专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20050266321A1 Mask for proximity field optical exposure, exposure apparatus and method therefor 审中-公开
标题翻译：用于近场光学曝光的掩模，曝光装置及其方法
公开(公告)号：US20050266321A1
公开(公告)日：2005-12-01
申请号：US11144944
申请日：2005-06-06
申请人： Isao Tsuruma , Masayuki Naya , Atsushi Mukai
发明人： Isao Tsuruma , Masayuki Naya , Atsushi Mukai
IPC分类号： G03B27/42 , G03B27/58 , G03C5/00 , G03F1/00 , G03F1/60 , G03F1/82 , G03F7/20 , H01L21/027
CPC分类号： B82Y10/00 , G03F1/50 , G03F1/82 , G03F7/2014 , G03F7/70325 , G03F7/7035 , G03F7/707 , G03F7/70741 , G03F7/70783
摘要： A mask for exposure 1 having an aperture in a prescribed pattern formed on one surface and subjected to proximity field exposure in a state kept in contact with the surface of a wafer 2. The mask 1 is made of a transparent material such as glass or quartz glass. The mask 1 forms a circular shape with a thickness of 1 mm or less, preferably 0.1-0.5 mm.
摘要翻译：一种曝光用掩模1，其具有形成在一个表面上的规定图案的孔径，并且在与晶片2的表面保持接触的状态下进行近场曝光。面罩1由诸如玻璃或石英玻璃的透明材料制成。掩模1形成厚度为1mm以下，优选为0.1-0.5mm的圆形。

2. 发明申请

US20050227153A1 Mask for proximity field optical exposure, exposure apparatus and method therefor 审中-公开
标题翻译：用于近场光学曝光的掩模，曝光装置及其方法
公开(公告)号：US20050227153A1
公开(公告)日：2005-10-13
申请号：US11144825
申请日：2005-06-06
申请人： Isao Tsuruma , Masayuki Naya , Atsushi Mukai
发明人： Isao Tsuruma , Masayuki Naya , Atsushi Mukai
IPC分类号： G03B27/42 , G03B27/58 , G03C5/00 , G03F1/00 , G03F1/60 , G03F1/82 , G03F7/20 , H01L21/027 , G03F9/00
CPC分类号： B82Y10/00 , G03F1/50 , G03F1/82 , G03F7/2014 , G03F7/70325 , G03F7/7035 , G03F7/707 , G03F7/70741 , G03F7/70783
摘要： A mask for exposure 1 having an aperture in a prescribed pattern formed on one surface and subjected to proximity field exposure in a state kept in contact with the surface of a wafer 2. The mask 1 is made of a transparent material such as glass or quartz glass. The mask 1 forms a circular shape with a thickness of 1 mm or less, preferably 0.1-0.5 mm.
摘要翻译：一种曝光用掩模1，其具有形成在一个表面上的规定图案的孔径，并且在与晶片2的表面保持接触的状态下进行近场曝光。掩模1由透明材料制成，例如玻璃或石英玻璃。掩模1形成厚度为1mm以下，优选为0.1-0.5mm的圆形。

3. 发明授权

US06338924B1 Photomask for near-field exposure having opening filled with transparent material 失效
标题翻译：用于近场曝光的光掩模，其具有填充有透明材料的开口
公开(公告)号：US06338924B1
公开(公告)日：2002-01-15
申请号：US09598452
申请日：2000-06-22
申请人： Isao Tsuruma , Masayuki Naya
发明人： Isao Tsuruma , Masayuki Naya
IPC分类号： G03F900
CPC分类号： G03F1/50
摘要： A photomask for use in near-field exposure includes a mask support which is transparent to exposure light; a shading film which is formed on one side of the mask support, and has at least one-opening arranged to form a predetermined pattern; and at least one filler which is transparent to the exposure light, and is arranged in the at least one opening with a predetermined height above the level of the boundary between the mask support and the shading film. The difference between the thickness of the shading film and the height of each of the at least one filler does not exceed 50 nanometers.
摘要翻译：用于近场曝光的光掩模包括对曝光光透明的掩模支架; 遮光膜，其形成在所述掩模支撑体的一侧，并且具有布置成形成预定图案的至少一个开口; 以及至少一个对所述曝光光透明的填料，并且布置在所述至少一个开口中，所述预定高度高于所述掩模支撑件和所述遮光膜之间的边界的高度。遮光膜的厚度与每个至少一个填料的高度之差不超过50纳米。

4. 发明授权

US07477452B2 Micro lens array, optical member and method of producing micro lens array 有权
标题翻译：微透镜阵列，光学构件和微透镜阵列的制造方法
公开(公告)号：US07477452B2
公开(公告)日：2009-01-13
申请号：US11213838
申请日：2005-08-30
申请人： Isao Tsuruma
发明人： Isao Tsuruma
IPC分类号： G02B27/10 , B29D11/00
CPC分类号： G03F7/0005 , G02B3/0018 , G02B3/0056 , G03F7/40
摘要： A micro lens array includes a plurality of convex micro lenses formed on a transparent substrate in an array. The micro lenses are convex toward a surface of the substrate in a position inward of the surface of the substrate and the top of the convex surface of the micro lenses is lower than the surface of the substrate.
摘要翻译：微透镜阵列包括形成在阵列中的透明基板上的多个凸形微透镜。微透镜在基板的表面内侧的位置朝向基板的表面凸出，并且微透镜的凸面的顶部低于基板的表面。

5. 发明授权

US6141478A Electrode for optical waveguide element and method of forming the same 有权
公开(公告)号：US6141478A
公开(公告)日：2000-10-31
申请号：US518227
申请日：2000-03-02
申请人： Isao Tsuruma
发明人： Isao Tsuruma
IPC分类号： G02F1/313 , G02F1/03 , G02F1/035 , H01S5/042 , G02B6/10
CPC分类号： G02F1/035 , G02F1/0316 , H01S5/0425
摘要： A metal film consisting of a first metal layer of at least one of Ta, Cr, W and Mo, a second metal layer of at least one of Au, Pt and Ag and a third metal layer of at least one of Ta, Cr, W and Mo superposed one on another in this order is formed on a surface of a substrate. Openings of predetermined shapes are formed in the metal film, and proton exchange is carried out on the surface of the substrate with the metal film used as a mask, thereby forming optical channel waveguides. Then the third metal layer is removed from the metal film, and the metal film consisting of the first and second metal layers into electrodes for applying an electric voltage to the optical channel waveguides.

6. 发明申请

US20070146434A1 LIQUID EJECTION HEAD AND METHOD OF PRODUCING THE SAME 审中-公开
标题翻译：液体喷射头及其生产方法
公开(公告)号：US20070146434A1
公开(公告)日：2007-06-28
申请号：US11682902
申请日：2007-03-07
申请人： Toshiaki FUKUNAGA , Isao Tsuruma
发明人： Toshiaki FUKUNAGA , Isao Tsuruma
IPC分类号： B41J2/06
CPC分类号： B41J2/06
摘要： The liquid ejection head ejects a solution, in which charged particles are dispersed, toward a counter electrode. The head has a head substrate, a solution guide member formed on a surface of the head substrate so as to protrude and include a sharp-pointed portion having a sharply pointed tip end, with the sharp-pointed portion being which is formed by inclined surfaces and having a cross section that is reduced as a distance to the tip end is decreased, and a solution supply path having a solution outflow opening through which the solution flows out to the neighborhood of the sharp-pointed portion so as to form a solution flow around the inclined surfaces. The solution flow is formed around the tip end of the sharp-pointed portion in a direction going across the inclined surface and a part of the solution flow is guided to the tip end and is ejected as a droplet by means of an electrostatic force.
摘要翻译：液体喷射头朝向对置电极喷射带电粒子分散的溶液。头部具有头基板，溶液引导部件，其形成在头基板的表面上，以突出并且包括具有尖锐尖端的尖锐部分，尖锐部分由倾斜表面形成并且具有与顶端距离减小的横截面减小，并且具有溶液流出开口的溶液供给路径，溶液通过该流出开口流出到尖锐部分附近，以形成溶液流围绕倾斜的表面。溶液流沿着尖锐部分的尖端形成在横过倾斜表面的方向上，并且溶液流的一部分被引导到尖端，并且通过静电力作为液滴喷射。

7. 发明授权

US07192122B2 Liquid ejecting head and a process for producing the head 失效
标题翻译：液体喷头及其制造方法
公开(公告)号：US07192122B2
公开(公告)日：2007-03-20
申请号：US10950820
申请日：2004-09-28
申请人： Isao Tsuruma
发明人： Isao Tsuruma
IPC分类号： B41J2/06
CPC分类号： B41J2/16 , B41J2/06 , B41J2/1634 , B41J2/1637 , B41J2/1645
摘要： A liquid ejecting head of the invention has ink ejected with the electrostatic force, with a structure having a partition wall separating the flow channel into an inflow region and an outflow region. The wall passing by the positions of the ejecting orifices runs in a serpentine path to traverse the ink flow space in a direction perpendicular to the direction of the ink flow. The partition wall is produced by, first, applying a specified film thickness of photoresist on a substrate, second pressing a molding substrate onto a surface of the applied film of the photoresist to form a ridge-like projections which is to be a projecting solution guides, third forming the wall by etching the patterned photoresist film using a mask having a pattern of lines.
摘要翻译：本发明的液体喷射头具有以静电力喷射的油墨，其结构具有将流动通道分成流入区域和流出区域的分隔壁。通过喷射孔的位置的壁在蛇形路径中延伸以沿着与油墨流动方向垂直的方向横穿油墨流动空间。分隔壁通过首先在基板上施加特定的光致抗蚀剂厚度来制造，将成型基板第二次压印在所述光致抗蚀剂的涂布膜的表面上，形成为凸状的突出部，，第三通过使用具有线图案的掩模蚀刻图案化的光致抗蚀剂膜来形成壁。

8. 发明授权

US6068781A Electrode for optical waveguide element and method of forming the same 失效
标题翻译：光波导元件用电极及其形成方法
公开(公告)号：US6068781A
公开(公告)日：2000-05-30
申请号：US940975
申请日：1997-09-30
申请人： Isao Tsuruma
发明人： Isao Tsuruma
IPC分类号： G02F1/313 , G02F1/03 , G02F1/035 , H01S5/042 , H01L21/00 , H01L21/28
CPC分类号： G02F1/035 , G02F1/0316 , H01S5/0425
摘要： A metal film consisting of a first metal layer of at least one of Ta, Cr, W and Mo, a second metal layer of at least one of Au, Pt and Ag and a third metal layer of at least one of Ta, Cr, W and Mo superposed one on another in this order is formed on a surface of a substrate. Openings of predetermined shapes are formed in the metal film, and proton exchange is carried out on the surface of the substrate with the metal film used as a mask, thereby forming optical channel waveguides. Then the third metal layer is removed from the metal film, and the metal film consisting of the first and second metal layers into electrodes for applying an electric voltage to the optical channel waveguides.
摘要翻译：由由Ta，Cr，W和Mo中的至少一种构成的第一金属层，Au，Pt和Ag中的至少一种的第二金属层和Ta，Cr， W和Mo依次叠置在基板的表面上。在金属膜中形成预定形状的开口，并且以金属膜作为掩模在基板的表面上进行质子交换，从而形成光通道波导。然后，从金属膜除去第三金属层，将由第一和第二金属层构成的金属膜分别放入用于向光通道波导施加电压的电极。

9. 发明授权

US06919169B2 Method of producing a liquid ejection head 失效
标题翻译：液体喷射头的制造方法
公开(公告)号：US06919169B2
公开(公告)日：2005-07-19
申请号：US10829961
申请日：2004-04-23
申请人： Isao Tsuruma
发明人： Isao Tsuruma
IPC分类号： B41J2/16 , B05B1/14 , B41J2/06 , G03F7/16
CPC分类号： B41J2/06 , B41J2202/22 , G03F7/168
摘要： The present invention provides a method of producing a liquid ejection head having a solution guide member protruding on a head substrate. The solution guide member has a sharp-pointed portion protruding from a liquid surface of a flowing solution in which charged particles are dispersed. The solution guide member guides the solution to the sharp-pointed portion such that the solution is ejected from the sharp-pointed portion by an electrostatic force. The method comprises the steps of forming a photosensitive resin layer on the head substrate; molding a convex portion having the sharp-pointed portion on a surface of the formed photosensitive resin layer by pressing a mold member against the surface of the photosensitive resin layer; and exposing a region of the molded convex portion; and developing the exposed photosensitive resin layer to produce the solution guide member provided on the head substrate.
摘要翻译：本发明提供一种制造具有突出在头基板上的溶液引导构件的液体喷射头的方法。溶液引导构件具有从其中分散有带电粒子的流动溶液的液体表面突出的尖锐部分。溶液引导构件将溶液引导到尖锐部分，使得溶液通过静电力从尖锐部分喷出。该方法包括在头基板上形成感光性树脂层的步骤; 通过将模具部件压靠在感光性树脂层的表面上，在形成的感光性树脂层的表面上形成具有尖锐部分的凸部; 并露出模制的凸部的区域; 并显影曝光的感光性树脂层，以制造设置在头基板上的溶液引导部件。

10. 发明授权

US06917463B2 Wavelength converting element and method of manufacture thereof 失效
标题翻译：波长转换元件及其制造方法
公开(公告)号：US06917463B2
公开(公告)日：2005-07-12
申请号：US09983057
申请日：2001-10-23
申请人： Isao Tsuruma
发明人： Isao Tsuruma
IPC分类号： G02B6/134 , G02F1/03 , G02F1/377 , G02F1/365
CPC分类号： G02F1/3775 , G02B6/1347 , G02F1/0316 , G02F2201/066
摘要： A wavelength converting element is provided in which a fundamental wave with respect to an optical crystal substrate and a peak of a vertical transverse mode of a second harmonic are made to coincide, the converting efficiency is good, and a beam shape which enables good joining to a lens or an optical fiber is obtained. Given that an angle formed by a surface of the optical crystal substrate and a C axis of the optical crystal substrate is θ, a period at which inverted domains are formed is p, and a distance from a distal end of a comb-shaped electrode for forming the inverted domain to a central position of a waveguide is G, in the ion implantation, a concentration peak of the ion implantation is formed at a distance of substantially (G·tanθ+p/4) from the surface of the optical crystal substrate.
摘要翻译：提供一种波长转换元件，其中使相对于光学晶体基板的基波和二次谐波的垂直横向模式的峰值一致，转换效率良好，并且能够良好地接合到获得透镜或光纤。假设由光学晶体基板的表面和光学晶体基板的C轴形成的角度为θ，则形成反转畴的周期为p，并且与梳状电极的远端的距离为在波导的中心位置处形成反向域为G，在离子注入中离子注入的浓度峰从与光晶体基板的表面基本上（G.tantheta + p / 4）的距离形成。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式