lens (13). The first and second condenser lenses are disposed between the electron source (50) and the objective lens (13). First deflecting means (133) is disposed in a beam passage opening formed in the first condenser lens (121). Second deflecting means (136) is disposed in a beam passage opening formed in the second condenser lens (122). An aperture plate (113) having a plurality of apertures (113a) of different diameters is mounted between the first deflecting means (133) and the second deflecting means (136). An electron detector (102) having a beam passage aperture (102a) is mounted between the second deflecting means (136) and the objective lens (13).
摘要翻译：扫描电子显微镜具有具有面向电子源（50）的透镜间隙（121a）的第一聚光透镜（121）和具有面向物镜（13）的透镜间隙（122a）的第二聚光透镜（122）。第一和第二聚光透镜设置在电子源（50）和物镜（13）之间。第一偏转装置（133）设置在形成在第一聚光透镜（121）中的光束通道开口中。第二偏转装置（136）设置在形成在第二聚光透镜（122）中的光束通道开口中。具有不同直径的多个孔径（113a）的孔板（113）安装在第一偏转装置（133）和第二偏转装置（136）之间。具有光束通过孔（102a）的电子检测器（102）安装在第二偏转装置（136）和物镜（13）之间。

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