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1. 发明授权

US06763723B1 Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators 失效
标题翻译：基于光激振荡器频率调制的光纤振动传感器
公开(公告)号：US06763723B1
公开(公告)日：2004-07-20
申请号：US09695584
申请日：2000-10-25
申请人： J. David Zook , William R. Herb , David W. Burns
发明人： J. David Zook , William R. Herb , David W. Burns
IPC分类号： C01H900
CPC分类号： G01P15/097 , G01P2015/0828
摘要： A sensor device for detecting vibration, including a laser light, a first optical fiber for transmitting the laser light, an oscillator to receive the transmitted laser light and reflect the light as a frequency modulated light; a second optical fiber to transmit the frequency modulated light; and a frequency modulated discriminator for receiving the frequency modulated light from the second optical fiber and producing a signal responsive of vibration of the oscillator. In a preferred embodiment, the frequency modulated discriminator further includes a frequency meter for determining the average number of cycles per unit time to provide a second signal responsive of the temperature of the oscillator. The optical fibers may be a pair of different fibers positioned for transmitting the laser light and the frequency modulated light respectively, or the same fiber positioned for transmitting both the laser light and the frequency modulated light.
摘要翻译：一种用于检测振动的传感器装置，包括激光，用于传输激光的第一光纤，用于接收所发射的激光并作为调频光反射的振荡器; 用于传输调频光的第二光纤; 以及频率调制鉴别器，用于接收来自第二光纤的调频光，并产生响应振荡器振动的信号。在优选实施例中，频率调制鉴别器还包括一个频率计，用于根据振荡器的温度确定每单位时间的平均循环次数以提供第二信号。光纤可以是分别用于透射激光和频率调制光的一对不同的光纤，或者相同的光纤被定位成用于透射激光和调频光。

2. 发明授权

US06246638B1 Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators 失效
标题翻译：基于光激振荡器频率调制的光纤振动传感器
公开(公告)号：US06246638B1
公开(公告)日：2001-06-12
申请号：US09281388
申请日：1999-03-30
申请人： J. David Zook , William R. Herb , David W. Burns
发明人： J. David Zook , William R. Herb , David W. Burns
IPC分类号： G02B600
CPC分类号： G01P15/097 , G01P2015/0828
摘要： A sensor device for detecting vibration, including a light source for providing a laser light, a first optical fiber connected to the source for transmitting the laser light, an oscillator positioned to receive the transmitted laser light and adapted to reflect the light as a frequency modulated light; a second optical fiber positioned to capture the frequency modulated light to transmit the frequency modulated light; and a frequency modulated discriminator for receiving the frequency modulated light from the second optical fiber and producing a signal responsive of vibration of the oscillator. In a preferred embodiment, the frequency modulated discriminator further includes a frequency meter for determining the average number of cycles per unit time to provide a second signal responsive of the temperature of the oscillator. The optical fibers may be a pair of different fibers positioned for transmitting the laser light and the frequency modulated light respectively, or the same fiber positioned for transmitting both the laser light and the frequency modulated light. In this latter embodiment, the device further includes a beam splitter to direct the frequency modulated light to the discriminator. The preferred oscillator includes a microchip having a microbeam mounted on a thin silicon cantilever such that deflection of the beam perpendicular to the plane of the microchip changes the tension in the microbeam to change its resonant frequency. Also preferred is a microbeam including a thin metal deposit to create a bimorph structure.
摘要翻译：一种用于检测振动的传感器装置，包括用于提供激光的光源，连接到用于传输激光的源的第一光纤，定位成接收所发射的激光并适于将光反射为频率调制的振荡器光; 第二光纤，定位成捕获调频光以发射调频光; 以及频率调制鉴别器，用于接收来自第二光纤的调频光，并产生响应振荡器振动的信号。在优选实施例中，频率调制鉴别器还包括一个频率计，用于根据振荡器的温度确定每单位时间的平均循环次数以提供第二信号。光纤可以是分别用于透射激光和频率调制光的一对不同的光纤，或者相同的光纤被定位成用于透射激光和调频光。在后一实施例中，该装置还包括一个分束器，用于将调频光引导到鉴别器。优选的振荡器包括具有安装在薄硅悬臂上的微束的微芯片，使得垂直于微芯片的平面的光束的偏转改变微束中的张力以改变其谐振频率。还优选的是包含薄金属沉积物以产生双压电晶片结构的微束。

3. 发明授权

US06179586B2 Dual diaphragm, single chamber mesopump 有权
标题翻译：双隔膜，单室介孔泵
公开(公告)号：US06179586B2
公开(公告)日：2001-01-30
申请号：US09408651
申请日：1999-09-15
申请人： William R. Herb , J. David Zook , Cleopatra Cabuz
发明人： William R. Herb , J. David Zook , Cleopatra Cabuz
IPC分类号： F04B4300
CPC分类号： F04B43/043 , A61M5/14224 , A61M5/14276
摘要： A diaphragm pump, which is preferably electrostatically actuated, but which may be activated by other forces such as electromagnetic or piezoelectric actuation. The pump is formed by a pump body having a pump chamber formed therein. First and second diaphragms each having a set of valve holes in the diaphragm surface thereof are mounted in the chamber. Also provided are at least one inlet and at least one outlet port for communication with the pump chamber. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the diaphragms to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump. The first position is when the diaphragms are spaced from one another and from the ports to permit flow of fluid through the pump chamber. The second position is when the diaphragms are in diaphragm surface contact with the sets of holes mutually nonaligned to form a seal between the diaphragms. The third position is when a diaphragm is in diaphragm surface contact with the ports to form the sealing contact.
摘要翻译：隔膜泵优选是静电驱动的，但是可以通过诸如电磁或压电致动的其它力来激活。泵由具有形成在其中的泵室的泵体形成。在其隔膜表面中具有一组阀孔的第一和第二隔膜安装在腔室中。还设置有至少一个入口和至少一个用于与泵室连通的出口。端口被定位成在不与隔膜中的孔对准的点处与隔膜密封接触。驱动器静电地驱动隔膜以使隔膜移动到多个隔膜位置以控制通过泵的流体的流动。第一位置是当隔膜彼此间隔开并且从端口间隔开以允许流体流过泵室时。第二个位置是当隔膜与隔膜表面接触时，这些孔彼此不对齐，以形成隔膜之间的密封。第三个位置是当隔膜与隔膜表面接触时，形成密封接触。

4. 发明授权

US5550516A Integrated resonant microbeam sensor and transistor oscillator 失效
标题翻译：集成谐振微束传感器和晶体管振荡器
公开(公告)号：US5550516A
公开(公告)日：1996-08-27
申请号：US357943
申请日：1994-12-16
申请人： David W. Burns , J. David Zook
发明人： David W. Burns , J. David Zook
IPC分类号： G01L1/10 , G01L1/14 , G01L1/18 , G01L9/00 , G01P15/097 , G01P15/10 , H03H9/24 , H03B5/30
CPC分类号： G01P15/097 , G01L1/183 , G01L9/0019
摘要： At least one microbeam situated on a substrate, having a resonant frequency dependent on the strain on the microbeam which may be affected by the bending of the substrate. The beam or beams have sense and drive electrodes proximate to the beam or beams and form capacitors with a beam being the other electrode. The capacitance varies as the beam moves in vibration. The sense electrode is connected to an input of a transistor, such as the gate or base, and the drive electrode is connected to an output of the transistor. The transistor has a load impedance with a capacitive component to aid in the sustaining of vibration of the beam at a resonant frequency. A high ohm resistor is connected between the gate and the drain of the transistor to appropriately bias the gate. The bending of the substrate may be caused by a magnitude of a physical stimulus being measured. However, the bending of the substrate is not utilized nor desired in the filter and temperature sensing configurations of the invention. The frequency of resonance is an indication of the magnitude of the physical parameter. Variants of the sensor may be implemented with different placements of the sense and drive electrodes, and additional electronics as needed to implement the various configurations and microbeam geometry. Additional sense and/or drive electrodes and beams also may be incorporated in the transistor resonant microbeam sensor.
摘要翻译：位于衬底上的至少一根微束，具有取决于微束上的应变的共振频率，其可能受到衬底的弯曲的影响。光束或光束具有靠近光束或光束的感测和驱动电极，并形成具有作为另一电极的光束的电容器。电容随着光束在振动中的移动而变化。感测电极连接到诸如栅极或基底的晶体管的输入，并且驱动电极连接到晶体管的输出端。晶体管具有具有电容分量的负载阻抗，以有助于以共振频率维持波束的振动。一个高欧姆电阻连接在晶体管的栅极和漏极之间以适当地偏置栅极。衬底的弯曲可以由被测量的物理刺激的大小引起。然而，在本发明的过滤器和温度检测结构中，基板的弯曲不被利用或不期望。谐振频率表示物理参数的大小。传感器的变体可以通过传感电极和驱动电极的不同布置以及实现各种构造和微束几何所需的附加电子装置来实现。附加的感测和/或驱动电极和光束也可以并入晶体管谐振微束传感器中。

5. 发明授权

US5458000A Static pressure compensation of resonant integrated microbeam sensors 失效
标题翻译：谐振集成微束传感器的静压补偿
公开(公告)号：US5458000A
公开(公告)日：1995-10-17
申请号：US94785
申请日：1993-07-20
申请人： David W. Burns , J. David Zook
发明人： David W. Burns , J. David Zook
IPC分类号： G01L1/10 , G01D3/028 , G01D3/036 , G01L1/18 , G01L9/00 , G01P1/00 , G01P15/097 , G01P15/10 , G01P15/12 , G01L19/04
CPC分类号： G01P15/097 , G01D3/0365 , G01L1/18 , G01L9/0019 , G01P1/006
摘要： A temperature and static pressure compensated differential pressure sensor includes a semiconductor substrate in which a flexible, pressure responsive diaphragm is formed. A pressure responsive resonant microbeam is fabricated at the diaphragm periphery. For temperature compensation, a secondary resonant microbeam sensor is fabricated on the substrate at a peripheral location beyond the point of substrate attachment to a pressure tube or other support. For static pressure compensation, another secondary resonant microbeam can be positioned remote from the diaphragm and at a location of maximum substrate response to static pressure. A further resonant microbeam can be mounted at the diaphragm center to augment the signal due to diaphragm deflections. Also disclosed is an accelerometer including a proof mass, a rigid rim surrounding the proof mass, and a series of narrow, flexible bridges supporting the proof mass relative to the rim. The bridges flex responsive to accelerations, thus to allow the proof mass to move relative to the rim. At least one of the bridges incorporates a resonant microbeam for measuring acceleration by virtue of the induced strain from flexure of its associated bridge. For temperature compensation, a secondary resonant microbeam is fabricated along the rim.
摘要翻译：温度和静压补偿压差传感器包括其中形成有柔性的压力响应膜片的半导体衬底。压力响应谐振微束在隔膜周边制造。对于温度补偿，次级谐振微束传感器在基板上的周边位置处制造，超过衬底连接到压力管或其它支撑点。对于静态压力补偿，另一个次级谐振微束可以远离隔膜定位在最大衬底对静压的响应位置。可以在隔膜中心安装另外的谐振微束，以增加由于隔膜偏转引起的信号。还公开了一种加速度计，其包括检测质量块，围绕检测质量块的刚性边缘，以及一系列相对于边缘支撑证明物质的窄的柔性桥梁。桥梁响应于加速度弯曲，从而允许检测质量相对于轮缘移动。至少一个桥结合有谐振微束，用于通过其相关桥的挠曲引起的应变来测量加速度。对于温度补偿，沿着边缘制造次级谐振微束。

6. 发明申请

US20110030925A1 APPARATUS AND METHOD FOR THERMAL MANAGEMENT USING VAPOR CHAMBER 有权
标题翻译：用于使用蒸气室进行热管理的装置和方法
公开(公告)号：US20110030925A1
公开(公告)日：2011-02-10
申请号：US12909669
申请日：2010-10-21
申请人： Wei Yang , Steven J. Eickhoff , Chunbo Zhang , Alex Gu , J. David Zook
发明人： Wei Yang , Steven J. Eickhoff , Chunbo Zhang , Alex Gu , J. David Zook
IPC分类号： F28D15/04
CPC分类号： F28D15/046 , F28D15/0233 , H01L23/427 , H01L2924/0002 , H01L2924/00
摘要： An apparatus includes a plurality of islands each carrying multiple cantilevers. The apparatus also includes a fluidic network having a plurality of channels separating the islands. The channels are configured to provide fluid to the islands, and the fluid at least partially fills spaces between the cantilevers and the islands. Heat from the islands vaporizes the fluid filling the spaces between the cantilevers and the islands to transfer the heat away from the islands while driving the cantilevers into oscillation. The apparatus may also include a casing configured to surround the islands and the fluidic network to create a vapor chamber, where the vapor chamber is configured to retain the vaporized fluid. The islands and the fluidic network could be formed in a single substrate, or the islands could be separate and attached together by a binder located within the channels of the fluidic network.
摘要翻译：一种装置包括多个岛，每个岛承载多个悬臂。该装置还包括具有分离岛的多个通道的流体网络。通道被配置成向岛提供流体，并且流体至少部分地填充悬臂和岛之间的空间。来自岛屿的热量使填充悬臂和岛屿之间的空间的流体蒸发，以将散热物从岛屿转移，同时驱动悬臂进入振荡。该装置还可以包括被配置成围绕岛和流体网络以形成蒸汽室的壳体，其中蒸气室被配置为保持蒸发的流体。岛和流体网络可以形成在单个基底中，或者岛可以分开并通过位于流体网络的通道内的粘合剂附着在一起。

7. 发明授权

US4252861A Growth technique for silicon-on-ceramic 失效
标题翻译：硅陶瓷生长技术
公开(公告)号：US4252861A
公开(公告)日：1981-02-24
申请号：US79844
申请日：1979-09-28
申请人： J. Don Heaps , J. David Zook
发明人： J. Don Heaps , J. David Zook
IPC分类号： H01L31/04 , C04B41/50 , C04B41/85 , C30B15/00 , C30B29/64 , H01L21/208 , H01L31/18 , B05D1/18 , H01L31/00
CPC分类号： C04B41/009 , C04B41/50 , C04B41/85 , C30B15/00 , C30B15/007 , C30B29/605 , H01L31/182 , Y02E10/546 , Y02P70/521
摘要： The present invention is an improvement to the method of growing silicon films on a substrate by bringing the substrate in contact with molten silicon. The improved growth technique may be classified as an asymmetric mode of growth of silicon on the substrate and is characterized by the substrate being maintained at a higher temperature than the solidification of silicon in the area of the substrate where the silicon layer growth is taking place, that is in the area of the liquid-solid interface. The higher temperature of the substrate causes the liquid-solid interface to be tilted to be nearly parallel to the substrate surface but inclined at a reentrant angle, so that the leading edge of the crystallization front is away from the substrate. This provides several advantages including increased growth speed, a nonhomogeneous doping of the silicon layer, that is an impurity concentration gradient and results in a high-low junction at the back surface and gives the back surface field effect.
摘要翻译：本发明是通过使衬底与熔融硅接触而在衬底上生长硅膜的方法的改进。改进的生长技术可以被分类为在衬底上的硅的不对称生长模式，其特征在于衬底被保持在比在硅层生长发生的衬底的区域中的硅的固化更高的温度，即在液固界面的区域。基板的较高温度使得液 - 固界面倾斜成几乎平行于基板表面，但以折入角倾斜，使得结晶前沿的前缘远离基板。这提供了几个优点，包括增加生长速度，硅层的非均匀掺杂，即杂质浓度梯度，并导致后表面的高低接合并给出背面场效应。

8. 发明授权

US08241919B2 Gas pulse generator for baseline drift correction and related system and method 有权
标题翻译：气体脉冲发生器，用于基线漂移校正及相关系统及方法
公开(公告)号：US08241919B2
公开(公告)日：2012-08-14
申请号：US12260007
申请日：2008-10-28
申请人： Adam Dewey McBrady , J. David Zook , Alex Gu , Michael L. Rhodes
发明人： Adam Dewey McBrady , J. David Zook , Alex Gu , Michael L. Rhodes
IPC分类号： G01N33/00
CPC分类号： G01N33/0011 , G01N2030/122 , G01N2030/623 , Y10T436/25 , Y10T436/25375 , Y10T436/255
摘要： A method includes acquiring a chemical sample and modulating the chemical sample at a frequency greater than a drift frequency of a sensor. The method also includes determining at least one of a presence and a concentration of the analyte within the modulated chemical sample using the sensor. Modulating the chemical sample could include alternately absorbing at least some of the analyte into a sorbent material and releasing at least some of the analyte from the sorbent material. Modulating the chemical sample could also include heating the sorbent material, absorbing part of the analyte into the sorbent material, and passing a remaining portion of the analyte into the sensor. Modulating the chemical sample could further include stopping the heating of the sorbent material, releasing the part of the analyte from the sorbent material, and passing the sample with the released part of the analyte into the sensor.
摘要翻译：一种方法包括获取化学样品并以大于传感器的漂移频率的频率调制化学样品。该方法还包括使用传感器确定调制的化学样品中的分析物的存在和浓度中的至少一种。调制化学样品可以包括交替地将至少一些分析物吸收到吸附材料中并从吸附剂材料中释放至少一些分析物。调制化学样品还可以包括加热吸附剂材料，将分析物的一部分吸收到吸附剂材料中，并将分析物的剩余部分传递到传感器中。调制化学样品可进一步包括停止吸附剂材料的加热，将分析物的一部分从吸附剂材料中释放出来，并将样品与分析物的释放部分一起传递到传感器中。

9. 发明授权

US07612871B2 Frequency-multiplexed detection of multiple wavelength light for flow cytometry 有权
标题翻译：用于流式细胞术的多波长光的多路复用检测
公开(公告)号：US07612871B2
公开(公告)日：2009-11-03
申请号：US10931686
申请日：2004-09-01
申请人： James A. Cox , J. David Zook
发明人： James A. Cox , J. David Zook
IPC分类号： G01C3/08 , G01N21/00
CPC分类号： G01N15/1459 , G01N2015/1438 , G01N2015/1477 , G01N2015/1486 , G01N2201/0691
摘要： A multiplexed set of light sources having outputs of light with various wavelengths which are combined into one beam. The beam may impinge a particle in a flow channel of a cytometer. The light leaving the flow channel may be sensed by a detector and the light distinguished according to wavelength.
摘要翻译：具有组合成一个光束的具有各种波长的光的输出的多路复用光源组。光束可能会在细胞仪的流动通道中撞击颗粒。离开流动通道的光可以由检测器感测，并且根据波长区分出的光。

10. 发明申请

US20090020271A1 APPARATUS AND METHOD FOR THERMAL MANAGEMENT USING VAPOR CHAMBER 有权
标题翻译：用于使用蒸气室进行热管理的装置和方法
公开(公告)号：US20090020271A1
公开(公告)日：2009-01-22
申请号：US12169793
申请日：2008-07-09
申请人： Wei Yang , Steven J. Eickhoff , Chunbo Zhang , Alex Gu , J. David Zook
发明人： Wei Yang , Steven J. Eickhoff , Chunbo Zhang , Alex Gu , J. David Zook
IPC分类号： F28D15/00
CPC分类号： F28D15/046 , F28D15/0233 , H01L23/427 , H01L2924/0002 , H01L2924/00
摘要： An apparatus includes a plurality of islands each carrying multiple cantilevers. The apparatus also includes a fluidic network having a plurality of channels separating the islands. The channels are configured to provide fluid to the islands, and the fluid at least partially fills spaces between the cantilevers and the islands. Heat from the islands vaporizes the fluid filling the spaces between the cantilevers and the islands to transfer the heat away from the islands while driving the cantilevers into oscillation. The apparatus may also include a casing configured to surround the islands and the fluidic network to create a vapor chamber, where the vapor chamber is configured to retain the vaporized fluid. The islands and the fluidic network could be formed in a single substrate, or the islands could be separate and attached together by a binder located within the channels of the fluidic network.
摘要翻译：一种装置包括多个岛，每个岛承载多个悬臂。该装置还包括具有分离岛的多个通道的流体网络。通道被配置成向岛提供流体，并且流体至少部分地填充悬臂和岛之间的空间。来自岛屿的热量使填充悬臂和岛屿之间的空间的流体蒸发，以将散热物从岛屿转移，同时驱动悬臂进入振荡。该装置还可以包括被配置成围绕岛和流体网络以形成蒸汽室的壳体，其中蒸气室被配置为保持蒸发的流体。岛和流体网络可以形成在单个基底中，或者岛可以分开并通过位于流体网络的通道内的粘合剂附着在一起。

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